CN201868400U - Collision prevention alarm of wafer transfer table - Google Patents
Collision prevention alarm of wafer transfer table Download PDFInfo
- Publication number
- CN201868400U CN201868400U CN2010205897754U CN201020589775U CN201868400U CN 201868400 U CN201868400 U CN 201868400U CN 2010205897754 U CN2010205897754 U CN 2010205897754U CN 201020589775 U CN201020589775 U CN 201020589775U CN 201868400 U CN201868400 U CN 201868400U
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- Prior art keywords
- transfer table
- wafer transfer
- warning device
- wafer
- alarm
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a collision prevention alarm of a wafer transfer table, which comprises a power source, an inductive sensor and an alarm. The power source, the inductive sensor and the alarm are connected in series. The collision prevention alarm is disposed on one side of the wafer transfer table. When an operator holds a boat to a certain distance nearby the sensor, the sensor can be triggered so that the alarm gives out warning sounds to remind the operator of paying attention to avoid hitting a table arm so as to avoid damaging or scrapping wafers. Therefore, the collision prevention alarm is capable of protecting wafers effectively, broken wafers can be reduced, resource waste can be reduced, and production cost can be saved.
Description
Technical field
The utility model relates to a kind of anticollision device, collision-prevention device, particularly a kind of proximity-warning device of wafer transfer table.
Background technology
Along with the progress of science and technology, electronic product miscellaneous has goed deep among your my life, and the inside of these electronic products, major part is a semiconductor wafer.Progress along with integrated circuit technique, the integrated level of semiconductor wafer is more and more higher, function is more and more, present integrated circuit generally is fit to a large amount of production, adopt so-called processing mode by the gross, the basic wafer of most formation integrated circuits itself can be formed simultaneously among the wafer, wafer is meant the used silicon wafer of Si semiconductor integrated circuit making, because it is shaped as circle, so be called wafer; On silicon wafer, can manufacture various circuit element structures, the IC of certain electric sexual function product be arranged and become.
In the semiconducter IC manufacture process, often need make chip and transmit, clean and processing with a kind of instrument, the instrument of this carries chips is commonly referred to as brilliant boat.Along with the semiconductor element integrated level of integrated circuit increases day by day, just seem especially important of the accuracy of technology because in case a little mistake takes place, promptly may be caused the failure of technology in technology, cause the damage of wafer or scrap, thereby expend a large amount of costs.In the semiconducter IC manufacture process, often need make chip with a kind of instrument transmits, cleans and processing, the instrument of this carries chips is commonly referred to as brilliant boat, prevent the function that shakes for having in the delivery process that makes chip, the general bag that also will be provided with again in the outside of brilliant boat changes transport case, crystal-boat box generally is divided into two kinds of black crystal-boat box and quartzy crystal-boat boxes, in the present semiconductor applications, uses these type of wafers such as R2D to pass on board more and finishes conversion operations between black crystal-boat box and quartzy crystal-boat box.But because the operator passes in the board process transporting crystal-boat box to R2D wafer, tend to produce the blind area, wafer might be knocked down the R2D wafer and pass on the board, cause the wafer fragmentation, make the damage of wafer or scrap, thereby expend a large amount of costs, cause the waste of resource.
The utility model content
At above-mentioned the deficiencies in the prior art, the technical problems to be solved in the utility model provides a kind of anticollision device, collision-prevention device of wafer transfer table, thereby reduce the operator as far as possible in transporting the process of crystal-boat box, thereby make wafer bump against the risk that the wafer transfer table causes producing fragmentation.
The utility model is realized above-mentioned technique effect by the following technical solutions:
A kind of proximity-warning device of wafer transfer table comprises power supply, inductive pick-up and warning device, described power supply, inductive pick-up and warning device series connection, and this proximity-warning device of described this wafer transfer table is positioned at a side of wafer transfer table.
As a preferred version of technique scheme, described transducer is an electro-optical pickoff.
As a preferred version of technique scheme, described warning device is a buzzer.
As a preferred version of technique scheme, described power supply is a Switching Power Supply.
As a preferred version of technique scheme, the proximity-warning device of this wafer transfer table is 150mm apart from the distance of wafer transfer table.
Technique scheme has following beneficial effect: use this proximity-warning device to be fixed on a side of wafer transfer table; when operating personnel embrace when getting brilliant boat and arriving near the transducer certain distance; can trigger transducer makes warning device send chimes of doom; remind operating personnel to note, in order to avoid bump against the board arm, make wafer make the damage of wafer or scrap; therefore this collision-proof alarm can effectively be protected wafer; reduce the wafer fragmentation, reduce the wasting of resources, save production cost.
Above-mentioned explanation only is the general introduction of technical solutions of the utility model, for can clearer understanding technological means of the present utility model, and can be implemented according to the content of specification, below with preferred embodiment of the present utility model and conjunction with figs. describe in detail as after.Embodiment of the present utility model is provided in detail by following examples and accompanying drawing thereof.
Description of drawings
Fig. 1 is the structural representation of the utility model embodiment.
Embodiment
Below in conjunction with accompanying drawing the utility model embodiment is described in detail.
As shown in Figure 1, as an embodiment of the present utility model, the proximity-warning device of this wafer transfer table comprises a Switching Power Supply, photoelectric sensor L and buzzer M, Switching Power Supply, photoelectric sensor L and buzzer M series connection.This photoelectric sensor L is positioned at a side of wafer transfer table, probably is 150mm apart from the distance of this wafer transfer table.When operating personnel embrace when getting brilliant boat and arriving near the transducer certain distance; can trigger transducer makes warning device send chimes of doom; remind operating personnel to note; in order to avoid bump against the board arm; make wafer make the damage of wafer or scrap, so this collision-proof alarm can effectively protect wafer, reduce the wafer fragmentation; reduce the wasting of resources, save production cost.
More than the proximity-warning device of a kind of wafer transfer table that the utility model embodiment is provided be described in detail; for one of ordinary skill in the art; thought according to the utility model embodiment; part in specific embodiments and applications all can change; in sum; this description should not be construed as restriction of the present utility model, is allly made any change with the utility model design philosophy, all within protection range of the present utility model.
Claims (5)
1. the proximity-warning device of a wafer transfer table, it is characterized in that: this device comprises power supply, inductive pick-up and warning device, described power supply, inductive pick-up and warning device series connection, this proximity-warning device of described this wafer transfer table is positioned at a side of wafer transfer table.
2. the proximity-warning device of a kind of wafer transfer table as claimed in claim 1 is characterized in that: described transducer is an electro-optical pickoff.
3. the proximity-warning device of a kind of wafer transfer table as claimed in claim 1 is characterized in that: described warning device is a buzzer.
4. the proximity-warning device of a kind of wafer transfer table as claimed in claim 1 is characterized in that: described power supply is a Switching Power Supply.
5. as the proximity-warning device of any described a kind of wafer transfer table of claim of claim 1 to 4, it is characterized in that: the proximity-warning device of this wafer transfer table is 150mm apart from the distance of wafer transfer table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205897754U CN201868400U (en) | 2010-11-03 | 2010-11-03 | Collision prevention alarm of wafer transfer table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205897754U CN201868400U (en) | 2010-11-03 | 2010-11-03 | Collision prevention alarm of wafer transfer table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201868400U true CN201868400U (en) | 2011-06-15 |
Family
ID=44139547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205897754U Expired - Fee Related CN201868400U (en) | 2010-11-03 | 2010-11-03 | Collision prevention alarm of wafer transfer table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201868400U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104969339A (en) * | 2013-02-04 | 2015-10-07 | 东京毅力科创株式会社 | Substrate transport device |
| CN106444782A (en) * | 2016-11-15 | 2017-02-22 | 江苏智石科技有限公司 | Intelligent material box transport vehicle based on infrared obstacle avoidance sensor |
| CN113947871A (en) * | 2020-07-17 | 2022-01-18 | 南亚科技股份有限公司 | Alarm device and alarm method thereof |
-
2010
- 2010-11-03 CN CN2010205897754U patent/CN201868400U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104969339A (en) * | 2013-02-04 | 2015-10-07 | 东京毅力科创株式会社 | Substrate transport device |
| CN104969339B (en) * | 2013-02-04 | 2017-06-06 | 东京毅力科创株式会社 | Base board delivery device |
| CN106444782A (en) * | 2016-11-15 | 2017-02-22 | 江苏智石科技有限公司 | Intelligent material box transport vehicle based on infrared obstacle avoidance sensor |
| CN113947871A (en) * | 2020-07-17 | 2022-01-18 | 南亚科技股份有限公司 | Alarm device and alarm method thereof |
| CN113947871B (en) * | 2020-07-17 | 2023-07-11 | 南亚科技股份有限公司 | Alarm device and alarm method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110615 Termination date: 20141103 |
|
| EXPY | Termination of patent right or utility model |