CN201833114U - Preparation device of surface-structured composite coating - Google Patents
Preparation device of surface-structured composite coating Download PDFInfo
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- CN201833114U CN201833114U CN 201020200277 CN201020200277U CN201833114U CN 201833114 U CN201833114 U CN 201833114U CN 201020200277 CN201020200277 CN 201020200277 CN 201020200277 U CN201020200277 U CN 201020200277U CN 201833114 U CN201833114 U CN 201833114U
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- pulsed laser
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- 238000004381 surface treatment Methods 0.000 claims abstract description 10
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Abstract
A preparation device of surface-structured composite coating is suitable for preparing surface-structured composite coating, and is an ultraviolet pulsed laser multifunctional surface treatment system device. The preparation device comprises an ultraviolet pulsed laser multifunctional surface treatment system device. The ultraviolet pulsed laser multifunctional surface treatment system device comprises a pulsed laser module, a precision scanning module and an environment regulation and control module which are sequentially connected. The structured treatment and composite coating deposition on material surface can be achieved at the same time by use of one laser source. The preparation device has the advantages of simple structure, easy control, single scanning, no need of complex post treatment of prepared samples, and wide application range. The ultraviolet pulsed laser has the characteristics of high photon energy and short wavelength. The preparation device can conduct precise surface structured treatment of any material, induce chemical reaction of multiple varieties of gases and efficiently conduct composite coating deposition.
Description
Technical field
The utility model relates to a kind of film coating of Surface Engineering, particularly a kind of surface structuration composite coating preparation method and device thereof.
Background technology
Along with science and technology and development of human society, more and more extramalization of the service condition of tribological material, complicated, this wearability to material, antifriction quality etc. have proposed more and more higher requirement.On the basis of traditional tribological material, by the surface engineering technology research and development, surperficial anti-friction wear-resistant coating provides one effectively, also to be scheme and the approach that has vitality for optimization mechanical system tribological property, solution fret wear.
Film coating is that Surface Engineering is independent of materialogy, heat treatment, plating, thermal spraying etc., becomes the key sign in independent technique field.In present stage, the preparation method of film coating mainly contains physical vapor deposition (PVD), chemical vapor deposition (CVD), plasma activated chemical vapour deposition (PCVD), ion beam assisted depositing (IBAD) and ion injection etc.; From the film coating material, still be soft, hard two big classes basically.But the conventional films coating has many shortcomings that can't overcome, as there being very big internal stress in the diamond-like coating, reduced and matrix between bond strength; Equadag coating has good antifriction performance, but the hardness of graphite is low, abrasion resistance properties is poor; Coating can not be coordinated the contradiction between hardness and the toughness.Therefore,, on component, develop to three components or four components, also seek new coating material simultaneously, even comprise the coating of oil-containing by one-component in the film coating field.The processing method of film coating develops to mixed process, low temperatureization and large scale direction on original PVD, CVD and IBAD basis, and surface structuration promptly prepares the processing method that the coating with predetermined surface geometry pattern also is the following emphasis of film coating.Up to now, do not see the patent and the research paper report of surface structuration composite coating aspect as yet.
Summary of the invention
The purpose of this utility model provides a kind of surface structuration composite coating preparation facilities that can coordinate film coating hardness and toughness.
For achieving the above object, surface structuration composite coating preparation facilities of the present utility model, comprise ultraviolet pulse laser multifunction surface treatment system device, ultraviolet pulse laser multifunction surface treatment system device comprises pulse laser module, precision sweep module and environment conditioning module, and pulse laser module, precision sweep module and environment conditioning sequence of modules are connected.
Described pulse laser module comprises controller and pulse laser, and controller and pulse laser are linked in sequence; Described precision sweep module comprises speculum, beam expanding lens, X-Y galvanometer and focus lamp, and speculum, beam expanding lens, X-Y galvanometer and focus lamp are linked in sequence, and the X-Y galvanometer is connected with computer; Described environment conditioning module comprises transparent glass, sample, rotatable sample platform, reative cell, stepper motor, computer, gas cylinder and vavuum pump, side at reative cell has a device that the hole of transparent glass is arranged, the rotatable sample platform is arranged in reative cell, rotatable sample platform upper end passes reative cell and is connected with stepper motor, on the rotatable sample platform, be connected with sample, gas cylinder and vavuum pump are arranged outside reative cell, gas cylinder is connected with reative cell with vavuum pump, and stepper motor is connected with the output of computer.
Beneficial effect: owing to adopted such scheme, prepared the composite coating with surface structuration at sample surfaces, smooth composite coating can be realized antifriction antiwear, and the surface structuration of composite coating will further improve its tribological property.At first be that structure is controlled.Conditions such as the rotary speed of the energy density by regulating laser, the sweep speed of X-Y galvanometer and sample platform, vacuum, background gas, can prepare the array microstructure with different depth, different live widths at material surface, the existence of this structure can effectively improve the tribological property of slidingsurface.Under DRY SLIDING, micro-structural can store abrasive dust or the microparticle that produces in the process of friction and wear, thereby reduces friction and reduce wearing and tearing.And under the lubricant medium condition, the micro-structural that distributes on the slidingsurface can form the hydrodynamic lubrication film, has good antifriction antiwear effect.The parameter difference of array microstructure, also different to the influence degree of tribological property, therefore controlled array microstructure can effectively be adjusted the anti-wear and wear-resistant performance of sample surfaces.By regulating ratio, the sequential scheduling of the reacting gas input in the composite coating deposition process, can effectively prepare gradient, composition controllable compound coating, thereby reduce the coating internal stress, effectively suppress the expansion of rubbing crack and spread the intensity and the plasticity_resistant deformation performance of raising coating.In addition, heat very localization during laser chemical vapor deposition, can produce the local deposition at a very little precise region of size range; Can reach very high reaction temperature, very little from the pollution beyond the substrate; This method deposition velocity exceeds several magnitude than traditional chemical vapour deposition.Material surface structuring processing and composite coating are coupled, thereby form the composite coating with specific surface structure.Superimposed and the synergy of excellent properties that this can make the excellent properties of patterned surface and composite coating further improves the anti-wear and wear-resistant performance of material surface.Simultaneously, the adhesion of composite coating and matrix is increased, effectively suppress coming off of friction process floating coat.It is novel, easy to process, efficient is high, adopts a LASER Light Source can realize the structuring processing of material surface and the deposition of composite coating simultaneously, simple in structure, be easy to control, single sweep operation gets final product, and need not the sample of preparation is carried out complicated aftertreatment technology; Applied range, ultraviolet pulse laser have the advantages that photon energy is big, wavelength is short, can carry out accurate surface structuration to any material and handle, and can induce the chemical reaction of multiple gases simultaneously, carry out the composite coating deposition efficiently.
Description of drawings
Fig. 1 is the utility model ultraviolet pulse laser multifunction surface treatment system device conceptual scheme.
Fig. 2 is the utility model ultraviolet pulse laser multifunction surface treatment system device schematic diagram.
Among the figure, 1-1, pulse laser module; 1-2, precision sweep module; 1-3, environment conditioning module; 1 controller, 2 pulse lasers, 3 speculums, 4 beam expanding lens, 5X-Y galvanometer, 6 focus lamps, 7 transparent glass, 8 samples, 9 rotatable sample platforms, 10 reative cells, 11 stepper motors, 12 computers, 13 gas cylinders, 14 vavuum pumps.
The specific embodiment
Below in conjunction with accompanying drawing embodiment of the present utility model is further described:
Shown in Figure 1, surface structuration composite coating preparation facilities of the present utility model mainly comprises three parts: pulse laser module 1-1, precision sweep module 1-2, environment conditioning module 2-3, pulse laser module 1-1, precision sweep module 1-2 and environment conditioning module 1-3 are linked in sequence.Laser energy density can adopt controller to regulate continuously in the zero-sum maximum magnitude.Focus on sample surfaces in the reative cell by the laser beam of pulse laser output through the precision sweep module, this module is connected in sequence by total reflective mirror, beam expanding lens, X-Y galvanometer, focus lamp.Vacuum in the reative cell is finished by vavuum pump (mechanical pump and molecular pump).Rotatable sample platform, stepper motor, computer connect successively, drive the rotation of sample platform by computer-controlled stepper motor, thereby realize rotatablely moving of cylindrical part.
Shown in Figure 2, the pulse laser module comprises controller 1 and pulse laser 2, and controller 1 and pulse laser 2 are linked in sequence, and the pulse laser module is the commercially available prod; The precision sweep module comprises speculum 3, beam expanding lens 4, X-Y galvanometer 5 and focus lamp 6, and speculum 3, beam expanding lens 4, X-Y galvanometer 5 and focus lamp 6 are linked in sequence, and X-Y galvanometer 5 is connected with the computer 12 of environment conditioning module 1-3; The environment conditioning module comprises transparent glass 7, sample 8, rotatable sample platform 9, reative cell 10, stepper motor 11, computer 12, gas cylinder 13 and vavuum pump 14, and the configuration CPU of computer 12 is that Pentium is more than three, more than the internal memory 512M; Side at reative cell 10 has a device that the hole of transparent glass 7 is arranged, rotatable sample platform 9 is arranged in reative cell 10, rotatable sample platform 9 upper ends pass reative cell and are connected with stepper motor 11, on rotatable sample platform 9, be connected with sample 8, gas cylinder 13 and vavuum pump 14 are arranged outside reative cell 10, gas cylinder 13 is connected with reative cell 10 with vavuum pump 14, and stepper motor 11 is connected with the output of computer 12.
Operation principle and process: at first, set up multifunction surface treatment system device, open pulse laser 2, the energy density that adopts controller 1 to regulate laser.Laser beam carries out primary event through speculum 3, is transferred to beam expanding lens 4 then, lasing beam diameter can be adjusted to suitable size by the distance of regulating two eyeglasses in the beam expanding lens.Laser beam behind the expansion bundle is through inciding behind the X-Y galvanometer 5 on the focus lamp 6, and the transparent window 7 of process reative cell 10 focuses on the sample 8.The track that laser spot is moved on sample is controlled by 12 pairs of X-Y galvanometers of computer, and focus lamp can be controlled the size of focus.Sample 8 is fixed on the rotatable sample platform 9, to realize the processing to the cylindrical sample surface.The rotation of sample platform drives by computer 12 control step motors 11.By selecting corresponding gas cylinder 13 and regulating vavuum pump 14 and control background gas and vacuum in the reative cell.At last, realize the surface structuration processing by the energy density of regulating laser, the sweep speed of X-Y galvanometer and rotary speed, vacuum, the background gas of sample platform.After the physics and chemistry of surface, control reacting gas composition, flow and ratio in the reative cell 10 by selecting suitable gas cylinder 13, energy density to the composite coating of regulating laser deposits desirable value, and the rotary speed of sweep speed by computer-controlled X-Y galvanometer and sample platform realizes the controllable deposition of composite coating then.
Claims (4)
1. surface structuration composite coating preparation facilities, it is characterized in that: it comprises ultraviolet pulse laser multifunction surface treatment system device, ultraviolet pulse laser multifunction surface treatment system device comprises pulse laser module, precision sweep module and environment conditioning module, and pulse laser module, precision sweep module and environment conditioning sequence of modules are connected.
2. surface structuration composite coating preparation facilities according to claim 1 is characterized in that: described pulse laser module comprises controller and pulse laser, and controller and pulse laser are linked in sequence.
3. surface structuration composite coating preparation facilities according to claim 1, it is characterized in that: described precision sweep module comprises speculum, beam expanding lens, X-Y galvanometer and focus lamp, speculum, beam expanding lens, X-Y galvanometer and focus lamp are linked in sequence, and the X-Y galvanometer is connected with computer.
4. surface structuration composite coating preparation facilities according to claim 1, it is characterized in that: described environment conditioning module comprises transparent glass, sample, the rotatable sample platform, reative cell, stepper motor, computer, gas cylinder and vavuum pump, side at reative cell has a device that the hole of transparent glass is arranged, the rotatable sample platform is arranged in reative cell, rotatable sample platform upper end passes reative cell and is connected with stepper motor, on the rotatable sample platform, be connected with sample, gas cylinder and vavuum pump are arranged outside reative cell, gas cylinder is connected with reative cell with vavuum pump, and stepper motor is connected with the output of computer.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020200277 CN201833114U (en) | 2010-05-18 | 2010-05-18 | Preparation device of surface-structured composite coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020200277 CN201833114U (en) | 2010-05-18 | 2010-05-18 | Preparation device of surface-structured composite coating |
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| CN201833114U true CN201833114U (en) | 2011-05-18 |
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| CN 201020200277 Expired - Fee Related CN201833114U (en) | 2010-05-18 | 2010-05-18 | Preparation device of surface-structured composite coating |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112975133A (en) * | 2021-02-07 | 2021-06-18 | 福建师范大学 | Device for quickly modifying surface of material by laser |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112975133A (en) * | 2021-02-07 | 2021-06-18 | 福建师范大学 | Device for quickly modifying surface of material by laser |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110518 Termination date: 20120518 |