CN201952526U - High-purity phosphorus oxychloride liquid level difference storage and transportation feeding device - Google Patents

High-purity phosphorus oxychloride liquid level difference storage and transportation feeding device Download PDF

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Publication number
CN201952526U
CN201952526U CN2010206991927U CN201020699192U CN201952526U CN 201952526 U CN201952526 U CN 201952526U CN 2010206991927 U CN2010206991927 U CN 2010206991927U CN 201020699192 U CN201020699192 U CN 201020699192U CN 201952526 U CN201952526 U CN 201952526U
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China
Prior art keywords
valve
phosphorus oxychloride
purity phosphorus
liquid level
bubbler
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Expired - Lifetime
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CN2010206991927U
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Chinese (zh)
Inventor
向东
姜盛君
舒骁骥
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Individual
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Individual
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Priority to CN2010206991927U priority Critical patent/CN201952526U/en
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Expired - Lifetime legal-status Critical Current

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Abstract

Disclosed is a high-purity phosphorus oxychloride liquid level different storage and transportation feeding device. A high-purity phosphorus oxychloride container is provided with a nitrogen inlet valve, a feeding opening valve and a discharge opening valve and is connected with a quartz bubbler with an ultrasonic liquid level controller via the discharge opening valve and a bubbler feeding valve, the quartz bubbler is connected with a diffusion furnace and provided with a high-purity nitrogen bubbling valve, and the nitrogen inlet valve on the high-purity phosphorus oxychloride container is connected with a nitrogen pressure reducing valve via a one-way valve. The high-purity phosphorus oxychloride liquid level difference storage and transportation feeding device adopts the structure, thereby reducing labor intensity of operation, saving labor cost, increasing safety of operation, simultaneously decreasing possibility of material pollution, strengthening continuity of an operation system, reducing operation difficulty and greatly reducing purchasing and maintaining costs for consumers. Total PFA (polyfluoroalkoxy) materials thoroughly stop risk of digestion of metal impurities of glass materials and other materials, production and logistics costs are greatly lowered, and accordingly the device is widely welcomed by phosphorus oxychloride using manufacturers.

Description

A kind of high purity phosphorus oxychloride liquid level difference accumulating feed device
Technical field
The utility model relates to a kind of accumulating feed device of hypertoxic hazardous substance high purity phosphorus oxychloride.
Background technology
Highly purified phosphorus oxychloride (99.9999%~99.99999%) is one of main raw material(s) of manufacturing preform, also be the diffusion of unicircuit, solar cell, Electronic Components Manufacturing process, the main raw material in the doping process, extensively applied to photovoltaic, IC industry.But it belongs to the water white transparency chemical of severe corrosive, strong oxidizing property, severe toxicity, chance water vigorous reaction.At present to a kind of high purity quartz container (0.4~1.5L) splendid attire that is to use of the accumulating feed of high purity phosphorus oxychloride, turnover high pure nitrogen pipe adopts PFA valve seal, connection, as transportation with use container, its shortcoming be Glass Containers frangible, change that bottle is frequent, operational hazards, risk of leakage height, human cost height, logistics cost height; Another kind is to use 19L stainless steel SS316L storage tank, and its shortcoming is that operation is loaded down with trivial details, apparatus structure is complicated, operating pressure is high, install self cost height, maintenance cost height (needing professional maintenance personnel), and can not thoroughly stop the pollution of metallic impurity to material.
Summary of the invention
The purpose of this utility model provides a kind of simple in structure, safe and reliable, nothing leakage, pollution-free, easy to use, the high purity phosphorus oxychloride liquid level difference accumulating feed device that running cost is low.
The purpose of this utility model is achieved in that nitrogen inlet valve, opening for feed valve and discharge port valve on high-purity phosphorus oxychloride container, high-purity phosphorus oxychloride container is by the quartzy bubbler of discharge port valve and bubbler feed valve connecting band ultrasonic solution level controller, and quartzy bubbler connects diffusion furnace.
On the quartzy bubbler high pure nitrogen bubbling valve is arranged.
Nitrogen inlet valve on high-purity phosphorus oxychloride container connects the nitrogen reducing valve by check valve.
Because the utility model has adopted said structure, reduced the labour intensity of operation, save human cost; Increase the security of operation, reduced the probability that material pollutes simultaneously; Strengthen the continuity of operating system, simplified the difficulty of operation; Greatly reduced purchasing and maintenance cost of client; Full PFA material has thoroughly been stopped the metallic impurity stripping risk of glass material and other materials; Greatly reduce production and logistics cost, therefore, be subjected to the extensive welcome that phosphorus oxychloride is used producer.
Description of drawings
Fig. 1 is the structure iron of the utility model first embodiment.
1 high-purity phosphorus oxychloride container, 2 opening for feed valves, 3 nitrogen inlet valves, 4 check valves, 5 nitrogen reducing valve, 6 discharge port valves, 7 bubbler feed valves, 8 ultrasonic solution level controllers, 9 diffusion furnaces, 10 high pure nitrogen bubbling valves, 11 quartzy bubblers among the figure.
Embodiment
Embodiment: nitrogen inlet valve 3, opening for feed valve 2 and discharge port valve 6 are arranged on high-purity phosphorus oxychloride container 1, high-purity phosphorus oxychloride container 1 is by the quartzy bubbler 11 of discharge port valve 6 and bubbler feed valve 7 connecting band ultrasonic solution level controllers 8, quartzy bubbler 11 connects diffusion furnace 9, on the quartzy bubbler 11 high pure nitrogen bubbling valve 10 is arranged, nitrogen inlet 3 valves on high-purity phosphorus oxychloride container 1 connect nitrogen reducing valve 5 by check valve 4.
High-purity phosphorus oxychloride container 1 material is the high-purity PFA of import, volume is 20L-200L, finish can and safe transport to using producer in manufacturer, high pure nitrogen connects check valve 4 by nitrogen reducing valve 5, check valve 4 connects high-purity phosphorus oxychloride container 1 by nitrogen inlet valve 3, discharge port valve 6 on high-purity phosphorus oxychloride container 1 connects bubbler feed valve 7, and bubbler feed valve 7 connects quartzy bubbler 11 quartzy bubblers 11 and connects diffusion furnace 9.On the quartzy bubbler 11 high pure nitrogen bubbling valve 10, ultrasonic solution level controller 8 are arranged.Opening for feed valve 2, nitrogen inlet valve 3 are arranged on high-purity phosphorus oxychloride container 1.
All pipe fittings, the valve of this device are made by high-purity PFA.This device provides transmitting power by the high-purity phosphorus oxychloride container 1 by high liquid level by liquid level difference, material flows in the quartzy bubbler 11 by discharge port valve 6 safely through quartzy bubbler feed valve 7, ultrasonic solution level controller 8 on the quartzy bubbler 11, the two position of controlled liq material, when material arrives setting height, the warning that pipes automatically of corresponding ultrasonic solution level controller 8.During use, regulate nitrogen reducing valve 5 convenient pressures, open nitrogen inlet valve 3, discharge port valve 6, bubbler feed valve 7 successively, material slowly enters quartzy bubbler, when material reached the setting liquid level, ultrasonic solution level controller 8 sent and pipes, and closes bubbler feed valve 7, discharge port valve 6, nitrogen inlet valve 3 successively, open high pure nitrogen bubbling valve 10 high pure nitrogen bubblings and bring material into diffusion furnace 9, finish reinforced process.

Claims (3)

1. high purity phosphorus oxychloride liquid level difference accumulating feed device, it is characterized in that: nitrogen inlet valve, opening for feed valve and discharge port valve are arranged on high-purity phosphorus oxychloride container, high-purity phosphorus oxychloride container is by the quartzy bubbler of discharge port valve and bubbler feed valve connecting band ultrasonic solution level controller, and quartzy bubbler connects diffusion furnace.
2. a kind of high purity phosphorus oxychloride liquid level difference accumulating feed device according to claim 1 is characterized in that: high pure nitrogen bubbling valve is arranged on the quartzy bubbler.
3. a kind of high purity phosphorus oxychloride liquid level difference accumulating feed device according to claim 1 is characterized in that: the nitrogen inlet valve on high-purity phosphorus oxychloride container connects the nitrogen reducing valve by check valve.
CN2010206991927U 2010-12-31 2010-12-31 High-purity phosphorus oxychloride liquid level difference storage and transportation feeding device Expired - Lifetime CN201952526U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010206991927U CN201952526U (en) 2010-12-31 2010-12-31 High-purity phosphorus oxychloride liquid level difference storage and transportation feeding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010206991927U CN201952526U (en) 2010-12-31 2010-12-31 High-purity phosphorus oxychloride liquid level difference storage and transportation feeding device

Publications (1)

Publication Number Publication Date
CN201952526U true CN201952526U (en) 2011-08-31

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010206991927U Expired - Lifetime CN201952526U (en) 2010-12-31 2010-12-31 High-purity phosphorus oxychloride liquid level difference storage and transportation feeding device

Country Status (1)

Country Link
CN (1) CN201952526U (en)

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
EE01 Entry into force of recordation of patent licensing contract

Assignee: Guiyang Jingyi Technology Co., Ltd.

Assignor: Xiang Dong

Contract record no.: 2014520000013

Denomination of utility model: High-purity phosphorus oxychloride liquid level difference storage and transportation feeding device

Granted publication date: 20110831

License type: Exclusive License

Record date: 20140603

LICC Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model
EC01 Cancellation of recordation of patent licensing contract
EC01 Cancellation of recordation of patent licensing contract

Assignee: Guiyang Jingyi Technology Co., Ltd.

Assignor: Xiang Dong

Contract record no.: 2014520000013

Date of cancellation: 20171226

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20110831