CN201857439U - Calcining and processing apparatus for monocrystalline growing heat system - Google Patents
Calcining and processing apparatus for monocrystalline growing heat system Download PDFInfo
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- CN201857439U CN201857439U CN2010205009090U CN201020500909U CN201857439U CN 201857439 U CN201857439 U CN 201857439U CN 2010205009090 U CN2010205009090 U CN 2010205009090U CN 201020500909 U CN201020500909 U CN 201020500909U CN 201857439 U CN201857439 U CN 201857439U
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Abstract
The utility model relates to the technology of monocrystalline growing furnace for processing silicon solar cell. A calcining and processing apparatus for a monocrystalline growing heat system is structured in such a manner that a cylindrical or rectangular furnace body (1) is fixedly arranged above the framework (3) of a rectangle frame, a furnace bottom (1c) is disposed on a backing plate (7), two rows of rolling wheels (8) are installed on the lower part of the backing plate (7) and disposed on a supporting plate (9) which is driven by an elevating system to move up and down, two guide rails (12) corresponding to two rows of rolling wheels (8) are laterally and parallelly arranged on a position flushing with the part of the supporting plate (9) on the bottom of the framework (3), the rolling wheels (8) on the supporting plate (9) are driven by a lateral driving mechanism and can horizontally move on the guide rails (12), a rod-shaped electric heater (14) is arranged in the furnace body (1), and the furnace shell (1b), furnace lid (1a), and furnace bottom (1c) of the furnace body are made of a metal casing and a heat-insulation layer. A special calcining and processing apparatus for a monocrystalline furnace heat system is provided in the utility model. Calcining in a special calcining container in a whole set or dissembled manner, which is more flexible. Moreover, the calcining and processing apparatus can improve calcining processing effect and efficiency, and save energy.
Description
Technical field
The utility model relates to the technology in the monocrystal growing furnace field that processes silicon solar cell, specifically relates to the calcination processing apparatus structure to hot system in the monocrystal growing furnace.
Background technology
Silicon monocrystal growth need carry out under the situation of cleaning; it is to form with machining graphite that many devices are arranged in the hot system of single crystal growing furnace; and graphitizing furnace is to have covered a large amount of graphite coke to protect on the graphite blank; carry out pyroprocessing; obstructed shielding gas; be under normal pressure, to carry out; so the device that comes out with this machining graphite contains a large amount of ash; graphite material is because the contamination in processing and transportation and contain moisture content etc. must thoroughly could be fit to the crystal growth use after the calcining through high temperature in addition.
Usually calcination processing is all carried out in single crystal growing furnace, but because the well heater in the hot system of single crystal growing furnace places in the middle of the hot system, the shape of well heater is that the garden is barrel-shaped, it is about 600mm that 22 inches well heaters are effectively calcined diameter, effectively the height of hot-zone has only about 500mm, so direction and scope that it mainly can heat only limit to the inner limited area of well heater and the corresponding outside, and most zone of hot system directly is not difficult to direct heating in the face of well heater, make hot system on, the outer zone of following position and stay-warm case all can't obtain the effective calcination of pyritous, its result prolongs the calcination time greatly, heat by the well heater indirect transfer slowly heats, such mode is not only changed the expense plenty of time, also because the calcining poor effect makes a few stove crystal pullings of beginning not smooth.Single crystal growing furnace is the working equipment that important a, energy consumption is big, involve great expense, it is expending of a kind of huge equipment and the energy that the change expense is used to calcine heat treated to graphite device, lagging material new in the hot system of single crystal growing furnace for a long time, delays the normal working hours and the efficient of single crystal growing furnace greatly.
Up to now by single crystal growing furnace the hot system of single crystal growing furnace being carried out heating and calcining and handle, is that a kind of this area is accustomed to for the normal mode of thinking, the calcining processing method of custom, also is a kind of caving-in bash.
Pursuing high workload efficient day by day, reducing energy consumption, today that especially worldwide finance, economic crisis increase the weight of, method and behave that urgent hope can make moderate progress.
Summary of the invention
The purpose of this utility model is to overcome prior art to come calcination to handle the method for new graphite device and the hot system of insulation device with existing single crystal growing furnace for process for processing silicon single crystal, heating and calcining weak effect, efficient are low, the shortcoming that cost is high provides the calcination processing device of a kind of calcination efficiency height, effective, time is short, the energy is economized, cost is low single crystal growth thermal system.
The purpose of this utility model is achieved by following technical scheme.
A kind of calcination processing device of single crystal growth thermal system is characterized in that:
Frame upper fixed at rectangular frame is provided with a round shape or rectangle, comprises the body of heater of shaft, bell and furnace bottom, and the intravital volume of stove is more than or equal to the hot system of the cover single crystal growing furnace physical dimension that comprises graphite device, thermal insulation layer; Furnace bottom is placed on the backing plate, and two row's rollers are installed in the bottom of backing plate, and are placed on the supporting plate, and supporting plate is driven and can be moved up and down by hoisting appliance, is movable to the bottom of frame downwards; The position that is positioned at the frame bottom with supporting plate is mutually concordant, and two and the corresponding guide rail of two row's rollers laterally be arranged in parallel; Roller on the supporting plate is driven and can be moved horizontally on guide rail by transversal driving mechanism; Bar-shaped electric heater is set respectively on shaft, bell and the furnace bottom in body of heater; The shaft of body of heater, bell and furnace bottom are made up of metal shell and thermal insulation layer; Bell is provided with aeration aperture, thermometer hole and bell and compresses fore shaft.
Described device employing vacuum pump and topping-up pump, reducing motor, electric heater are controlled through comprising that temperature sensor, vacuum pressure sensor, the time relay, travel switch move device by controller.
Further, be round shape in the described body of heater, internal diameter is 1000-1200mm, highly is 1000-1200mm.
Further, described hoisting appliance is, four jiaos of inserted nums of supporting plate and are formed the running gear that moves up and down by the synchronously driven four rhizoid bars of lifting reducing motor.
Further, described transversal driving mechanism is, fixed lateral reducing motor on backing plate, and the output shaft of transversal deceleration motor is fixedlyed connected with one group of roller through turning to transmission.
Further, described furnace bottom bottom is fixed on the backing plate through shock spring.
Further, described body of heater electric heater is that graphite carbon rod connects into the three-phase heating element, and the temperature of electric heater is 1600-2000 ℃.
Further, described body of heater is made up of the stainless steel double-level-metal shell and the graphite felt thermal insulation layer of logical water coolant in the interlayer.
Further, support is movably shelved in setting in described body of heater.
The beneficial effects of the utility model: adopt special-purpose calcining furnace of the present utility model, by body of heater, frame, vacuum system, Controlling System, heating system and lifting machinery are formed.Maximum 24 inches a whole set of thermal fields all can be placed the high-temperature zone calcination, shorten the calcining cycle, save on the energy consumption and obtained good effect.Single crystal growing furnace is calcined a whole set of thermal field needs 120 hours, during also need prepurging four times, about about 5000 degree of power consumption; And calcining furnace only needs 50 hours one-period (to calcine 24 hours, stand for a long while stove 26 hours), only need prepurging 1 time, save labour intensity, and fully high-temperature calcination, about about 3000 degree of power consumption, economize on electricity reaches more than 40%, and the calcining better effects if, the first stove crystal pulling of the hot system of incinerating just can make the crystal dislocation-free grow into the end in this way.The calcination efficiency of graphite device and energy-saving effect can be better separately, and it has remedied the current shortcoming that hot system effect is poor, efficient is low, cost is high, labour intensity is big of all coming new graphite device of calcination and insulation device to form with single crystal growing furnace.
Through measuring and calculating and test, adopt the utility model, on the single crystal growing furnace calcined basis, economize on electricity and reach more than 40%, in state-owned several thousand single crystal growing furnaces, every single crystal growing furnace was driven tens stoves in every month, there are twenties graphite devices in the hot system of one cover, every graphite device work-ing life is between 30-150 stoves, do not comprise and surpassing present every year outside newly-increased thousands of the single crystal growing furnaces, every month replacing work-ing life, overdue graphite device was exactly an enormous quantity, give full play to the function of special-purpose calcining furnace, will produce huge economic benefit and social benefit.
In a word, the utility model: 1. initiative change and broken away from necessary in the past, can only be in single crystal growing furnace the treatment process of the hot system of heating and calcining single crystal growing furnace, a kind of special in addition a kind of method for the hot system and device of calcination processing single crystal growing furnace is provided; 2. the calcining of this device both can be calcined integral body, also can calcine component, and was more flexible, obviously improved calcination processing effect and efficient; 3. make full use of the calcining furnace internal space, adjust the control calcination time, save the energy, improve the working efficiency of former single crystal growing furnace, needn't be calcination processing, especially individual parts and take whole single crystal growing furnace; 4. easy to operate, can calcination processing in the same time multiplex's part more, reduced operator's operating time and labour intensity, because it has moving-out device.
Description of drawings
Fig. 1 is a kind of embodiment overall structure configuration schematic diagram of the calcination processing device of the utility model single crystal growth thermal system, and wherein pallet part is positioned at the top of frame, and furnace bottom and shaft are closing condition.
Fig. 2 moves down for pallet part among Fig. 1, and furnace bottom and shaft are disengaged condition, the structure configuration schematic diagram of device.
Fig. 3 is the bottom position that pallet part is moved downward to frame among Fig. 1, the structure configuration schematic diagram of device.
Fig. 4 is among Fig. 1, and furnace bottom is placed on the backing plate, and two row's rollers are installed in the bottom of backing plate,, fixedly connected through turning to transmission by the output shaft of reducing motor with one group of roller, and driving rolls, the furnace bottom parts shift out frame, are positioned at the apparatus structure configuration schematic diagram of rail state.
Among the figure, the 1st, body of heater, 1a are that bell, 1b are that shaft, 1c are furnace bottoms, the 2nd, transmission rod, the 3rd, machine
Frame, the 4th, lifting reducing motor, the 5th, screw mandrel, the 6th, shock spring, the 7th, backing plate, the 8th, roller, the 9th, supporting plate, the 10th, vacuum pump, the 11st, transversal deceleration motor, the 12nd, guide rail, the 13rd, controller, 14 electric heaters.
Embodiment
Further describe structure of the present utility model below in conjunction with accompanying drawing.
A kind of special-purpose calcining furnace of calcination processing of single crystal growth thermal system, by body of heater, frame 3, vacuum pump 10, controller 13, electric heater 14 and lifting machinery are formed.
The calcining vessel interior space dimension is greater than the hot system of the single crystal growing furnace that comprises graphite device, thermal insulation layer;
Special-purpose calcining vessel is an Electric heating, and the decline by bell 1a down and shifting out can be put into calcination graphite device and take out very easily, and temperature can reach 2000 ℃ during heating, and is vacuum state, and vacuum degree of cold state is smaller or equal to 1Pa;
Adopt technical scheme, earlier furnace bottom 1c is moved downward to the bottom of frame 3 to shown in Figure 3 by hoisting appliance, furnace bottom 1c bottom is fixed on by shock spring 6 carries out damping on the backing plate 7, hot system failure when preventing to operate, furnace bottom 1c outwards moves to shown in Figure 4 by transversal driving mechanism at guide rail 12 then.
Tabular electric heater 14 is set respectively on shaft 1b, bell 1a and the furnace bottom 1c in body of heater 1; The shaft 1b of body of heater 1, bell 1a and furnace bottom 1c are by being made up of the stainless steel double-level-metal shell and the thermal insulation layer of logical water coolant in the interlayer; Bell 1a is provided with aeration aperture, thermometer hole and bell and compresses fore shaft; Be positioned over maximum 24 inches a whole set of thermal fields in the special-purpose calcining vessel or setting can change distance in device support, carry out multilayer and place calcined material, furnace bottom 1c is moved to shown in Figure 3 by transversal driving mechanism then, furnace bottom 1c is moved upward to the bottom of shaft 1b to shown in Figure 1 by hoisting appliance, open vacuum system 10, open hand stop valve respectively, the vacuum angle valve is evacuated to vacuum degree of cold state smaller or equal to 1Pa, close hand stop valve, the leak detection of vacuum angle valve, less than 0.1Pa/min, open hand stop valve, the vacuum angle valve is found time, calcining heats up.
Set electric heater 14 by controller 13 and heat, Heating temperature is 1600-2000 ℃, heats after 24 hours, and blowing out was cooled off 26 hours by inflation.After cooling finished, as above hot system was taken out in operation, clears up after the cooling.Described bell 1a is provided with aeration aperture, thermometer hole and bell and compresses snap close.
Below two technical schemes are summarized:
The calcining processing method of the hot system of a kind of single crystal growing furnace: a kind of special-purpose calcining vessel, have and can open and airtight container door, the calcining vessel interior space dimension is greater than the hot system of the single crystal growing furnace that comprises graphite device, thermal insulation layer physical dimension; Special-purpose calcining vessel inside peripheral wall is the Electric heating heating, and Heating temperature can reach 2000 ℃, is vacuum state when calcining in the container, and vacuum degree of cold state is smaller or equal to reaching 1Pa; The hot system of single crystal growing furnace is placed in the special-purpose calcining vessel with a whole set of or the mode of breaking and calcines.
A kind of calcination processing device of single crystal growth thermal system, frame 3 upper fixed at rectangular frame are provided with a round shape or rectangle, the body of heater 1 that comprises shaft 1b, bell 1a and furnace bottom 1c, the volume in the body of heater 1 is more than or equal to the hot system of the cover single crystal growing furnace physical dimension that comprises graphite device, thermal insulation layer; According to processing and working conditions, requirement, select round shape or cuboid, its inner size can be according to service requirements, such as being calcining whole single crystal growing furnace hot system, then must be greater than the external volume of this hot system of single crystal growing furnace, if the component of the hot system of calcining single crystal growing furnace, and what often need is calcination process to component, therefore, then must in body of heater, can place part more to be calcined greater than taking big or small the getting final product in space that the back component are placed apart.
Described device employing vacuum pump and topping-up pump 10, reducing motor, electric heater 14 are controlled through comprising that temperature sensor, vacuum pressure sensor, the time relay, travel switch move device by controller 13.
Described body of heater 1 is a round shape, and internal diameter is 1000-1200mm, highly is 1000-1200mm.Be of a size of the effective area herein, can be for the bulk of placing the calcining workpiece, described scope is general Commonly Used Size, and is both easy to use, suitable for making also can increase and increase volume according to actual needs again.
Described hoisting appliance is, four jiaos of inserted nums of supporting plate 9 and are formed the running gear that moves up and down by lifting reducing motor 4 synchronously driven four rhizoid bars 5.Nut, screw mandrel can constitute simply, reliable, the accurate localized hoisting appliance that moves up and down.
Described transversal driving mechanism is, fixed lateral reducing motor 11 on backing plate 7, and the output shaft of transversal deceleration motor 11 is fixedlyed connected with one group of roller 8 through turning to transmission.By the rotation of transversal deceleration motor 11, pass to one group and be through roller 8 rotations on the axle, move around at guide rail 12 as a dolly especially.
Described furnace bottom 1c bottom is fixed on the backing plate 7 through shock spring 6.Play cushioning effect, improve reliability of operation, security, the also protection of favourable equipment maintenance.
Described body of heater 1 electric heater 14 connects into the three-phase heating element for graphite carbon rod, and the temperature of electric heater 14 can reach 2000 ℃; Use for reference sophisticated single crystal growing furnace type of heating, realize easily and reach the calcining effect.
Described body of heater 1 is made up of the stainless steel double-level-metal shell and the graphite felt thermal insulation layer of logical water coolant in the interlayer.Water coolant is to cool off furnace body temperature usefulness for calcining when the back workpiece is come out of the stove, and also can use for reference the mature experience of utilization single crystal furnace device.
Support is movably shelved in setting in described body of heater 1.Distinctive feature of the present utility model, can flexibly, flexibly place the workpiece that needs calcination processing, can stack many more, make full use of the space in the body of heater 1, improve calcination processing efficient, as previously mentioned, what often need in actual production is that new graphite device to some replacings carries out calcination processing, have only the utility model to realize this purpose, therefore, the advantage that support is shelved in configuration is clearly.
Claims (8)
1. the calcination processing device of a single crystal growth thermal system is characterized in that:
Frame (3) upper fixed at rectangular frame is provided with a round shape or rectangle, volume in the body of heater (1) that comprises shaft (1b), bell (1a) and furnace bottom (1c), body of heater (1) is more than or equal to the hot system of the cover single crystal growing furnace physical dimension that comprises graphite device, thermal insulation layer;
Furnace bottom (1c) is placed on the backing plate (7), and two row's rollers (8) are installed in the bottom of backing plate (7), and are placed on the supporting plate (9), and supporting plate (9) is driven and can be moved up and down by hoisting appliance, is movable to the bottom of frame (3) downwards; The position that is positioned at frame (3) bottom with supporting plate (9) is mutually concordant, and two and two row's corresponding guide rails of roller (8) (12) laterally be arranged in parallel; Roller (8) on the supporting plate (9) is driven to go up at guide rail (12) by transversal driving mechanism and moves horizontally;
In body of heater (1), on shaft (1b), bell (1a) and the furnace bottom (1c) bar-shaped electric heater (14) is set respectively;
The shaft (1b) of body of heater (1), bell (1a) and furnace bottom (1c) are made up of metal shell and thermal insulation layer;
Bell (1a) is provided with aeration aperture, thermometer hole and bell and compresses fore shaft;
Described device employing vacuum pump and topping-up pump (10), reducing motor, electric heater (14) are controlled through comprising that temperature sensor, vacuum pressure sensor, the time relay, travel switch move device by controller (13).
2. according to the calcination processing device of the described single crystal growth thermal system of claim 1, it is characterized in that being round shape in the described body of heater (1) that internal diameter is 1000-1200mm, highly is 1000-1200mm.
3. according to the calcination processing device of the described single crystal growth thermal system of claim 1, it is characterized in that described hoisting appliance is, four jiaos of inserted nums of supporting plate (9) and are formed the running gear that moves up and down by the synchronously driven four rhizoid bars (5) of lifting reducing motor (4).
4. according to the calcination processing device of the described single crystal growth thermal system of claim 1, it is characterized in that described transversal driving mechanism is, go up fixed lateral reducing motor (11) at backing plate (7), the output shaft of transversal deceleration motor (11) is fixedlyed connected with one group of roller (8) through turning to transmission.
5. according to the calcination processing device of the described single crystal growth thermal system of claim 1, it is characterized in that described furnace bottom (1c) bottom is fixed on the backing plate (7) through shock spring (6).
6. according to the calcination processing device of the described single crystal growth thermal system of claim 1, it is characterized in that described body of heater (1) electric heater (14) connects into the three-phase heating element for graphite carbon rod, the temperature of electric heater (14) is 1600-2000 ℃.
7. according to the calcination processing device of the described single crystal growth thermal system of claim 1, it is characterized in that described body of heater (1) is made up of the stainless steel double-level-metal shell and the graphite felt thermal insulation layer of logical water coolant in the interlayer.
8. according to the calcination processing device of the described single crystal growth thermal system of claim 1, it is characterized in that support is movably shelved in setting in described body of heater (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205009090U CN201857439U (en) | 2010-08-23 | 2010-08-23 | Calcining and processing apparatus for monocrystalline growing heat system |
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| CN2010205009090U CN201857439U (en) | 2010-08-23 | 2010-08-23 | Calcining and processing apparatus for monocrystalline growing heat system |
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| CN201857439U true CN201857439U (en) | 2011-06-08 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101914807A (en) * | 2010-08-23 | 2010-12-15 | 上海卡姆丹克太阳能科技有限公司 | Calcining processing method and device thereof of single crystal growth thermal system |
| CN103820847A (en) * | 2012-11-16 | 2014-05-28 | 有研半导体材料股份有限公司 | Temperature gradient control device for growing large-sized silicon single crystal with zone-melting method and method thereof |
-
2010
- 2010-08-23 CN CN2010205009090U patent/CN201857439U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101914807A (en) * | 2010-08-23 | 2010-12-15 | 上海卡姆丹克太阳能科技有限公司 | Calcining processing method and device thereof of single crystal growth thermal system |
| CN103820847A (en) * | 2012-11-16 | 2014-05-28 | 有研半导体材料股份有限公司 | Temperature gradient control device for growing large-sized silicon single crystal with zone-melting method and method thereof |
| CN103820847B (en) * | 2012-11-16 | 2016-06-15 | 有研半导体材料有限公司 | A kind of zone-melting process growing large-size silicon single crystal thermograde controls device and method |
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Granted publication date: 20110608 Termination date: 20120823 |