CN201681959U - Scribing machine for thin-film solar battery - Google Patents

Scribing machine for thin-film solar battery Download PDF

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Publication number
CN201681959U
CN201681959U CN2010200262586U CN201020026258U CN201681959U CN 201681959 U CN201681959 U CN 201681959U CN 2010200262586 U CN2010200262586 U CN 2010200262586U CN 201020026258 U CN201020026258 U CN 201020026258U CN 201681959 U CN201681959 U CN 201681959U
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direction linear
thin film
machine table
linear motor
air
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CN2010200262586U
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Chinese (zh)
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吴建霖
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The utility model discloses a scribing machine for a thin-film solar battery, which belongs to the technical field of positioning such large panels as the thin-film solar battery. The scribing machine comprises a machine table on which an x-y machine table mechanism, an outer light path system, an air flotation load-bearing mechanism and positioning mechanisms are arranged, wherein the x-y machine table mechanism comprises an x-direction linear motor substrate and a Y-direction linear motor substrate; the outer light path system is arranged on the x-direction linear motor substrate of the x-y machine table mechanism, and is used for providing focused laser with high peak power; the air flotation load-bearing mechanism is arranged on the Y-direction linear motor substrate of the x-y machine table mechanism; the positioning mechanisms are arranged at the two sides of the air floatation load-bearing mechanism, and are used for clamping and positioning the thin-film solar battery; and the air floatation load-bearing mechanism comprises conveying wheel systems, an air floatation plate and an air floatation plate rack. The air floatation load-bearing mechanism not only bears the thin-film solar battery, but also realizes the conveying and connecting of workpieces. The conveying wheel systems are arranged at the two outer sides of the air floatation plate, and are located above the air floatation plate rack of the air floatation plate. The air floatation plate is arranged on the x-direction linear motor substrate of the x-y machine table mechanism.

Description

Solar thin film battery scribing machine
Technical Field
The utility model relates to a location processing field of great panels such as solar energy thin film battery especially relates to a solar energy thin film battery line printer.
Background
In recent years, the solar photovoltaic industry in China has been rapidly developed. The solar photovoltaic industry has now leaped the third world, second only to japan and germany. Due to the fact that international capital is well utilized, 10 enterprises such as Changzhou Tianhe, Suzhou CSI, Suzuolinyang hong Kong, Nanjing Zhongji, Hebei Channao ao, Baoding Yili and the like are listed in the New York securities and Nasidack capital markets successively after Shangdu electric power is listed in the New York securities in 2005, production scale of the enterprises is continuously enlarged, technical level is continuously improved, and enterprise competitiveness is continuously enhanced. Further, companies in Zhejiang, Baoding, Sichuan, etc. have begun the production of polycrystalline silicon solar cells, and the market has formed a view of two main cell products, monocrystalline silicon and polycrystalline silicon.
However, some key devices in the solar photovoltaic industry still cannot be made into a home, and completely depend on import, and become important factor practicalities for restricting the reduction of the photovoltaic power generation cost. The polysilicon casting furnace, the wire cutting machine, the PECVD and other devices almost completely depend on the inlet; the research on equipment and process is disjointed; the product degree of automation is not high, does not pay attention to the connection between each equipment, and domestic equipment is manual or semi-automatic basically, and the connection between the equipment relies on the manual work to accomplish.
Cost and capacity are significant barriers that currently limit the popularity of solar photovoltaic power generation.
The existing solar thin film cell scribing line mainly conveys solar thin film cells through a conveying wheel, and the problem that the solar thin film cells are scratched exists in the conveying process, so that the bad frequency is high.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a first aim at: provided is a solar thin film cell scribing machine which can prevent the problem of scratching a solar thin film cell.
The utility model provides a solar thin film battery scribing machine, which is characterized by comprising a machine table,
an x-y machine table mechanism, an external light path system, an air floatation bearing mechanism and a positioning mechanism are arranged on the machine table;
the X-Y machine table mechanism comprises an X-direction linear motor substrate and a Y-direction linear motor substrate, the outer light path system is arranged on the X-direction linear motor substrate of the X-Y machine table mechanism and used for providing high peak power focused laser, the air floatation bearing mechanism is arranged on the Y-direction linear motor substrate of the X-Y machine table mechanism, the positioning mechanisms are arranged on two sides of the air floatation bearing mechanism, and the positioning mechanisms are used for clamping and positioning the solar thin film cell;
the air supporting bearing mechanism comprises a conveying wheel system, an air supporting plate and an air supporting plate frame, the conveying wheel system is arranged on two outer sides of the air supporting plate, the air supporting plate is arranged above the air supporting plate frame, and the air supporting plate frame is arranged on an x-direction linear motor substrate of the x-y machine table mechanism.
Optionally, the outer optical path system comprises: the device comprises a laser, a beam expander, a 45-degree total reflection lens, a focusing lens seat and a focusing lens; wherein,
the laser is fixed on a machine table, the beam expander is arranged at the front end of the laser, the 45-degree total reflection mirror is arranged in front of the beam expander, the focusing mirror seat is arranged on an x-direction linear motor substrate in the x-y machine table mechanism, a diaphragm-variable adjusting clear aperture and a focusing mirror are arranged on the focusing mirror seat, and the optical axis of the focusing mirror coincides with the reflection optical path of the 45-degree total reflection mirror.
Optionally, the x-y stage mechanism comprises: the linear motor comprises two y-direction linear motors, two y-direction linear motor substrates, two y-direction linear motor grating rulers and reading heads thereof, an x-direction linear motor substrate and a grating ruler reading head; wherein,
two y direction linear electric motor base plates set up respectively on two y direction linear electric motor, two y direction linear electric motor grating chi and reading head set up respectively on the y direction linear electric motor base plate for survey y direction movement distance, x direction linear electric motor sets up below between the two y direction linear electric motor base plates, x direction linear electric motor base plate sets up on the x direction linear electric motor base plate, x direction linear electric motor grating chi and reading head set up respectively on the x direction linear electric motor base plate.
Optionally, the positioning mechanism comprises: a left clamping component and a right clamping component opposite to the left clamping component,
the front end part and the rear end part of the left side clamping component or the right side clamping component are respectively provided with an imaging device,
the two imaging devices are respectively used for acquiring images of two lines on the adjusted panel clamped between the side clamping assembly and the right side clamping assembly and transmitting the images to the control system, so that the control system can adjust the left side clamping assembly and the right side clamping assembly according to the images to adjust the angle of the adjusted panel.
Optionally, a dust removal system is further disposed above the air floating plate, and the dust removal system includes: a dust collector, a dust suction nozzle, an ion air pump and a rodless electric cylinder, wherein,
the ion air pump is located the top of air supporting plate for blow in the dust that equipment produced in take out in the dirt mouth, take out the dirt mouth with the dust arrester intercommunication, rodless electronic jar with take out dirt mouth, ion air pump connection, be used for control take out the removal of dirt mouth, ion air pump.
It can be seen from above that, use this line printer at the in-process that carries out the laser marking off to solar energy thin film battery, solar energy thin film battery moves on the air supporting plate, and it is for prior art's whole drive wheel transmission mode, uses this line printer can ensure effectively that solar energy thin film battery can not damaged by the fish tail, can improve solar energy thin film battery's quality greatly.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, do not constitute a limitation of the invention, and in which:
fig. 1 is a schematic structural diagram of a solar thin film battery scribing machine provided in embodiment 1 of the present invention;
fig. 2 is a schematic structural view of an external optical path system 101 in a solar thin film battery scribing machine provided in embodiment 1 of the present invention;
fig. 3 is a schematic structural diagram of an x-y table mechanism 102 in a solar thin film battery scribing machine provided in embodiment 1 of the present invention;
fig. 4 is a schematic structural diagram of a positioning mechanism 104 in a solar thin film battery scribing machine according to embodiment 1 of the present invention;
fig. 5 is a schematic top view of the positioning mechanism 104 shown in fig. 4 according to embodiment 1 of the present invention;
fig. 6 is a schematic structural view of an air floatation bearing mechanism 103 in a solar thin film battery scribing machine according to embodiment 1 of the present invention;
fig. 7 is a schematic structural diagram of a dust removal system in a solar thin film battery scribing machine according to embodiment 1 of the present invention.
Detailed Description
The invention will be described in detail with reference to the drawings and specific embodiments, wherein the exemplary embodiments and descriptions are provided to explain the invention, but not to limit the invention.
Example 1:
referring to fig. 1, a solar thin film cell 104 scribing machine of the present embodiment mainly includes a machine 100, and an external optical path system 101, an x-y machine mechanism 102, an air floating carrying mechanism 103, and a positioning mechanism 104 disposed on the machine 100.
The X-Y stage mechanism 102 includes an X-direction linear motor substrate 1021 and a Y-direction linear motor substrate 1022, and the external optical path system 101 is disposed on the X-direction linear motor substrate 1021 of the X-Y stage mechanism 102 and can move along with the X-direction linear motor substrate 1021 in the X-axis.
The air-floating bearing mechanism 103 is arranged on a linear motor substrate 1022 in the Y direction of the x-Y machine mechanism 102, the positioning mechanisms 104 are arranged on two sides of the air-floating bearing mechanism 103, and the positioning mechanisms 104 are used for clamping and positioning the solar thin film cells 104, so that air positioning meets the requirements of scribing.
The air floatation bearing mechanism 103 comprises a transfer wheel system 1031, an air floatation plate 1032 and an air floatation plate adjusting frame 1033, and the air floatation bearing mechanism 103 is used for bearing the solar thin film cell 104 and realizing transfer and connection of workpieces.
The transfer wheel system 1031 is disposed on two outer sides of the air floating plate 1032, and is located above the air floating plate 1033 by the air floating plate 1032, and the air floating plate 1033 is disposed on the Y-direction linear motor substrate 1022 of the x-Y stage mechanism 102. The driving wheel in the transfer wheel system 1031 is connected to the solar thin film cell 104 transferred from the previous stage and transfers it to the air floating plate 1032 on the air floating plate adjusting frame 1033, and the air floating plate 1032 is connected to the solar thin film cell 104 transferred from the driving wheel and drives the solar thin film cell 104 to move by air floating.
The working principle of the scribing machine of the embodiment is that the X-Y machine mechanism 102 is started, the focusing mirror 206 group moves transversely on the X axis, the solar thin film cell 104 moves longitudinally on the air floating plate 1032 on the Y axis along with the air floating plate 1032, and the purpose of laser scribing is achieved through the movement of X, Y.
Therefore, when the scribing machine is used for laser scribing of the solar thin film cell 104, the solar thin film cell 104 moves on the air flotation plate 1032, and compared with the whole-course transmission wheel transmission mode in the prior art, the scribing machine can effectively prevent the solar thin film cell 104 from being scratched and damaged, and can greatly improve the quality of the solar thin film cell 104.
As an illustration of a detailed implementation of the present embodiment, referring to fig. 2, the external optical path system 101 includes: the device comprises a laser 201, a beam expander 202, a 45-degree total reflection mirror 203, a focusing mirror seat 205 and a focusing mirror 206.
The components are fixed on an x-direction linear motor substrate 1021, a beam expander 202 is arranged at the front end of a laser 201, a 45-degree total reflection mirror 203 is arranged in front of the beam expander 202, a variable diaphragm adjusting clear aperture 2 litigation 04 and a focusing mirror 206 are arranged on a focusing mirror seat 205, and the optical axis of the focusing mirror 206 is superposed with the reflection optical path of the 45-degree total reflection mirror 203.
The laser 201 provides high-peak power laser, the beam expander 202 amplifies the light spot, and the three-dimensional beam expander 202 adjusting frame can realize the coupling of the beam expander 202 and a laser light path; the 45-degree total reflection mirror 203 completely reflects the laser into the focusing mirror base 205; a variable diaphragm adjusting clear aperture 204; the focusing lens 206 focuses the laser on the solar thin film cell 104, so that the surface is gasified to generate a blind hole; the focus lens holder 205 is fixed to the x-direction linear motor substrate 1021, and the pitch of the scribe lines is controlled by a control motor.
Referring to FIG. 3, the x-y stage mechanism 102 includes: two Y-direction linear motors 301, two Y-direction linear motor substrates 1022, two Y-direction linear motors 301, a linear scale and a reading head thereof, an x-direction linear motor substrate 1021, and a linear scale reading head thereof; the two Y-direction linear motor substrates 1022 are respectively disposed on the two Y-direction linear motors 301, and the two Y-direction linear motors 301 grating scales and the reading heads thereof are respectively disposed on the Y-direction linear motor substrates 1022, and are configured to detect a Y-direction movement distance, and provide an x-direction power and a closed-loop control. The x-direction linear motor is arranged below the space between two Y-direction linear motor substrates 1022, the x-direction linear motor substrate 1021 is arranged on the x-direction linear motor substrate 1021, and the x-direction linear motor grating ruler and the reading head thereof are respectively arranged on the x-direction linear motor substrate 1021 to provide x-direction power and closed-loop control.
Referring to fig. 4, the positioning mechanism 104 and the automatic positioning and adjusting mechanism mainly achieve positioning of the X, Y, Z azimuth of the solar thin film cell 104 and can achieve automatic adjustment of perpendicularity of the solar thin film cell 104 and the X direction through assistance of software, so as to ensure processing quality.
The positioning mechanism 104 includes: a left clamp assembly 401, and a right clamp assembly 402 opposite the left clamp assembly 401. An imaging device 403 is respectively arranged at the front end and the rear end of the left clamping component 401 or the right clamping component 402, wherein the imaging device 403 is used for acquiring images of two lines on the solar thin-film cell to be modulated between the left clamping component 401 and the right clamping component 402 and transmitting the images to a control system, so that the control system can adjust the left clamping component 401 and the right clamping component 402 according to the images to adjust the verticality of the modulated solar thin-film cell 104 with the X direction, and the processing quality is ensured.
Referring to fig. 5, the left clamping assembly 401 and the right clamping assembly 402 together form the positioning mechanism 104. Wherein the x-y direction is the same as previously defined and the z direction is the vertical direction. A stepping motor 501 for providing power in the x direction; y-direction auxiliary clamps and sensors 502 and 510 for assisting and determining y-direction positioning of the solar thin film cell 104; a power pair 505 for pushing the solar thin film cell 104 to move in the x direction; positioning the CCDs 504 and 508, and testing and feeding back the positioning condition of the solar thin film cell 104; z- direction positioning clips 505 and 512 powered by cylinders; a sensor 506 for feeding back the positioning condition of the solar thin film cell 104 in the z direction; auxiliary wheels 507, 511, 513 for assisting the positioning of the x-direction solar thin film cell 104; y- direction positioning clamps 509, 514 powered by cylinders.
The x direction: the stepping motor 501 provides power to drive the power pair 503 to push the solar thin film cell 104, and under the assistance of the auxiliary wheels 507, 508 and 513, the power acts on the solar thin film cell 104, and the positioning CCDs 504 and 508 detect whether the solar thin film cell 104 reaches a specified position. If so, maintaining the state; if not, the power is adjusted 501 to make the solar thin film cell 104 reach the designated position.
The y direction: the y- direction positioning clips 509 and 514 cooperate to push the solar thin film cell 104, and the y-direction auxiliary clips and the sensors 502 and 510 detect whether the solar thin film cell 104 reaches a specified position. If so, maintaining the state; if not, the power of the cylinder is adjusted to enable the solar thin film cell 104 to reach the designated position.
The z direction: (see fig. 4) cylinders 601, 603, 606, 608 move clamps 602, 604, 605, 607, respectively, to adjust the z-direction solar cell. The pressure detected by the sensor 506 determines that the specified position is reached. If so, maintaining the state; if not, the power of the cylinder is adjusted to enable the solar thin film cell 104 to reach the designated position.
The motion logic of the automatic glass positioning and adjusting mechanism is as follows:
after the material is input, the power pair in the X direction pushes the glass until the glass reaches a specified position; the y-direction cylinder pushes the glass until the glass reaches a specified position; after the X direction and the Y direction are in place, the Z direction pressing clamp pushes the glass until the glass is pressed to a specified position, and then the X-Y machine table mechanism 102 and the outer light path system 101 are started to realize laser scribing.
The air floatation bearing mechanism 103 mainly comprises the parts shown in FIG. 6:
the adjustable air floating plate adjusting frames 1033 are provided with six screws for adjusting the height, so that the air floating plate 1032 is horizontal, and the solar amorphous silicon thin film battery is uniformly stressed; 704 active driving wheels (4 groups in total) for sending the solar amorphous silicon thin film battery to the machine; 703 driven driving wheels (4 groups in total) for assisting in conveying the solar amorphous silicon thin film battery to the machine; 702 air floating plates 1032 (totally 8 groups) for bearing the weight of the solar amorphous silicon thin film cell.
704. 703 simultaneously raised above the air bearing plate 1032 to drive the material to the starting position; 702 starting to jet air to lift the material; 704. 703 is lowered to a position below the air floating plate 1032; after the machining is complete, 704, 703 are raised again to drive the material to the next machining position.
In order to further improve the scribing quality of the scribing machine, as shown in fig. 7, a dust removal system may be disposed above the air floating plate 1032, and the dust removal system includes: dust arrester, suction nozzle, ionic wind pump, no pole electric cylinder, wherein, ionic wind pump is located the top of air supporting plate 1032 for blow in the dust that equipment produced in suction nozzle, suction nozzle and dust arrester intercommunication, no pole electric cylinder with suction nozzle, ionic wind pump are connected, are used for controlling suction nozzle, ionic wind pump's removal. The 901 dust collector is used for collecting dust generated by equipment, and the filter element needs to be replaced once every 5000 pieces of processed dust are processed; 902 dust suction nozzle for sucking the dust generated by the equipment; 904 an ion air pump which blows dust generated by the equipment into 802; 903 is a rodless electric cylinder which provides power for 902 and 904.
The principle of the scribing machine of the embodiment is as follows:
firstly, a driving wheel rises, the solar thin film cell 104 is driven to enter the scribing machine through the action of friction force until the solar thin film cell 104 reaches a designated position, an air floating plate 1032 blows air, the driving wheel descends, the air floating plate 1032 is connected with the solar thin film cell 104 plate conveyed, the driving wheel descends, the solar thin film cell 104 is borne on the air floating plate 1032, a laser 201 is started, and the included angle between the solar thin film cell 104 and an X axis is adjusted through a positioning mechanism 104 until the solar thin film cell 104 reaches the designated position; then, the focusing lens 206 group is moved to the Nth longitudinal line position, and the solar thin film cell 104 is completely moved to the other air floating frame to complete longitudinal line scribing; then the solar thin film cell 104 is moved to the Nth transverse line position, the focusing mirror base 206 completely passes through the solar thin film cell 104 to complete the transverse line task, after the transverse line and the longitudinal line are completed, the positioning mechanism 104 and the focusing mirror 206 group are moved to the initial position, the driving wheel is lifted, the solar thin film cell 104 is moved to the blanking position, the driving wheel is lowered, and the solar thin film cell 104 is blanked.
The technical solutions provided by the embodiments of the present invention are described in detail above, and the principles and embodiments of the present invention are explained herein by using specific examples, and the descriptions of the above embodiments are only applicable to help understand the principles of the embodiments of the present invention; meanwhile, for a person skilled in the art, according to the embodiments of the present invention, there may be variations in the specific implementation manners and application ranges, and in summary, the content of the description should not be construed as a limitation to the present invention.

Claims (5)

1. A solar thin film battery scribing machine is characterized by comprising a machine table,
an x-y machine table mechanism, an external light path system, an air floatation bearing mechanism and a positioning mechanism are arranged on the machine table;
the X-Y machine table mechanism comprises an X-direction linear motor substrate and a Y-direction linear motor substrate, the outer light path system is arranged on the X-direction linear motor substrate of the X-Y machine table mechanism and used for providing high peak power focused laser, the air floatation bearing mechanism is arranged on the Y-direction linear motor substrate of the X-Y machine table mechanism, the positioning mechanisms are arranged on two sides of the air floatation bearing mechanism, and the positioning mechanisms are used for clamping and positioning the solar thin film cell;
the air supporting bearing mechanism comprises a conveying wheel system, an air supporting plate and an air supporting plate frame, the conveying wheel system is arranged on two outer sides of the air supporting plate, the air supporting plate is arranged above the air supporting plate frame, and the air supporting plate frame is arranged on an x-direction linear motor substrate of the x-y machine table mechanism.
2. The solar thin film cell scribing machine according to claim 1,
the outer optical path system includes: the device comprises a laser, a beam expander, a 45-degree total reflection lens, a focusing lens seat and a focusing lens; wherein,
the laser is fixed on a machine table, the beam expander is arranged at the front end of the laser, the 45-degree total reflection mirror is arranged in front of the beam expander, the focusing mirror seat is arranged on an x-direction linear motor substrate in the x-y machine table mechanism, a diaphragm-variable adjusting clear aperture and a focusing mirror are arranged on the focusing mirror seat, and the optical axis of the focusing mirror coincides with the reflection optical path of the 45-degree total reflection mirror.
3. The solar thin film cell scribing machine according to claim 1,
the x-y machine table mechanism comprises: the linear motor comprises two y-direction linear motors, two y-direction linear motor substrates, two y-direction linear motor grating rulers and reading heads thereof, an x-direction linear motor substrate and a grating ruler reading head; wherein,
two y direction linear electric motor base plates set up respectively on two y direction linear electric motor, two y direction linear electric motor grating chi and reading head set up respectively on the y direction linear electric motor base plate for survey y direction movement distance, x direction linear electric motor sets up below between the two y direction linear electric motor base plates, x direction linear electric motor base plate sets up on the x direction linear electric motor base plate, x direction linear electric motor grating chi and reading head set up respectively on the x direction linear electric motor base plate.
4. The solar thin film cell scribing machine according to claim 1,
the positioning mechanism includes: a left clamping component and a right clamping component opposite to the left clamping component,
the front end part and the rear end part of the left side clamping component or the right side clamping component are respectively provided with an imaging device,
the two imaging devices are respectively used for acquiring images of two lines on the adjusted panel clamped between the side clamping assembly and the right side clamping assembly and transmitting the images to the control system, so that the control system can adjust the left side clamping assembly and the right side clamping assembly according to the images to adjust the angle of the adjusted panel.
5. The solar thin film cell scribing machine according to claim 1,
still be provided with dust pelletizing system in the top of air supporting plate, dust pelletizing system includes: a dust collector, a dust suction nozzle, an ion air pump and a rodless electric cylinder, wherein,
the ion air pump is located the top of air supporting plate for blow in the dust that equipment produced in take out in the dirt mouth, take out the dirt mouth with the dust arrester intercommunication, rodless electronic jar with take out dirt mouth, ion air pump connection, be used for control take out the removal of dirt mouth, ion air pump.
CN2010200262586U 2010-01-06 2010-01-06 Scribing machine for thin-film solar battery Expired - Fee Related CN201681959U (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN2010200262586U CN201681959U (en) 2010-01-06 2010-01-06 Scribing machine for thin-film solar battery

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102490133A (en) * 2011-12-01 2012-06-13 河海大学常州校区 Modularizing multipoint flexible fixture
CN104766904B (en) * 2014-01-06 2017-01-11 大族激光科技产业集团股份有限公司 CIGS thin film solar cell scribing equipment
CN108581208A (en) * 2018-05-16 2018-09-28 汪玉洁 A kind of amorphous silicon battery laser film-engraving machine
CN108649103A (en) * 2018-05-16 2018-10-12 汪玉洁 A kind of non-crystal silicon solar cell production technology
CN109360867A (en) * 2018-10-09 2019-02-19 苏州宏瑞达新能源装备有限公司 A kind of photovoltaic cell string feed device
WO2023015937A1 (en) * 2021-08-13 2023-02-16 苏州迈为科技股份有限公司 Laser edge deletion machine for solar cell and edge deletion method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102490133A (en) * 2011-12-01 2012-06-13 河海大学常州校区 Modularizing multipoint flexible fixture
CN104766904B (en) * 2014-01-06 2017-01-11 大族激光科技产业集团股份有限公司 CIGS thin film solar cell scribing equipment
CN108581208A (en) * 2018-05-16 2018-09-28 汪玉洁 A kind of amorphous silicon battery laser film-engraving machine
CN108649103A (en) * 2018-05-16 2018-10-12 汪玉洁 A kind of non-crystal silicon solar cell production technology
CN108649103B (en) * 2018-05-16 2019-11-01 江苏悦阳光伏科技有限公司 A kind of non-crystal silicon solar cell production technology
CN108581208B (en) * 2018-05-16 2020-07-31 绍兴市梓昂新材料有限公司 Laser film engraving machine for amorphous silicon battery
CN109360867A (en) * 2018-10-09 2019-02-19 苏州宏瑞达新能源装备有限公司 A kind of photovoltaic cell string feed device
WO2023015937A1 (en) * 2021-08-13 2023-02-16 苏州迈为科技股份有限公司 Laser edge deletion machine for solar cell and edge deletion method

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Granted publication date: 20101222

Termination date: 20140106