CN201868389U - 有效控制晶圆边缘部分关键尺寸的蚀刻装置 - Google Patents
有效控制晶圆边缘部分关键尺寸的蚀刻装置 Download PDFInfo
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- CN201868389U CN201868389U CN2010205995583U CN201020599558U CN201868389U CN 201868389 U CN201868389 U CN 201868389U CN 2010205995583 U CN2010205995583 U CN 2010205995583U CN 201020599558 U CN201020599558 U CN 201020599558U CN 201868389 U CN201868389 U CN 201868389U
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CN2010205995583U CN201868389U (zh) | 2010-11-09 | 2010-11-09 | 有效控制晶圆边缘部分关键尺寸的蚀刻装置 |
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CN2010205995583U CN201868389U (zh) | 2010-11-09 | 2010-11-09 | 有效控制晶圆边缘部分关键尺寸的蚀刻装置 |
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CN201868389U true CN201868389U (zh) | 2011-06-15 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106856188A (zh) * | 2015-12-08 | 2017-06-16 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 承载装置以及半导体加工设备 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106856188A (zh) * | 2015-12-08 | 2017-06-16 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 承载装置以及半导体加工设备 |
CN106856188B (zh) * | 2015-12-08 | 2020-02-14 | 北京北方华创微电子装备有限公司 | 承载装置以及半导体加工设备 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130321 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
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Effective date of registration: 20130321 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai Zhangjiang Road, Pudong New Area, No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110615 Termination date: 20181109 |
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CF01 | Termination of patent right due to non-payment of annual fee |