CN202167755U - Outside-cavity resonant ultraviolet laser generating device - Google Patents
Outside-cavity resonant ultraviolet laser generating device Download PDFInfo
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- CN202167755U CN202167755U CN2011202204433U CN201120220443U CN202167755U CN 202167755 U CN202167755 U CN 202167755U CN 2011202204433 U CN2011202204433 U CN 2011202204433U CN 201120220443 U CN201120220443 U CN 201120220443U CN 202167755 U CN202167755 U CN 202167755U
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Abstract
The utility model discloses an outside-cavity resonant ultraviolet laser generating device, which comprises a secondary harmonic system and a quartic harmonic system which are on a same collimating optical path, wherein the secondary harmonic system is in a full-solid laser structure; the quartic harmonic system is in an outside-cavity resonance structure and mainly consists of a 532 nm photo-isolator, a quartic harmonic front-end double-color lens, a quartic harmonic nonlinear optical frequency conversion crystal and a quartic harmonic rear-end double-color lens; the 532 nm photo-isolator is backwards arranged at the output end of the collimating optical path of the secondary harmonic system; a quartic harmonic F-P resonance cavity formed by the quartic harmonic front-end double-color lens and the quartic harmonic rear-end double-color lens is positioned behind the 532 nm photo-isolator; and the quartic harmonic nonlinear optical frequency conversion crystal is positioned in the quartic harmonic F-P resonance cavity. The outside-cavity resonant ultraviolet laser generating device has the characteristics of simple structure, small size, large power, stable laser output power, good light beam quality and the like.
Description
Technical field
The utility model belongs to laser technology field, resonance ultraviolet laser generation device outside particularly a kind of chamber.
Background technology
The generation mechanism of ultraviolet laser mostly adopts hydrogen ion ultraviolet laser, argon ion laser, LED ultraviolet laser or utilizes LD or the second harmonic of all solid state laser output at present; Through nonlinear optical crystal frequency, utilize the prism beam split to realize Ultra-Violet Laser output again.At first, in above-mentioned various types of lasers, hydrogen ion laser safety coefficient is low, argon ion laser is bulky, LED ultraviolet laser coherence is poor, the LD frequency conversion produces ultraviolet light output quality difference and price is higher; Secondly, to produce ultraviolet light mainly be to utilize nonlinear optical crystal such as BBO that all solid state second harmonic is carried out frequency translation to realize Ultra-Violet Laser output to above-mentioned solid state laser.Though all solid state laser structure relative compact; Output beam quality is better; But, limit the further raising of its power, and taken the confined space of whole laser because second harmonic and four-time harmonic generally all adopt the prism beam split; So just increase the complexity of solid state laser apparatus structure, limited the further compression of its structure.Thereby provide a kind of simple in structure, volume is little, output is stable and high, the high-power ultraviolet laser generation device of beam quality has great importance.It has broad application prospects and important scientific research value.
The utility model content
The utility model technical problem to be solved provides resonance ultraviolet laser generation device outside a kind of chamber, its have simple in structure, volume is little, power is big, laser output power is stable and characteristics such as good beam quality.
For addressing the above problem, resonance ultraviolet laser generation device outside a kind of chamber that the utility model designed comprises second harmonic system and four-time harmonic system; Wherein the second harmonic system is that all solid state laser structure and output center wavelength are the laser of 532nm; The four-time harmonic system is that resonance structure and output center wavelength are the laser of 266nm outside the chamber, and second harmonic system and four-time harmonic system are positioned on the same collimated light path; Above-mentioned four-time harmonic system mainly is made up of 532nm optical isolator, the double-colored eyeglass of four-time harmonic front end, the double-colored eyeglass of four-time harmonic nonlinear optical frequency conversion crystal and four-time harmonic rear end; The 532nm optical isolator is placed on the second harmonic system collimated light path output; Be positioned at the rear of 532nm optical isolator by the formed four-time harmonic F-P of the double-colored eyeglass of four-time harmonic front and back ends resonant cavity, four-time harmonic nonlinear optical frequency conversion crystal is in the four-time harmonic F-P resonant cavity; Above-mentioned 532nm optical isolator, the double-colored eyeglass of four-time harmonic front end, the double-colored eyeglass of four-time harmonic nonlinear optical frequency conversion crystal and four-time harmonic rear end are co-located on the same collimated light path.
In the such scheme, being coated with anti-reflection film and the centre wavelength that centre wavelength is 532nm on the double-colored eyeglass of four-time harmonic front end of four-time harmonic system is the highly reflecting films of 266nm; All be coated with the high transmittance film that centre wavelength is 532nm and 266nm on two logical light faces of four-time harmonic nonlinear optical frequency conversion crystal; Being coated with highly reflecting films and the centre wavelength that centre wavelength is 532nm on the double-colored eyeglass in four-time harmonic rear end is the anti-reflection film of 266nm.
In the such scheme, four-time harmonic nonlinear optical frequency conversion crystal is made up of nonlinear crystals such as barium metaborate or three cesium lithium borates.
The said second harmonic of the utility model system mainly is made up of the LD pumping source, pumping input coupled lens group, second harmonic front end trichromscope sheet, working-laser material crystal, acousto-optic Q modulation assembly, 532nm laser harmonic eyeglass, second harmonic nonlinear optical frequency conversion crystal, the terminal double-colored eyeglass of second harmonic and the output collimation lens set that are positioned on the same collimated light path; Wherein the rearmounted pumping input of LD pumping source coupled lens group is positioned at the rear that the coupled lens group is imported in pumping by second harmonic front end trichromscope sheet and the formed second harmonic F-P of the terminal double-colored eyeglass of second harmonic resonant cavity; Working-laser material crystal, acousto-optic Q modulation assembly, 532nm laser harmonic eyeglass and second harmonic nonlinear optical frequency conversion crystal are successively set in the second harmonic F-P resonant cavity; Second harmonic F-P resonant cavity rear is provided with the output collimation lens set.
In the such scheme, pumping input coupled lens group adopts non-spherical lens group or micro objective group.
In the such scheme, the output collimation lens set adopts two aspheric surface collimating lenses, and all is coated with the high transmittance film that centre wavelength is 532nm on two aspheric surface collimating lenses.
In the such scheme, being coated with high transmittance film and the centre wavelength that centre wavelength is the 808nm pump light on the second harmonic front end trichromscope sheet is the high-reflecting film of 1064nm and 532nm; All be coated with the anti-reflection film that centre wavelength is 1064nm on two logical light faces of working-laser material crystal and acousto-optic Q modulation assembly; Being coated with anti-reflection film and the centre wavelength that centre wavelength is 1064nm on the 532nm laser harmonic eyeglass is the high-reflecting film of 532nm; Be coated with the high transmittance film that centre wavelength is 1064nm and 532nm simultaneously on two logical light faces of second harmonic nonlinear optical frequency conversion crystal; Being coated with high-reflecting film and the centre wavelength that centre wavelength is 1064nm on the terminal double-colored eyeglass of second harmonic is the high transmittance film of 532nm.
In the such scheme, the working-laser material crystal is made up of neodymium-doped yttrium-aluminum garnet, and the peak absorbtivity wavelength of the centre wavelength of LD pumping source and this working-laser material crystal is complementary.
Compared with prior art; The utility model adopts outside all solid state laser and the chamber resonance structure mode that combines; Make fundamental light wave realize that in all solid state laser the second harmonic of light wave transforms, and the conversion of the four-time harmonic of realization light wave in the outer resonance structure in chamber in the wings; This not only makes volume-diminished, the structure of ultraviolet laser generation device become more simple, compact, and can guarantee high light beam quality, high-output power and high stability; Thereby can provide that a kind of volume is little for laser industry, applications such as breeding with laser, especially Ultra-Violet Laser atmospheric communication, stable performance, power output is high, output beam quality is good ultraviolet laser generation device.
Description of drawings
Fig. 1 is the structural representation of resonance ultraviolet laser generation device outside a kind of chamber of the utility model.
Label among the figure:
1, second harmonic system; 1-1, LD pumping source; 1-2, pumping input coupled lens group; 1-3, second harmonic front end trichromscope sheet; 1-4, working-laser material crystal; 1-5, acousto-optic Q modulation assembly; 1-6,532nm laser harmonic eyeglass; 1-7, second harmonic nonlinear optical frequency conversion crystal; 1-8, the terminal double-colored eyeglass of second harmonic; 1-9, output collimation lens set;
2, four-time harmonic system; 2-1,532nm optical isolator; 2-2, the double-colored eyeglass of four-time harmonic front end; 2-3, four-time harmonic nonlinear optical frequency conversion crystal; 2-4, the double-colored eyeglass in four-time harmonic rear end.
Embodiment
Referring to Fig. 1, the utility model is a resonance ultraviolet laser generation device outside a kind of chamber, comprises second harmonic system 1 and four-time harmonic system 2.Wherein second harmonic system 1 is that all solid state laser structure and output center wavelength are the laser of 532nm; Four-time harmonic system 2 is the laser of 266nm for the outer resonance structure in chamber and output center wavelength, and second harmonic system 1 and four-time harmonic system 2 are positioned on the same collimated light path.
The second harmonic system 1 of the utility model mainly is made up of the LD pumping source 1-1, pumping input coupled lens group 1-2, second harmonic front end trichromscope sheet 1-3, working-laser material crystal 1-4, acousto-optic Q modulation assembly 1-5,532nm laser harmonic eyeglass 1-6, second harmonic nonlinear optical frequency conversion crystal 1-7, the terminal double-colored eyeglass 1-8 of second harmonic and the output collimation lens set 1-9 that are positioned on the same collimated light path.Wherein be equipped with pumping input coupled lens group 1-2 behind the LD pumping source 1-1.Be positioned at the rear of pumping input coupled lens group 1-2 by second harmonic front end trichromscope sheet 1-3 and the formed second harmonic F-P of the terminal double-colored eyeglass 1-8 of second harmonic resonant cavity.Working-laser material crystal 1-4, acousto-optic Q modulation assembly 1-5,532nm laser harmonic eyeglass 1-6 and second harmonic nonlinear optical frequency conversion crystal 1-7 then are successively set in the second harmonic F-P resonant cavity.Second harmonic F-P resonant cavity rear is provided with output collimation lens set 1-9.Be to be provided with second harmonic front end trichromscope sheet 1-3 behind the pumping input coupled lens group 1-2; Behind the second harmonic front end trichromscope sheet 1-3 working-laser material crystal 1-4 is set; Acousto-optic Q modulation assembly 1-5 is set behind the working-laser material crystal 1-4; 532nm laser harmonic eyeglass 1-6 is set behind the acousto-optic Q modulation assembly 1-5; Second harmonic nonlinear optical frequency conversion crystal 1-7 is set behind the 532nm laser harmonic eyeglass 1-6, the terminal double-colored eyeglass 1-8 of second harmonic is set behind the second harmonic nonlinear optical frequency conversion crystal 1-7, output collimation lens set 1-9 is set behind the terminal double-colored eyeglass 1-8 of second harmonic.Long in order to shorten the chamber, each building block in the above-mentioned second harmonic F-P resonant cavity should be as far as possible near.
The fine output of the LD pumping source 1-1 magnetic tape trailer of second harmonic system 1; Its output facula diameter is 800 μ m; Numerical aperture is 0.22; Peak power output is 9W, and the peak absorbtivity wavelength of the working-laser material crystal 1-4 that centre wavelength and neodymium-doped yttrium-aluminum garnet are constituted is complementary, is that centre wavelength is 808nm.Pumping input coupled lens group 1-2 adopts non-spherical lens group or micro objective group.Be coated with the high transmittance film that centre wavelength is the 808nm pump light (transmitance 99%) on the second harmonic front end trichromscope sheet 1-3, centre wavelength is the high-reflecting film (reflectivity＞98%) of 1064nm and 532nm.All be coated with the anti-reflection film that centre wavelength is 1064nm (transmitance 99%) on two logical light faces of working-laser material crystal 1-4 and acousto-optic Q modulation assembly 1-5, and the side hacking.Being coated with anti-reflection film that centre wavelength is 1064nm (transmitance 99%) and centre wavelength on the 532nm laser harmonic eyeglass 1-6 is the high-reflecting film (reflectivity＞98%) of 532nm.Being coated with centre wavelength on two logical light faces of second harmonic nonlinear optical frequency conversion crystal 1-7 simultaneously is that 1064nm and centre wavelength are the high transmittance film (transmitance is 99%) of 532nm.Be coated with the high-reflecting film that centre wavelength is 1064nm (reflectivity＞98%) on the terminal double-colored eyeglass 1-8 of second harmonic and centre wavelength is the high transmittance film (transmitance 90%) of 532nm.Output collimation lens set 1-9 adopts two aspheric surface collimating lenses, and all is coated with the high transmittance film that centre wavelength is 532nm (transmitance 99%) on two aspheric surface collimating lenses.
The four-time harmonic system 2 of the utility model mainly is made up of 532nm optical isolator 2-1, the double-colored eyeglass 2-2 of four-time harmonic front end, four-time harmonic nonlinear optical frequency conversion crystal 2-3 and the double-colored eyeglass 2-4 in four-time harmonic rear end; 532nm optical isolator 2-1 is placed on the second harmonic system 1 collimated light path output; Be positioned at the rear of 532nm optical isolator 2-1 by the formed four-time harmonic F-P of the double-colored eyeglass of four-time harmonic front and back ends resonant cavity, and four-time harmonic nonlinear optical frequency conversion crystal 2-3 is in the four-time harmonic F-P resonant cavity; Above-mentioned 532nm optical isolator 2-1, the double-colored eyeglass 2-2 of four-time harmonic front end, four-time harmonic nonlinear optical frequency conversion crystal 2-3 and the double-colored eyeglass 2-4 in four-time harmonic rear end are co-located on the same collimated light path.
Be coated with the highly reflecting films (reflectivity＞99%) that anti-reflection film that centre wavelength is 532nm (transmissivity is 70%) and centre wavelength are 266nm on the double-colored eyeglass 2-2 of the four-time harmonic front end of four-time harmonic system 2.Four-time harmonic nonlinear optical frequency conversion crystal 2-3 is made up of nonlinear crystals such as barium metaborate or three cesium lithium borates, all is coated with the anti-reflection film that centre wavelength is 532nm and 266nm (transmitance＞99%) on its two the logical light faces, and the side hacking.Be coated with the anti-reflection film that highly reflecting films that centre wavelength is 532nm (reflectivity＞99%) and centre wavelength are 266nm (transmissivity is 75%) on the double-colored eyeglass 2-4 in four-time harmonic rear end.
The concrete course of work of the utility model is:
In second harmonic system 1, the pump light that LD pumping source 1-1 produces focuses on the second harmonic front end trichromscope sheet 1-3 through pumping input coupled lens group 1-2 coupling.Through the working-laser material crystal 1-4 that second harmonic front end trichromscope sheet 1-3 excites neodymium-doped yttrium-aluminum garnet to constitute, producing wavelength is 1064nm fundamental frequency light.The fundamental frequency light that produces vibrates through the acousto-optic Q modulation assembly 1-5 of fundamental frequency light in second harmonic F-P resonant cavity back and forth.In order to improve the utilance that wavelength is the basic frequency laser of 1064nm, the utility model has increased 532nm laser harmonic eyeglass 1-6.Wavelength is that the basic frequency laser of 1064nm is realized the conversion of second harmonic through second harmonic nonlinear optical frequency conversion crystal 1-7, and in second harmonic F-P resonant cavity, forms the high-power secondary harmonic vibration that centre wavelength is 532nm.After terminal double-colored this second harmonic laser of eyeglass 1-8 output of second harmonic.The wavelength of second harmonic system 1 output gets in the four-time harmonic system 2 through output collimation lens set 1-9 for 532nm laser.
After the laser of second harmonic system 1 output passes through the 532nm optical isolator 2-1 of four-time harmonic system 2, the double-colored eyeglass 2-2 of directive four-time harmonic front end.Vibration back and forth in four-time harmonic F-P resonant cavity behind the double-colored eyeglass 2-2 of above-mentioned laser process four-time harmonic front end; And pass through the conversion that four-time harmonic nonlinear optical frequency conversion crystal 2-3 is realized four-time harmonic, to form the high power four-time harmonic vibration that centre wavelength is 266nm.After the four-time harmonic that the terminal double-colored eyeglass output center wavelength of four-time harmonic is 266nm, thereby obtain the output of 266nm Ultra-Violet Laser.
Resonance produces the above high light beam quality Ultra-Violet Laser of the exportable 380mW of device of Ultra-Violet Laser outside the chamber of this instance, and the power output stability is good, and compact conformation, volume are little, and electricity-phototranstormation efficiency is higher, is desirable atmospheric communication Ultra-Violet Laser light source.
Claims (8)
1. resonance ultraviolet laser generation device outside the chamber is characterized in that: comprise second harmonic system (1) and four-time harmonic system (2); Wherein second harmonic system (1) is that all solid state laser structure and output center wavelength are the laser of 532nm; Four-time harmonic system (2) is the laser of 266nm for resonance structure outside the chamber and output center wavelength, and second harmonic system (1) and four-time harmonic system (2) are positioned on the same collimated light path; Above-mentioned four-time harmonic system (2) mainly is made up of 532nm optical isolator (2-1), the double-colored eyeglass of four-time harmonic front end (2-2), the double-colored eyeglass of four-time harmonic nonlinear optical frequency conversion crystal (2-3) and four-time harmonic rear end (2-4); 532nm optical isolator (2-1) is placed on second harmonic system (1) the collimated light path output; Be positioned at the rear of 532nm optical isolator (2-1) by the formed four-time harmonic F-P of the double-colored eyeglass of four-time harmonic front and back ends resonant cavity, four-time harmonic nonlinear optical frequency conversion crystal (2-3) is in the four-time harmonic F-P resonant cavity; Above-mentioned 532nm optical isolator (2-1), the double-colored eyeglass of four-time harmonic front end (2-2), the double-colored eyeglass of four-time harmonic nonlinear optical frequency conversion crystal (2-3) and four-time harmonic rear end (2-4) are co-located on the same collimated light path.
2. resonance ultraviolet laser generation device outside the chamber according to claim 1 is characterized in that: being coated with anti-reflection film and the centre wavelength that centre wavelength is 532nm on the double-colored eyeglass of four-time harmonic front end (2-2) of four-time harmonic system (2) is the highly reflecting films of 266nm; All be coated with the high transmittance film that centre wavelength is 532nm and 266nm on two logical light faces of four-time harmonic nonlinear optical frequency conversion crystal (2-3); Being coated with highly reflecting films and the centre wavelength that centre wavelength is 532nm on the double-colored eyeglass in four-time harmonic rear end (2-4) is the anti-reflection film of 266nm.
3. resonance ultraviolet laser generation device outside the chamber according to claim 1 is characterized in that: four-time harmonic nonlinear optical frequency conversion crystal (2-3) is barium metaborate nonlinear crystal or three cesium lithium borate nonlinear crystals.
4. according to resonance ultraviolet laser generation device outside any described chamber in the claim 1～3, it is characterized in that: second harmonic system (1) mainly is made up of the LD pumping source (1-1), pumping input coupled lens group (1-2), second harmonic front end trichromscope sheet (1-3), working-laser material crystal (1-4), acousto-optic Q modulation assembly (1-5), 532nm laser harmonic eyeglass (1-6), second harmonic nonlinear optical frequency conversion crystal (1-7), the terminal double-colored eyeglass (1-8) of second harmonic and the output collimation lens set (1-9) that are positioned on the same collimated light path; Wherein be equipped with pumping input coupled lens group (1-2) behind the LD pumping source (1-1), be positioned at the rear of pumping input coupled lens group (1-2) by second harmonic front end trichromscope sheet (1-3) and the formed second harmonic F-P of the terminal double-colored eyeglass (1-8) of second harmonic resonant cavity; Working-laser material crystal (1-4), acousto-optic Q modulation assembly (1-5), 532nm laser harmonic eyeglass (1-6) and second harmonic nonlinear optical frequency conversion crystal (1-7) then are successively set in the second harmonic F-P resonant cavity; Second harmonic F-P resonant cavity rear is provided with output collimation lens set (1-9).
5. resonance ultraviolet laser generation device outside the chamber according to claim 4 is characterized in that: pumping input coupled lens group (1-2) adopts non-spherical lens group or micro objective group.
6. resonance ultraviolet laser generation device outside the chamber according to claim 4 is characterized in that: output collimation lens set (1-9) adopts two aspheric surface collimating lenses, and all is coated with the high transmittance film that centre wavelength is 532nm on two aspheric surface collimating lenses.
7. resonance ultraviolet laser generation device outside the chamber according to claim 4; It is characterized in that: working-laser material crystal (1-4) is made up of neodymium-doped yttrium-aluminum garnet, and the centre wavelength of the peak absorbtivity wavelength of this working-laser material crystal (1-4) and LD pumping source (1-1) is complementary.
8. resonance ultraviolet laser generation device outside the chamber according to claim 4 is characterized in that: being coated with high transmittance film and the centre wavelength that centre wavelength is the 808nm pump light on the second harmonic front end trichromscope sheet (1-3) is the high-reflecting film of 1064nm and 532nm; All be coated with the anti-reflection film that centre wavelength is 1064nm on two logical light faces of working-laser material crystal (1-4) and acousto-optic Q modulation assembly (1-5); Being coated with anti-reflection film and the centre wavelength that centre wavelength is 1064nm on the 532nm laser harmonic eyeglass (1-6) is the high-reflecting film of 532nm; Be coated with the high transmittance film that centre wavelength is 1064nm and 532nm simultaneously on two logical light faces of second harmonic nonlinear optical frequency conversion crystal (1-7); Being coated with high-reflecting film and the centre wavelength that centre wavelength is 1064nm on the terminal double-colored eyeglass of second harmonic (1-8) is the high transmittance film of 532nm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011202204433U CN202167755U (en) | 2011-06-27 | 2011-06-27 | Outside-cavity resonant ultraviolet laser generating device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202204433U CN202167755U (en) | 2011-06-27 | 2011-06-27 | Outside-cavity resonant ultraviolet laser generating device |
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| CN202167755U true CN202167755U (en) | 2012-03-14 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102889929A (en) * | 2012-07-20 | 2013-01-23 | 中国电子科技集团公司第四十一研究所 | Method for calibrating wavelength of ultraviolet spectrograph |
| CN103094829A (en) * | 2012-11-30 | 2013-05-08 | 中国科学院福建物质结构研究所 | Quadruplicated frequency ultraviolet laser outside cavity |
| TWI614558B (en) * | 2013-06-11 | 2018-02-11 | 克萊譚克公司 | Deep ultra-violet (duv) continuous wave (cw) laser and method of generating duv cw laser radiation |
| US10175555B2 (en) | 2017-01-03 | 2019-01-08 | KLA—Tencor Corporation | 183 nm CW laser and inspection system |
| CN111025874A (en) * | 2019-11-08 | 2020-04-17 | 桂林电子科技大学 | Novel phase-shift phase microscopic imaging method based on F-P cavity |
-
2011
- 2011-06-27 CN CN2011202204433U patent/CN202167755U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102889929A (en) * | 2012-07-20 | 2013-01-23 | 中国电子科技集团公司第四十一研究所 | Method for calibrating wavelength of ultraviolet spectrograph |
| CN102889929B (en) * | 2012-07-20 | 2015-11-25 | 中国电子科技集团公司第四十一研究所 | A kind of ultraviolet spectrometer (UVS) method for wavelength calibration |
| CN103094829A (en) * | 2012-11-30 | 2013-05-08 | 中国科学院福建物质结构研究所 | Quadruplicated frequency ultraviolet laser outside cavity |
| TWI614558B (en) * | 2013-06-11 | 2018-02-11 | 克萊譚克公司 | Deep ultra-violet (duv) continuous wave (cw) laser and method of generating duv cw laser radiation |
| US10044166B2 (en) | 2013-06-11 | 2018-08-07 | Kla-Tencor Corporation | CW DUV laser with improved stability |
| US10175555B2 (en) | 2017-01-03 | 2019-01-08 | KLA—Tencor Corporation | 183 nm CW laser and inspection system |
| US10429719B2 (en) | 2017-01-03 | 2019-10-01 | Kla-Tencor Corporation | 183 nm CW laser and inspection system |
| CN111025874A (en) * | 2019-11-08 | 2020-04-17 | 桂林电子科技大学 | Novel phase-shift phase microscopic imaging method based on F-P cavity |
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Granted publication date: 20120314 Effective date of abandoning: 20130320 |
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