CN201682643U - Silicon bar preheater for phosphorus inspection furnace - Google Patents
Silicon bar preheater for phosphorus inspection furnace Download PDFInfo
- Publication number
- CN201682643U CN201682643U CN2010201783699U CN201020178369U CN201682643U CN 201682643 U CN201682643 U CN 201682643U CN 2010201783699 U CN2010201783699 U CN 2010201783699U CN 201020178369 U CN201020178369 U CN 201020178369U CN 201682643 U CN201682643 U CN 201682643U
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- China
- Prior art keywords
- preheater
- heater
- silicon rod
- phosphorus
- sleeve pipe
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- Expired - Fee Related
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Abstract
The utility model discloses a silicon bar preheater for a phosphorus inspection furnace, which comprises an arc-shaped heating body (5), a casing pipe (6) and a connecting bar (7). The shape of the casing pipe (6) matches with the shape of the heating body (5) which is arranged in the casing pipe (6). One end of the connecting bar (7) is fixedly connected with the casing pipe (6). Due to the adoption of high-purity graphite as the heating body and high-temperature resistant and high-purity quartz glass as the casing seal, graphite is heated through high frequency and the polycrystalline silicon inspection bar is heated in the form of radiant heat transfer, when polycrystalline silicon is heated the volatilization of metal impurities is prevented and the polycrystalline silicon inspection bar is free from being polluted, and the inspection accuracy is ensured.
Description
Technical field
The utility model relates in the polysilicon product checkout procedure, and phosphorus inspection furnace structure is optimized, and a high-purity heater block of increase specifically, is a kind of silicon rod preheater that is used for phosphorus inspection stove.
Background technology
Polysilicon product quality situation is that the method for stipulating with GB records resistivity after becoming monocrystalline (common name " phosphorus inspection ") by district's melting and pulling, life-span and conductivity model, and the purity of polysilicon product is between 8N～10N.In this process, any impurity all can influence the accuracy of detection, misleads the product quality of polysilicon.In district's melting and pulling monocrystalline silicon process, general pre-heating mean is to adopt molybdenum filament wrapping test rod at present, and the high-frequency heating molybdenum filament is by heat transfer preheating check rod.Because in this process, the molybdenum filament temperature is very high, reaches 700 ℃～1600 ℃, the metal impurities evaporation easily forms surface contamination to check rod, melts in check rod, influences the quality of check rod itself, causes detecting inaccurate.
The utility model content
Technical problem to be solved in the utility model provides a kind of accurate, silicon rod preheater that phosphorus is examined stove that is used for for avoiding the contamination that the excellent preheating of the direct exposure test of molybdenum filament forms when heating, changing conducting heat for radiation heating that can improve testing result.
The technical scheme in the invention for solving the above technical problem is: the silicon rod preheater that is used for phosphorus inspection stove, comprise the heater, sleeve pipe, the pitman that are circular-arc, described sleeve-shaped and heater are complementary and heater is arranged in the sleeve pipe, and an end of pitman is fixedlyed connected with sleeve pipe.
Particularly, described heater is a graphite heater.
Described sleeve pipe is a quartz socket tube.
Described pitman is quartzy pitman.
The radian of described heater is π/3～π.
The cross section of described heater is that rectangle and this rectangular dimension are 4 * 4～20 * 20mm, and the external diameter of sleeve pipe is 8～25mm.
The diameter of described pitman is 5～15mm.
The internal diameter of the circle at the circular arc place that described heater forms is 30～50mm.
In sum, the beneficial effects of the utility model are:
1, the utility model adopts high purity graphite to make heater, do the cover envelope with high temperature resistant, pure quartz glass, by high-frequency heating graphite, form heating polysilicon check rod with radiant heat transfer, avoided polysilicon in heating process, the polysilicon check rod is stain in the impurity volatilization in the molybdenum filament, guarantees the accuracy that detects.
2, may be for the volatilization that solves graphite itself to the influence of check rod, this preheater adopts resistant to elevated temperatures pure quartz glass big envelope vacuum seal graphite heater, makes impurity in the graphite sealing shroud of can not overflowing, the contamination polysilicon.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the distribution schematic diagram of silicon rod preheater of the present utility model in phosphorus inspection stove;
Fig. 3 is that the A-A of silicon rod preheater of the present utility model among Fig. 2 is to view;
Fig. 4 is the perspective view of heater.
Mark and corresponding parts title in the accompanying drawing: 1-phosphorus inspection stove, 2-polysilicon check rod, 3-high frequency coil, 4-are used for the silicon rod preheater of phosphorus inspection stove, 5-heater, 6-sleeve pipe, 7-pitman, 8-grip device, 9-joystick, 10-lower rotary shaft.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, but execution mode of the present utility model is not limited thereto.
Extremely shown in Figure 3 referring to Fig. 1, the silicon rod preheater that is used for phosphorus inspection stove of the present utility model comprises the graphite heater 5 that is circular-arc, quartz socket tube 6, quartzy pitman 7, wherein, the radian of graphite heater 5 is π/3～π, the internal diameter of the circle at the circular arc place that graphite heater 5 forms is 30～50mm, and the cross section of graphite heater 5 is a rectangle, the rectangular dimension scope is 4 * 4～20 * 20mm, the external diameter of sleeve pipe 6 is 8～25mm, be convenient to assemble to be arranged in the quartz socket tube be advisable with graphite heater, the diameter of quartzy pitman is 5～15mm, described quartz socket tube 6 shapes and graphite heater 5 is complementary and graphite heater 5 is arranged in the quartz socket tube 6, an end of quartzy pitman 7 is fixedlyed connected with sleeve pipe 6.
The quartzy pitman 7 that is used for the silicon rod preheater 4 of phosphorus inspection stove of the present utility model is installed in the joystick 9 that phosphorus is examined stove 1 by anchor clamps 8, and the silicon rod preheater can move to the next door of polysilicon check rod 2 during heating, the top of high frequency coil 3.During work, silicon rod preheater 4 positions of phosphorus inspection stove 1 are on the next door of polysilicon check rod 2, apart from 2～50mm; Be positioned at the top of high frequency coil 3, distance 5～50mm.Heating graphite heater 5 temperature reach 600～1600 ℃, with the form heating polysilicon check rod 2 of radiant heat transfer, when polysilicon check rod 2 temperature reach 200～1000 ℃, remove the silicon rod preheater 4 of phosphorus inspection stove, beginning pulling monocrystal silicon.So not only save the molybdenum filament that curls up, and reduce molybdenum filament high temperature evaporation impurity,, make detection more accurate the contamination of polysilicon check rod 2.
As mentioned above, just can realize the utility model preferably.
Claims (8)
1. the silicon rod preheater that is used for phosphorus inspection stove, it is characterized in that, comprise the heater (5), sleeve pipe (6), the pitman (7) that are circular-arc, described sleeve pipe (6) shape and heater (5) are complementary and heater (5) is arranged in the sleeve pipe (6), and an end of pitman (7) is fixedlyed connected with sleeve pipe (6).
2. the silicon rod preheater that is used for phosphorus inspection stove according to claim 1 is characterized in that described heater (5) is a graphite heater.
3. the silicon rod preheater that is used for phosphorus inspection stove according to claim 1 is characterized in that described sleeve pipe (6) is a quartz socket tube.
4. the silicon rod preheater that is used for phosphorus inspection stove according to claim 1 is characterized in that described pitman (7) is quartzy pitman.
5. the silicon rod preheater that is used for phosphorus inspection stove according to claim 1 is characterized in that the radian of described heater (5) is π/3～π.
6. the silicon rod preheater that is used for phosphorus inspection stove according to claim 1 is characterized in that the cross section of described heater (5) is that rectangle and this rectangular dimension are 4 * 4～20 * 20mm, and the external diameter of sleeve pipe (6) is 8～25mm.
7. the silicon rod preheater that is used for phosphorus inspection stove according to claim 1 is characterized in that the diameter of described pitman (7) is 5～15mm.
8. the silicon rod preheater that is used for phosphorus inspection stove according to claim 1 is characterized in that the internal diameter of the circle at the circular arc place that described heater (5) forms is 30～50mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201783699U CN201682643U (en) | 2010-05-04 | 2010-05-04 | Silicon bar preheater for phosphorus inspection furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201783699U CN201682643U (en) | 2010-05-04 | 2010-05-04 | Silicon bar preheater for phosphorus inspection furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201682643U true CN201682643U (en) | 2010-12-22 |
Family
ID=43347674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201783699U Expired - Fee Related CN201682643U (en) | 2010-05-04 | 2010-05-04 | Silicon bar preheater for phosphorus inspection furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201682643U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102864491A (en) * | 2012-08-28 | 2013-01-09 | 北京京运通科技股份有限公司 | Preheating device and device translation system |
-
2010
- 2010-05-04 CN CN2010201783699U patent/CN201682643U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102864491A (en) * | 2012-08-28 | 2013-01-09 | 北京京运通科技股份有限公司 | Preheating device and device translation system |
| CN102864491B (en) * | 2012-08-28 | 2015-08-12 | 北京京运通科技股份有限公司 | A kind of primary heater unit and device translation system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101222 Termination date: 20130504 |