CN201762104U - Silicon nitride firing furnace - Google Patents

Silicon nitride firing furnace Download PDF

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Publication number
CN201762104U
CN201762104U CN201020270394XU CN201020270394U CN201762104U CN 201762104 U CN201762104 U CN 201762104U CN 201020270394X U CN201020270394X U CN 201020270394XU CN 201020270394 U CN201020270394 U CN 201020270394U CN 201762104 U CN201762104 U CN 201762104U
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CN
China
Prior art keywords
silicon nitride
wall
hearth
burner hearth
firing furnace
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Expired - Fee Related
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CN201020270394XU
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Chinese (zh)
Inventor
章体
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Individual
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Individual
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Priority to CN201020270394XU priority Critical patent/CN201762104U/en
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Publication of CN201762104U publication Critical patent/CN201762104U/en
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Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a silicon nitride firing furnace, which comprises a hearth, a sealing cover arranged at the top of the hearth and a furnace wall wrapping the hearth, wherein a heat-insulating layer is arranged between the hearth and the furnace wall; a heating rod is arranged in the hearth; the furnace wall comprises an inner layer wall and an outer layer wall; and a water cooling jacket is arranged between the inner layer wall and the outer layer wall and is connected with a water inlet pipe and a water outlet pipe. The utility model realizes the quick temperature reduction of a furnace body after silicon nitride powder is fired; and the hearth has favorable compactness so as to avoid expansion under high-temperature condition, save gas consumption, improve the production efficiency and reduce the production cost.

Description

A kind of silicon nitride firing furnace
Technical field
The utility model relates to the silicon nitride production unit, particularly a kind of silicon nitride firing furnace.
Background technology
The silicon nitride firing furnace is used for feeding nitrogen; argon gas; under the state of hydrogen silica is fired into alpha-silicon nitride powders; traditional silicon nitride firing furnace furnace wall adopts the individual layer steel to be welded; after product burns till end; product is reduced to room temperature discharging then by the nature cooling method from 1460 ℃ in the stove of sealing; this temperature-fall period length consuming time; make that the production efficiency of stove is low; owing to burning till, silica need reach 1460 ℃ of high temperature simultaneously; traditional general employing of heat-resisting burner hearth does not come brick or corundum brick to build shaping by laying bricks or stones; the shortcoming of this class masonry way is that at high temperature brick is realized the expansion of current situation portion and absorbed shielding gas, causes air consumption big.
The utility model content
Problem to be solved in the utility model just provides a kind of silicon nitride firing furnace, burns till at alpha-silicon nitride powders and finishes back realization body of heater fast cooling, and burner hearth compactness is good, can not occur under the hot conditions expanding, save air consumption, enhance productivity, reduce production costs.
In order to solve the problems of the technologies described above, the utility model adopts following technical scheme: a kind of silicon nitride firing furnace, the furnace wall that comprises burner hearth, is located at the vertical capping of burner hearth and wraps up burner hearth, between burner hearth and furnace wall, be provided with thermal insulation layer, in burner hearth, be provided with heating rod, it is characterized in that: described furnace wall comprises inner layer wall and outer wall, is provided with water jacket between inner layer wall and outer wall, is connected to water inlet pipe and rising pipe on the water jacket.
Further, described burner hearth is formed by stacking up and down by at least three casting matrixs.Increase compactness.
Further, described casting matrix is a hollow circular cylinder.
Further, described casting matrix adopts the corundum material integral cast.The high temperature rate of expansion is low.
Further, the lower surface of described capping is provided with the fixedly inserting groove of heating rod of plug-in mounting.
Further, described heating rod is a Si-Mo rod.
Further, described water inlet pipe is connected on the lower end of water jacket, and rising pipe is connected on the upper end of water jacket.Make full use of the cold and hot water convection current, accelerate speed of cooling, strengthen cooling efficiency.
After adopting technique scheme, the utlity model has following advantage: adopt the water jacket cooling method, cooling rate after can accelerating alpha-silicon nitride powders greatly and burning till, increase work efficiency, the burner hearth compactness of the integrated poured shaping of syllogic corundum is good, rate of expansion is low under the hot conditions, does not absorb gas, reduces production costs.
Description of drawings
The utility model is described in further detail below in conjunction with accompanying drawing:
Fig. 1 is the structural representation of a kind of embodiment of the utility model;
Fig. 2 is an A place cross section upward view among Fig. 1.
Embodiment
The structural representation of a kind of embodiment of the utility model shown in Fig. 1 to 2, a kind of silicon nitride firing furnace, the furnace wall 3 that comprises burner hearth 1, is located at the vertical capping 2 of burner hearth and wraps up burner hearth, between burner hearth and furnace wall, be provided with thermal insulation layer 4, in burner hearth, be provided with heating rod 5, the lower surface of capping is provided with the fixedly inserting groove 21 of heating rod of plug-in mounting, heating rod 5 is inserted in the inserting groove from the bottom up, the furnace wall comprises inner layer wall 31 and outer wall 32, between inner layer wall and outer wall, be provided with water jacket 6, be connected to water inlet pipe and rising pipe on the water jacket.Burner hearth is formed by stacking up and down by three casting matrixs 11, casting matrix adopts the corundum material integral cast to become the right cylinder of hollow, certainly burner hearth can superpose with four or more casting matrix, but compactness and corresponding the changing of high temperature rate of expansion meeting do not reach best effect.
In the foregoing description, the furnace wall is that high temperature resistant steel plate is welded, form water cycle by convection current about the water jacket energy, burning till furnace wall, end back for alpha-silicon nitride powders lowers the temperature rapidly, thermal insulation layer adopts the high-temperature-resistant thermal-insulation material, it is good that the burner hearth of the integrated poured shaping of syllogic corundum has compactness, and rate of expansion is low under the hot conditions, do not absorb the advantage of gas; Heating rod is a Si-Mo rod; Water inlet pipe is connected on the lower end of water jacket, and rising pipe is connected on the upper end of water jacket, makes full use of the cold and hot water convection current, accelerates speed of cooling, strengthens cooling efficiency.

Claims (7)

1. silicon nitride firing furnace, the furnace wall (3) that comprises burner hearth (1), is located at the vertical capping of burner hearth (2) and wraps up burner hearth, between burner hearth and furnace wall, be provided with thermal insulation layer (4), in burner hearth, be provided with heating rod (5), it is characterized in that: described furnace wall comprises inner layer wall (31) and outer wall (32), between inner layer wall and outer wall, be provided with water jacket (6), be connected to water inlet pipe and rising pipe on the water jacket.
2. a kind of silicon nitride firing furnace according to claim 1 is characterized in that: described burner hearth is formed by stacking up and down by at least three casting matrixs (11).
3. a kind of silicon nitride firing furnace according to claim 2 is characterized in that: described casting matrix is a hollow circular cylinder.
4. a kind of silicon nitride firing furnace according to claim 3 is characterized in that: described casting matrix adopts the corundum material integral cast.
5. a kind of silicon nitride firing furnace according to claim 1 is characterized in that: the lower surface of described capping is provided with the fixedly inserting groove of heating rod (21) of plug-in mounting.
6. a kind of according to claim 1 or 5 silicon nitride firing furnace is characterized in that: described heating rod is a Si-Mo rod.
7. a kind of silicon nitride firing furnace according to claim 1, it is characterized in that: described water inlet pipe is connected on the lower end of water jacket, and rising pipe is connected on the upper end of water jacket.
CN201020270394XU 2010-07-23 2010-07-23 Silicon nitride firing furnace Expired - Fee Related CN201762104U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201020270394XU CN201762104U (en) 2010-07-23 2010-07-23 Silicon nitride firing furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201020270394XU CN201762104U (en) 2010-07-23 2010-07-23 Silicon nitride firing furnace

Publications (1)

Publication Number Publication Date
CN201762104U true CN201762104U (en) 2011-03-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201020270394XU Expired - Fee Related CN201762104U (en) 2010-07-23 2010-07-23 Silicon nitride firing furnace

Country Status (1)

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CN (1) CN201762104U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101913577A (en) * 2010-07-23 2010-12-15 章体 Silicon nitride firing furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101913577A (en) * 2010-07-23 2010-12-15 章体 Silicon nitride firing furnace

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110316

Termination date: 20110723