CN201678449U - High-purity phosphorous oxychloride storage and transportation device - Google Patents
High-purity phosphorous oxychloride storage and transportation device Download PDFInfo
- Publication number
- CN201678449U CN201678449U CN2010201576769U CN201020157676U CN201678449U CN 201678449 U CN201678449 U CN 201678449U CN 2010201576769 U CN2010201576769 U CN 2010201576769U CN 201020157676 U CN201020157676 U CN 201020157676U CN 201678449 U CN201678449 U CN 201678449U
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- CN
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- Prior art keywords
- purity
- bubbler
- phosphorous oxychloride
- peristaltic pump
- phosphorus oxychloride
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model relates to a high-purity phosphorous oxychloride storage and transportation device. A high-purity phosphorous oxychloride container is connected with a multiport liquid distributor which is connected with a peristaltic pump. The peristaltic pump is connected with a quartz bubbler which is wrapped with a semiconductor cold trap. The quartz bubbler is connected with a phosphor diffuser. The high-purity phosphorous oxychloride container is provided with a gas inlet valve. The quartz bubbler is provided with a high-purity nitrogen inlet valve. The device is convenient, firm and safe and saves logistic cost. The device adopts PFA or other corrosion resistant high-purity plastic or high-purity quartz and other nonmetal materials, the pollution of metal impurities on materials is avoided and the purity of the materials is ensured. The accurate control of the peristaltic pump is adopted so that the discharging concentration of the bubbler is stable, the use manufacturer can achieve the best diffusion in the diffusion process and the product quality is ensured. The device has the advantages of simple structure, good safety and reliability, no leakage and pollution, low use and convenience cost and is popularized by the high-purity phosphorous oxychloride use manufacturers.
Description
Technical field
The utility model relates to a kind of accumulating using appts of hypertoxic hazardous substance high purity phosphorus oxychloride.
Background technology
Highly purified phosphorus oxychloride (99.9999%～99.99999%) is one of main raw material(s) of manufacturing preform, also be the diffusion of unicircuit, solar cell, Electronic Components Manufacturing process, the main raw material in the doping process, extensively applied to photovoltaic, IC industry.But it belongs to the water white transparency chemical of severe corrosive, strong oxidizing property, severe toxicity, chance water vigorous reaction.At present to a kind of high purity quartz container (0.4～1.5L) splendid attire that is to use of the accumulating of high purity phosphorus oxychloride, turnover high pure nitrogen pipe adopts PFA valve seal, connection, as transportation with use container, its shortcoming be Glass Containers frangible, change that bottle is frequent, operational hazards, risk of leakage height, human cost height, logistics cost height; Another kind is to use 19L stainless steel SS316L storage tank, and its shortcoming is that operation is loaded down with trivial details, apparatus structure is complicated, operating pressure is high, install self cost height, maintenance cost height (needing professional maintenance personnel), and can not thoroughly stop the pollution of metallic impurity to material.
Summary of the invention
The purpose of this utility model provide a kind of simple in structure, safe and reliable, do not have to leak, pollution-free, high purity phosphorus oxychloride storage and transportation apparatus that use cost is low.
The purpose of this utility model is achieved in that high-purity phosphorus oxychloride container connects the multiport liquid distributor, and the multiport liquid distributor connects peristaltic pump, and peristaltic pump connects the quartzy bubbler of outsourcing semi-conductor cold-trap, and quartzy bubbler connects the phosphorous diffusion device.
On high-purity phosphorus oxychloride container the gas inlet valve is arranged.
On the quartzy bubbler high pure nitrogen intake valve is arranged.
Because the utility model adopts said structure, this installs convenient transportation, and is firmly solid non-friable, easy to use, safe, has saved logistics cost; This device all adopts PFA or non-metallic material such as other corrosion-resistant high-purity plastic or high purity quartz, can avoid the pollution of metallic impurity to material fully, guarantees the purity of material; Adopt peristaltic pump accurately to control, made bubbler discharging concentration stabilize, can use producer in the diffusion technique process, to reach best diffusion purpose, guaranteed quality product; This apparatus structure is simple, safe and reliable, do not have leak, pollution-free, use cost is low, maintenance cost is low, is subjected to high-purity phosphorus oxychloride to use producer to welcome deeply.
Description of drawings
Fig. 1 is the structure iron of the utility model embodiment.
1 high-purity phosphorus oxychloride container, 2 multiport liquid distributors, 3 peristaltic pumps, 4 quartzy bubblers, 5 semi-conductor cold-traps, 6 gas inlet valves, 7 high pure nitrogen intake valves, 8 phosphorous diffusion devices among the figure.
Embodiment
Embodiment: high-purity phosphorus oxychloride container 1 connects multiport liquid distributor 2, multiport liquid distributor 2 connects peristaltic pump 3, peristaltic pump 3 connects the quartzy bubbler 4 of outsourcing semi-conductor cold-trap 5, quartzy bubbler 4 connects phosphorous diffusion device 8, on high-purity phosphorus oxychloride container 1 gas inlet valve 6 is arranged, on the quartzy bubbler 4 high pure nitrogen intake valve 7 is arranged.
The high-purity phosphorus oxychloride container of 25L 1 top one end connects as using on-the-spot high pure nitrogen by gas inlet valve 6, the top the other end connects multiport liquid distributor 2, it is the peristaltic pump 3 of BT100-1L that liquid distributor 2 connects model, peristaltic pump 3 connects the quartzy bubbler 4 of two (or a plurality of) 500ml respectively, it is the semi-conductor cold-trap 5 of LJB1-14 that quartzy bubbler 4 places model, high pure nitrogen intake valve on the quartzy bubbler 4 inserts high pure nitrogen, and discharge end connects the phosphorous diffusion device.
During use in quartzy bubbler 3 by phosphoric diffusion technology demand a certain amount of high-purity phosphorus oxychloride of packing into, open semi-conductor cold-trap 5 material in the quartzy bubbler 4 is adjusted to 20 ℃, open on-the-spot high pure nitrogen again, open the gas inlet valve 6 on high-purity phosphorus oxychloride container 1 top and the high pure nitrogen intake valve 7 on quartzy bubbler 4 tops, open again peristaltic pump 3 by phosphoric diffusion technology to the demand of high-purity phosphorus oxychloride with the flow control of every feed-pipe at 0.01--50ml/min, but continuous feeding guarantees steady running.
Claims (3)
1. high purity phosphorus oxychloride storage and transportation apparatus, it is characterized in that: high-purity phosphorus oxychloride container connects the multiport liquid distributor, the multiport liquid distributor connects peristaltic pump, and peristaltic pump connects the quartzy bubbler of outsourcing semi-conductor cold-trap, and quartzy bubbler connects the phosphorous diffusion device.
2. a kind of high purity phosphorus oxychloride storage and transportation apparatus according to claim 1 is characterized in that: on high-purity phosphorus oxychloride container the gas inlet valve is arranged.
3. a kind of high purity phosphorus oxychloride storage and transportation apparatus according to claim 1 is characterized in that: the high pure nitrogen intake valve is arranged on the quartzy bubbler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201576769U CN201678449U (en) | 2010-04-06 | 2010-04-06 | High-purity phosphorous oxychloride storage and transportation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201576769U CN201678449U (en) | 2010-04-06 | 2010-04-06 | High-purity phosphorous oxychloride storage and transportation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201678449U true CN201678449U (en) | 2010-12-22 |
Family
ID=43343502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201576769U Expired - Lifetime CN201678449U (en) | 2010-04-06 | 2010-04-06 | High-purity phosphorous oxychloride storage and transportation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201678449U (en) |
-
2010
- 2010-04-06 CN CN2010201576769U patent/CN201678449U/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Guiyang Jingyi Technology Co., Ltd. Assignor: Xiang Dong Contract record no.: 2014520000013 Denomination of utility model: High-purity phosphorous oxychloride storage and transportation device Granted publication date: 20101222 License type: Exclusive License Record date: 20140603 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| EC01 | Cancellation of recordation of patent licensing contract | ||
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Guiyang Jingyi Technology Co., Ltd. Assignor: Xiang Dong Contract record no.: 2014520000013 Date of cancellation: 20171226 |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20101222 |