CN201778103U - Evaporation source device of organic light emitting diode (OLED) evaporator - Google Patents
Evaporation source device of organic light emitting diode (OLED) evaporator Download PDFInfo
- Publication number
- CN201778103U CN201778103U CN2010205212691U CN201020521269U CN201778103U CN 201778103 U CN201778103 U CN 201778103U CN 2010205212691 U CN2010205212691 U CN 2010205212691U CN 201020521269 U CN201020521269 U CN 201020521269U CN 201778103 U CN201778103 U CN 201778103U
- Authority
- CN
- China
- Prior art keywords
- evaporation source
- hole
- crucible
- assembly
- working
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The utility model relates to an evaporation source device of an organic light emitting diode (OLED) evaporator, which comprises a working platform, crucible components and evaporation source baffle components. A working through hole is disposed at the center of the working platform, and at least one group of the crucible components and the evaporation source baffle components are uniformly arrayed in the working through hole peripherally. The evaporation source device is characterized by further comprising a crucible dredging component which is located at the center of the working through hole and comprises a probe, a hanging arm and a lifting member, and the probe is fixedly connected with the lifting member through the hanging arm and can perpendicularly move along with the lifting member and rotate along the center of the working through hole. The evaporation source device has the advantages that the evaporation source device can automatically dredge evaporation materials blocked in the crucible components arrayed at the periphery of the working through hole, thereby keeping production coherence and efficiency and also avoiding affecting quality of OLED display devices during manual dredging.
Description
Technical field
The utility model belongs to OLED technique of display field, relates in particular to the evaporated device of OLED display device organic luminous layer.
Background technology
The OLED display device is made carrier blocking layers and the organic luminous layer that constitutes the OLED display device by the evaporation organism.As shown in Figure 1, the evaporation source of existing OLED evaporator, comprise workplatform 1, crucible assembly 2, evaporation source baffle plate assembly 3, the central authorities of workplatform 1 have work through hole 11, many group crucible assemblies 2 and evaporation source baffle plate assembly 3 are evenly distributed according to circumference in the work through hole, evaporation source baffle plate assembly 3 can be connected with the actuating unit of device outside, constantly opens and block crucible assembly 2, so that selectively carry out evaporation process.In the organic matter vaporization plating process,, be easy to assemble, until the outlet of crucible assembly 2 is blocked fully at the outlet position of crucible assembly 2 because the organism that evaporation goes out is fluffy structure.But because the singularity of OLED display device manufacture craft need be finished organic evaporation continuously under the vacuum environment that continues, in case and the outlet of crucible assembly 2 is blocked, organism can't be evaporated, evaporation process can't be proceeded, have a strong impact on production, experiment progress.Simultaneously, under existing situation, the outlet of mediation crucible assembly 2 need be opened the evaporation chamber, the manually outlet of mediation crucible assembly 2 is opened the evaporation chamber and is also vacuumized again, generally needs 1～2 hour, continuity and the efficiency of producing brought very big influence, because element manufacturing is interrupted, device performance is also received influence to a certain degree, influences quality product simultaneously.
The utility model content
The purpose of this utility model is the deficiency that can not dredge the material that the outlet of its crucible assembly stops up for the evaporation source that overcomes existing OLED evaporator automatically, has proposed the evaporation source of the OLED evaporator of the material that a kind of outlet that can dredge crucible assembly automatically stops up.
To achieve these goals, concrete scheme of the present utility model is: a kind of evaporation source of OLED evaporator, comprise workplatform, crucible assembly, the evaporation source baffle plate assembly, the central authorities of described workplatform have the work through hole, at least one group of crucible assembly and evaporation source baffle plate assembly are evenly distributed according to circumference in the work through hole, it is characterized in that, also comprise crucible mediation assembly, described crucible mediation assembly is positioned at the center of work through hole, comprise probe, hang arm and lift component, described probe is fixedlyed connected with lift component by hanging arm, and can be with the lift component vertical movement with along the center rotation of work through hole.
Above-mentioned lift component comprises lifting shaft, Positioning Gear, motor gear and shaft collar, the outside of described lifting shaft has flange, described shaft collar and Positioning Gear have the through hole with the lifting shaft cross-sections match, described lifting shaft is installed in the through hole of shaft collar and Positioning Gear, described Positioning Gear and motor gear engagement, described motor gear is connected with the servomotor of device outside and can rotates under the drive of servomotor, and described lifting shaft is connected with the cylinder of device outside and can vertical movement under the drive of cylinder.
The beneficial effects of the utility model are: owing to increased crucible mediation assembly on the basis of the evaporation source of existing OLED evaporator, the probe of crucible mediation assembly can be with the lift component vertical movement with along the center rotation of work through hole, therefore can dredge the deposition material that is arranged in the crucible assembly obstruction all around of work through hole automatically, therefore kept the continuity and the efficient of producing, also avoided in the artificial mediation process influence OLED display device quality.
Description of drawings
Fig. 1 is the evaporation source structural representation of existing OLED evaporator.
Fig. 2 is the evaporation source structural representation of OLED evaporator of the present utility model.
Fig. 3 is the structural representation of the lift component propradation of crucible mediation assembly of the present utility model.
Fig. 4 is the structural representation of the lift component decline state of crucible mediation assembly of the present utility model.
Description of reference numerals: workplatform 1, work through hole 11, crucible assembly 2, evaporation source baffle plate assembly 3, crucible mediation assembly 4, probe 41, extension arm 42, lift component 43, lifting shaft 431, flange 4311, shaft collar 432, Positioning Gear 433, motor gear 434.
Embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
As Fig. 1, a kind of evaporation source of OLED evaporator, comprise workplatform 1, crucible assembly 2, evaporation source baffle plate assembly 3 and crucible mediation assembly 4, the central authorities of workplatform 1 have work through hole 11, six groups of crucible assemblies and evaporation source baffle plate assembly are evenly distributed according to circumference in the work through hole, crucible mediation assembly 4 is positioned at the center of work through hole 11, comprise probe 41, hang arm 42 and lift component 43, probe 41 is fixedlyed connected with lift component 43 by hanging arm 42, and can be with lift component 43 vertical movements with along the 11 centers rotation of work through hole.
Above-mentioned crucible assembly and evaporation source baffle plate assembly dispose in pairs, and its quantity can be provided with arbitrarily as required.
Shown in Fig. 2 and 3, for convenience of explanation, lift component 43 among the figure is out of position with actual installation, lift component 43 comprises lifting shaft 431, Positioning Gear 433, motor gear 434 and shaft collar 432, the outside of lifting shaft 431 has flange 4311, shaft collar 432 and Positioning Gear 433 have the through hole with the lifting shaft cross-sections match, lifting shaft 431 is installed in the through hole of shaft collar 432 and Positioning Gear 433, Positioning Gear 433 and motor gear 434 engagements, motor gear 434 is connected with the servomotor of device outside and can rotates under the drive of servomotor, and described lifting shaft 431 is connected with the cylinder of device outside and can vertical movement under the drive of cylinder.
Those of ordinary skill in the art will appreciate that embodiment described here is in order to help reader understanding's principle of the present utility model, should to be understood that protection domain of the present utility model is not limited to such special statement and embodiment.Those of ordinary skill in the art can make various other various concrete distortion and combinations that do not break away from the utility model essence according to disclosed these technology enlightenments of the utility model, and these distortion and combination are still in protection domain of the present utility model.
Claims (2)
1. the evaporation source of an OLED evaporator, comprise workplatform, crucible assembly, evaporation source baffle plate assembly, the central authorities of described workplatform have the work through hole, at least one group of crucible assembly and evaporation source baffle plate assembly are evenly distributed according to circumference in the work through hole, it is characterized in that, also comprise crucible mediation assembly, described crucible mediation assembly is positioned at the center of work through hole, comprise probe, hang arm and lift component, described probe is fixedlyed connected with lift component by hanging arm, and can be with the lift component vertical movement with along the center rotation of work through hole.
2. according to the evaporation source of the described OLED evaporator of claim 1, it is characterized in that, described lift component comprises lifting shaft, Positioning Gear, motor gear and shaft collar, the outside of described lifting shaft has flange, described shaft collar and Positioning Gear have the through hole with the lifting shaft cross-sections match, described lifting shaft is installed in the through hole of shaft collar and Positioning Gear, described Positioning Gear and motor gear engagement, described motor gear is connected with the servomotor of device outside and can rotates under the drive of servomotor, and described lifting shaft is connected with the cylinder of device outside and can vertical movement under the drive of cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205212691U CN201778103U (en) | 2010-09-08 | 2010-09-08 | Evaporation source device of organic light emitting diode (OLED) evaporator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205212691U CN201778103U (en) | 2010-09-08 | 2010-09-08 | Evaporation source device of organic light emitting diode (OLED) evaporator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201778103U true CN201778103U (en) | 2011-03-30 |
Family
ID=43791322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205212691U Expired - Lifetime CN201778103U (en) | 2010-09-08 | 2010-09-08 | Evaporation source device of organic light emitting diode (OLED) evaporator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201778103U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101942641A (en) * | 2010-09-08 | 2011-01-12 | 四川虹视显示技术有限公司 | Evaporation source device of OLED (Organic Light Emitting Diode) evaporator |
| CN104073764A (en) * | 2014-06-17 | 2014-10-01 | 京东方科技集团股份有限公司 | Rotary evaporation source device used for evaporation of OLED (organic light emitting diode) |
| WO2015096242A1 (en) * | 2013-12-27 | 2015-07-02 | 深圳市华星光电技术有限公司 | Evaporation source assembly for oled evaporator |
| CN109306454A (en) * | 2018-10-26 | 2019-02-05 | 武汉华星光电半导体显示技术有限公司 | Evaporation coating device and its control method |
-
2010
- 2010-09-08 CN CN2010205212691U patent/CN201778103U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101942641A (en) * | 2010-09-08 | 2011-01-12 | 四川虹视显示技术有限公司 | Evaporation source device of OLED (Organic Light Emitting Diode) evaporator |
| WO2015096242A1 (en) * | 2013-12-27 | 2015-07-02 | 深圳市华星光电技术有限公司 | Evaporation source assembly for oled evaporator |
| CN104073764A (en) * | 2014-06-17 | 2014-10-01 | 京东方科技集团股份有限公司 | Rotary evaporation source device used for evaporation of OLED (organic light emitting diode) |
| CN104073764B (en) * | 2014-06-17 | 2016-05-18 | 京东方科技集团股份有限公司 | A kind of rotary evaporation source apparatus for OLED evaporation |
| US9970097B2 (en) | 2014-06-17 | 2018-05-15 | Boe Technology Group Co., Ltd. | Rotary evaporation source apparatus for OLED evaporation |
| CN109306454A (en) * | 2018-10-26 | 2019-02-05 | 武汉华星光电半导体显示技术有限公司 | Evaporation coating device and its control method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101942641B (en) | Evaporation source device of OLED (Organic Light Emitting Diode) evaporator | |
| CN201778103U (en) | Evaporation source device of organic light emitting diode (OLED) evaporator | |
| CN100560782C (en) | A kind of novel mask system of organic electroluminescence device and making method | |
| CN104611681B (en) | Magnetron-sputtering winding coating machine capable of rapidly changing target and continuously and efficiently coating film in single-surface reciprocating manner | |
| CN107604328A (en) | A kind of fuel battery metal double polar plate highly effective ring vacuum coater | |
| CN102037813B (en) | Transplanting mechanism of double-shaft bevel gear drive tilting wide-and-narrow row rice transplanter | |
| CN201670871U (en) | Novel high-efficient coater | |
| US20210351017A1 (en) | Vapor deposition baffle mechanism and vapor deposition apparatus | |
| CN109940500A (en) | A kind of transmission device of continous way curved surface polishing machine | |
| CN104294217A (en) | Evaporation source device | |
| CN108745715A (en) | A kind of four station flame spray coating devices of electric motor end cap | |
| CN112588164A (en) | Straw mixing apparatus is used in processing of rice straw fitment board | |
| CN203270024U (en) | Multifunctional magnetron sputtering coating device | |
| CN115216738A (en) | Rotatable plating ring plate pot mechanism and evaporator | |
| CN204174265U (en) | A kind of overturning drive device realizing flaps automatically under vacuum state | |
| CN203007385U (en) | Device for even vacuum coating on side surfaces of large batch of cylinders | |
| CN209039579U (en) | Prepare the magnetron sputtering film production line of back electrode of solar cell | |
| CN203079223U (en) | Automatic dividing machine for initiating explosive medicament | |
| CN109234685A (en) | Microwave film plating process, motherboard and microwave coating apparatus | |
| CN204080099U (en) | A kind of vacuum direct magnetic control sputter coating machine | |
| CN219508005U (en) | Micro OLED preparation material evaporation device | |
| CN104563916B (en) | Camlock fingerboard mechanism | |
| CN202534700U (en) | Vapor plating mask plate | |
| CN204022935U (en) | A kind of vacuum coating film equipment | |
| CN201687954U (en) | Rotating plate valve structure of film-coating vacuum chamber |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20110330 Effective date of abandoning: 20120613 |