CN201478278U - Liquid supplement system for a polycrystal groove type fine-hair making device - Google Patents
Liquid supplement system for a polycrystal groove type fine-hair making device Download PDFInfo
- Publication number
- CN201478278U CN201478278U CN2009202086995U CN200920208699U CN201478278U CN 201478278 U CN201478278 U CN 201478278U CN 2009202086995 U CN2009202086995 U CN 2009202086995U CN 200920208699 U CN200920208699 U CN 200920208699U CN 201478278 U CN201478278 U CN 201478278U
- Authority
- CN
- China
- Prior art keywords
- groove
- liquid
- fluid infusion
- liquid bath
- weigh tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 39
- 239000012530 fluid Substances 0.000 claims description 23
- 238000001802 infusion Methods 0.000 claims description 23
- 238000005530 etching Methods 0.000 claims description 13
- 239000012528 membrane Substances 0.000 claims description 9
- 230000005622 photoelectricity Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 239000003814 drug Substances 0.000 abstract 1
- 235000014347 soups Nutrition 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 210000004027 cells Anatomy 0.000 description 4
- 210000002268 Wool Anatomy 0.000 description 3
- 235000008216 herbs Nutrition 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Inorganic materials [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000576 supplementary Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a liquid supplement system for a polycrystal groove type fine-hair making device, comprising a raw liquid box, a pipeline system, a weighting groove, a liquid mixing groove, a diaphragm pump, a flowmeter, an air-operated valve; wherein the raw liquid box is respectively connected with the weighting groove and the liquid mixing groove and the weighting groove is connected with the liquid mixing groove and the diaphragm pump, the pipeline system are arranged in turn between the raw liquid box and the weighting groove and the air-operated valve is arranged between the raw liquid box and the liquid mixing groove; the weighting groove is connected with the liquid mixing groove and the flowmeter is arranged between the weighting groove and the liquid mixing groove. The liquid supplement system greatly increases the efficiency, ensures the stability of the medicine liquid and achieves consistency of the fine-hair making effect without man-made interference.
Description
Technical field
The utility model relates to the etching device in a kind of technical field of semiconductors, and specifically, what relate to is a kind of fluid infusion system that is used for polycrystalline slot type etching device.
Background technology
Making herbs into wool is that silicon chip surface is carried out isotropic etch, forms little ditch, reduces the reflectivity of silicon chip surface, impels the sun to carry out higher order reflection at silicon chip surface, promotes the utilance of light.In the preparation technology of solar energy crystal silicon battery, process for etching is the pith that is related to the light absorption of solar cell surface, also is one of important channel of improving conversion efficiency of solar cell.
Develop today of application rapidly at solar cell, for the crystal silicon solar energy battery that accounts for the staple market at present, not surface treated emissivity generally surpasses 30%, through anisotropy such as alkali lye chemistry corrosion formation surface micrometre-grade at random behind the pyramid structure matte monocrystalline silicon battery slin emissivity can drop to 10%, polycrystal silicon cell is owing to the crystal orientation difference of surface microstructure, and each that generally adopts can only be reduced to 20% with emissivity to the row chemical corrosion at present.
In the prior art, there is the soup instability in the fluid infusion system of etching device, thereby can cause the inconsistency of product, has reduced efficient.
The utility model content
The technical problems to be solved in the utility model is, a kind of fluid infusion system that is used for polycrystalline slot type etching device is provided, and this system can raise the efficiency greatly, guarantees the stability of soup, reach unmanned for situation about disturbing under the consistency of making herbs into wool effect.
For realizing above purpose, the utility model provides a kind of fluid infusion system that is used for polycrystalline slot type etching device, and this system comprises stoste case, pipe-line system, weigh tank, mixes liquid bath, membrane pump, flowmeter, Pneumatic valve.The stoste case is connected with difference weigh tank, mixed liquid bath, and weigh tank, mixed liquid bath link to each other, and wherein are provided with membrane pump, pipe-line system between stoste case and the weigh tank successively, between stoste case and the mixed liquid bath Pneumatic valve are set; Weigh tank, mixed liquid bath link to each other, and are provided with flowmeter between the two.
In the utility model; the stoste case is as the liquid storage system, and outlet enters through pump, flowmeter, Pneumatic valve and mixes in the liquid bath, takes into account the accuracy that Pneumatic valve is controlled liquid feeding by flow; thereby guarantee the stability of the liquor strength of mixed liquid bath inside, finish the operation of fluid infusion just.Just mend and be primarily aimed at fluid infusion for the first time big and customization, and then shorten the fluid infusion time, make equipment after unlatching, can enter production status rapidly, raise the efficiency the demand of soup.
In the utility model, weigh tank is in etching device inside, the next door of back air draft, and outlet enters in the reactive tank through Pneumatic valve, flowmeter, guarantees the consistency (guaranteeing that deviation is about 1%) of each fluid infusion by flowmeter, Pneumatic valve, finishes smart fluid infusion operation.Smart fluid infusion operation mainly is the supplementary function at each reaction consumes soup, and these consume seldom, blanking time abundance, the accuracy height is guaranteed the accuracy of fluid infusion.
Description of drawings
Fig. 1 is example structure schematic diagram of the utility model;
Among the figure: 1, stoste case; 2, pipe-line system; 3, weigh tank; 4, mix liquid bath; 5, membrane pump; 6, flowmeter; 7, level sensor; 8, Pneumatic valve.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples, and following description only is used to understand the usefulness of technical solutions of the utility model, is not used in the scope of the present utility model that limits.
The utility model provides a kind of fluid infusion system that is used for polycrystalline slot type etching device, as shown in Figure 1, in an embodiment of this system, comprises stoste case 1, pipe-line system 2, weigh tank 3, mixes liquid bath 4, membrane pump 5, flowmeter 6, Pneumatic valve 8.Stoste case 1 is with weigh tank 3, mixed liquid bath 4 are connected respectively, wherein be connected with pipe-line system 2 by membrane pump 5 successively between stoste case 1 and the weigh tank 3, be connected by Pneumatic valve 8 between stoste case 1 and the mixed liquid bath 4, weigh tank 3, mix between the liquid bath 4 and connect by flowmeter 6.
Further, described stoste case 1 is provided with level sensor 7; Described weigh tank 3 also is provided with level sensor, and level sensor is measured the position of liquid and feedback information is carried out alarm to control system.
Preferable, described level sensor 7 can adopt the photoelectricity level sensor.
During the system works of present embodiment, be divided into two operations:
(1) operation of fluid infusion just: configure on the operation interface of control system required data (unit: rise) by confirm soup by membrane pump 5 from stoste case 1 behind flowmeter 6, Pneumatic valve 8 to weigh tank 3 and mixed liquid bath 4, mixed liquid bath 4 and weigh tank 3 have only a flowmeter 6 during dosing, can only carry out one group during fluid infusion, carry out another group after having mended again.But order fluid infusion in no particular order.
(2) smart fluid infusion operation: configure on the operation interface of control system required smart fluid infusion data (unit: rise) by confirm soup by self gravitation from weigh tank 3 behind Pneumatic valve 8 to mixed liquid bath 4, system receives that the fluid infusion signal replenishes soup automatically during automatic liquid supply, but weigh tank 4 also can replenish soup according to the soup that consumes automatically automatically.Stoste case 1 and weigh tank 3 all are provided with photoelectricity level sensor 7, return when owing liquid and burst to the control system alarm.
The utility model is controlled membrane pump, valve by flowmeter and is quantitatively replenished soup, can quantitatively control the soup addition, guarantees the technology concentration requirement, liquor strength is guaranteed all the time in the process curve scope, thereby guaranteed consistency of product.The utility model can be raised the efficiency greatly, guarantees the stability of soup, and reaching at nobody is the consistency of making herbs into wool effect under the situation about disturbing.
Claims (4)
1. a fluid infusion system that is used for polycrystalline slot type etching device is characterized in that, comprises stoste case, pipe-line system, weigh tank, mixes liquid bath, membrane pump, flowmeter, Pneumatic valve; The stoste case is connected with difference weigh tank, mixed liquid bath, and weigh tank, mixed liquid bath link to each other, and wherein are provided with membrane pump, pipe-line system between stoste case and the weigh tank successively, between stoste case and the mixed liquid bath Pneumatic valve are set; Weigh tank, mixed liquid bath link to each other, and are provided with flowmeter between the two.
2. the fluid infusion system that is used for polycrystalline slot type etching device according to claim 1 is characterized in that: described stoste case is provided with level sensor.
3. the fluid infusion system that is used for polycrystalline slot type etching device according to claim 1 is characterized in that: described weigh tank is provided with level sensor.
4. according to claim 2 or the 3 described fluid infusion systems that are used for polycrystalline slot type etching device, it is characterized in that: described level sensor adopts the photoelectricity level sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202086995U CN201478278U (en) | 2009-08-31 | 2009-08-31 | Liquid supplement system for a polycrystal groove type fine-hair making device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202086995U CN201478278U (en) | 2009-08-31 | 2009-08-31 | Liquid supplement system for a polycrystal groove type fine-hair making device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201478278U true CN201478278U (en) | 2010-05-19 |
Family
ID=42414538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202086995U Expired - Fee Related CN201478278U (en) | 2009-08-31 | 2009-08-31 | Liquid supplement system for a polycrystal groove type fine-hair making device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201478278U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102082200A (en) * | 2010-11-29 | 2011-06-01 | 常州亿晶光电科技有限公司 | Device for filling chemical reagent with uniform concentration into texturing groove |
| CN102148285A (en) * | 2010-12-29 | 2011-08-10 | 常州亿晶光电科技有限公司 | Constant volume type accurate automatic liquid replenishing device |
| CN103838176A (en) * | 2014-03-11 | 2014-06-04 | 苏州润阳光伏科技有限公司 | Multifunctional additive automatic liquid supplementing device |
| CN105655444A (en) * | 2016-03-15 | 2016-06-08 | 江苏东鋆光伏科技有限公司 | Efficient and automatic removing device for porous silicon on surface of etching battery piece |
| CN105734676A (en) * | 2016-02-24 | 2016-07-06 | 江苏永能光伏科技有限公司 | Polycrystalline texturing automatic liquid supplementing device |
-
2009
- 2009-08-31 CN CN2009202086995U patent/CN201478278U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102082200A (en) * | 2010-11-29 | 2011-06-01 | 常州亿晶光电科技有限公司 | Device for filling chemical reagent with uniform concentration into texturing groove |
| CN102148285A (en) * | 2010-12-29 | 2011-08-10 | 常州亿晶光电科技有限公司 | Constant volume type accurate automatic liquid replenishing device |
| CN102148285B (en) * | 2010-12-29 | 2014-07-30 | 常州亿晶光电科技有限公司 | Constant volume type accurate automatic liquid replenishing device |
| CN103838176A (en) * | 2014-03-11 | 2014-06-04 | 苏州润阳光伏科技有限公司 | Multifunctional additive automatic liquid supplementing device |
| CN105734676A (en) * | 2016-02-24 | 2016-07-06 | 江苏永能光伏科技有限公司 | Polycrystalline texturing automatic liquid supplementing device |
| CN105655444A (en) * | 2016-03-15 | 2016-06-08 | 江苏东鋆光伏科技有限公司 | Efficient and automatic removing device for porous silicon on surface of etching battery piece |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: BEIJING GIGASOLAR TECHNOLOGY CO., LTD. Free format text: FORMER NAME: CHINA UNITED CLEANING TECHNOLOGY CO., LTD., BEIJING |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 100012, No. 2, Beiyuan Road, Chaoyang District, Beijing (Beijing Institute of nonferrous metals and rare earth applications), No. 40 Patentee after: GIGA solar holding Co., Ltd. Address before: 100012, No. 2, Beiyuan Road, Chaoyang District, Beijing (Beijing Institute of nonferrous metals and rare earth applications), No. 40 Patentee before: China United Cleaning Technology Co., Ltd., Beijing |
|
| DD01 | Delivery of document by public notice |
Addressee: GIGA solar holding Co., Ltd. Document name: Notification of Termination of Patent Right |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100519 Termination date: 20150831 |
|
| EXPY | Termination of patent right or utility model |