CN202002629U - Thickness measuring device - Google Patents

Thickness measuring device Download PDF

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Publication number
CN202002629U
CN202002629U CN2010206823438U CN201020682343U CN202002629U CN 202002629 U CN202002629 U CN 202002629U CN 2010206823438 U CN2010206823438 U CN 2010206823438U CN 201020682343 U CN201020682343 U CN 201020682343U CN 202002629 U CN202002629 U CN 202002629U
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CN
China
Prior art keywords
sheet metal
thickness
mounting table
measure
metal plate
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2010206823438U
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Chinese (zh)
Inventor
鎌田隆史
幡野敬典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Business Technologies Wuxi Co Ltd
Konica Minolta Business Technologies Inc
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Konica Minolta Business Technologies Wuxi Co Ltd
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Priority to CN2010206823438U priority Critical patent/CN202002629U/en
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Publication of CN202002629U publication Critical patent/CN202002629U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

The utility model relates to a thickness measuring device, which is used for measuring the thickness of a non-magnetic metal plate and is provided with a placing table, a moving mechanism and a thickness measuring instrument, wherein the placing table is used for placing the metal plate, the moving mechanism is used for enabling the placing table to move in the placing plane, the thickness measuring instrument is arranged above the placing table and is used for measuring the thickness of the metal plate, a plurality of suction holes, connecting openings and internal air passages are formed on the placing table, the suction holes are arranged on the surface for placing the metal plate, the connecting openings can be connected with a vacuum suction device, and the air passages are used for connecting the suction holes and the connecting openings and are formed inside the placing table. According to the thickness measuring device for the metal plate, the influence caused by warping of the non-magnetic metal plate can be eliminated, the measuring precision is improved, and in addition, the whole region of the metal plate can be measured in a short time.

Description

Measurer for thickness
Technical field
The utility model relates to a kind of measurer for thickness, particularly a kind ofly can eliminate the warpage of sheet metal and is used to measure the measurer for thickness of the thickness of nonmagnetic metal plate.
Background technology
Usually, in order to measure the thickness of non magnetic sheet material, can use vernier caliper or milscale directly its thickness to be measured.But, when the planar dimension of sheet material is very big, obtains accurately one-tenth-value thickness 1/10 and just need measure comprehensively sheet material, like this will the expensive time.To this, proposed nonmagnetic metal plates such as aluminium are arranged on the test desk, with the face that carries sheet metal of test desk as reference field, by measuring the thickness that obtains sheet metal from this reference field to distance with this reference field opposite metal plates surface.In the case, can utilize a plurality of height measuring devices that a plurality of points of sheet metal are measured simultaneously, save greatly and measured the required time.
But, utilizing under the situation of this measuring method, owing to itself existing warpage, the nonmagnetic metal plate cause measuring error very big, be difficult to measure accurately.
The utility model content
The utility model proposes in order to solve above-mentioned the problems of the prior art, its purpose is to provide a kind of measurer for thickness of nonmagnetic metal plate, can eliminate the influence that the warpage of nonmagnetic metal plate causes, improve measuring accuracy, and can improve efficiency of measurement, can measure the whole zone of sheet metal at short notice.
To achieve these goals, measurer for thickness of the present utility model utilizes the negative pressure of air that the nonmagnetic metal plate is fitted tightly on reference plane.Surveying instrument is arranged on the top of sheet metal, can switch between fixed mode and Move Mode.And, measure for whole zone sheet metal, also possess the travel mechanism that sheet metal is planar moved.
Specifically, a kind of plate thickness measurement mechanism of the present utility model is used to measure the thickness of nonmagnetic metal plate, it is characterized in that, have: the mounting table of placing sheet metal, the travel mechanism that described mounting table is moved in placing the plane, the thickness measure mechanism that is used to measure plate thickness that is installed in the top of described mounting table and can moves up and down; Be formed with on the described mounting table: the internal air passageways that is arranged on a plurality of attractions hole on the face of placing described sheet metal, the connector that can be connected, described attraction hole is connected with described connector with the negative pressure shape apparatus for converting.
Measurer for thickness according to this sheet metal, because the internal air passageways that is formed with a plurality of attractions hole, the connector that can be connected and will attracts the hole to be connected in the mounting table with connector with the negative pressure shape apparatus for converting, can in internal air passageways, form negative pressure by the negative pressure shape apparatus for converting, utilize the negative pressure of air that the sheet metal that is placed on the mounting table is fitted tightly on the reference field of mounting table.Thus, can eliminate the warpage of sheet metal self, improve the precision of thickness measure greatly.
In addition, make mounting table mobile travel mechanism in the placement plane of placing sheet metal, can in placing the plane, move freely sheet metal, thus, can finish measurement at short notice fast the whole zone of sheet metal owing to have.
A preferred embodiment of plate thickness measurement mechanism of the present utility model is, described travel mechanism comprises makes described mounting table along length direction travel mechanism that the length direction of described sheet metal moves with make described mounting table along Width travel mechanism that the Width of described sheet metal moves.
Thus, can in the plane at sheet metal place, move freely sheet metal, finish the thickness measure in the whole zone of sheet metal fast.
A preferred embodiment of plate thickness measurement mechanism of the present utility model is that described negative pressure shape apparatus for converting is a vacuum suction device.
Thus, can in internal air passageways, form vacuum state, sheet metal can be attracted on the reference plane of mounting table reliably, eliminate the warpage of sheet metal effectively.
Another preferred embodiment of plate thickness measurement mechanism of the present utility model is, described thickness measure mechanism has a plurality of measurement section.
Thus, can utilize a plurality of measurement section that a plurality of measurement points are measured simultaneously, further improve efficiency of measurement.
Another preferred embodiment of plate thickness measurement mechanism of the present utility model is that described connector is formed on the side of described mounting table.
Thus, can easily realize being connected of mounting table and negative pressure shape apparatus for converting.
Description of drawings
Fig. 1 is the structural representation of the measurer for thickness of sheet metal of the present utility model;
Fig. 2 A is the stereographic map of the sheet metal mounting table of measurer for thickness of the present utility model, and Fig. 2 B is the synoptic diagram that the sheet metal mounting table of measurer for thickness of the present utility model is connected with the vacuum suction device of outside;
Fig. 3 A is the synoptic diagram of sheet metal warpage situation when utilizing prior art to measure plate thickness, and Fig. 3 B is the synoptic diagram of the situation that the sheet metal warpage is eliminated when utilizing measurer for thickness of the present utility model to measure plate thickness;
Fig. 4 is the key diagram of the situation the when thickness that utilizes measurement section to measure sheet metal is described.
Description of reference numerals
1 measurer for thickness
2 sheet metals
10 mounting tables
11 attract the hole
12 connectors
13 internal air passageways
21 length direction travel mechanisms
22 Width travel mechanisms
23 postings
24 location divisions
25 grooves
30 thickness measure mechanisms
31 measurement section
40 vacuum suction devices
41 jointings
42 gas outlets
Embodiment
Below, with reference to accompanying drawing specific embodiment of the utility model is described.For the ease of diagram, the size of each parts is extended in the accompanying drawing describes or dwindles description, and content of the present invention is not to be defined in part dimension shown in the accompanying drawing and quantity.
Fig. 1 is the structural representation of the measurer for thickness of sheet metal of the present utility model.Measurer for thickness 1 of the present utility model has the mounting table 10 that is used to place as the sheet metal 2 of measuring object thing, make mounting table 10 travel mechanism that planar move, that comprise length direction travel mechanism 21 and Width travel mechanism 22 (seeing Fig. 2 A), be used to measure the thickness measure mechanism 30 of the thickness of sheet metal 2.
As shown in Figure 1, sheet metal 2 to be measured is lain on the mounting table 10.Thickness measure mechanism 30 is arranged on the top of mounting table 10, can switch between fixed mode and staggered relatively Move Mode that moves up and down.Thickness measure mechanism 30 has a plurality of measurement section 31 in the present embodiment.Example as measurement section can exemplify height-gauge.As the measuring basis face, the height of the face of the measuring basis face opposition side by measuring sheet metal 2 is calculated the thickness of sheet metal 2 with the face that is placed with sheet metal 2 of mounting table 10.
Certainly, the number of measurement section 31 not necessarily must be a plurality of, also can only be provided with one.
Utilize the length direction travel mechanism 21 shown in Fig. 1 that mounting table 10 is moved along the length direction L of sheet metal 2.Utilize the Width travel mechanism 22 shown in the accompanying drawing 2A, mounting table 10 is moved along the Width W of sheet metal 2.Specifically, be provided with the posting 23 of rectangle at the upper surface of mounting table 10, this posting 23 has certain height, forms the groove 25 that can embed sheet metal 2 with the upper surface at mounting table 10.Two ends, the left and right sides at posting 23 are provided with location division 24.As an example, this location division 24 forms a plurality of peristomes of arranging along the Width of sheet metal 2.By selecting different peristomes to aim at, change the position of posting on sheet metal 2 Widths, thereby sheet metal 2 is moved on Width with the location division that is formed on mounting table 10 upper surfaces.
Shown in Fig. 2 A, Fig. 2 B, the upper surface of mounting table 10 of the present utility model is formed with a plurality of attractions hole 11, and, attract 11 corresponding positions, hole to be formed with a plurality of connectors 12 in the side of mounting table 10 and each.These attract holes 11 to communicate with each other the formation internal air passageways in the inside of mounting table 2 with corresponding connector 12.On connector 12, can connect vacuum suction device 40,, thus, attract 11 places, hole to produce negative pressure so that internal air passageways forms vacuum state as negative pressure shape apparatus for converting one example.This vacuum suction device 40 can use known device, is connected with each connector 12 with gas outlet 42 by jointing 41.
Certainly, not necessarily must become vacuum state in the internal air passageways, so long as that the negative pressure that is produced can make sheet metal not fit tightly on reference field with having warpage is just passable.
In addition, attract the set-up mode in hole 11 to be not limited to the situation shown in Fig. 2 A, Fig. 2 B, can be provided with as required crypto set or sparse more.And, attract hole 11 to be set under posting 23 and sheet metal 2 are placed on state on the mounting table 10, can attract hole 11 to cover fully.When posting 23 drives sheet metal 22 change positions, still can attract hole 11 to cover fully.Thus, can be in the attractive force of each position assurance to sheet metal 2.
The formation position of connector 12 is not limited to the side of mounting table, also can be formed on the bottom surface of mounting table.
When using existing measurement mechanism to measure the thickness of sheet metal 2, as shown in Figure 3A, because self there is warpage in sheet metal 2, can not fit tightly with upper surface as the mounting table of measuring basis face, at measurement point A, B, E place, between the upper surface of sheet metal 2 and mounting table 10, there is the gap, causes to measure exactly the thickness of sheet metal 2.
Under the situation of using measurer for thickness 1 of the present utility model to measure, shown in Fig. 3 B, sheet metal 2 fits tightly the upper surface at mounting table 10 under the effect of the negative pressure that attracts 11 places, hole to produce, sheet metal 2 becomes smooth state fully, and the warpage of himself is eliminated fully.Utilize such measurement mechanism to measure, can eliminate the influence that the sheet metal warpage is caused, significantly improve measurement accuracy.
More particularly, as shown in Figure 4, measurement section 31 is moved down into the upper surface position contacting with sheet metal 2, measures the height h of sheet metal upper surface.The height of the upper surface of mounting table 10 is determined in advance as reference value h0.Poor according between measuring height h and the reference value h0 can be calculated the thickness of sheet metal 2.Utilize a plurality of measuring heads 31, can measure a plurality of points of sheet metal 2, and calculate mean value.
These a plurality of measuring heads 31 can be measured each point on the sheet metal 2 one by one, from improving the angle of efficiency of measurement, preferably simultaneously a plurality of measurement points on the sheet metal 2 are measured.
And, because sheet metal 2 can planar move under the effect of travel mechanism, therefore, can measure each point on the sheet metal 2 easily, easily realize measuring comprehensively.
As measurement section, enumerated the height-gauge of the height of sheet metal being measured with the way of contact 31, but also can use the height sensor of measuring with non-contacting mode, for example photovoltaic.
More than embodiment of the present utility model is illustrated, still, obviously, this embodiment also can carry out various changes.Such change should not thought and broken away from protection domain of the present utility model, is that tangible change all is included in the scope of the present utility model for the person of ordinary skill of the art.

Claims (5)

1. the measurer for thickness of a sheet metal is used to measure the thickness of nonmagnetic metal plate, it is characterized in that,
Have:
Place the mounting table of sheet metal,
The travel mechanism that described mounting table is moved in placing the plane,
The thickness measure mechanism that is used to measure plate thickness that is installed in the top of described mounting table and can moves up and down;
Be formed with on the described mounting table: the internal air passageways that is arranged on a plurality of attractions hole on the face of placing described sheet metal, the connector that can be connected, described attraction hole is connected with described connector with the negative pressure shape apparatus for converting.
2. plate thickness measurement mechanism as claimed in claim 1, it is characterized in that described travel mechanism comprises makes described mounting table along length direction travel mechanism that the length direction of described sheet metal moves with make described mounting table along Width travel mechanism that the Width of described sheet metal moves.
3. plate thickness measurement mechanism as claimed in claim 1 or 2 is characterized in that, described negative pressure shape apparatus for converting is a vacuum suction device.
4. plate thickness measurement mechanism as claimed in claim 1 or 2 is characterized in that, described thickness measure mechanism has a plurality of measurement section.
5. the measurer for thickness of sheet metal as claimed in claim 1 or 2 is characterized in that, described connector is formed on the side of described mounting table.
CN2010206823438U 2010-12-27 2010-12-27 Thickness measuring device Expired - Fee Related CN202002629U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010206823438U CN202002629U (en) 2010-12-27 2010-12-27 Thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010206823438U CN202002629U (en) 2010-12-27 2010-12-27 Thickness measuring device

Publications (1)

Publication Number Publication Date
CN202002629U true CN202002629U (en) 2011-10-05

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Application Number Title Priority Date Filing Date
CN2010206823438U Expired - Fee Related CN202002629U (en) 2010-12-27 2010-12-27 Thickness measuring device

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103217112A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Single-point thickness measurement method of SMT screen plate
CN104781631A (en) * 2012-11-23 2015-07-15 Posco公司 Apparatus for measuring scale thickness of steel plate
CN108225197A (en) * 2018-01-20 2018-06-29 东莞领丰电子有限公司 A kind of thickness measure smelting tool
CN111903188A (en) * 2018-03-26 2020-11-06 夏普株式会社 Measuring device and measuring method
CN114608508A (en) * 2022-03-22 2022-06-10 麦峤里(上海)半导体科技有限责任公司 Wafer thickness measuring device of square resistance measuring point normal position
CN117542759A (en) * 2023-11-28 2024-02-09 无锡卓海科技股份有限公司 Square resistance measuring device and measuring method

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103217112A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Single-point thickness measurement method of SMT screen plate
CN104781631A (en) * 2012-11-23 2015-07-15 Posco公司 Apparatus for measuring scale thickness of steel plate
CN104781631B (en) * 2012-11-23 2017-07-11 Posco公司 The scale thickness measurement apparatus of steel plate
CN108225197A (en) * 2018-01-20 2018-06-29 东莞领丰电子有限公司 A kind of thickness measure smelting tool
CN108225197B (en) * 2018-01-20 2020-08-25 东莞领丰电子有限公司 Thickness measurement smelting tool
CN111903188A (en) * 2018-03-26 2020-11-06 夏普株式会社 Measuring device and measuring method
CN111903188B (en) * 2018-03-26 2023-07-04 夏普株式会社 Measuring device and measuring method
CN114608508A (en) * 2022-03-22 2022-06-10 麦峤里(上海)半导体科技有限责任公司 Wafer thickness measuring device of square resistance measuring point normal position
CN117542759A (en) * 2023-11-28 2024-02-09 无锡卓海科技股份有限公司 Square resistance measuring device and measuring method

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20111005

Termination date: 20161227