CN201946575U

CN201946575U - Rotary type vacuum treatment installation

Info

Publication number: CN201946575U
Application number: CN2010206607509U
Authority: CN
Inventors: 徐正勋; 柳济宣
Original assignee: Sichuan CCO Display Technology Co Ltd
Current assignee: Sichuan CCO Display Technology Co Ltd
Priority date: 2010-12-15
Filing date: 2010-12-15
Publication date: 2011-08-24
Anticipated expiration: 2020-12-15

Abstract

The utility model discloses a rotary type vacuum treatment installation capable of simultaneously processing a plurality of workpieces, which comprises a delivering unit. The delivering unit comprises a rotating shaft and manipulators arranged on the rotating shaft, and at least three processing units which comprise input units and output units are arranged around the delivering unit. Workpiece stations of each processing unit are evenly distributed on one circumference, and at least three manipulators which circularly correspond to each workpiece station are connected with the rotating shaft. Axis of the rotating shaft is perpendicularly crossed with the center of the circumference. The number of the manipulators ranges from three to six. The rotary type vacuum treatment installation is particularly suitable for vacuum manufacturing devices.

Description

The rotary type vacuum processing unit

Technical field

The utility model relates to a kind of vacuum treatment installation, especially a kind of rotary type vacuum processing unit.

Background technology

At present, in semiconductor or the demonstration field, for the manufacture method of substrate, people are always for reducing expenses, boost productivity unremitting effort.

Existing vacuum manufacturing equipment, for example evaporated device, etching machines or ion implantor because processing environment need vacuumize, are therefore compared with the equipment of online type, must be subjected to certain influence on the processing time.The basic structure of these vacuum manufacturing equipments all comprises the transfer unit of a vacuum-pumping, is furnished with the processing unit of a plurality of vacuum-pumpings around this transfer unit, and the workpiece station of each processing unit distributes at grade.Transfer unit comprises rotating shaft and is installed in a manipulator on the rotating shaft, the scalable action of manipulator, and can rotate together in company with rotating shaft, so that workpiece is sent to successively between each processing unit/is taken out; Wherein two processing units are generally input unit and the output unit that is connected conveying workpieces between the pre-process and post-process operation of operating space, workpiece thus into and out of.For reducing vacuum pumping, input unit and output device generally are designed to move simultaneously, when promptly going up workpiece output, next workpiece is imported simultaneously, after a workpiece input, will vacuumize transfer unit, workpiece being sent into each processing unit handles again, after this workpiece disposed, by output device output, meanwhile next workpiece was imported by input unit again.During vacuum treatment, next workpiece must wait before input/output device, and therefore, productivity ratio is lower.

The utility model content

In order to overcome the existing low deficiency of vacuum manufacturing equipment productivity ratio, technical problem to be solved in the utility model provides a kind of a plurality of workpiece of can handling simultaneously, is particularly suitable for the rotary type vacuum processing unit of using on the vacuum manufacturing equipment.

The technical scheme that its technical problem that solves the utility model adopts is: the rotary type vacuum processing unit, comprise a transfer unit, described transfer unit comprises rotating shaft and the manipulator that is arranged on the rotating shaft, be furnished with at least three processing units around this transfer unit, comprising input unit, output unit, the workpiece station of described each processing unit is distributed on the same circumference, is connected with on the rotating shaft and at least three corresponding manipulator of each workpiece station circulation.

The axial line of described rotating shaft and this circumference are vertically intersected on the center of circle of this circumference.

Described manipulator has 3～6.

The beneficial effects of the utility model are: can boost productivity, be particularly suitable for using on the vacuum manufacturing equipment.

Description of drawings

Fig. 1 is the schematic diagram that the utility model processing unit is in state one.

Fig. 2 is the schematic diagram that the utility model processing unit is in state two.

Fig. 3 is the schematic diagram that the utility model processing unit is in state three.

Fig. 4 is the schematic diagram that the utility model processing unit is in state four.

Fig. 5 is the schematic diagram that the utility model processing unit is in state one.

Be labeled as 1-workpiece one, 2-workpiece two, 3-workpiece three, 4-workpiece four, 1 '-workpiece five, 5-processing unit, 7-second processing unit, 8-output unit, 9-transfer unit, 10-rotating shaft, 11-manipulator, 12-circumference, the O-center of circle among the figure.

Embodiment

Below in conjunction with drawings and Examples the utility model is further specified.

As Fig. 1, Fig. 2, Fig. 3, Fig. 4 and shown in Figure 5, rotary type vacuum processing unit of the present utility model comprises a transfer unit 9, described transfer unit 9 comprises rotating shaft 10 and the manipulator 11 that is arranged on the rotating shaft 10, be furnished with at least three processing units around this transfer unit 9, comprising input unit 5, output unit 8, the workpiece station of described each processing unit is distributed on the same circumference, be connected with on the rotating shaft 10 and corresponding at least three the manipulator 11 of each workpiece station circulation, such scheme can increase and carry out vacuum treated workpiece number simultaneously, concerning whole vacuum plant, still be that workpiece of I/O just carries out a vacuum pumping, shorten the waiting time of workpiece before the vacuum treatment input unit at double with less input, thereby improved production efficiency.

For simplifying the control operation to manipulator, described rotating shaft 10 preferably is arranged at the center of described circumference, and the axial line of promptly described rotating shaft 10 and this circumference are vertically intersected on the center of circle O of this circumference.

If must have M by the processing unit under vacuum condition, add input unit and output unit, the number of then corresponding definite described manipulator is " M+2 ", considers the occupation of land of equipment, for the area that reduces transfer unit 9 to shorten the vacuum pumping time, described manipulator 11 has 3～6.

It should be noted that in order to guarantee crudy, when for example this device is used for the semiconductor substrate processing, guarantee the accurate control of the installation site precision and the anglec of rotation of each manipulator 11.

Embodiment:

As Fig. 1, Fig. 2, Fig. 3, Fig. 4 and shown in Figure 5, rotary type vacuum processing unit of the present utility model comprises a transfer unit 9, described transfer unit 9 comprises rotating shaft 10 and the manipulator 11 that is arranged on the rotating shaft 10, be furnished with four processing units around this transfer unit 9: input unit 5, first processing unit 6, second processing unit 7, output unit 8, the workpiece station of described each processing unit is distributed on the same circumference 12, the axial line of described rotating shaft 10 and this circumference 12 are vertically intersected on the center of circle O of this circumference 12, even compartment of terrain is connected with four manipulators 11 on the rotating shaft 10, it is corresponding with each workpiece station circulation: when workpiece 1 is entered by input unit 5, carry out a vacuum pumping, then, rotating shaft 10 rotates 90 °, manipulator 11 is sent workpiece 1 into first processing unit 6 and is handled, at this moment, another manipulator 11 is taken into transfer unit 9 with workpiece 22 by input unit 5, carry out a vacuum pumping again, then, rotating shaft 10 rotates 90 ° in the same way, manipulator 11 is sent workpiece 1 into second processing unit 7 and is handled, another manipulator 11 is sent workpiece 22 into first processing unit 6 and is handled, at this moment, another manipulator 11 is taken into transfer unit 9 with workpiece 33 by input unit 5, carry out a vacuum pumping again, then, rotating shaft 10 continues to rotate 90 ° in the same way, manipulator 11 is sent workpiece 1 into output unit 8 outputs, the vacuum process of workpiece 1 is finished, another manipulator 11 is sent part 22 into second processing unit 7 and is handled, another manipulator 11 sent workpiece 33 into first processing unit 6 and handled, at this moment, a remaining manipulator 11 is taken into transfer unit 9 with workpiece 44 by input unit 5, carry out a vacuum pumping, then, rotating shaft 10 continues to rotate 90 ° in the same way, manipulator 11 is got back to the position corresponding with input unit 5, with workpiece 51 ' be taken into transfer unit 9 by input unit 5, meanwhile, the vacuum process of workpiece 22 is finished, another manipulator 11 is sent workpiece 22 into 8 outputs of output chamber, finishes a circulation.

To be objective, compared with prior art, rotary type vacuum treatment installation of the present utility model also has its weak point, and its each processing unit is so free not as prior art with respect to the arrangement of transfer unit.

Claims

1. rotary type vacuum processing unit, comprise a transfer unit (9), described transfer unit (9) comprises rotating shaft (10) and is arranged on manipulator (11) on the rotating shaft (10), be furnished with at least three processing units around this transfer unit (9), comprising input unit (5), output unit (8), it is characterized in that: the workpiece station of described each processing unit is distributed on the same circumference (12), is connected with on the rotating shaft (10) and corresponding at least three the manipulator (11) of each workpiece station circulation.

2. rotary type vacuum processing unit as claimed in claim 1 is characterized in that: the axial line of described rotating shaft (10) and this circumference (12) are vertically intersected on the center of circle (O) of this circumference (12).

3. rotary type vacuum processing unit as claimed in claim 1 or 2 is characterized in that: described manipulator (11) has 3～6.