CN201653359U - Parallel confocal measuring system based on digital microscope light source - Google Patents
Parallel confocal measuring system based on digital microscope light source Download PDFInfo
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- CN201653359U CN201653359U CN2010201823785U CN201020182378U CN201653359U CN 201653359 U CN201653359 U CN 201653359U CN 2010201823785 U CN2010201823785 U CN 2010201823785U CN 201020182378 U CN201020182378 U CN 201020182378U CN 201653359 U CN201653359 U CN 201653359U
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- light source
- dmd
- parallel confocal
- microscope
- measuring
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Abstract
The utility model discloses a parallel confocal measuring system based on a digital microscope light source and is characterized in that the parallel confocal measuring system based on a digital microscope light source is provided with a DMD system which is composed of a DMD microscope control system and a DMD chip and can control any microscope to deflect in the DMD chip; a light beam emitted by a collimation light source can form reflection in the DMD system; reflected light formed by the DMD system forms a light source required by measuring by an imaging lens; the light source required by measuring is projected on the surface of a tested object on a workbench successively by a spectroscope and a telescope system, the tested object reflects the light beam projected on the surface of the tested object to an area array CCD to form a parallel confocal measuring system. The utility model utilizes DMD to build a soft digital microscope light source and applies the digital microscope light source in the parallel confocal measuring system. The utility model can conveniently and quickly control the deflection state of each microscope in the microscope array as required so as to build the flexible light source with different shapes and sizes.
Description
Technical field
The utility model relates to the measuring system that is applied to the three-dimensional appearance detection, a kind of parallel confocal measuring system of more specifically saying so.
Background technology
Traditional parallel confocal microscope adopts Nipkow rotating disk, micro hole array, micro-optical device (as microlens array etc.) to realize cutting apart light beam usually, thereby becoming multiple spot by spot measurement measures simultaneously, but in a single day these optical device are made, the parameter of light source is just fixing, just must change optical device if will change the distribution and the size of light source point, this has not only improved cost, has also limited the certain applications of parallel confocal system.
The utility model content
The utility model is for avoiding above-mentioned existing in prior technology weak point, a kind of shape, size that can change light source arbitrarily is provided, change parameters such as array of source density, obtain the parallel confocal measuring system based on digital micromirror light source of the ability of surface information to strengthen the parallel confocal measuring system.
The utility model technical solution problem adopts following technical scheme
The utility model based on the characteristics of the parallel confocal measuring system of digital micromirror light source is:
Setting is with the DMD system of DMD micromirror control system and dmd chip deflection that constitute, that can control arbitrary micro mirror in the dmd chip; Receive the collimated light beam that collimated light source sends with described DMD system, and the collimated light source reflected light of imaging len is invested in formation, described collimated light source reflected light is through forming the measuring light that photograph is thrown on the measured object surface on worktable through spectroscope and telescopic system successively as measurement light source behind the imaging len, constitute the measuring light reflex circuit simultaneously by described telescopic system and spectroscope, area array CCD 7 receives the tested folded light beam from the measured object surface through the measuring light reflex circuit.
Compared with the prior art, the utility model beneficial effect is embodied in:
The utility model utilizes DMD to make up a kind of digital micromirror light source of flexibility, and be applied to the parallel confocal measuring system, can control the deflection state of each micro mirror in the micro mirror array quickly and easily as required, thereby construct the flexible light source of difformity, any size.
Description of drawings
Fig. 1 is for being used to eliminate Tabo effect is measured influence to parallel confocal DMD control flow chart in the utility model.
Fig. 2 surface measurements has the DMD control flow chart of the measured object of stria.
Fig. 3 is the utility model schematic diagram.
Number in the figure: 1 collimated light source, 2 is DMD system, 3 imaging lens, 4 spectroscopes, 5 telescopic systems, 6 worktable, 7 area array CCDs 7.
Embodiment
Referring to Fig. 3, present embodiment is provided with the DMD system 2 that constitutes with DMD micromirror control system and dmd chip, when the DMD in the parallel confocal measuring system carries out work, each micro mirror can be distinguished with the form of coordinate in length and breadth, by the DMD micromirror control system micro mirror on each coordinate points is programmed again, control their deflection situation respectively.The light beam that collimated light source sends forms reflection in the DMD system, the reflected light that is formed by the DMD system forms the required light source of measurement through imaging len, measure required light source and be projected on measured object surface on the worktable through spectroscope and telescopic system successively, to be projected on its surperficial beam reflection to area array CCD by described measured object, constitute the parallel confocal measuring system.
Shown in Figure 3, present embodiment is to receive the collimated light beam that collimated light source 1 sends with DMD system 2, and the collimated light source reflected light of imaging len 3 is invested in formation, the collimated light source reflected light forms the measuring light that photograph is thrown on the measured object surface on worktable 6 through spectroscope 4 and telescopic system 5 through imaging len 3 backs successively as measurement light source, constitute the measuring light reflex circuit simultaneously by telescopic system 5 and spectroscope 4, area array CCD 7 receives the tested folded light beam from the measured object surface through the measuring light reflex circuit.
Dmd chip is the optical device that is made of 800 * 600 micro mirror array, wherein each micro mirror all have 0 ° ,+12 ° and-12 ° of three kinds of states, micro mirror is in " inoperative " state in the time of 0 °; Under the duty, micro mirror will shine and next light reflection back formation light source point in the time of+12 °, then be absorbed the screen absorption through the micro mirror light reflected in the time of-12 °, not participate in making up light source.The related DMD micromirror control system of the utility model can be programmed to the micro mirror on each coordinate points in the micro mirror array, control their deflection situation respectively, so just can control+position of micro mirror in micro mirror array of 12 ° of deflections distributes arbitrarily, thereby forms required light source.
Setting up departments, the wavelength of collimated light source is λ in the system, and measurements range is L, and the lateral resolution of system requirements is δ, and the magnification of system is M, and dmd chip is that the length of side of each square micro mirror is d by the micro mirror array of m * n micro mirror formation
0, the position d of each micro mirror in array
I, jExpression, wherein i and j represent the horizontal ordinate and the ordinate of this micro mirror respectively, i=1,2 ..., m; J=1,2 ..., n; The pointolite size of k * k micro mirror formation is kd so
0* kd
0
Measuring method in the present embodiment is carried out as follows:
A, by the formula z=2d/ λ of Taibo spacing, reach L for making system's range, then constructed light source cycle d=d
1, this moment pointolite spacing N
1=d
1/ d
0
i＝1+aN
1，2+aN
1，…，k+aN
1
j＝1+bN
1，2+bN
1，…，k+bN
1
B, control d
I, jDeflection+12 °, wherein:
a＝0，1，2，…，[m/(k+N
1)]
b＝0，1，2，…，[n/(k+N
1)]
The preview light source is constructed in all the other micro mirror deflections-12 °; Determine the positive position of focal plane of pointolite corresponding region by described preview light source;
C, by d
2=δ/M determines light source periodic light source dot spacing N
2=d
2/ d
0
i＝1+aN
2，2+aN
2，…，k+aN
2
j＝1+bN
2，2+bN
2，…，k+bN
2
D, control d
I, jDeflection+12 °, wherein:
a＝0，1，2，…，[m/(k+N
2)]
b＝0，1，2，…，[n/(k+N
2)]
Measurement light source is constructed in all the other micro mirror deflections-12 °; Under the situation of finding out positive position of focal plane, carry out parallel confocal with measurement light source and measure, obtain the coordinate figure of each sampled point.
The control flow of above-mentioned measuring method as shown in Figure 1, this measuring method can be eliminated the influence that Tabo effect is measured parallel confocal.
When if there is stria on the measured object surface, also can measure the surface topography of groove width and all the other positions, surface by this method, measuring method is:
1, control d
I, jDeflection+12 °
i＝1+aN
2，2+aN
2，…，N
1+aN
2
j＝1，2，…，n
a＝0，1，2，…，[m/(N
1+N
2)]
All the other micro mirror deflections-12 °, the structure thickness is d
1, spacing is d
2The longitudinal stripe light source;
When 2, the striped light source irradiation is on stria, can two breaks occur, calculate the break width y under the longitudinal stripe at the edge of groove
1
3, control d
I, jDeflection+12 °
i＝1，2，…，m
j＝1+bN
4，2+bN
4，…，N
3+bN
4
b＝0，1，2，…，[n/(N
3+N
4)]
All the other micro mirror deflections-12 °, the structure thickness is d
3, spacing is d
4The travers light source;
4, the break width y under the calculating travers
2
5, work as y
1, y
2≠ 0 o'clock, by
Calculate the actual width of stria;
And work as y
1=0 o'clock, y=y
2Otherwise, y=y
1
6, determine light source periodic light source dot spacing N=d/d by d=δ/M
0
7, control d
I, jDeflection+12 °, wherein
i＝1+aN，2+aN，…，k+aN
j＝1+bN，2+bN，…，k+bN
a＝0，1，2，…，[m/(k+N)]
b＝0，1，2，…，[n/(k+N)]
All the other micro mirror deflections-12 ° have made up measurement light source;
8, with measurement light source parallel confocal is carried out in all the other positions, surface and measure, obtain the coordinate figure of each sampled point.Its control flow as shown in Figure 2.
Claims (1)
1. based on the parallel confocal measuring system of digital micromirror light source, it is characterized in that:
Setting is with the DMD system (2) of DMD micromirror control system and dmd chip deflection that constitute, that can control arbitrary micro mirror in the dmd chip; Receive the collimated light beam that collimated light source (1) sends with described DMD system (2), and the collimated light source reflected light of imaging len (3) is invested in formation, described collimated light source reflected light passes through spectroscope (4) through imaging len (3) back successively as measurement light source and telescopic system (5) forms the measuring light that photograph is thrown on the measured object surface on worktable (6), constitute the measuring light reflex circuit simultaneously by described telescopic system (5) and spectroscope (4), area array CCD (7) receives the tested folded light beam from the measured object surface through the measuring light reflex circuit.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201823785U CN201653359U (en) | 2010-04-30 | 2010-04-30 | Parallel confocal measuring system based on digital microscope light source |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201823785U CN201653359U (en) | 2010-04-30 | 2010-04-30 | Parallel confocal measuring system based on digital microscope light source |
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| Publication Number | Publication Date |
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| CN201653359U true CN201653359U (en) | 2010-11-24 |
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| CN2010201823785U Expired - Fee Related CN201653359U (en) | 2010-04-30 | 2010-04-30 | Parallel confocal measuring system based on digital microscope light source |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101858727A (en) * | 2010-04-30 | 2010-10-13 | 合肥工业大学 | Parallel confocal measuring system and measuring method based on digital micromirror light source |
| CN102749027A (en) * | 2011-04-18 | 2012-10-24 | 陈亮嘉 | Linear color confocal microscope system |
-
2010
- 2010-04-30 CN CN2010201823785U patent/CN201653359U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101858727A (en) * | 2010-04-30 | 2010-10-13 | 合肥工业大学 | Parallel confocal measuring system and measuring method based on digital micromirror light source |
| CN102749027A (en) * | 2011-04-18 | 2012-10-24 | 陈亮嘉 | Linear color confocal microscope system |
| CN102749027B (en) * | 2011-04-18 | 2015-08-12 | 陈亮嘉 | Linear color confocal microscope system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101124 Termination date: 20140430 |