CN201873775U - Feeding trolley of Czochralski crystal growing furnace - Google Patents
Feeding trolley of Czochralski crystal growing furnace Download PDFInfo
- Publication number
- CN201873775U CN201873775U CN2010206407517U CN201020640751U CN201873775U CN 201873775 U CN201873775 U CN 201873775U CN 2010206407517 U CN2010206407517 U CN 2010206407517U CN 201020640751 U CN201020640751 U CN 201020640751U CN 201873775 U CN201873775 U CN 201873775U
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- CN
- China
- Prior art keywords
- feeder
- growing furnace
- crystal growing
- czochralski crystal
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a feeding trolley of a Czochralski crystal growing furnace, which structurally comprises a frame and a feeder carrier. The feeder carrier is arranged on the frame through a rotating shaft, and a speed reducer connected with the rotating shaft is also arranged on the frame. During production, a feeder is carried by the feeding trolley to feed into the Czochralski crystal growing furnace secondly, the feeder can be protected against breakage, pollution caused by contact between the feeder and metal, and purity and quality of single crystal silicon products are guaranteed.
Description
Technical field
The utility model relates to a kind of czochralski crystal growing furnace feeding vehicle, relates to pulling of silicon single crystal processor technical field.
Background technology
At present, the manufacturing of pulling of crystals silicon rod is finished in the middle of czochralski crystal growing furnace, in its production process, need in the middle of czochralski crystal growing furnace, to carry out the secondary charging operation, this technology all is to finish by feeder, this pulling of silicon single crystal secondary batching feeder is a cylinder of quartz glass, be subjected to mechanical impact that fragmentation takes place easily, simultaneously it causes pollution easily with metallic contact, influences the single crystal silicon product quality.
The utility model content
The technical problems to be solved in the utility model provides a kind of czochralski crystal growing furnace feeding vehicle; in the production process of pulling of silicon single crystal, can deliver feeder and in czochralski crystal growing furnace, carry out secondary batching; not only can effectively protect feeder not broken; the pollution that simultaneously can avoid feeder and metallic contact to cause, the purity and the quality of assurance pulling of silicon single crystal product.
For solving the problems of the technologies described above, technical solution adopted in the utility model is:
A kind of czochralski crystal growing furnace feeding vehicle comprises vehicle frame and is arranged on feeder carrier on the vehicle frame by rotating shaft in its structure, also be provided with the step-down gear that joins with rotating shaft on the vehicle frame.
As a kind of optimal technical scheme of the present utility model, described feeder carrier comprises two semi-circular butt joint framves that flexibly connect by buckle, and the intrados and the feeder outside surface of two butt joint framves adapt.
As a kind of optimal technical scheme of the present utility model, described feeder carrier bottom is provided with quartz plate.
As a kind of optimal technical scheme of the present utility model, described step-down gear is manual step-down gear.
As a kind of optimal technical scheme of the present utility model, described vehicle frame is provided with castor.
Adopt the beneficial effect that technique scheme produced to be: feeder to be loaded on the feeding vehicle of the present utility model by the feeder carrier, thereby can handle the angle of inclination of rotating shaft control feeder on the one hand by manual step-down gear, when filling with substance makes feeder maintenance level, again it is erected during discharging, feasible reinforced, discharge process safe ready, reduce the suffered mechanical impact of feeder, guarantee that it can be not broken; On the other hand, this feeding vehicle is provided with castor, and is by this feeding vehicle delivery and transfer feeder, from the movable loading point to the emptying point, also very convenient; Secondly, because feeder carrier bottom is provided with quartz plate, that can effectively reduce feeder and metal contacts the purity of bonding crystal silicon and quality.
Description of drawings
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail.
Fig. 1 is the structural representation of an embodiment of the utility model.
Among the figure: 1, vehicle frame 2, feeder carrier 3, rotating shaft 4, quartz plate 5, step-down gear 6, castor.
Embodiment
Referring to accompanying drawing, comprise vehicle frame 1 in the structure of a specific embodiment of the utility model and be arranged on feeder carrier 2 on the vehicle frame 1 by rotating shaft 3; Described feeder carrier 2 comprises two semi-circular butt joint framves that flexibly connect by buckle, and the intrados and the feeder outside surface of two butt joint framves adapt, and like this, utilize the cylindrical circular feeder of these feeder carrier 2 loading, unloading easily; Feeder carrier 2 bottoms are provided with quartz plate 4, can effectively reduce contacting of feeder and metal, reduce and pollute, the purity of bonding crystal silicon and quality; Also be provided with the manual step-down gear 5 that joins with rotating shaft 3 on the vehicle frame 1, thus by this manual step-down gear 5 easily rotating shaft 3 adjust the angle of inclination of feeders so that in feeder, feed or discharging; Also be provided with castor 6 on the vehicle frame 1, so that delivery and transfer feeder.
Principle of work of the present utility model is: at first by feeder carrier 2 feeder is loaded on the feeding vehicle of the present utility model, thereby handle the angle of inclination of rotating shaft 3 control feeders by manual step-down gear 5, when filling with substance makes feeder maintenance level, fill behind the material and feeding vehicle to be shifted onto czochralski crystal growing furnace is other to carry out discharging, erect feeder by manual step-down gear 5 this moment again, get final product the discharging of carrying out of safe ready, whole loading, unloading material process feeder is not subjected to mechanical impact, avoids the generation of broken accident; Simultaneously, because feeder carrier 2 bottoms are provided with quartz plate 4, that can effectively reduce feeder and metal contacts the purity of bonding crystal silicon and quality.
Foregoing description only proposes as the enforceable technical scheme of the utility model, not as the single restricted condition to its technical scheme itself.
Claims (5)
1. czochralski crystal growing furnace feeding vehicle is characterized in that: comprise vehicle frame (1) in its structure and be arranged on feeder carrier (2) on the vehicle frame (1) by rotating shaft (3), also be provided with the step-down gear (5) that joins with rotating shaft (3) on the vehicle frame (1).
2. a kind of czochralski crystal growing furnace feeding vehicle according to claim 1 is characterized in that: described feeder carrier (2) comprises two semi-circular butt joint framves that flexibly connect by buckle, and the intrados and the feeder outside surface of two butt joint framves adapt.
3. a kind of czochralski crystal growing furnace feeding vehicle according to claim 2 is characterized in that: described feeder carrier (2) bottom is provided with quartz plate (4).
4. a kind of czochralski crystal growing furnace feeding vehicle according to claim 1 is characterized in that: described step-down gear (5) is manual step-down gear.
5. according to claim 1 or 2 or 3 or 4 described a kind of czochralski crystal growing furnace feeding vehicles, it is characterized in that: described vehicle frame (1) is provided with castor (6).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010206407517U CN201873775U (en) | 2010-12-03 | 2010-12-03 | Feeding trolley of Czochralski crystal growing furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010206407517U CN201873775U (en) | 2010-12-03 | 2010-12-03 | Feeding trolley of Czochralski crystal growing furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201873775U true CN201873775U (en) | 2011-06-22 |
Family
ID=44161701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010206407517U Expired - Fee Related CN201873775U (en) | 2010-12-03 | 2010-12-03 | Feeding trolley of Czochralski crystal growing furnace |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN201873775U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102312285A (en) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | External continuous feeding mechanism for monocrystal furnace |
CN103451722A (en) * | 2013-08-06 | 2013-12-18 | 浙江晶盛机电股份有限公司 | External continuous feeder capable of being shared by multiple coil bases |
-
2010
- 2010-12-03 CN CN2010206407517U patent/CN201873775U/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102312285A (en) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | External continuous feeding mechanism for monocrystal furnace |
CN102312285B (en) * | 2011-07-04 | 2014-02-19 | 浙江晶盛机电股份有限公司 | External continuous feeding mechanism for monocrystal furnace |
CN103451722A (en) * | 2013-08-06 | 2013-12-18 | 浙江晶盛机电股份有限公司 | External continuous feeder capable of being shared by multiple coil bases |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110622 Termination date: 20161203 |