CN201795793U - 晶片承载台的水平度检测装置 - Google Patents
晶片承载台的水平度检测装置 Download PDFInfo
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- CN201795793U CN201795793U CN2010202850883U CN201020285088U CN201795793U CN 201795793 U CN201795793 U CN 201795793U CN 2010202850883 U CN2010202850883 U CN 2010202850883U CN 201020285088 U CN201020285088 U CN 201020285088U CN 201795793 U CN201795793 U CN 201795793U
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CN2010202850883U CN201795793U (zh) | 2010-08-05 | 2010-08-05 | 晶片承载台的水平度检测装置 |
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CN201795793U true CN201795793U (zh) | 2011-04-13 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104858769A (zh) * | 2014-02-26 | 2015-08-26 | 盛美半导体设备(上海)有限公司 | 相对距离测量装置及方法 |
TWI650281B (zh) * | 2017-10-26 | 2019-02-11 | 均華精密工業股份有限公司 | 取放單元調整水平系統及其方法 |
WO2021164771A1 (zh) * | 2020-02-21 | 2021-08-26 | 长鑫存储技术有限公司 | 晶圆加工系统、半导体机台自动调平装置及其调平方法 |
CN113739762A (zh) * | 2021-09-17 | 2021-12-03 | 无锡迪渊特科技有限公司 | 用于半导体设备的安装位检测装置 |
CN114577178A (zh) * | 2022-03-17 | 2022-06-03 | 新阳硅密(上海)半导体技术有限公司 | 一种电镀头水平检测装置及方法 |
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2010
- 2010-08-05 CN CN2010202850883U patent/CN201795793U/zh not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104858769A (zh) * | 2014-02-26 | 2015-08-26 | 盛美半导体设备(上海)有限公司 | 相对距离测量装置及方法 |
TWI650281B (zh) * | 2017-10-26 | 2019-02-11 | 均華精密工業股份有限公司 | 取放單元調整水平系統及其方法 |
WO2021164771A1 (zh) * | 2020-02-21 | 2021-08-26 | 长鑫存储技术有限公司 | 晶圆加工系统、半导体机台自动调平装置及其调平方法 |
US11972967B2 (en) | 2020-02-21 | 2024-04-30 | Changxin Memory Technologies, Inc. | Wafer processing system, semiconductor-machine automatic leveling apparatus and leveling method thereof |
CN113739762A (zh) * | 2021-09-17 | 2021-12-03 | 无锡迪渊特科技有限公司 | 用于半导体设备的安装位检测装置 |
CN113739762B (zh) * | 2021-09-17 | 2022-05-20 | 无锡迪渊特科技有限公司 | 用于半导体设备的安装位检测装置 |
CN114577178A (zh) * | 2022-03-17 | 2022-06-03 | 新阳硅密(上海)半导体技术有限公司 | 一种电镀头水平检测装置及方法 |
CN114577178B (zh) * | 2022-03-17 | 2023-11-24 | 新阳硅密(上海)半导体技术有限公司 | 一种电镀头水平检测装置及方法 |
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Owner name: SEMICONDUCTOR MANUFACTURING (BEIJING) INTERNATIONA Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING (SHANGHAI) INTERNATIONAL CORPORATION Effective date: 20121105 |
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Effective date of registration: 20121105 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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