CN201999386U - Pressurization, storage, distribution and feeding device of high purity phosphorus oxychloride - Google Patents
Pressurization, storage, distribution and feeding device of high purity phosphorus oxychloride Download PDFInfo
- Publication number
- CN201999386U CN201999386U CN2010206991946U CN201020699194U CN201999386U CN 201999386 U CN201999386 U CN 201999386U CN 2010206991946 U CN2010206991946 U CN 2010206991946U CN 201020699194 U CN201020699194 U CN 201020699194U CN 201999386 U CN201999386 U CN 201999386U
- Authority
- CN
- China
- Prior art keywords
- valve
- high purity
- phosphorus oxychloride
- bubbler
- pressurization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Provided is a pressurization, storage, distribution and feeding device of high purity phosphorus oxychloride. Container of the high purity phosphorus oxychloride is connected with a quartz bubbler through a discharging port valve, a liquid pressure relief valve, a liquid control valve and a bubbler feeding valve. The quartz bubbler is provided with a high level ultrasonic wave liquid level controller and a low level ultrasonic wave liquid level controller and connected with a diffusion furnace. A high purity nitrogen bubbling valve is arranged on the quartz bubbler. A nitrogen inlet arranged on the container of the high purity phosphorus oxychloride is connected with a nitrogen pressure relief valve. Accordingly, the pressurization, storage, distribution and feeding device of high purity phosphorus oxychloride reduces labor intensity of operation, saves labor cost, improves safety in operation, reduces probability of material pollution simultaneously, enhances continuity of the operating system, simplifies the difficulty of the operation, and greatly reduces purchase cost and maintenance cost of customers, utilizes polytetrafluoroethylene (PFA) materials completely so that a dissolving out risk of metal impurities of glass materials and other materials is avoided, and greatly reduces production cost and logistics cost, thereby being very popular to factories using the phosphorus oxychloride.
Description
Technical field
The utility model relates to a kind of accumulating feed operative installations of hypertoxic dangerous material high purity POCl3.
Background technology
Highly purified POCl3 (99.9999%～99.99999%) is one of main raw material(s) of manufacturing preform, also be the diffusion of integrated circuit, solar cell, Electronic Components Manufacturing process, the primary raw material in the doping process, extensively applied to photovoltaic, IC industry.But it belongs to the water white transparency chemical of severe corrosive, strong oxidizing property, severe toxicity, chance water vigorous reaction.At present to a kind of high purity quartz container (0.4～1.5L) splendid attire that is to use of the accumulating feed of high purity POCl3, turnover high pure nitrogen pipe adopts PFA valve seal, connection, as transportation with use container, its shortcoming be glass container frangible, change that bottle is frequent, operational hazards, risk of leakage height, human cost height, logistics cost height; Another kind is to use 19L corrosion-resistant steel SS316L storage tank, and its shortcoming is that operation is loaded down with trivial details, apparatus structure is complicated, install self cost height, maintenance cost height (needing professional service personnel), and can not thoroughly stop the pollution of metallic impurity to material.
Summary of the invention
The purpose of this utility model provides a kind of simple in structure, safe and reliable, no leak, pollution-free, easy to use, the high purity POCl3 pressurization accumulating feeding device that operating cost is low.
The purpose of this utility model is achieved in that the quartzy bubbler of high-purity POCl3 container by discharging opening valve, liquid reducing valve, liquid control valve, the high-order ultrasonic solution level controller of bubbler inlet valve connecting band and low level ultrasonic solution level controller, and quartzy bubbler connects diffusion furnace.
On the quartzy bubbler high pure nitrogen bubbling valve is arranged.
Nitrogen inlet valve on high-purity POCl3 container connects the nitrogen reducing valve.
Because the utility model has adopted said structure, reduced the labour intensity of operation, save human cost; Increase the safety of operation, reduced the probability that material pollutes simultaneously; Strengthen the continuity of operating system, simplified the difficulty of operation; Greatly reduced purchasing and maintenance cost of client; Full PFA material has thoroughly been stopped the metallic impurity stripping risk of glass material and other materials; Greatly reduce production and logistics cost, therefore, be subjected to the extensive welcome that POCl3 uses producer.
Description of drawings
Fig. 1 is the constructional drawing of the utility model embodiment.
1 high-purity POCl3 container, 2 nitrogen inlet valves, 3 discharging opening valves, 4 nitrogen reducing valves, 5 liquid reducing valves, 6 liquid control valves, 7 bubbler inlet valves, 8 high pure nitrogen bubbling valves, 9 high-order ultrasonic solution level controllers, 10 diffusion furnaces, 11 low level ultrasonic solution level controllers, 12 quartzy bubblers among the figure.
The specific embodiment
Embodiment: high-purity POCl3 container 1 has high-order ultrasonic solution level controller 9 bottoms that the quartzy bubbler 12 of low level ultrasonic solution level controller 11 is arranged by the discharging opening valve 3 on the pipeline, liquid reducing valve 5, liquid control valve 6, bubbler inlet valve 7 connection tops, quartzy bubbling 12 devices connect diffusion furnace 10, on the quartzy bubbler 12 high pure nitrogen bubbling valve 8 is arranged, the nitrogen inlet valve 2 on high-purity POCl3 container 1 connects nitrogen reducing valve 4.
High-purity POCl3 container 1 material is the high-purity PFA of import, volume is 20L-200L, finish can and safe transport to using producer in manufacturer, high pure nitrogen connects nitrogen inlet valve 2 by nitrogen reducing valve 4, nitrogen inlet valve 2 connects high-purity POCl3 container 1, discharging opening valve 3 connects liquid reducing valve 5, liquid reducing valve 5 connects liquid control valve 6, liquid control valve 6 connects bubbler inlet valve 7, bubbler inlet valve 7 connects quartzy bubbler 12, and high pure nitrogen bubbling valve 8 is arranged on the quartzy bubbler 12, high-order ultrasonic solution level controller 9 and low level ultrasonic solution level controller 11.
All pipe fittings, the valve of this device are made by high-purity PFA.This device provides transportation power by high pure nitrogen behind nitrogen reducing valve 4 and liquid reducing valve 5 adjustment pressures, material is sent into respectively in each quartzy bubbler behind liquid reducing valve 6 adjustment pressures by discharge port end.Quartzy bubbler 10 is equipped with high-order ultrasonic solution level controller 9 and low level ultrasonic solution level controller 11, the two position of controlling liquid material respectively, and when material arrives setting height, the warning that pipes automatically of cooresponding ultrasonic solution level controller.It is reinforced that low level ultrasonic solution level controller 11 sends the prompting that pipes, regulate nitrogen reducing valve 4 and liquid reducing valve 5 to convenient pressure, open nitrogen inlet valve 2, discharging opening valve 3, liquid control valve 6, bubbler inlet valve 7, high pure nitrogen bubbling valve 8 successively, material slowly enters quartzy bubbler 12, when material reaches the setting liquid level, high-order ultrasonic solution level controller 9 sends and pipes, close bubbler inlet valve 7, liquid control valve 6, discharging opening valve 3, nitrogen inlet valve 2 successively, the high pure nitrogen bubbling is brought material into diffusion furnace 10, finishes reinforced process.
Claims (3)
1. high purity POCl3 pressurization accumulating feeding device, it is characterized in that: high-purity POCl3 container is by the quartzy bubbler of discharging opening valve, liquid reducing valve, liquid control valve, the high-order ultrasonic solution level controller of bubbler inlet valve connecting band and low level ultrasonic solution level controller, and quartzy bubbler connects diffusion furnace.
2. a kind of high purity POCl3 pressurization accumulating feeding device according to claim 1 is characterized in that: high pure nitrogen bubbling valve is arranged on the quartzy bubbler.
3. a kind of high purity POCl3 pressurization accumulating feeding device according to claim 1, it is characterized in that: the nitrogen inlet valve on high-purity POCl3 container connects the nitrogen reducing valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206991946U CN201999386U (en) | 2010-12-31 | 2010-12-31 | Pressurization, storage, distribution and feeding device of high purity phosphorus oxychloride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206991946U CN201999386U (en) | 2010-12-31 | 2010-12-31 | Pressurization, storage, distribution and feeding device of high purity phosphorus oxychloride |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201999386U true CN201999386U (en) | 2011-10-05 |
Family
ID=44702135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206991946U Expired - Lifetime CN201999386U (en) | 2010-12-31 | 2010-12-31 | Pressurization, storage, distribution and feeding device of high purity phosphorus oxychloride |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201999386U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103819101A (en) * | 2014-01-27 | 2014-05-28 | 江苏通鼎光棒技术有限公司 | Continuous and centralized feeding device for coating materials as well as feeding method and control method of continuous and centralized feeding device |
-
2010
- 2010-12-31 CN CN2010206991946U patent/CN201999386U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103819101A (en) * | 2014-01-27 | 2014-05-28 | 江苏通鼎光棒技术有限公司 | Continuous and centralized feeding device for coating materials as well as feeding method and control method of continuous and centralized feeding device |
| CN103819101B (en) * | 2014-01-27 | 2016-03-23 | 江苏通鼎光棒技术有限公司 | Feed device and method of feeding thereof and control method in a kind of coating material continuum |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106870945B (en) | Natural gas pressure regulating skid-mounted device with multistage safety protection function | |
| CN201999386U (en) | Pressurization, storage, distribution and feeding device of high purity phosphorus oxychloride | |
| CN101871573A (en) | Liquid chlorine vaporization device | |
| CN202609903U (en) | Sulfuric acid pressure conveying system | |
| CN202546241U (en) | Safety feeding system for high-purity phosphorus oxychloride | |
| CN201827656U (en) | High-purity phosphorus oxychloride storage and transportation device | |
| CN201952526U (en) | High-purity phosphorus oxychloride liquid level difference storage and transportation feeding device | |
| CN201072025Y (en) | Safe phosphorus oxytrichloride conveyer | |
| CN201971333U (en) | High-purity phosphorus oxychloride vacuuming, storing and feeding device | |
| CN201706714U (en) | Hot water supply device for producing liquid cement grinding aid | |
| CN204433807U (en) | A kind of economizer ash discharge transport path switches and control system | |
| CN208135896U (en) | Skid-mounted type methanol and vapor plasma method reformation hydrogen production device of air | |
| CN202080601U (en) | Bucket for storing, transporting and feeding high-purity phosphorus oxychloride | |
| CN201971334U (en) | Storage, transportation and feeding device for high-purity phosphorus oxychloride | |
| CN201876193U (en) | Cooling water control system of heat exchanger | |
| CN201678449U (en) | High-purity phosphorous oxychloride storage and transportation device | |
| CN210584343U (en) | Exhaust gas purification device | |
| CN217178261U (en) | Reheating type low-temperature liquid pressurizing device | |
| CN202575971U (en) | Novel chlorine purification equipment | |
| CN203108427U (en) | Automatic adjusting and spraying equipment for denitrating cement kiln | |
| CN202950993U (en) | Rapid temperature and pressure reducing system in sterilizing and feeding tank and sterilizing and stirring tank | |
| CN101358686A (en) | Safety conveying method for phosphorus oxychloride | |
| CN201670726U (en) | High-purity phosphorus oxychloride bubbling device | |
| CN203534258U (en) | Water tank type device for recycling cold flow of low-temperature liquid products | |
| CN104495748B (en) | In a kind of natural gas pyrolysis hydrogen manufacturing, in fuel gas, pressure changes low pressure use device and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Guiyang Jingyi Technology Co., Ltd. Assignor: Xiang Dong Contract record no.: 2014520000013 Denomination of utility model: Pressurization, storage, distribution and feeding device of high purity phosphorus oxychloride Granted publication date: 20111005 License type: Exclusive License Record date: 20140603 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| EC01 | Cancellation of recordation of patent licensing contract | ||
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Guiyang Jingyi Technology Co., Ltd. Assignor: Xiang Dong Contract record no.: 2014520000013 Date of cancellation: 20171226 |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20111005 |