CN201716108U - Calibration device for shearing amount of interferometer - Google Patents
Calibration device for shearing amount of interferometer Download PDFInfo
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- CN201716108U CN201716108U CN2010202167730U CN201020216773U CN201716108U CN 201716108 U CN201716108 U CN 201716108U CN 2010202167730 U CN2010202167730 U CN 2010202167730U CN 201020216773 U CN201020216773 U CN 201020216773U CN 201716108 U CN201716108 U CN 201716108U
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- interferometer
- caliberating device
- laser
- video camera
- shearing displacement
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- 238000010008 shearing Methods 0.000 title claims abstract description 42
- 238000006073 displacement reaction Methods 0.000 claims description 33
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical group [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 claims description 7
- 239000010438 granite Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 7
- 230000003595 spectral effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 206010038743 Restlessness Diseases 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model relates to a calibration device of interferometer shearing volume, calibration device of interferometer shearing volume include the laser instrument and set up the CCD camera on same light path with the laser instrument. The utility model provides a calibration device of interferometer shearing volume of high accuracy, high definition and accurate positioning.
Description
Technical field
The utility model belongs to optical field, relates in particular to a kind of caliberating device of interferometer shearing displacement.
Background technology
Interference imaging spectral technology is the front line science of current visible light and infrared remote sensor Detection Techniques, it is the combination of current imaging technique and spectral technique, compare with traditional camera, it not only can obtain the two-dimensional space information of detected target, the more important thing is that it can obtain the spectral information of detected target simultaneously, form data cube.Along with spationautics, extensive integrated array formula detector manufacturing technology and the development of space optics, precision optical machinery, Computer Image Processing and data transmission technology, make interference imaging spectral technology the aspect such as obtain and more and more demonstrate its consequence and effect, also demonstrate its wide application prospect aspect scientific research, the national economic development and national security more in space remote sensing, information.
Inteference imaging spectrometer is to grow up on the basis of interference spectrum technology, and it is divided into time modulation type inteference imaging spectrometer and spatial modulation type inteference imaging spectrometer according to the modulation system difference.Because there are two shortcomings in time modulation type inteference imaging spectrometer: 1) need the high-precision index glass mobile system of a cover, will remaining a constant speed property in motion process, and strict requirement is all arranged to rocking or tilting, process and debug difficulty; 2) real-time is poor, and interferogram is finished sampling needs index glass motion one-period, therefore fast-changing spectrum is measured very difficult.Therefore study more to spatial modulation type inteference imaging spectrometer in the engineering reality at present.
In the adjusting type inteference imaging spectrometer of space, lateral shearing interferometer is a critical component, it is equivalent to a beam splitter, when object during at infinity, can regard as and be become two to restraint the coherent light beam that is parallel to each other by lateral shear after a branch of directional light incides lateral shearing interferometer, distance between this two bundles directional light is called horizontal shear capacity, it directly influences the spectral resolution of inteference imaging spectrometer, therefore to improve the spectral resolution of inteference imaging spectrometer, must accurately demarcate the lateral shearing interferometer shearing displacement.
The utility model content
In order to solve the above-mentioned technical matters that exists in the background technology, the utility model provides the caliberating device of the interferometer shearing displacement of a kind of high precision, high definition and accurate location.
Technical solution of the present utility model is: the utility model provides a kind of caliberating device of interferometer shearing displacement, and its special character is: the caliberating device of described interferometer shearing displacement comprises laser instrument and is arranged at ccd video camera on the same light path with laser instrument.
The caliberating device of above-mentioned interference instrument shearing displacement also comprises laser beam expanding lens; Described laser beam expanding lens is arranged between laser instrument and the ccd video camera, and with the same light path of laser instrument and ccd video camera place on.
The caliberating device of above-mentioned interference instrument shearing displacement also comprises interferometer adjustment platform, and described interferometer is adjusted platform and placed between laser beam expanding lens and the ccd video camera.
It is 00 grade of granite platform that the above-mentioned interference instrument is adjusted platform.
The flatness of above-mentioned 00 grade of granite platform is 5 microns.
The caliberating device of above-mentioned interference instrument shearing displacement also comprises laser instrument adjustment support; Described laser instrument is arranged at laser instrument and adjusts on the support.
The caliberating device of above-mentioned interference instrument shearing displacement also comprises ccd video camera adjustment support, and described ccd video camera is arranged at ccd video camera and adjusts on the support.
Above-mentioned laser instrument is helium-neon laser, inferior ion laser device or semiconductor laser.
Above-mentioned laser instrument is helium-neon laser or inferior ion laser device.
It is 1024 * 1024 that above-mentioned ccd video camera adopts resolution, and the CCD chip of pixel dimension 0.012mm, focal length are the standard lens of 100mm.
The utility model has the advantages that:
1, high precision.The caliberating device of interferometer shearing displacement provided by the utility model adopts selects for use helium-neon laser or inferior ion laser device to carry out the laser generation, its wavelength accuracy can reach 0.1nm, simultaneously, the utility model also adopts laser beam expanding lens, so that high-quality laser beam is provided, to be full of the interferometer plane of incidence, make the demarcation of shearing displacement fundamentally realize high precision.
2, high definition.The utility model has structurally also used ccd video camera, it is 1024x1024 that this ccd video camera adopts resolution, pixel dimension 0.012mm, the CCD chip, focal length is the standard lens of 100mm, this camera lens is all calibrated various aberrations, this video camera imaging sharpness is higher, reading noise is 9e-rms, and dark current is 0.002e-/p/sec, can realize taking pictures of high definition.
3, accurately locate.The utility model has structurally also adopted laser instrument to adjust support, interferometer is adjusted platform and ccd video camera adjustment support; Laser instrument is adjusted support can carry out three-dimensional adjustment to laser instrument pitching, orientation, height direction, to guarantee accurately irradiating laser beam expanding lens inlet of laser instrument; Interferometer is adjusted platform and is adopted 00 grade of granite platform, and flatness is 5 microns, and can carry out pitching, orientation, three direction adjustment of height, can vertical irradiation interferometer incidence surface to guarantee incident beam; Ccd video camera is adjusted support can carry out three-dimensional adjustment to ccd video camera pitching, orientation, height direction, to guarantee outgoing beam and the ccd video camera light shaft coaxle by interferometer; Three's combination can make the utility model accurately to locate, and is very easy to use.
Description of drawings
Fig. 1 is the structural representation of the caliberating device of interferometer shearing displacement provided by the utility model.
Embodiment
Referring to Fig. 1, the utility model provides a kind of caliberating device of interferometer shearing displacement, and the caliberating device of this interferometer shearing displacement comprises laser instrument 1 and is arranged at ccd video camera 3 on the same light path with laser instrument 1.For result of use is more outstanding, the caliberating device of this interferometer shearing displacement also comprises the laser beam expanding lens 2 that is arranged between laser instrument 1 and the ccd video camera 3, this laser beam expanding lens 2 and with the same light path of laser instrument 1 and ccd video camera 3 places on.
Laser beam expanding lens 2 has two functions, the diameter of first expanded beam; It two is the angles of divergence that reduce laser beam, provides high-quality laser beam, to be full of the interferometer plane of incidence.
Interferometer is adjusted platform 5: adopt 00 grade of granite platform, flatness is 5 microns, and can carry out pitching, orientation, three direction adjustment of height, to guarantee that incident beam can vertical irradiation interferometer incidence surface.
It is 1024 * 1024 that ccd video camera 3 adopts resolution, and the CCD chip of pixel dimension 0.012mm, focal length are the standard lens of 100mm, this camera lens is all calibrated various aberrations, these ccd video camera 3 imaging definitions are higher, and reading noise is 9e-rms, and dark current is 0.002e-/p/sec.
According to Fig. 1 installation testing equipment, principle of work is: adjust laser instrument adjustment support 4 and make laser instrument 1 aim at laser beam expanding lens 2 inlets, laser instrument 1 forms collimated light beam by laser beam expanding lens 2 backs, form interference fringe by interferometer again, striped passes through ccd video camera 3 lens focus to the CCD chip, ccd video camera 3 is according to the electric charge of the power accumulation corresponding proportion of light, the electric charge of each pixel accumulation is under the video time sequence control, pointwise moves outward, through filtering, after the processing and amplifying, the output of formation video signal, acquisition of image data is accurately calculated the lateral shearing interferometer shearing displacement, and the concrete operations step is as follows:
1, in order to reduce stochastic error, gather several (100 width of cloth) interferogram data, multiple image is averaged;
2, eliminate ground unrest by the method for medium filtering;
3, the image of removing noise is carried out the higher difference computing, quick and precisely determine interference fringe crest (perhaps trough) position;
4, count N according to crest (perhaps trough) the position calculation interference fringe number n pixel corresponding with the interference fringe number;
5, with the interference fringe number, the pixel number that interference fringe accounts for, formula calculates lateral shearing interferometer shearing displacement d below CCD pixel dimension S, laser wavelength lambda, the ccd video camera focal distance f ' substitution:
Claims (10)
1. the caliberating device of an interferometer shearing displacement is characterized in that: the caliberating device of described interferometer shearing displacement comprises laser instrument and is arranged at ccd video camera on the same light path with laser instrument.
2. the caliberating device of interferometer shearing displacement according to claim 1 is characterized in that: the caliberating device of described interferometer shearing displacement also comprises laser beam expanding lens; Described laser beam expanding lens is arranged between laser instrument and the ccd video camera, and with the same light path of laser instrument and ccd video camera place on.
3. the caliberating device of interferometer shearing displacement according to claim 2 is characterized in that: the caliberating device of described interferometer shearing displacement also comprises interferometer adjustment platform, and described interferometer is adjusted platform and placed between laser beam expanding lens and the ccd video camera.
4. the caliberating device of interferometer shearing displacement according to claim 3 is characterized in that: it is 00 grade of granite platform that described interferometer is adjusted platform.
5. the caliberating device of interferometer shearing displacement according to claim 4 is characterized in that: the flatness of described 00 grade of granite platform is 5 microns.
6. the caliberating device of interferometer shearing displacement according to claim 5 is characterized in that: the caliberating device of described interferometer shearing displacement also comprises laser instrument adjustment support; Described laser instrument is arranged at laser instrument and adjusts on the support.
7. the caliberating device of interferometer shearing displacement according to claim 6 is characterized in that: the caliberating device of described interferometer shearing displacement also comprises ccd video camera adjustment support, and described ccd video camera is arranged at ccd video camera and adjusts on the support.
8. according to claim 1 or 2 or 3 or 4 or 5 or the caliberating device of 6 or 7 described interferometer shearing displacements, it is characterized in that: described laser instrument is helium-neon laser, inferior ion laser device or semiconductor laser.
9. the caliberating device of interferometer shearing displacement according to claim 8 is characterized in that: described laser instrument is helium-neon laser or inferior ion laser device.
10. the caliberating device of interferometer shearing displacement according to claim 9 is characterized in that: it is 1024 * 1024 that described ccd video camera adopts resolution, and the CCD chip of pixel dimension 0.012mm, focal length are the standard lens of 100mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202167730U CN201716108U (en) | 2010-06-07 | 2010-06-07 | Calibration device for shearing amount of interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202167730U CN201716108U (en) | 2010-06-07 | 2010-06-07 | Calibration device for shearing amount of interferometer |
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| Publication Number | Publication Date |
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| CN201716108U true CN201716108U (en) | 2011-01-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010202167730U Expired - Fee Related CN201716108U (en) | 2010-06-07 | 2010-06-07 | Calibration device for shearing amount of interferometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102269624A (en) * | 2010-06-07 | 2011-12-07 | 中国科学院西安光学精密机械研究所 | Calibration device for shearing amount of interferometer |
| CN102889980A (en) * | 2012-10-15 | 2013-01-23 | 中国科学院光电技术研究所 | Microlens fixed-focus detection method based on grating shearing interference detection system |
-
2010
- 2010-06-07 CN CN2010202167730U patent/CN201716108U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102269624A (en) * | 2010-06-07 | 2011-12-07 | 中国科学院西安光学精密机械研究所 | Calibration device for shearing amount of interferometer |
| CN102889980A (en) * | 2012-10-15 | 2013-01-23 | 中国科学院光电技术研究所 | Microlens fixed-focus detection method based on grating shearing interference detection system |
| CN102889980B (en) * | 2012-10-15 | 2015-07-15 | 中国科学院光电技术研究所 | Microlens fixed-focus detection method based on grating shearing interference detection system |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110119 Termination date: 20150607 |
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| EXPY | Termination of patent right or utility model |