CN106735911A - A kind of method on ultrafast laser treatment aluminium oxide ceramic insert surface - Google Patents
A kind of method on ultrafast laser treatment aluminium oxide ceramic insert surface Download PDFInfo
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- CN106735911A CN106735911A CN201611063655.9A CN201611063655A CN106735911A CN 106735911 A CN106735911 A CN 106735911A CN 201611063655 A CN201611063655 A CN 201611063655A CN 106735911 A CN106735911 A CN 106735911A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/355—Texturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
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- Optics & Photonics (AREA)
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- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
The present invention provides a kind of method on ultrafast laser treatment aluminium oxide ceramic insert surface, the method is first by ceramic tip sample is using the clean rear cold wind drying of deionized water and washes of absolute alcohol or dries, recycle laser processing technology, sample is surface-treated after the technological parameter that correlation is regulated using ultrafast laser, countless micro-nano structures are processed in sample surfaces, tool surface is changed into super close cutting fluid from close cutting fluid.Preparation method process is simple of the invention, can be carried out, easy to operate, efficiency high, less energy consumption, low cost, environmental protection, it is easy to accomplish commercial Application in open environment.
Description
Technical field
The present invention relates to cermet substrate process for modifying surface field, more particularly to a kind of ultrafast laser treatment aluminum oxide
The method on ceramic tip surface.
Background technology
The aluminum oxide characteristic different from other cutter materials be：Aluminum oxide stable chemical performance, inoxidizability is especially good, it
Cutting edge even at can also be cut for a long time under red heat state, therefore alumina tool is particularly suitable for high-speed cutting.By
It is poor to the wetability of most of metallic in aluminum oxide blade, so it is difficult to metal bond, cutting when coefficient of friction it is low, cutting
Power is small, be not likely to produce built-up edge and bonding abrasion, therefore workpiece is readily obtained finish surface higher.Aluminum oxide tool is fitted
Processing most metals material is closed, cutting chilled cast iron or hardened steel is especially suitable for, it is desirable using smart car generation mill to these materials
Obtain obvious technical economic benefit.Aluminum oxide keeps high rigidity at high temperature, and its cutting speed is up to 1300 ms/min.Current oxygen
Change aluminium cutter and be mainly used in semifinishing and finishing, finish its precision and finish is adapted to being ground with car generation for hard material, and
Processing efficiency is greatly improved, processing cost can reduce by more than 50, so aluminum oxide tool is popular.In German automobiles very
Multi-part is all that alumina tool is completed with car generation mill finishing.
Cutting tool is lubricated using cutting fluid be most traditional lubricating system, using the widest in actual production
It is general.Cutting fluid can be divided into the water base and major class of oil base two, and by base oil (liquid) and various additives, (polar additive, oiliness are added
Agent and kollag etc.) composition.Its mechanism of action is mainly and penetrates into knife-bits contact zone by cutting fluid, in knife-bits contact
Lubricating film is formed between interface and knife-work contact interface so as to reach lubricant effect, reduces the friction in working angles, reduce friction
Power and cutting force.
Method with laser directly changes Al2O3The wellability on ceramic tip surface, preparing has micro-nano-scale double-deck
The super hydrophobic surface of structure will be a promising technical research.The wellability of ceramic tool material is cermet table
A critically important feature of face, the microstructure and constituent joint effect of material the wellability of material surface.In pottery
The preparation method that close cutting fluid surface is prepared on porcelain cutter is a lot, and typical method and approach mainly have：Sol-gel method, electricity
Chemical method, method of electrostatic spinning, plasma technique, oxidation-reduction method, hydro-thermal method, phase separation method, vapour deposition process, layer by layer certainly
Construction from part, template etc..The existing technology in part usually from ceramic material, start with and prepare Hydophilic ceramics in itself by performance, or needs
Redesign, prepare hydrophobic coating, result in the deficiencies such as high cost, complex process, hardly possible popularization.While these technology generally existings
The immersion of chemical medicinal liquid, can produce chemical contamination, and complex steps, the low shortcoming of time-consuming and preparation efficiency, these shortcomings are all limited
Its practical application is made.
In sum, development technology is simple, and preparation efficiency is high, it is adaptable to commercial application, and does not produce any environment dirty
Dye, disposably realizes Al2O3The method that ceramic tip substrate surface cordiality is cut fluidity and needs not move through any chemical technology treatment,
It is current researcher technical problem urgently to be resolved hurrily.
The content of the invention
In order to overcome the shortcomings of that prior art is present, it is an object of the invention to provide a kind of process is simple, preparation efficiency
The method on the ultrafast laser treatment aluminium oxide ceramic insert surface of high, environmental protection.The method of the present invention can in various sizes and
Different shape Al2O3Ceramic tip surface obtains the super close cutting fluid surface that steady in a long-term, contact angle is about 0 °, while being obtained
Surface to increase tool surface lubricity and reduce friction have important effect.
The purpose of the present invention is achieved through the following technical solutions：
A kind of method on ultrafast laser treatment aluminium oxide ceramic insert surface, methods described comprises the following steps：
Step one, by pending Al2O3Ceramic tip sample is cleaned by ultrasonic in deionized water, then uses washes of absolute alcohol
After clean rear i.e. surface is without dust and grease, by Al2O3Ceramic tip sample surfaces cold wind is dried up or room temperature is dried in the air naturally
It is dry, obtain the Al of cleaning2O3Ceramic tip sample；
Step 2, using laser processing technology, using what is obtained to step one after the related technological parameter of ultrafast laser regulation
Clean Al2O3Ceramic tip sample surfaces carry out laser scanning treatment, and micro-nano structure is processed in sample surfaces.
As preference：A kind of supersonic frequency of ultrasonic cleaning of step is 40kHz, and the deionized water resistivity is
18.25 megaohms, the deionized water should be by Al2O3Ceramic tip sample surfaces flood, and continuous ultrasound cleans 30 points at room temperature
Clock.
As preference：Ultrafast laser wavelength is 720-880nm, pulsewidth 90-110fs, pulse in the step 2
Energy is less than 0.4mJ, repetition rate 9-11 kHz, and the theoretical beam diameter after focusing is 12-17 μm.
As preference：Ultrafast laser wavelength is 800nm in the step 2, and pulsewidth 100fs, single pulse energy is less than
0.4mJ, the kHz of repetition rate 10, the theoretical beam diameter after focusing are 15 μm.
As preference：The specific method of laser scanning treatment is in the step 2：Using galvanometer to Al2O3Stupalox
Piece sample surfaces carry out light beam scanning, and the speed of vibration mirror scanning is 0.1mm/s~30m/s.
As preference：The specific method of laser scanning treatment is in the step 2：Scanning light beam is fixed, Al2O3Pottery
To beam motion, the speed of motion is 0.1mm/s~3m/s to porcelain blade-like condition.
As preference：The single pulse energy is 30 μ J~90 μ J, and sweep speed is 29mm/s~294mm/s.
Compared with prior art, the present invention has advantages below：
（1）The Al prepared using the inventive method2O3Ceramic tip is about 0 ° with the contact angle of cutting fluid, therefore with non-
Often good hydrophilicity；
（2）Preparation method process is simple of the invention, can be carried out, easy to operate, efficiency high, less energy consumption in open environment, into
This low, environmental protection, does not use any chemical reagent coating, and the technological parameter of the inventive method to be easily controlled, it is easy to accomplish
Commercial Application；
（3）The close cutting fluid Al prepared using the inventive method2O3Ceramic tip surface property stabilization, possesses good profit
Slip energy and frictional behaviour, considerably increase Al2O3The service life of ceramic tip.
Brief description of the drawings
Fig. 1 is untreated preceding Al2O3The contact angle schematic diagram on ceramic tip surface（a）And tomograph（b）；
Fig. 2 is the Al that the embodiment of the present invention 1 is prepared using ultrafast laser2O3Ceramic tip is illustrated with the contact angle of cutting fluid
Figure（c）And tomograph（d）；
Fig. 3 is respectively the Al that the embodiment of the present invention 2 is prepared using ultrafast laser2O3The contact angle of ceramic tip and cutting fluid
Schematic diagram（e）And tomograph（f）；
Fig. 4 is respectively the Al that the embodiment of the present invention 3 is prepared using ultrafast laser2O3The contact angle of ceramic tip and cutting fluid
Schematic diagram（g）And tomograph（h）；
Fig. 5 is respectively the Al that the embodiment of the present invention 4 is prepared using ultrafast laser2O3The contact angle of ceramic tip and cutting fluid
Schematic diagram（j）And tomograph（k）.
Specific embodiment
In order to be better understood from the present invention, technical scheme is done further in detail below in conjunction with specific embodiment
Introduce.Experimental technique used in following embodiments is conventional method unless otherwise specified.
The method on ultrafast laser treatment aluminium oxide ceramic insert surface of the present invention, is in Al2O3Ceramic tip surface
On produce micro nano surface structure and its contact angle to water-base cutting fluid is about 0 °, with good wetability；Methods described
Comprise the following steps：
Step one, by pending Al2O3Ceramic tip sample is cleaned in being placed on the ultrasonic washing instrument for fill deionized water, so
After there is no dust and grease with washes of absolute alcohol to surface afterwards, by the Al2O3Ceramic tip sample surfaces are blown with cold wind
Dry or room temperature is dried naturally, obtains the Al of cleaning2O3Ceramics sample；
Step 2, using laser processing technology, is regulated after the technological parameter of correlation to described in step one using ultrafast laser
The clean Al for obtaining2O3Ceramic tip sample surfaces carry out laser scanning treatment, and micro-nano structure is processed in sample surfaces；
The laser scanning carries out light beam scanning using galvanometer system, and the speed of vibration mirror scanning is 0.1mm/s-30m/s, laser
The sweep limits of break-make and galvanometer system, scanning track and process velocity are by computer program control and setting；Or it is described sharp
Optical scanning realizes, light beam is fixed that sample relative beam motion, the speed that platform is moved is 0.1mm/ using motion platform system
S-3m/s, the break-make of laser, platform movement locus and speed are by computer program control and setting；
Wherein, the ultrafast laser wavelength described in step 2 is 800nm, and the laser processing parameter is：Pulsewidth 100fs, simple venation
Energy is rushed less than 0.4mJ, the kHz of repetition rate 10, the theoretical spot diameter after focusing is 15 μm.
Still further preferably, the single pulse energy is 30 μ J -90 μ J, and sweep speed is 29mm/s-294mm/s.
Embodiment 1
A kind of method on ultrafast laser treatment aluminium oxide ceramic insert surface of the present embodiment, including step in detail below：
Step one, by Al2O3Ceramic tip sample is cleaned with ultrasonic washing instrument, and ultrasonic washing instrument ultrasonic frequency is
40kHz, sample surfaces are flooded with the deionized water that resistivity is 18.25 megaohms, at room temperature, continuous wash 30 minutes, and then
After with washes of absolute alcohol to the no dust in surface and grease, room temperature is dried naturally, obtains the Al of cleaning2O3Ceramic tip
Sample；
Step 2, using ultrafast laser to the clean Al that is obtained described in step one2O3Ceramics sample surface carries out laser scanning
Processing, countless micro-nano structures are processed in sample surfaces；The laser wavelength is 800nm, and pulsewidth is 100fs, pulse
Energy is 30 μ J, and repetition rate is 10kHz, and the laser scanning utilizes X-Y scanning galvanometer systems, makes lasing beam diameter be 15 μ
M, with Al described in the ablation line by line of the speed of 29mm/s2O3Ceramic tip sample surfaces, obtain final product.
After laser treatment is complete, using total synthesis water-base cutting fluid, using optical contact angle surface interfacial tension measuring instrument
The Al obtained described in test2O3The contact angle on ceramic tip surface：Cutting fluid volume is 9 microlitres, and test temperature is 21 DEG C, humidity
It is 19.5%RH.The result for measuring is approximately 0 ° for contact angle, it can be said that surface now is super close cutting fluid surface, will
Sample is placed around being measured again after 90 days in environment its contact angle and measures its contact angle and is still about 0 °, therefore sample after processing
Product surfaces has good stability；
The Al that the present embodiment is prepared2O3Ceramic tip surface and the three-dimensional knot of the contact angle schematic diagram and blade face of cutting fluid
Composition is as shown in Figure 2.
The Al that the present embodiment is prepared2O3Ceramic tip surface is shown in Table 1 with the contact angle test result of cutting fluid.
Embodiment 2
A kind of method on ultrafast laser treatment aluminium oxide ceramic insert surface of the present embodiment, including step in detail below：
Step one, by Al2O3Ceramic tip sample is cleaned with ultrasonic washing instrument, and ultrasonic washing instrument ultrasonic frequency is
40kHz, sample surfaces are flooded with the deionized water that resistivity is 18.25 megaohms, at room temperature, continuous wash 30 minutes, and then
After with washes of absolute alcohol to the no dust in surface and grease, room temperature is dried naturally, obtains the Al of cleaning2O3Ceramic tip
Sample；
Step 2, using ultrafast laser to the clean Al that is obtained described in step one2O3Ceramics sample surface carries out laser scanning
Processing, countless micro-nano structures are processed in sample surfaces；The laser wavelength is 800nm, and pulsewidth is 100fs, pulse
Energy is 90 μ J, and repetition rate is 10kHz, and the laser scanning utilizes X-Y scanning galvanometer systems, makes lasing beam diameter be 15 μ
M, with Al described in the ablation line by line of the speed of 29mm/s2O3Ceramic tip sample surfaces, obtain final product.
After laser treatment is complete, using total synthesis water-base cutting fluid, using optical contact angle surface interfacial tension measuring instrument
The Al obtained described in test2O3The contact angle on ceramic tip surface：Cutting fluid volume is 9 microlitres, and test temperature is 21 DEG C, humidity
It is 19.5%RH.The result for measuring is approximately 0 ° for contact angle, it can be said that surface now is super close cutting fluid surface, will
Sample is placed around being measured again after 90 days in environment its contact angle and measures its contact angle and still is about 0 °, therefore sample after processing
Surface has good stability；
The Al that the present embodiment is prepared2O3Ceramic tip surface and the three-dimensional knot of the contact angle schematic diagram and blade face of cutting fluid
Composition is as shown in Figure 3.
The Al that the present embodiment is prepared2O3Ceramic tip surface is shown in Table 1 with the contact angle test result of cutting fluid.
Embodiment 3
The a kind of of the present embodiment prepares Al using ultrafast laser2O3The method on the super close cutting fluid surface of ceramic tip, including it is following
Specific steps：
Step one, by Al2O3Ceramic tip sample is cleaned with ultrasonic washing instrument, and ultrasonic washing instrument ultrasonic frequency is
40kHz, sample surfaces are flooded with the deionized water that resistivity is 18.25 megaohms, at room temperature, continuous wash 30 minutes, and then
After with washes of absolute alcohol to the no dust in surface and grease, room temperature is dried naturally, obtains the Al of cleaning2O3Ceramic tip
Sample；
Step 2, using ultrafast laser to the clean Al that is obtained described in step one2O3Ceramics sample surface carries out laser scanning
Processing, countless micro-nano structures are processed in sample surfaces；The laser wavelength is 800nm, and pulsewidth is 100fs, pulse
Energy is 30 μ J, and repetition rate is 10kHz, and the laser scanning utilizes X-Y scanning galvanometer systems, makes lasing beam diameter be 15 μ
M, with Al described in the ablation line by line of the speed of 294mm/s2O3Ceramic tip sample surfaces；
After laser treatment is complete, using total synthesis water-base cutting fluid, tested using optical contact angle surface interfacial tension measuring instrument
The Al for obtaining2O3The contact angle on ceramic tip surface：Cutting fluid volume is 9 microlitres, and test temperature is 21 DEG C, and humidity is
19.5%RH.The result for measuring is about 0 ° for contact angle, it can be said that surface now is super close cutting fluid surface, by sample
It is placed around being measured again after 90 days in environment its contact angle and measures its contact angle and still is about 0 °, therefore sample surfaces after processing
Have good stability；
The Al that the present embodiment is prepared2O3Ceramic tip surface and the three-dimensional knot of the contact angle schematic diagram and blade face of cutting fluid
Composition is as shown in Figure 4.
The Al that the present embodiment is prepared2O3Ceramic tip surface is shown in Table 1 with the contact angle test result of cutting fluid.
Embodiment 4
The a kind of of the present embodiment prepares Al using ultrafast laser2O3The method on ceramic tip parent's cutting fluid surface, including following tool
Body step：
Step one, by Al2O3Ceramic tip sample is cleaned with ultrasonic washing instrument, and ultrasonic washing instrument ultrasonic frequency is
40kHz, sample surfaces are flooded with the deionized water that resistivity is 18.25 megaohms, at room temperature, continuous wash 30 minutes, and then
After with washes of absolute alcohol to the no dust in surface and grease, room temperature is dried naturally, obtains the Al of cleaning2O3Ceramic tip
Sample；
Step 2, using ultrafast laser to the clean Al that is obtained described in step one2O3Ceramics sample surface carries out laser scanning
Processing, countless micro-nano structures are processed in sample surfaces；The laser wavelength is 800nm, and pulsewidth is 100fs, pulse
Energy is 90 μ J, and repetition rate is 10kHz, and the laser scanning utilizes X-Y scanning galvanometer systems, makes lasing beam diameter be 15 μ
M, with Al described in the ablation line by line of the speed of 294mm/s2O3Ceramic tip sample surfaces；
After laser treatment is complete, using total synthesis water-base cutting fluid, tested using optical contact angle surface interfacial tension measuring instrument
The Al for obtaining2O3The contact angle on ceramic tip surface：Cutting fluid volume is 9 microlitres, and test temperature is 21 DEG C, and humidity is
19.5%RH.The result for measuring is approximately 0 ° for contact angle, it can be said that surface now is super close cutting fluid surface, by sample
Product are placed around being measured again after 90 days in environment its contact angle and measure its contact angle and still are about 0 °, therefore sample table after processing
Face has good stability；
The Al that the present embodiment is prepared2O3Ceramic tip surface and the three-dimensional knot of the contact angle schematic diagram and blade face of cutting fluid
Composition is as shown in Figure 5.
The Al that the present embodiment is prepared2O3Ceramic tip surface is shown in Table 1 with the contact angle test result of cutting fluid.
Through overtesting, surface roughness Ra is less than 0.7 μm before aluminium oxide ceramic insert processing in above-described embodiment；After Laser Processing
The roughness Ra on surface is 0.7 μm~1.4 μm.
The Al that table 1 is prepared for various embodiments of the present invention2O3Ceramic tip surface and the test result of cutting fluid contact angle.
Table 1
| Embodiment | Laser treatment contact angle after a hour/° | Laser treatment contact angle after 90 days/° |
| Embodiment 1 | Approximate 0 | Approximate 0 |
| Embodiment 2 | Approximate 0 | Approximate 0 |
| Embodiment 3 | Approximate 0 | Approximate 0 |
| Embodiment 4 | Approximate 0 | Approximate 0 |
Embodiment 5
The a kind of of the present embodiment prepares Al using ultrafast laser2O3The method on ceramic tip parent's cutting fluid surface, including following tool
Body step：
Step one, by Al2O3Ceramic tip sample is cleaned with ultrasonic washing instrument, and ultrasonic washing instrument ultrasonic frequency is
40kHz, sample surfaces are flooded with the deionized water that resistivity is 18.25 megaohms, at room temperature, continuous wash 10 minutes, and then
After with washes of absolute alcohol to the no dust in surface and grease, room temperature is dried naturally, obtains the Al of cleaning2O3Ceramic tip
Sample；
Step 2, using ultrafast laser to the clean Al that is obtained described in step one2O3Ceramics sample surface carries out laser scanning
Processing, countless micro-nano structures are processed in sample surfaces；The laser wavelength is 720nm, and pulsewidth is 90fs, single pulse energy
It is 60 μ J to measure, and repetition rate is 9kHz, and the laser scanning utilizes X-Y scanning galvanometer systems, makes lasing beam diameter for 12 μm, with
Al described in the ablation line by line of the speed of 250mm/s2O3Ceramic tip sample surfaces, obtain final product.
Embodiment 6
The a kind of of the present embodiment prepares Al using ultrafast laser2O3The method on ceramic tip parent's cutting fluid surface, including following tool
Body step：
Step one, by Al2O3Ceramic tip sample is cleaned with ultrasonic washing instrument, and ultrasonic washing instrument ultrasonic frequency is
40kHz, sample surfaces are flooded with the deionized water that resistivity is 18.25 megaohms, at room temperature, continuous wash 20 minutes, and then
After with washes of absolute alcohol to the no dust in surface and grease, room temperature is dried naturally, obtains the Al of cleaning2O3Ceramic tip
Sample；
Step 2, using ultrafast laser to the clean Al that is obtained described in step one2O3Ceramics sample surface carries out laser scanning
Processing, countless micro-nano structures are processed in sample surfaces；The laser wavelength is 880nm, and pulsewidth is 110fs, pulse
Energy is 60 μ J, and repetition rate is 11kHz, and the laser scanning utilizes X-Y scanning galvanometer systems, makes lasing beam diameter be 19 μ
M, with Al described in the ablation line by line of the speed of 100mm/s2O3Ceramic tip sample surfaces, obtain final product.
In above-described embodiment, the specific method of laser scanning treatment can be to Al using galvanometer in step 22O3Ceramic tip
Sample surfaces carry out light beam scanning, and the speed of vibration mirror scanning can also be to fix scanning light beam for 29mm/s~294mm/s,
Al2O3Ceramic tip sample relative beam is moved, and the speed of motion is 29mm/s~294mm/s.
It should be appreciated that the part that this specification is not elaborated belongs to prior art.
It should be appreciated that the above-mentioned description for preferred embodiment is more detailed, therefore can not be considered to the present invention
The limitation of scope of patent protection, one of ordinary skill in the art, will right of the present invention is not departed under enlightenment of the invention
Ask under protected ambit, replacement can also be made or deformed, each fall within protection scope of the present invention, it is of the invention
Scope is claimed should be determined by the appended claims.
Claims (7)
1. a kind of method that ultrafast laser processes aluminium oxide ceramic insert surface, it is characterised in that：Methods described includes following step
Suddenly：
Step one, by pending Al2O3Ceramic tip sample is cleaned by ultrasonic in deionized water, then uses washes of absolute alcohol
By Al after clean2O3Ceramic tip sample surfaces cold wind is dried up or room temperature is dried naturally, obtains the Al of cleaning2O3Ceramic tip
Sample；
Step 2, using laser processing technology, using what is obtained to step one after the related technological parameter of ultrafast laser regulation
Clean Al2O3Ceramic tip sample surfaces carry out laser scanning treatment, and micro-nano structure is processed in sample surfaces.
2. the method for claim 1, it is characterised in that：Deionized water described in the step one should be by Al2O3Stupalox
Piece sample surfaces flood, continuous wash 10-30 minutes at room temperature.
3. method as claimed in claim 2, it is characterised in that：Ultrafast laser wavelength is 720-880nm in the step 2,
Pulsewidth 90-110fs, single pulse energy is less than 0.4mJ, repetition rate 9-11 kHz, and the theoretical beam diameter after focusing is 12-17
μm。
4. method as claimed in claim 3, it is characterised in that：Ultrafast laser wavelength is 800nm, pulsewidth in the step 2
100fs, single pulse energy is less than 0.4mJ, the kHz of repetition rate 10, and the theoretical beam diameter after focusing is 15 μm.
5. the method as described in claim 3 or 4, it is characterised in that：The specific method of laser scanning treatment in the step 2
For：Using galvanometer to Al2O3Ceramic tip sample surfaces carry out light beam scanning, and the speed of vibration mirror scanning is 29mm/s~294mm/
s。
6. the method as described in claim 3 or 4, it is characterised in that：The specific method of laser scanning treatment in the step 2
For：Scanning light beam is fixed, Al2O3Ceramic tip sample relative beam is moved, and the speed of motion is 29mm/s~294mm/s.
7. the method as described in claim 3 or 4 is any, it is characterised in that：The single pulse energy is 30 μ J~90 μ J.
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| CN110842366A (en) * | 2019-12-02 | 2020-02-28 | 北京航空航天大学 | Laser processing method for preparing ceramic surface super-hydrophilic structure |
| CN111299869A (en) * | 2019-11-26 | 2020-06-19 | 湖北工业大学 | Gradient hydrophilic cutting fluid Al processed by femtosecond laser2O3Method for ceramic cutting tool |
| WO2020147170A1 (en) * | 2019-01-17 | 2020-07-23 | 广东工业大学 | Silicon nitride ceramic with surface-modifiable micro-nano structure, and processing method therefor |
| CN111673284A (en) * | 2020-05-29 | 2020-09-18 | 上海工程技术大学 | Method for improving wetting and spreading performance of reaction wetting system material |
| CN114105677A (en) * | 2021-12-28 | 2022-03-01 | 中国科学院长春光学精密机械与物理研究所 | Method for realizing lasting super-hydrophilicity of sapphire surface |
| CN114309955A (en) * | 2022-01-13 | 2022-04-12 | 江苏富乐华半导体科技股份有限公司 | Ceramic copper-clad substrate and laser processing technology thereof |
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