CN104894638A - Carbon-material combined crucible for single-crystal furnace - Google Patents
Carbon-material combined crucible for single-crystal furnace Download PDFInfo
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- CN104894638A CN104894638A CN201510369177.3A CN201510369177A CN104894638A CN 104894638 A CN104894638 A CN 104894638A CN 201510369177 A CN201510369177 A CN 201510369177A CN 104894638 A CN104894638 A CN 104894638A
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Abstract
A carbon-material combined crucible for a single-crystal furnace comprises a combined crucible body made of carbon-carbon composite or graphite materials. The combined crucible body comprises a crucible cylinder (1), a crucible bowl (2) and a crucible support (3). A circular hole is formed in the bottom of the crucible bowl (2). The crucible bowl (2) comprises at least two crucible bowl components. A boss matched with the bottom circular hole of the crucible bowl (2) is disposed on the middle of the crucible support (3). A concave arc matched with a quartz crucible is disposed on the boss. The crucible bowl (2) is assembled to the crucible support (3). The crucible cylinder (1) is assembled to the upper edge of the crucible bowl (2). The bottom end of the crucible cylinder (1) is in lap joint with the upper portion of the crucible bowl (2). The carbon-material combined crucible has the advantages that the combine crucible is simple in structure, convenient to operate, capable of effectively relieving damage of the residual quartz crucible on the combined crucible, good in roundness, stable, and high in whole bar rate and crystal forming rate during crystal pulling, and the service life of the combined crucible is prolonged.
Description
Technical field
The present invention relates to a kind of crucible, be specifically related to a kind of single crystal growing furnace Combined carbon crucible.
Technical background
At present; during single crystal growing furnace pulling monocrystal silicon rod; the crucible be positioned on crucible holder put into by the quartz crucible of the raw materials such as splendid attire polysilicon block; heat fused in protective atmosphere, regulates and controls after technological temperature, and seed crystal inserts in melting polysilicon liquid through guide shell; crucible is placed in crucible holder and is together rotated by the crucible holder axle drive under it; meanwhile, seed crystal also retrograde rotation upwards promoting, makes polysilicon liquid become silicon single crystal rod by the Siliciumatom of the seed crystal crystallization and freezing that puts in order.In silicon single crystal rod pulling process, in-furnace temperature is up to about 1550 DEG C, and now, quartz crucible deliquescing, crucible support outside, and quartz crucible residual after crystal pulling is often close to crucible internal walls.
Because quartz crucible is disposable frock, must change by stove, when crucible is one-piece construction, then comparatively difficulty removed by quartz crucible, even damages crucible crucible body during removal.When crucible crucible body adopts many valve structures, as plumbago crucible, because its mechanical property is poor, use in hot environment, support quartz crucible and raw-material weight, and be in rotating state, easily break under the effect of external force.For improving the mechanical property of crucible, also having and adopting carbon/carbon compound material to prepare many valve structures crucible.
Although many valve structures crucible can solve the problem removing the residual body of quartz crucible, but its many valve structure only coordinates to form with the inner conical surface of crucible holder be integrated by its base cone face, because the circularity of many valve structures crucible is not good, and in use, its circularity also likely changes, affect the stable of crystal pulling environment, whole excellent rate and crystal forming rate are all affected, and cause enterprise's production cost to increase.
CN 201110146108.8 discloses a kind of combined method and combination crucible of Combined carbon crucible.The bottom of this combination crucible crucible bowl is entity structure, still there is the problem being difficult to remove the residual body of crucible bowl bottom quartz crucible.
Summary of the invention
The technical problem to be solved in the present invention is, overcomes the above-mentioned defect that prior art exists, and provides a kind of and conveniently can remove the residual body of quartz crucible and can keep again the single crystal growing furnace Combined carbon crucible of crucible circularity.
The technical scheme that the present invention solves the employing of its technical problem is: a kind of single crystal growing furnace Combined carbon crucible, comprise the combination crucible crucible body be made up of carbon-carbon composites or graphite material, described combination crucible crucible body comprises crucible cylinder, crucible bowl, crucible holder, described crucible cylinder is cylindric, described crucible bowl bottom is provided with circular hole, and crucible bowl is made up of at least 2 lobe crucible bowl components; Be provided with the boss suitable with crucible bowl bottom circular hole in the middle of described crucible holder, boss is provided with the concave arc suitable with quartz crucible, and crucible bowl is assemblied in crucible holder, and crucible wound packages fits on crucible bowl, and bottom and the crucible bowl top of crucible cylinder overlap.
Further, for guaranteeing the right alignment of crucible cylinder and crucible bowl, the lap-joint of crucible cylinder and crucible bowl is conical surface overlap joint.Cone angle can be 90 ° ~ 110 °.
Further, in order to ensure the stability that crucible cylinder and crucible bowl overlap, the overlap joint interface height preferably 10 ~ 30mm of crucible cylinder and crucible bowl.
Further, in order to remove the residual body of crucible bowl bottom quartz crucible more easily, crucible bowl bottom Circularhole diameter preferably 150 ~ 420mm.
Further, in order to remove the residual body of quartz crucible more easily, the gap between the adjacent crucible bowl wall assembly of formation crucible bowl is 0.5 ~ 3.0mm.
Further, crucible bowl the number of components preferably 2 ~ 4 lobes of crucible bowl are formed.
Further, the height of crucible cylinder is 30 ~ 230mm.
Further, crucible holder is made up of isostatic pressing formed graphite material.
Further, the density>=1.2g/ cm of described carbon-carbon composites
3.
The present invention combines the manufacture assembling process of crucible: first prepare crucible cylinder, crucible bowl, crucible holder; Propped up by crucible on the pressure pin axle be placed in single crystal growing furnace again, be then arranged in crucible holder by crucible bowl component one lobe lobe, then crucible wound packages fitted over the top of crucible bowl, overlap joint fastening, is namely assembled into an overall combination crucible thus.During use, quartz crucible is arranged in combination crucible, then silicon material is loaded in quartz crucible.
The present invention combines the unloading process of crucible: first hung out in single crystal growing furnace together with quartz crucible by combination crucible, removes crucible holder, then from quartz crucible outer surface one lobe lobe dismounting crucible bowl component, finally dismantles crucible cylinder.Such dismounting, will not break into pieces by quartz crucible, and after the dismounting of combination crucible, quartz crucible entirety still can keep substantially complete.
The present invention compared with prior art, has following advantage:
(1) the present invention combines crucible, and structure is simple, uses easy and simple to handle, the labour intensity of workman can be alleviated, and the damage to quartz crucible when effectively can alleviate dismountable crucible, and effectively can reduce the residual body of quartz crucible of combination crucible crucible bowl bottom, extend the work-ing life of combination crucible.
(2) to combine the circularity of crucible good in the present invention, and stable, during crystal pulling whole excellent rate and crystal forming rate higher.
Accompanying drawing explanation
Fig. 1 is the structural representation of single crystal growing furnace Combined carbon crucible of the present invention;
Fig. 2 is the vertical view of the crucible of combination shown in Fig. 1.
Wherein: 1-crucible cylinder, 2-crucible bowl, the holder of 3-crucible, the gap between 4-adjacent crucible bowl component.
Embodiment
Below in conjunction with example, the invention will be further described.
Embodiment 1
As shown in Figure 1, 2, the present embodiment single crystal growing furnace Combined carbon crucible, comprise the combination crucible crucible body be made up of carbon-carbon composites and graphite material, described combination crucible crucible body comprises crucible cylinder 1, crucible bowl 2, crucible holder 3, described crucible cylinder 1 is cylindric, the bottom of described crucible bowl 2 is provided with circular hole, and crucible bowl 2 is made up of 2 lobe crucible bowl components; Be provided with the boss suitable with the bottom circular aperture of crucible bowl 2 in the middle of described crucible holder 3, boss is provided with the concave arc suitable with quartz crucible, and crucible bowl 2 is assemblied in crucible holder 3, and crucible cylinder 1 is assemblied on crucible bowl 2, and bottom and the crucible bowl top of crucible cylinder overlap.
Crucible cylinder 1 and the crucible bowl 2 of the present embodiment combination crucible adopt carbon-carbon composites to prepare, the carbon fiber reinforced carbon matrix composite that described carbon-carbon composites is made up of pure carbon, it is shaping is combined into prefabricated component by Carbon fibe net tire and charcoal cloth through lamination, again by making base substrate after chemical vapour deposition density and/or dipping density, eventually pass and be machined to crucible cylinder 1, crucible bowl 2, its density is 1.2g/ cm
3; Crucible holder 3 is made up of isostatic pressing formed graphite material.
For guaranteeing the right alignment of crucible cylinder 1 and crucible bowl 2, the lap-joint of crucible cylinder 1 and crucible bowl 2 is conical surface overlap joint, and the cone angle of the conical surface is 90 °, and the height of crucible cylinder 1 is 30mm.
In order to ensure the stability that crucible cylinder 1 and crucible bowl 2 overlap, the overlap height of crucible cylinder 1 and crucible bowl 2 is 10mm.
In order to remove the residual body of quartz crucible bottom crucible bowl 2 easily, crucible bowl 2 bottom circular aperture diameter is 150mm, and the gap between the every lobe of crucible bowl 2 is 3.0mm.
During use; first crucible holder 3 is put on the pressure pin in single crystal growing furnace; then crucible bowl 2, crucible cylinder 1 are assembled into an integral crucible; quartz crucible is put among combination crucible; again the starting material such as polysilicon are put into quartz crucible, the starting material heat fused such as polysilicon are carried out the production of silicon single crystal rod in protective atmosphere environment.When silicon single crystal rod draws the residual body of complete removal quartz crucible, first combination crucible is hung out together with quartz crucible in stove, remove crucible holder 3, lobe lobe from quartz crucible surface dismounting crucible bowl 2, finally remove crucible cylinder 1; The quartz crucible of such dismounting be one overall.
On probation through putting into practice, the present invention is easy to operate, effectively can alleviate the damage to combination crucible when removing the residual body of quartz crucible, extend the work-ing life of combination crucible; In addition, the circularity of combination crucible is good and stable, and relative to the crystal pulling of use many lobes graphite crucible, its whole excellent rate improves 3 ﹪ ~ 10 ﹪.
Embodiment 2
The difference of the present embodiment and embodiment 1 is only, crucible cylinder 1, crucible bowl 2 are made up of carbon-carbon composites, and its density is 1.5g/ cm
3; The contact surface of crucible cylinder 1 and crucible bowl 2 is cone match, and its cone angle is 110 °, and the height of crucible cylinder 1 is 230mm; The overlap height of crucible cylinder 1 and crucible bowl 2 is 30mm; Crucible bowl 2 bottom circular aperture diameter is 420mm, and the gap between the every lobe of crucible bowl 2 is 0.5mm.
Remaining with embodiment 1.
Embodiment 3
The difference of the present embodiment and embodiment 1 is only, crucible cylinder 1, crucible bowl 2 are made up of carbon-carbon composites, and its density is 1.7g/ cm
3; The contact surface of crucible cylinder 1 and crucible bowl 2 is cone match, and its cone angle is 100 °, and the height of crucible cylinder 1 is 150mm; The overlap height of crucible cylinder 1 and crucible bowl 2 is 20mm; Crucible bowl 2 bottom circular aperture diameter is 300mm, and the gap between the every lobe of crucible bowl 2 is 0.5mm.
Remaining with embodiment 1.
Embodiment 4
The difference of the present embodiment and embodiment 1 is only, crucible cylinder 1, crucible bowl 2 are made up of carbon-carbon composites, and its density is 1.4g/ cm
3; The contact surface of crucible cylinder 1 and crucible bowl 2 is cone match, and its cone angle is 95 °, and the height of crucible cylinder 1 is 150mm; The overlap height of crucible cylinder 1 and crucible bowl 2 is 15mm; Crucible bowl 2 bottom circular aperture diameter is 350mm, and the gap between the every lobe of crucible bowl 2 is 1.5mm.
Remaining with embodiment 1.
The above is only preferred embodiment of the present invention, not imposes any restrictions the present invention, every above embodiment is done according to the technology of the present invention essence any amendment, change and equivalent structure transformation, all still belong to the protection domain of technical solution of the present invention.
Claims (8)
1. a single crystal growing furnace Combined carbon crucible, comprise the combination crucible crucible body be made up of carbon-carbon composites or graphite material, described combination crucible crucible body comprises crucible cylinder (1), crucible bowl (2), crucible holder (3), described crucible cylinder (1) is cylindric, it is characterized in that, described crucible bowl (2) bottom is provided with circular hole, and crucible bowl (2) is made up of at least 2 lobe crucible bowl components; The boss suitable with crucible bowl (2) bottom circular aperture is provided with in the middle of described crucible holder (3), boss is provided with the concave arc suitable with quartz crucible, crucible bowl (2) is assemblied in crucible holder (3), crucible cylinder (1) is assemblied on crucible bowl (2), and bottom and crucible bowl (2) top of crucible cylinder (1) overlap.
2. single crystal growing furnace Combined carbon crucible according to claim 1, is characterized in that: the lap-joint of described crucible cylinder (1) and crucible bowl (2) is conical surface overlap joint, and the cone angle of the conical surface is 90 ° ~ 110 °.
3. single crystal growing furnace Combined carbon crucible according to claim 2, is characterized in that: the height of the overlap joint interface of described crucible cylinder (1) and crucible bowl (2) is 10 ~ 30mm.
4. the single crystal growing furnace Combined carbon crucible according to claim 1 or 2 or 3, is characterized in that: the Circularhole diameter of described crucible bowl (2) bottom is 150 ~ 420mm.
5. the single crystal growing furnace Combined carbon crucible according to claim 1 or 2 or 3, is characterized in that: the gap (4) between the adjacent crucible bowl component forming described crucible bowl (2) is 0.5 ~ 3.0mm.
6. the single crystal growing furnace Combined carbon crucible according to claim 1 or 2 or 3, is characterized in that: the height of described crucible cylinder (1) is 30 ~ 230mm.
7. the single crystal growing furnace Combined carbon crucible according to claim 1 or 2 or 3, is characterized in that: described crucible holder (3) is made up of isostatic pressing formed graphite material.
8. the single crystal growing furnace Combined carbon crucible according to claim 1 or 2 or 3, is characterized in that: the density>=1.2g/ cm of described carbon-carbon composites
3.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510369177.3A CN104894638A (en) | 2015-06-30 | 2015-06-30 | Carbon-material combined crucible for single-crystal furnace |
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| CN201510369177.3A CN104894638A (en) | 2015-06-30 | 2015-06-30 | Carbon-material combined crucible for single-crystal furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112341232A (en) * | 2020-10-28 | 2021-02-09 | 西安超码科技有限公司 | Carbon/carbon crucible and manufacturing method thereof |
| CN113061979A (en) * | 2021-03-19 | 2021-07-02 | 湖南世鑫新材料有限公司 | Multi-section carbon-carbon composite material crucible with thermal barrier coating and preparation method and application thereof |
| CN114457421A (en) * | 2021-12-21 | 2022-05-10 | 弘元新材料(包头)有限公司 | Device for increasing feeding amount for monocrystalline silicon production and using method thereof |
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| CN201351186Y (en) * | 2009-02-05 | 2009-11-25 | 嘉兴嘉晶电子有限公司 | Novel graphite crucible |
| CN201463538U (en) * | 2009-08-11 | 2010-05-12 | 湖南金博复合材料科技有限公司 | combined crucible |
| CN201756596U (en) * | 2010-03-29 | 2011-03-09 | 上海杰姆斯电子材料有限公司 | Multi-petal graphite crucible |
| CN201942783U (en) * | 2010-12-30 | 2011-08-24 | 山东伟基炭科技有限公司 | Combined crucible for straight pull single crystal furnace |
| CN102296358A (en) * | 2011-06-01 | 2011-12-28 | 湖南金博复合材料科技有限公司 | Combination method for carbon material combined crucible, and combined crucible thereof |
| KR20130074779A (en) * | 2013-05-22 | 2013-07-04 | 박철훈 | How to reuse graphite furnace in silicon crystal growing |
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2015
- 2015-06-30 CN CN201510369177.3A patent/CN104894638A/en active Pending
Patent Citations (6)
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| CN201351186Y (en) * | 2009-02-05 | 2009-11-25 | 嘉兴嘉晶电子有限公司 | Novel graphite crucible |
| CN201463538U (en) * | 2009-08-11 | 2010-05-12 | 湖南金博复合材料科技有限公司 | combined crucible |
| CN201756596U (en) * | 2010-03-29 | 2011-03-09 | 上海杰姆斯电子材料有限公司 | Multi-petal graphite crucible |
| CN201942783U (en) * | 2010-12-30 | 2011-08-24 | 山东伟基炭科技有限公司 | Combined crucible for straight pull single crystal furnace |
| CN102296358A (en) * | 2011-06-01 | 2011-12-28 | 湖南金博复合材料科技有限公司 | Combination method for carbon material combined crucible, and combined crucible thereof |
| KR20130074779A (en) * | 2013-05-22 | 2013-07-04 | 박철훈 | How to reuse graphite furnace in silicon crystal growing |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112341232A (en) * | 2020-10-28 | 2021-02-09 | 西安超码科技有限公司 | Carbon/carbon crucible and manufacturing method thereof |
| CN113061979A (en) * | 2021-03-19 | 2021-07-02 | 湖南世鑫新材料有限公司 | Multi-section carbon-carbon composite material crucible with thermal barrier coating and preparation method and application thereof |
| CN114457421A (en) * | 2021-12-21 | 2022-05-10 | 弘元新材料(包头)有限公司 | Device for increasing feeding amount for monocrystalline silicon production and using method thereof |
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Application publication date: 20150909 |