CN201853939U - All-solid-state laser resonant cavity of semiconductor pump - Google Patents
All-solid-state laser resonant cavity of semiconductor pump Download PDFInfo
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- CN201853939U CN201853939U CN2010205061386U CN201020506138U CN201853939U CN 201853939 U CN201853939 U CN 201853939U CN 2010205061386 U CN2010205061386 U CN 2010205061386U CN 201020506138 U CN201020506138 U CN 201020506138U CN 201853939 U CN201853939 U CN 201853939U
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Abstract
The utility model discloses an all-solid-state laser resonant cavity of a semiconductor pump, which belongs to the field of all solid state laser. The all-solid-state laser resonant cavity comprises a resonant cavity lens system, a modulation system and a laser pump system, wherein the modulation system and the laser pump system are positioned in a resonant light path of the resonant cavity lens system. The solid-state laser resonant cavity is characterized by further comprising a cavity length adjusting device provided with two rows of assemble holes, and a front lens or a rear lens of the resonant cavity lens system is mounted on the assemble holes. The resonant cavity further comprises two meniscus lenses with equal thicknesses, the two meniscus lenses are symmetrically disposed on two sides of a pump crystal in the laser pump system, and convex faces of the meniscus lenses face the end face of the pump crystal. The cavity length of the resonant cavity as compared with the prior art is adjustable flexibly, thermal lens effect of the pump crystal is improved, and accordingly stable output of the resonant cavity is improved evidently.
Description
Technical field
The utility model belongs to the all-solid state laser field, relates to a kind of laser resonant cavity, particularly a kind of semiconductor pumped all-solid state laser resonant cavity.
Background technology
The all solid state laser of semiconductor laser pumping is the new laser that occurs phase late 1980s.The overall efficiency of all solid state laser is higher 10 times than lamp pumping at least, because the heat load of unit output reduces, can obtain higher power, lifetime of system and reliability approximately are 100 times of flash-lamp pump pumping system, therefore, the diode-end-pumped technology is that solid state laser has injected new vigor and vitality, make all solid state laser have the dual characteristics of solid state laser and semiconductor laser simultaneously, its appearance and gradually maturation be a revolution of solid state laser, also be the developing direction of solid state laser.And, it has been penetrated into each ambit, for example: laser intelligence storage and processing, Materialbearbeitung mit Laserlicht, laser medicine and biology, laser communications, laser printing, laser spectroscopy, laser chemistry, laser isotope separation, laser fusion, laser projection demonstration, laser detection and metering and military laser technology etc. have greatly promoted the technological progress and the unprecedented development in these fields.The appearance of these interleaving techniquess and subject has promoted the development of conventional industries and new industry widely.
At present, country such as the U.S., Japan, Germany is in manufacturing industry, as electronics, medical treatment, automobile, Aeronautics and Astronautics, etc. the field finish the update of traditional handicraft substantially, step into " light processing " epoch.In recent years because the developing rapidly of semiconductor laser, make the shared market share of all solid state laser process equipment of semiconductor laser pumping increasing.60% has been all solid state laser in the laser process equipment that Germany Rofin laser company is sold.According to ASSOCIATE STATISTICS, external all solid state laser industry 2004 annual sales amounts have reached nearly 10,000,000,000 dollars, and wherein 29% of product sales is used for laser labelling, and 15% is used for Laser Micro-Machining.Whole world all solid state laser system of processing annual growth is about 23%, and all solid state laser is the core component of laser system of processing, and the market demand also will be grown simultaneously, its year the growth rate of demand will reach more than 20%.Therefore, the development trend of all solid state laser is fine, and prospect is boundless.
Present Nd:YVO
4Crystal is a kind of all solid state laser gain media that often is used, and it can provide tens watts pulse laser.By the nanosecond Q-regulating technique, it can produce the laser of high strength, high repetition frequency.The semiconductor laser of general employing 808 of this crystalloid and 888nm is as exciting light source.Because wavelength belongs to near-infrared laser greater than the laser of 800nm, the thermal effect of infrared laser is more intense, at Nd:YVO
4Can form thermal lens in the crystal.We know that the stable output condition of laserresonator can obtain with computing formula once:
Under the situation that the long L in chamber fixes, the principal element that influences resonant cavity work is the R value that forms actual minute surface in the chamber as can be seen.And Nd:YVO
4The thermal lens that crystal forms brings adverse effect can for the stability of resonant cavity.
At present general common way is to place planoconvex spotlight in the crystal one or both ends, and its different choice of utilizing convex surface R is to remedy the influence of thermal lens.But this way also has its not enough aspect, an aspect is because planoconvex spotlight itself is not a homogeneous body, it can produce some inner stress under the uneven situation of being heated, thereby make its R value produce small variation, and this variation is to be difficult to give accurate control, and it can cause the instability of resonant cavity; Be that thereby it can bring certain aberration to reduce pump light at Nd:YVO for pump light on the other hand
4Utilization ratio in the crystal.
Present resonant cavity mainly is made of jointly resonance cavity system, acoustooptic modulation system and laser pumping system, even adopted the said lens bucking-out system that thermal effect is optimized, its stability that obtains is the highest also only about 90%, can't further improve.The improvement that the utility model proposes at above-mentioned shortcoming just, purpose are to improve the stability and the pattern of laser power output.
The utility model content
The purpose of this utility model is to overcome the shortcoming that exists in the above-mentioned prior art, and a kind of semiconductor pumped all-solid state laser resonant cavity is provided; The present invention provides a kind of efficient, stable laser aid of realizing by resonator mirror system and the compact long adjusting mechanism in chamber that the thermal lensing effect that adopts the pumping crystal compensates.
The purpose of this utility model is achieved through the following technical solutions:
A kind of semiconductor pumped all-solid state laser resonant cavity comprises resonator mirror system, modulating system and laser pumping system, and wherein said modulating system, laser pumping system are arranged in the resonant optical path of described resonator mirror system; It is characterized in that also comprising the long adjusting device in a chamber, the long adjusting device in described chamber is provided with two row's pilot holes, and the preceding end mirror of described resonator mirror system or back end mirror are installed on the described pilot hole.
Also comprise two meniscus lens in the described resonant optical path, the both sides that are positioned over the pumping crystal in the described laser pumping system of symmetry respectively, and the convex surface of meniscus lens is towards the end face of described pumping crystal.
Described meniscus lens is the meniscus lens of uniform thickness.
The radius of curvature of two described uniform thickness meniscus lens is unequal.
The radius of curvature of two described uniform thickness meniscus lens equates.
The thickness of described meniscus lens is 1/5 to 1/2 of meniscus lens bore diameter.
The material of described meniscus lens is a flint glass.
The convex surface of described meniscus lens is coated with pump light anti-reflection film and laser anti-reflection film, and its concave mirror is coated with the pump light anti-reflection film.
Described pumping crystal is Nd:YVO
4, the convex surface of described meniscus lens is coated with the anti-reflection film to the anti-reflection film of 1064nm centre wavelength light and 888nm centre wavelength light, and its concave mirror is coated with 888nm centre wavelength light anti-reflection film.
Described resonator mirror system is the fold resonator mirror system; Described modulating system is the acoustooptic modulation system.
Semiconductor pumped all-solid state laser resonant cavity of the present utility model, comprise resonator mirror system, acoustooptic modulation system and laser pumping system, wherein the resonator mirror system forms a fold resonator by 6 chamber mirrors, the acoustooptic modulation system is positioned at the fold resonator leading portion, form by acousto-optic modulator, optical gate and base, the modulating frequency of acousto-optic modulator is adjustable to 150KHz from 1, pulsewidth is 5ns, the laser pumping system is positioned at the fold resonator stage casing and is made up of pumping crystal, crystal frame and semiconductor chilling plate, and pumping crystal material is Nd:YVO
4, it as the pumping exciting light source, adopts the end pumping mode to be excited to send 1064nm light with 888nm, the resonator mirror system that this resonant cavity has adopted the thermal lensing effect to the pumping crystal to compensate.
In the said system, be provided with the long adjusting device in chamber of a compactness in the resonant cavity, the long adjusting device in chamber leaves the pilot hole that 2 row's quantity do not wait at place, mirror element fixed position, the rear end of laser base board fold resonator, two chamber mirror harmony light modulation systems can require to install according to the long difference in chamber.
The characteristics of said system are, by the pilot hole that uses 2 row's quantity not wait, the adjustment resonant cavity of appropriateness is long, according to formula 1 as can be known, it can change the distribution of fundamental frequency light in whole resonant cavity internal power density, thereby realize the adjusting of resonant cavity stable state, the optical gate with the acoustooptic modulation system matches again, so promoted the reliability and the fail safe of system greatly.
The chamber mirror of resonator mirror system has two meniscus lens to be placed on the both sides of pumping crystal respectively symmetrically, and the convex surface of meniscus lens is towards the end face of described pumping crystal.
The convex surface of meniscus lens and concave equate, thickness is that the D/5 of meniscus lens bore diameter D is to D/2.
The radius of curvature of two described meniscus lens can equate also can not wait, and both radius of curvature are selected arbitrarily in can be from R1 to R2, thereby are divided into various combination symmetry or the asymmetric both sides that are placed on the pumping crystal according to the different situations of thermal lensing effect.
There is the flat surface of two symmetries at the edge of the resonator mirror of resonator mirror system, and the length of flat surface is that the D/5 of aperture of lens diameter D is to D/2.
The material of meniscus lens is a flint glass.
The plating of the convex surface of meniscus lens is anti-reflection and to the film system of the high reflection of 1064nm, the concave surface of meniscus lens only plates the anti-reflection film system of 888nm light to 888nm light.
The resonator mirror system is the ray machine integral structure, and the chamber mirror is directly fixed in governor motion without any beat or pitching with mechanical connection, and the bridging agent of curing can be spent between 150 degree 80 in ultraviolet light or temperature and be come into force.
The characteristics of said system are, by using a pair of meniscus lens, change and incide Nd:YVO
4The spot size of fundamental frequency light, according to formula 1 as can be known, it can change fundamental frequency light at Nd:YVO
4In power density distribution, thereby realize the adjusting of resonant cavity stable state, match with the ray machine integral structure again, the stable resonator output that can be optimized is so promoted the reliability of system greatly.
Compared with prior art, good effect of the present utility model is:
The utility model has changed the power density distribution of fundamental frequency light in the pumping crystal by add the meniscus lens of uniform thickness in pumping crystal both sides, thereby realizes the adjusting of resonant cavity stable state, obtains stable resonator output, has promoted the reliability of system greatly.Further, leave the pilot hole that 2 row's quantity do not wait, make two chamber mirror harmony light modulation systems to require to install, improved the adaptability of resonant cavity greatly according to the long difference in chamber by place, parts fixed position at preceding end mirror or back end mirror.
Description of drawings
Fig. 1 is Nd:YVO
4Absorption curve figure as the spectrum of pumping crystal;
Fig. 2 is the schematic diagram that adopts the resonator mirror system that the thermal lensing effect to the pumping crystal compensates according to the utility model;
The 21-meniscus lens, 22-pumping crystal,
Fig. 3 is the schematic diagram that has adopted the compact long adjusting device in chamber according to the utility model;
The 31-laser base board, 32-chamber mirror, the 33-optical gate, the 34-acousto-optic modulator,
Fig. 4 is the schematic diagram according to a kind of all-solid state laser resonant cavity described in the utility model;
The 41a-speculum, the 41b-speculum, the 41c-meniscus lens, the 41d-meniscus lens, the 41e-speculum, the 41f-speculum, 42-acoustooptic modulation Q opens the light, 43-optical gate, 44-pumping crystal.
Embodiment
Below, describe embodiment of the present utility model in conjunction with the accompanying drawings in detail.
Embodiment 1: Fig. 1 is Nd:YVO
4As the absorption curve figure of the spectrum of pumping crystal, we can see Nd:YVO from this figure
4Two very strong absworption peaks are arranged near 808 and 880.But they are also very big in the absorption difference of a axle and c axle simultaneously, and this just causes the extremely imbalance of the absorption of crystal under higher-wattage.Because the internal stress that this imbalance produced can make that crystal breaks when arriving to a certain degree, thereby can't be useful in the high power laser field.In addition, it also makes the thermal lensing effect of crystal very obviously have influence on the stability of power output.In order to address this problem, we notice near the 888nm also a little absworption peak, and a axle at this moment and the absorption difference of c axle are not very big.It provides possibility for realizing that the high power laser field is used.Fig. 2 is the schematic diagram that adopts the resonator mirror system that the thermal lensing effect to the pumping crystal compensates according to the utility model.This system comprises meniscus lens 21, pumping crystal 22; Wherein two meniscus lens are placed on the both sides of pumping crystal respectively symmetrically, and the convex surface of meniscus lens is towards the end face of pumping crystal.Incide Nd:YVO by using the meniscus lens of different curvature radius, changing
4The spot size of fundamental frequency light, according to formula 1 as can be known, it can change fundamental frequency light at Nd:YVO
4In power density distribution, thereby realize the adjusting of resonant cavity stable state.
The convex surface of meniscus lens and concave equate, center thickness is that the D/5 of lens diameter is to D/2.The radius of meniscus lens is respectively R=1000mm, R=1300mm, R=1500mm, R=2100mm and R=2700mm.They realize that altogether 25 kinds of combinations come thermal lensing effect is carried out symmetry or asymmetrical compensation.Can learn that according to calculating the thermal focal length scope that it can adaptive compensation is from 200mm to 400mm.There is the flat surface of two symmetries at the edge of chamber mirror, and the length of flat surface is that the D/5 of meniscus lens bore diameter D is to D/2.Be so for convenience the recruitment clamping hold that the chamber mirror is regulated and with the cured of mechanical parts.The material of meniscus lens is a flint glass.The plating of the convex surface of meniscus lens is anti-reflection and to the film system of the high reflection of 1064nm, the concave surface of meniscus lens only plates the anti-reflection film system of 888nm light to 888nm light.The chamber mirror is directly fixed in governor motion without any beat or pitching with mechanical connection, and the bridging agent of curing can be spent between 150 degree 80 in ultraviolet light or temperature and be come into force.
System as shown in Figure 2 optimizes by the chamber mirror, matches with the ray machine integral structure again, and the stable resonator output that can be optimized is so promoted the reliability of system greatly.
Embodiment 2: Fig. 3 is the schematic diagram that has adopted the compact long adjusting device in chamber according to the utility model.This device comprises laser base board 31, chamber mirror 32, optical gate 33 and acousto-optic modulator 34; Wherein place, the front end mirror element fixed position of laser base board fold resonator leaves the pilot hole that 2 row's quantity do not wait, and two chamber mirrors (end mirror and back end mirror promptly) harmony light modulation system can carry out aggregate erection according to the long different requirements in chamber.According to formula 1 as can be known, it can change the distribution of fundamental frequency light in whole resonant cavity internal power density, thereby realizes the adjusting of resonant cavity stable state.
Here the chamber mirror in acousto-optic modulator left side has 3 position of sound production places, and acousto-optic modulator has 3 position of sound production places, and the chamber mirror on acousto-optic modulator right side has 5 position of sound production places.The excursion that has 15 kinds of combinations can satisfy laserresonator like this has+/-30mm.Optical gate is to form by a diaphragm sheet and miniature relay, and the diaphragm chip architecture is divided into lamellar body, fulcrum hole and connecting rod, and lamellar body and connecting rod are to the arm of force approximately equal of fulcrum hole; Relay adopts the mode of adhesive curing to install.Optical gate can play the effect of interim blocking-up resonant cavity work.
The pilot hole that quantity do not wait is arranged by using 2 by system as shown in Figure 3, and the adjustment resonant cavity of appropriateness is long, and the optical gate with the acoustooptic modulation system matches again, so promoted the reliability and the fail safe of system greatly.
Embodiment 4: Fig. 4 is the schematic diagram of all solid state laser resonant cavity described in the utility model, and speculum 41a～41f constitutes resonant cavity jointly, and the 888nm light source is Nd:YVO to operation material
4And doping content is that 0.5% laser crystal 44 carries out pumping, produce the laser of 1064nm, acoustooptic modulation Q opens the light and 42 places a side of laserresonator that laser is modulated, and makes whole system output pulsed light, and optical gate 43 is controlled resonance condition in acousto-optic modulator one side.Wherein meniscus lens 41d and 41c are to Nd:YVO
4The thermal lens of laser crystal 44 compensates, and chamber mirror 41a and 41b change cavity length and resonant cavity regulated the power output that is optimized.
Although the utility model is made specific descriptions with reference to the above embodiments, but for the person of ordinary skill of the art, should be appreciated that and can make amendment or improve based on the disclosed content of the utility model, and these modifications and improving all within spirit of the present utility model and scope.
Claims (10)
1. a semiconductor pumped all-solid state laser resonant cavity comprises resonator mirror system, modulating system and laser pumping system, and wherein said modulating system, laser pumping system are arranged in the resonant optical path of described resonator mirror system; It is characterized in that also comprising the long adjusting device in a chamber, the long adjusting device in described chamber is provided with two row's pilot holes, and the preceding end mirror of described resonator mirror system or back end mirror are installed on the described pilot hole.
2. resonant cavity as claimed in claim 1 is characterized in that also comprising in the described resonant optical path two meniscus lens, the both sides that are positioned over the pumping crystal in the described laser pumping system of symmetry respectively, and the convex surface of meniscus lens is towards the end face of described pumping crystal.
3. resonant cavity as claimed in claim 2 is characterized in that described meniscus lens is the meniscus lens of uniform thickness.
4. resonant cavity as claimed in claim 3 is characterized in that the radius of curvature of two described uniform thickness meniscus lens is unequal.
5. resonant cavity as claimed in claim 3 is characterized in that the radius of curvature of two described uniform thickness meniscus lens equates.
6. as claim 4 or 5 described resonant cavitys, the thickness that it is characterized in that described meniscus lens is 1/5 to 1/2 of meniscus lens bore diameter.
7. as claim 2 or 3 or 4 or 5 described resonant cavitys, the material that it is characterized in that described meniscus lens is a flint glass.
8. resonant cavity as claimed in claim 7 is characterized in that the convex surface of described meniscus lens is coated with pump light anti-reflection film and laser anti-reflection film, and its concave mirror is coated with the pump light anti-reflection film.
9. resonant cavity as claimed in claim 8 is characterized in that described pumping crystal is Nd:YVO
4, the convex surface of described meniscus lens is coated with the anti-reflection film to the anti-reflection film of 1064nm centre wavelength light and 888nm centre wavelength light, and its concave mirror is coated with 888nm centre wavelength light anti-reflection film.
10. resonant cavity as claimed in claim 1 is characterized in that described resonator mirror system is the fold resonator mirror system; Described modulating system is the acoustooptic modulation system.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010205061386U CN201853939U (en) | 2010-08-26 | 2010-08-26 | All-solid-state laser resonant cavity of semiconductor pump |
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| CN2010205061386U CN201853939U (en) | 2010-08-26 | 2010-08-26 | All-solid-state laser resonant cavity of semiconductor pump |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101986479A (en) * | 2010-08-26 | 2011-03-16 | 大恒新纪元科技股份有限公司 | All-solid-state laser resonant cavity |
| CN112130395A (en) * | 2020-09-25 | 2020-12-25 | 山西大学 | Integral optical resonant cavity for frequency conversion |
-
2010
- 2010-08-26 CN CN2010205061386U patent/CN201853939U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101986479A (en) * | 2010-08-26 | 2011-03-16 | 大恒新纪元科技股份有限公司 | All-solid-state laser resonant cavity |
| CN101986479B (en) * | 2010-08-26 | 2012-08-01 | 大恒新纪元科技股份有限公司 | All-solid-state laser resonant cavity |
| CN112130395A (en) * | 2020-09-25 | 2020-12-25 | 山西大学 | Integral optical resonant cavity for frequency conversion |
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Granted publication date: 20110601 |