CN201887067U - Bubbling stirred liquid replenishing device of texture etching cell - Google Patents
Bubbling stirred liquid replenishing device of texture etching cell Download PDFInfo
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- CN201887067U CN201887067U CN2010206282850U CN201020628285U CN201887067U CN 201887067 U CN201887067 U CN 201887067U CN 2010206282850 U CN2010206282850 U CN 2010206282850U CN 201020628285 U CN201020628285 U CN 201020628285U CN 201887067 U CN201887067 U CN 201887067U
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- inlet pipe
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- blowing arm
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
A bubbling stirred liquid replenishing device of a texture etching cell comprises a liquid storage tank, a liquid delivery pipe, a liquid replenishing pump, a one-way valve, a flow meter and the texture etching cell. A bubbling stirring component arranged at the bottom of the liquid storage tank consists of an electromagnetic reversing valve, a main gas inlet pipe and bubbling branch pipes, wherein the main gas inlet pipe is communicated with the bubbling branch pipes, the main gas inlet pipe is communicated with a pressure nitrogen gas source through the electromagnetic valve, and the bubbling branch pipes are provided with gas outlet holes. The electromagnetic reversing valve is turned on three to five minutes before liquid is replenished into the texture etching cell from the liquid replenishing pump, the pressure nitrogen gas source supplies gas into the main gas inlet pipe, and then gas is exhausted from the gas outlet holes on the bubbling branch pipes. As chemical reagent in the liquid storage tank does not react with nitrogen gas, bubbling stirring effect by the aid of pressure nitrogen gas is perfect, uniform stirring of the chemical agent in the liquid storage tank before liquid replenishing can be guaranteed, and accordingly consistent concentricity of liquid replenished by the liquid replenishing pump each time is guaranteed, stability of texture etching process is increased, and texture etching quality of silicon wafers is ensured.
Description
Technical field:
The utility model relates to the etching device in the solar battery sheet production, relates in particular to the liquid supply device on the etching device.
Background technology:
In the production technology of solar cell, the preparation of suede structure is the important step that increases battery sheet absorptivity.Desirable suede structure helps to improve the performance of battery.Because incident light has increased the absorption of light in the repeatedly reflection and the refraction of silicon chip surface, its reflectivity is very low, is mainly reflected in the raising of short circuit current.The preparation of so-called suede structure is to utilize NaOH dilution, ethylenediamine and chemical mordants such as phosphorus benzenediol water, the monoethanolamine aqueous solution that silicon chip surface is carried out matte to handle, handle the back silicon chip surface and form densely covered pyramid shape tetragonal pyramid, the reflection of incident light rate is reduced in 10%.Making herbs into wool is reflected in the texturing slot to be carried out, because silicon chip and Woolen-making liquid have produced chemical reaction, original chemicals in order to make technology stability stronger, need be replenished corresponding chemicals by reaction consumes in the Woolen-making liquid in Woolen-making liquid after certain reaction times.In order to reduce the number of times of fluid infusion manually, the process of convenient fluid infusion, concentrated liquid supply device must be set, this liquid supply device can a large amount of chemical reagent of disposable storage, in the etching device operation process, according to the design of program, at the appointed time use mechanical pump in texturing slot, quantitatively to replenish chemical reagent.
This texturing slot liquid supply device, as shown in Figure 1, it comprises fluid reservoir 1, woven hose 2, fluid infusion pump 3, unidirectional valve 4, flowmeter 5 and texturing slot 6, fluid reservoir 1 passes through woven hose 2 with fluid infusion pump 3, unidirectional valve 4 and flowmeter 5 are together in series with texturing slot 6, the imbibition end of fluid infusion pump 3 links to each other with the bottom of fluid reservoir 1 by woven hose 2, the outlet end of flowmeter 5 feeds in the texturing slot 6 by woven hose 2, manually the chemical reagent for preparing is joined in the fluid reservoir of being made by the PP material 1, then in the process of etching device operation, at set intervals or after reacting certain number of times, open fluid infusion pump 3, extracting a certain amount of chemical reagent solution from the bottom of fluid reservoir 1 is transported to the texturing slot 6 of etching device by woven hose 2, by the capacity of flowmeter 5 demonstration make-up solution, after reaching predetermined magnitude of recruitment, close fluid infusion pump 3.From add the additional chemical reagent solution for preparing to fluid reservoir 1 after, to replenishing in the process of chemical reagent to texturing slot 6, the chemical reagent solution in the fluid reservoir 1 remains static always.Owing to contain number of chemical article and water in the chemical reagent solution, layering can take place after long-time static, thereby the concentration that has caused the chemical reagent solution of fluid reservoir 1 bottom is higher than the concentration at top, make that the chemical reagent solution concentration of replenishing in the different periods is variant, thereby influenced the stability of process for etching.
The utility model content:
Above shortcomings in the existing etching device liquid supply device, the purpose of this utility model provides a kind of bubbling stirring-type texturing slot liquid supply device.
The technical scheme that the utility model adopted is:
Described bubbling stirring-type texturing slot liquid supply device, it comprises fluid reservoir, woven hose, the fluid infusion pump, unidirectional valve, flowmeter and texturing slot, the fluid infusion pump, unidirectional valve and flowmeter are arranged between fluid reservoir and the texturing slot after being connected by woven hose, the liquid sucting port of fluid infusion pump is interlinked by the bottom of woven hose and fluid reservoir, the liquid outlet of flowmeter feeds in the texturing slot through woven hose, it is characterized in that: be provided with the bubbling mixing component in the bottom of fluid reservoir, described bubbling mixing component is by solenoid directional control valve, total inlet pipe and air-blowing arm are formed, total inlet pipe and air-blowing arm interlink, total inlet pipe interlinks by solenoid directional control valve and pressure nitrogen gas source, is provided with venthole on the air-blowing arm.
Further, described air-blowing arm is the airtight shape of ring-type, and all air-blowing arms all concentric spacing are fixed on the total inlet pipe, and the air-blowing arm is positioned at the top of total inlet pipe.
Further, the cross sectional shape of described air-blowing arm and total inlet pipe is the Back Word square tube.
Further, the material of described total inlet pipe and air-blowing arm is the corrosion resistant plastics.
Further, the medial surface of the air-blowing arm of inner ring, lateral surface and above equal intervals be provided with venthole, the lateral surface of other air-blowing arm and above equidistantly have venthole.
Owing to set up the bubbling mixing component in the bottom of fluid reservoir, the total inlet pipe in the described bubbling mixing component interlinks by solenoid directional control valve and pressure nitrogen gas source, and total inlet pipe and air-blowing arm interlink, and are provided with venthole on the air-blowing arm.As long as before the texturing slot fluid infusion, opened solenoid directional control valve in 3～5 minutes at the fluid infusion pump, make band press source nitrogen to ventilate to total inlet pipe, just the venthole from the air-blowing arm is emerged then, because chemical reagent and nitrogen in the fluid reservoir do not react, carry out bubble type mixing effect ideal with pressure nitrogen gas, can guarantee before the fluid infusion chemical reagent in the fluid reservoir to be stirred, thereby the concentration of guaranteeing the each fluid infusion of fluid infusion pump is identical, improve the stability of process for etching, guaranteed the making herbs into wool quality of silicon chip.
Description of drawings:
Fig. 1 is existing liquid supply device structural representation;
Fig. 2 is a structural representation of the present utility model;
Fig. 3 is the structural representation of bubbling mixing component;
Fig. 4 is an A-A cutaway view among Fig. 3;
Among the figure: the 1-fluid reservoir; The 2-woven hose; 3-fluid infusion pump; The 4-unidirectional valve; The 5-flowmeter; The 6-texturing slot; 7-bubbling mixing component; The 71-solenoid directional control valve; The 72-total inlet pipe; 73-air-blowing arm; The 74-venthole; The 8-source nitrogen.
Embodiment:
Introduce embodiment of the present utility model in detail below in conjunction with accompanying drawing:
Described bubbling stirring-type texturing slot liquid supply device, as Fig. 2, Fig. 3, shown in Figure 4, it comprises fluid reservoir 1, woven hose 2, fluid infusion pump 3, unidirectional valve 4, flowmeter 5 and texturing slot 6, fluid infusion pump 3, unidirectional valve 4 and flowmeter 5 are arranged between fluid reservoir 1 and the texturing slot 6 after being connected by woven hose 2, the liquid sucting port of fluid infusion pump 3 is interlinked by the bottom of woven hose 2 with fluid reservoir 1, the liquid outlet of flowmeter 5 feeds in the texturing slot 6 through woven hose 2, be provided with bubbling mixing component 7 in the bottom of fluid reservoir 1, described bubbling mixing component 7 is by solenoid directional control valve 71, total inlet pipe 72 and air-blowing arm 73 are formed, total inlet pipe 72 interlinks with air-blowing arm 73, total inlet pipe 72 interlinks by solenoid directional control valve 71 and pressure nitrogen gas source 8, on air-blowing arm 73, be provided with venthole 74, described air-blowing arm 73 is the airtight shape of ring-type, all air-blowing arms 73 all concentric spacing are fixed on the total inlet pipe 72, and air-blowing arm 73 is positioned at the top of total inlet pipe 72; Described air-blowing arm 73 is " returning " font square tube for cross sectional shape, and total inlet pipe 72 also is that cross sectional shape is " returning " font square tube, and their material all is the corrosion-proof type plastics; The medial surface of the air-blowing arm 73 of inner ring, lateral surface and above equal intervals be provided with venthole 74, the lateral surface of other air-blowing arm 73 and above equidistantly have venthole 74.
Claims (5)
1. bubbling stirring-type texturing slot liquid supply device, it comprises fluid reservoir (1), woven hose (2), fluid infusion pump (3), unidirectional valve (4), flowmeter (5) and texturing slot (6), fluid infusion pump (3), unidirectional valve (4) and flowmeter (5) are arranged between fluid reservoir (1) and the texturing slot (6) after being connected by woven hose (2), the liquid sucting port of fluid infusion pump (3) is interlinked by the bottom of woven hose (2) with fluid reservoir (1), the liquid outlet of flowmeter (5) feeds in the texturing slot (6) through woven hose (2), it is characterized in that: be provided with bubbling mixing component (7) in the bottom of fluid reservoir (1), described bubbling mixing component (7) is by solenoid directional control valve (71), total inlet pipe (72) and air-blowing arm (73) are formed, total inlet pipe (72) interlinks with air-blowing arm (73), total inlet pipe (72) interlinks by solenoid directional control valve (71) and pressure nitrogen gas source (8), is provided with venthole (74) on air-blowing arm (73).
2. according to the described bubbling stirring-type of claim 1 texturing slot liquid supply device, it is characterized in that: described air-blowing arm (73) is the airtight shape of ring-type, all air-blowing arms (73) all concentric spacing are fixed on the total inlet pipe (72), and air-blowing arm (73) is positioned at the top of total inlet pipe (72).
3. according to the described bubbling stirring-type of claim 1 texturing slot liquid supply device, it is characterized in that: the cross sectional shape of described air-blowing arm (73) and total inlet pipe (72) is the Back Word square tube.
4. according to the described bubbling stirring-type of claim 1 texturing slot liquid supply device, it is characterized in that: the material of described total inlet pipe (72) and air-blowing arm (73) is the corrosion resistant plastics.
5. according to the described bubbling stirring-type of claim 1 texturing slot liquid supply device, it is characterized in that: the medial surface of the air-blowing arm (73) of inner ring, lateral surface and above equal intervals be provided with venthole (74), the lateral surface of other air-blowing arm (73) and above equidistantly have venthole (74).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206282850U CN201887067U (en) | 2010-11-29 | 2010-11-29 | Bubbling stirred liquid replenishing device of texture etching cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206282850U CN201887067U (en) | 2010-11-29 | 2010-11-29 | Bubbling stirred liquid replenishing device of texture etching cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201887067U true CN201887067U (en) | 2011-06-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206282850U Expired - Lifetime CN201887067U (en) | 2010-11-29 | 2010-11-29 | Bubbling stirred liquid replenishing device of texture etching cell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201887067U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102082203A (en) * | 2010-11-29 | 2011-06-01 | 常州亿晶光电科技有限公司 | Bubbling and stirring type liquid-replenishing device with texturing tank |
| CN102755852A (en) * | 2012-07-30 | 2012-10-31 | 济南大学 | Gas explosion-preventive spiral spray pipe bubbling stirring apparatus |
| CN107649060A (en) * | 2017-10-18 | 2018-02-02 | 嘉兴尚能光伏材料科技有限公司 | A kind of efficient automatic filling machine |
-
2010
- 2010-11-29 CN CN2010206282850U patent/CN201887067U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102082203A (en) * | 2010-11-29 | 2011-06-01 | 常州亿晶光电科技有限公司 | Bubbling and stirring type liquid-replenishing device with texturing tank |
| CN102755852A (en) * | 2012-07-30 | 2012-10-31 | 济南大学 | Gas explosion-preventive spiral spray pipe bubbling stirring apparatus |
| CN102755852B (en) * | 2012-07-30 | 2014-04-09 | 济南大学 | Gas explosion-preventive spiral spray pipe bubbling stirring apparatus |
| CN107649060A (en) * | 2017-10-18 | 2018-02-02 | 嘉兴尚能光伏材料科技有限公司 | A kind of efficient automatic filling machine |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110629 |
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| CX01 | Expiry of patent term |