CN201670726U

CN201670726U - High-purity phosphorus oxychloride bubbling device

Info

Publication number: CN201670726U
Application number: CN2010201800124U
Authority: CN
Inventors: 向东; 舒骁骥
Original assignee: Individual
Current assignee: Individual
Priority date: 2010-04-30
Filing date: 2010-04-30
Publication date: 2010-12-15
Anticipated expiration: 2020-04-30

Abstract

The utility model relates to a high-purity phosphorus oxychloride bubbling device. An air inlet pipe and a feeding pipe are inserted into a cylinder body and welded and fixed with one or a plurality of sieve plates in the cylinder body after passing through the sieve plate (s); an air outlet pipe is arranged at the upper part of the cylinder body; and the air inlet pipe, the feeding pipe and the air outlet pipe are respectively connected with a valve. The high-purity phosphorus oxychloride bubbling device has the advantages of simple structure, safe and reliable use, no leakage, no pollution, uniform bubbling and balanced phosphorus oxychloride consumption and addition amount and can ensure continuous and stable material feeding. Because the high-purity phosphorus oxychloride bubbling device is made of high-purity quartz or PFA and other nonmetallic materials, the pollution of metal impurities to materials is completely avoided, so that the purity of the materials is ensured.

Description

High purity phosphorus oxychloride bubbling device

Technical field

The utility model relates to a kind of bubbling device used when using hypertoxic hazardous substance high purity phosphorus oxychloride.

Background technology

Highly purified phosphorus oxychloride (99.9999%～99.99999%) is one of main raw material(s) of manufacturing preform, also be the diffusion of unicircuit, solar cell, Electronic Components Manufacturing process, the main raw material in the doping process, extensively applied to photovoltaic, IC industry.But it belongs to the water white transparency chemical of severe corrosive, strong oxidizing property, severe toxicity, chance water vigorous reaction.Mainly be directly to use quartzy source bottle to feed high pure nitrogen at present when the high purity phosphorus oxychloride is used, utilize high pure nitrogen phosphorus oxychloride to be taken out of as carrier gas, its shortcoming be dangerous, unreliable, leak and contaminate environment easily, minimizing along with phosphorus oxychloride amount in the bottle of quartzy source, the inventory that follow-up nitrogen is taken out of can gradually reduce, cause the inhomogeneous of use side material, thus the instability of end product quality in use.

Summary of the invention

The purpose of this utility model provide a kind of simple in structure, safe and reliable, do not have to leak, high purity phosphorus oxychloride bubbling device pollution-free, discharging continous-stable when using.

The purpose of this utility model is achieved in that inlet pipe and feed-pipe insert cylindrical shell and pass sieve plate and the sieve plate reinforcement of weld, and the intravital sieve plate of tube is one or more pieces, and escape pipe is arranged at cylindrical shell top, and inlet pipe, feed-pipe and escape pipe are connected with valve respectively.

Because the utility model adopts said structure, this apparatus structure is simple, safe and reliable, the nothing leakage is not polluted, bubbling is even, the consumption of phosphorus oxychloride and add-on balance can guarantee that the material of continous-stable is supplied with, and this device adopts other non-metallic material such as high purity quartz or PFA to make, avoid the pollution of metallic impurity fully, guarantee the purity of material material.

Description of drawings

Fig. 1 is the structure iron of the utility model embodiment.

1 inlet pipe, 2 escape pipes, 3 feed-pipes, 4 sieve plates, 5 valves, 6 cylindrical shells among the figure.

Embodiment

Embodiment: inlet pipe 1 and feed-pipe 3 insert cylindrical shell 6 and pass sieve plate 4 and sieve plate 4 reinforcement of welds, the bottom is apart from cylindrical shell 6 bottoms 4～6mm, sieve plate 4 in the cylindrical shell 6 is one or more pieces, and escape pipe 2 is arranged at cylindrical shell 6 tops, and inlet pipe 1, feed-pipe 3 and escape pipe 2 are connected with valve 5 respectively.Valve 5 all is teflon valves, and inlet pipe 1 inserts high pure nitrogen by valve 5, and escape pipe 2 connects material by valve 5 and uses pipe, and feed-pipe 3 inserts high-purity phosphorus oxychloride by valve 5.

During use in high-purity phosphorus oxychloride bubbling device by phosphoric diffusion technology demand a certain amount of high-purity phosphorus oxychloride of packing into, by refrigerating unit material is adjusted to 20 ℃, open on-the-spot high pure nitrogen, open the valve 5 on escape pipe 2 tops, open the valve 5 on inlet pipe 1 top again, after opening the valve 6 on feed-pipe 3 tops then, the inlet amount of opening feeding unit control feed-pipe is at 0.01--50ml/min, but continuous feeding guarantees steady running.

Claims

1. high purity phosphorus oxychloride bubbling device, it is characterized in that: inlet pipe and feed-pipe insert cylindrical shell and pass sieve plate and the sieve plate reinforcement of weld, the intravital sieve plate of tube is one or more pieces, and escape pipe is arranged at cylindrical shell top, and inlet pipe, feed-pipe and escape pipe are connected with valve respectively.