CN101913577A - Silicon nitride firing furnace - Google Patents
Silicon nitride firing furnace Download PDFInfo
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- CN101913577A CN101913577A CN 201010236150 CN201010236150A CN101913577A CN 101913577 A CN101913577 A CN 101913577A CN 201010236150 CN201010236150 CN 201010236150 CN 201010236150 A CN201010236150 A CN 201010236150A CN 101913577 A CN101913577 A CN 101913577A
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- silicon nitride
- burner hearth
- firing furnace
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Abstract
The invention discloses a silicon nitride firing furnace which comprises a hearth, a cover arranged at the top end of the hearth and a furnace wall enclosing the hearth, wherein an insulating layer is arranged between the hearth and the furnace wall, heating rods are arranged in the hearth, the furnace wall comprises an inner wall and an outer wall, a water-cooling jacket is arranged between the inner wall and the outer wall, and the water-cooling jacket is connected with a water inlet pipe and a water outlet pipe. After finishing the firing of silicon nitride powder, the invention realizes fast cooling of a furnace body, achieves good compactness, can not expand under high-temperature conditions, saves air consumption, improves production efficiency and reduces production cost.
Description
Technical field
The present invention relates to the silicon nitride production unit, particularly a kind of silicon nitride firing furnace.
Background technology
The silicon nitride firing furnace is used for feeding nitrogen; argon gas; under the state of hydrogen silica is fired into alpha-silicon nitride powders; traditional silicon nitride firing furnace furnace wall adopts the individual layer steel to be welded; after product burns till end; product is reduced to room temperature discharging then by the nature cooling method from 1460 ℃ in the stove of sealing; this temperature-fall period length consuming time; make that the production efficiency of stove is low; owing to burning till, silica need reach 1460 ℃ of high temperature simultaneously; traditional general employing of heat-resisting burner hearth does not come brick or corundum brick to build shaping by laying bricks or stones; the shortcoming of this class masonry way is that at high temperature brick is realized the expansion of current situation portion and absorbed shielding gas, causes air consumption big.
Summary of the invention
Problem to be solved by this invention just provides a kind of silicon nitride firing furnace, burns till at alpha-silicon nitride powders and finishes back realization body of heater fast cooling, and burner hearth compactness is good, can not occur under the hot conditions expanding, and saves air consumption, enhances productivity, and reduces production costs.
In order to solve the problems of the technologies described above, the present invention adopts following technical scheme: a kind of silicon nitride firing furnace, the furnace wall that comprises burner hearth, is located at the vertical capping of burner hearth and wraps up burner hearth, between burner hearth and furnace wall, be provided with thermal insulation layer, in burner hearth, be provided with heating rod, it is characterized in that: described furnace wall comprises inner layer wall and outer wall, is provided with water jacket between inner layer wall and outer wall, is connected to water inlet pipe and rising pipe on the water jacket.
Further, described burner hearth is formed by stacking up and down by at least three casting matrixs.Increase compactness.
Further, described casting matrix is a hollow circular cylinder.
Further, described casting matrix adopts the corundum material integral cast.The high temperature rate of expansion is low.
Further, the lower surface of described capping is provided with the fixedly inserting groove of heating rod of plug-in mounting.
Further, described heating rod is a Si-Mo rod.
Further, described water inlet pipe is connected on the lower end of water jacket, and rising pipe is connected on the upper end of water jacket.Make full use of the cold and hot water convection current, accelerate speed of cooling, strengthen cooling efficiency.
After adopting technique scheme, the present invention has following advantage: adopt the water jacket cooling method, cooling rate after can accelerating alpha-silicon nitride powders greatly and burning till, increase work efficiency, the burner hearth compactness of the integrated poured shaping of syllogic corundum is good, rate of expansion is low under the hot conditions, does not absorb gas, reduces production costs.
Description of drawings
The invention will be further described below in conjunction with accompanying drawing:
Fig. 1 is the structural representation of an embodiment of the present invention;
Fig. 2 is an A place cross section upward view among Fig. 1.
Embodiment
The structural representation of an embodiment of the present invention shown in Fig. 1 to 2, a kind of silicon nitride firing furnace, the furnace wall 3 that comprises burner hearth 1, is located at the vertical capping 2 of burner hearth and wraps up burner hearth, between burner hearth and furnace wall, be provided with thermal insulation layer 4, in burner hearth, be provided with heating rod 5, the lower surface of capping is provided with the fixedly inserting groove 21 of heating rod of plug-in mounting, heating rod 5 is inserted in the inserting groove from the bottom up, the furnace wall comprises inner layer wall 31 and outer wall 32, between inner layer wall and outer wall, be provided with water jacket 6, be connected to water inlet pipe and rising pipe on the water jacket.Burner hearth is formed by stacking up and down by three casting matrixs 11, casting matrix adopts the corundum material integral cast to become the right cylinder of hollow, certainly burner hearth can superpose with four or more casting matrix, but compactness and corresponding the changing of high temperature rate of expansion meeting do not reach best effect.
In the foregoing description, the furnace wall is that high temperature resistant steel plate is welded, form water cycle by convection current about the water jacket energy, burning till furnace wall, end back for alpha-silicon nitride powders lowers the temperature rapidly, thermal insulation layer adopts the high-temperature-resistant thermal-insulation material, it is good that the burner hearth of the integrated poured shaping of syllogic corundum has compactness, and rate of expansion is low under the hot conditions, do not absorb the advantage of gas; Heating rod is a Si-Mo rod; Water inlet pipe is connected on the lower end of water jacket, and rising pipe is connected on the upper end of water jacket, makes full use of the cold and hot water convection current, accelerates speed of cooling, strengthens cooling efficiency.
Claims (7)
1. silicon nitride firing furnace, the furnace wall (3) that comprises burner hearth (1), is located at the vertical capping of burner hearth (2) and wraps up burner hearth, between burner hearth and furnace wall, be provided with thermal insulation layer (4), in burner hearth, be provided with heating rod (5), it is characterized in that: described furnace wall comprises inner layer wall (31) and outer wall (32), between inner layer wall and outer wall, be provided with water jacket (6), be connected to water inlet pipe and rising pipe on the water jacket.
2. a kind of silicon nitride firing furnace according to claim 1 is characterized in that: described burner hearth is formed by stacking up and down by at least three casting matrixs (11).
3. a kind of silicon nitride firing furnace according to claim 2 is characterized in that: described casting matrix is a hollow circular cylinder.
4. a kind of silicon nitride firing furnace according to claim 3 is characterized in that: described casting matrix adopts the corundum material integral cast.
5. a kind of silicon nitride firing furnace according to claim 1 is characterized in that: the lower surface of described capping is provided with the fixedly inserting groove of heating rod (21) of plug-in mounting.
6. a kind of according to claim 1 or 5 silicon nitride firing furnace is characterized in that: described heating rod is a Si-Mo rod.
7. a kind of silicon nitride firing furnace according to claim 1, it is characterized in that: described water inlet pipe is connected on the lower end of water jacket, and rising pipe is connected on the upper end of water jacket.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201010236150 CN101913577A (en) | 2010-07-23 | 2010-07-23 | Silicon nitride firing furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201010236150 CN101913577A (en) | 2010-07-23 | 2010-07-23 | Silicon nitride firing furnace |
Publications (1)
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CN101913577A true CN101913577A (en) | 2010-12-15 |
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CN 201010236150 Pending CN101913577A (en) | 2010-07-23 | 2010-07-23 | Silicon nitride firing furnace |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102679667A (en) * | 2012-05-11 | 2012-09-19 | 山东邹平嘉鑫粉体科技有限公司 | High-temperature quartz sand cooling and after heat recovery device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2687593Y (en) * | 2004-01-09 | 2005-03-23 | 蒋明学 | High temperature nitriding furnace |
CN101514870A (en) * | 2008-02-22 | 2009-08-26 | 中冶天工建设有限公司 | Construction method for manufacturing working layer of annular heating furnace by utilizing timber shuttering and profile steel |
CN201762104U (en) * | 2010-07-23 | 2011-03-16 | 章体 | Silicon nitride firing furnace |
-
2010
- 2010-07-23 CN CN 201010236150 patent/CN101913577A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2687593Y (en) * | 2004-01-09 | 2005-03-23 | 蒋明学 | High temperature nitriding furnace |
CN101514870A (en) * | 2008-02-22 | 2009-08-26 | 中冶天工建设有限公司 | Construction method for manufacturing working layer of annular heating furnace by utilizing timber shuttering and profile steel |
CN201762104U (en) * | 2010-07-23 | 2011-03-16 | 章体 | Silicon nitride firing furnace |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102679667A (en) * | 2012-05-11 | 2012-09-19 | 山东邹平嘉鑫粉体科技有限公司 | High-temperature quartz sand cooling and after heat recovery device |
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Application publication date: 20101215 |