CN201868390U - 刻蚀机及其开盖装置 - Google Patents
刻蚀机及其开盖装置 Download PDFInfo
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- CN201868390U CN201868390U CN2010206129901U CN201020612990U CN201868390U CN 201868390 U CN201868390 U CN 201868390U CN 2010206129901 U CN2010206129901 U CN 2010206129901U CN 201020612990 U CN201020612990 U CN 201020612990U CN 201868390 U CN201868390 U CN 201868390U
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2010206129901U CN201868390U (zh) | 2010-11-17 | 2010-11-17 | 刻蚀机及其开盖装置 |
Applications Claiming Priority (1)
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CN2010206129901U CN201868390U (zh) | 2010-11-17 | 2010-11-17 | 刻蚀机及其开盖装置 |
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CN201868390U true CN201868390U (zh) | 2011-06-15 |
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CN2010206129901U Expired - Lifetime CN201868390U (zh) | 2010-11-17 | 2010-11-17 | 刻蚀机及其开盖装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105317307A (zh) * | 2014-07-29 | 2016-02-10 | 盛美半导体设备(上海)有限公司 | 真空腔盖翻转装置 |
CN113188370A (zh) * | 2021-04-12 | 2021-07-30 | 上海机电工程研究所 | 基于连杆机构的自动开盖机构 |
-
2010
- 2010-11-17 CN CN2010206129901U patent/CN201868390U/zh not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105317307A (zh) * | 2014-07-29 | 2016-02-10 | 盛美半导体设备(上海)有限公司 | 真空腔盖翻转装置 |
CN113188370A (zh) * | 2021-04-12 | 2021-07-30 | 上海机电工程研究所 | 基于连杆机构的自动开盖机构 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
|
CP01 | Change in the name or title of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: 100176 No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: Beijing North China microelectronics equipment Co Ltd |
|
CP02 | Change in the address of a patent holder | ||
CX01 | Expiry of patent term |
Granted publication date: 20110615 |
|
CX01 | Expiry of patent term |