CN201625865U - Ultrasonic punching machine - Google Patents

Ultrasonic punching machine Download PDF

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Publication number
CN201625865U
CN201625865U CN 201020139124 CN201020139124U CN201625865U CN 201625865 U CN201625865 U CN 201625865U CN 201020139124 CN201020139124 CN 201020139124 CN 201020139124 U CN201020139124 U CN 201020139124U CN 201625865 U CN201625865 U CN 201625865U
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CN
China
Prior art keywords
milling machine
piezoelectric ceramic
ultrasonic
cnc milling
hole
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201020139124
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Chinese (zh)
Inventor
岳军
李俊岭
孙晓波
牛进毅
张谨
吴洪坤
李云峰
苗俊芳
胡文平
李永珍
苗泽志
梁丽娟
王莉
马斌
吴楠
杨杰
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CETC 2 Research Institute
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CETC 2 Research Institute
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Publication date
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Priority to CN 201020139124 priority Critical patent/CN201625865U/en
Application granted granted Critical
Publication of CN201625865U publication Critical patent/CN201625865U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Drilling And Boring (AREA)

Abstract

The utility model provides an ultrasonic punching machine which solves the technical problems that when the existing ultrasonic punching machine drills through holes on hard brittle materials, the places around the impact points are easy to crack and the thin material corners are easy to break. The ultrasonic punching machine comprises a numerical control milling machine (1), a numerical control milling machine controller (2), a numerical control milling machine mainshaft rotating component (3) with a mainshaft through hole (14), a visual system component (4), an industrial controlling machine (5), a numerical control milling machine workbench (6), a voltage-stabilizing power supply (8) and an ultrasonic power supply (9); the top end of the mainshaft through hole (14) is fixed with a stream collecting ring component (15); a conical port (13) on the bottom end of the mainshaft through hole (14) is fixed with a fixed sleeve (12) of a piezoelectric ceramic transducer, and the piezoelectric ceramic transducer (10); and the lower end of the piezoelectric ceramic transducer (10) is fixedly connected with a drill bit (11). The ultrasonic punching machine can be widely applied to the industries such as manufacturing industry of thin-film substrate or thick-film substrate, manufacturing industry of semiconductors, aeronautics and astronautics, and the like.

Description

Ultrasonic punching machine
Technical field
The present invention relates to a kind of ultrasonic machining unit, particularly a kind of equipment to the hard brittle material perforation processing.
Background technology
At present, the ultrasonic head of ultrasonic punching machine all is fixed, and its power, efficient and precision are all lower, and are manual control mode.This equipment is mainly used in jewelry such as jade, crystal, agate, emerald, in the hard crisp part processing than low side, can not satisfy the requirement of electronics productions such as Aero-Space.
Summary of the invention
The invention solves existing ultrasonic punching machine when hard brittle material is drilled through the hole, impact easily a little on every side crackle and the thin material corner technical problem of breaking will manually become the automatic operating efficiency that improves equipment simultaneously.
The present invention overcomes the above problems by following scheme:
Ultrasonic punching machine, comprise CNC milling machine, the CNC milling machine controller, CNC milling machine main axis rotation assembly, the vision system assembly, Industrial Control Computer, the CNC milling machine workbench, voltage-stabilized power supply and ultrasonic power, be provided with spindle through-hole along axis in the main shaft in the described CNC milling machine main axis rotation assembly, be set with the collecting ring assembly on the top of spindle through-hole, in the cone-shaped interface of the bottom of spindle through-hole, be set with the fixed cover of piezoelectric ceramic transducer, in the fixed cover of piezoelectric ceramic transducer, be provided with piezoelectric ceramic transducer, the lower end and the drill bit of piezoelectric ceramic transducer are fixed together, the upper end of piezoelectric ceramic transducer is connected with the power line of two piezoelectric ceramic transducers, the power line of these two piezoelectric ceramic transducers pass spindle through-hole respectively with the collecting ring assembly on last collecting ring be connected with the lower header ring, last collecting ring and lower header ring and ultrasonic power are electrically connected.
Described CNC milling machine workbench is provided with the gas suspension workbench, the base of gas suspension workbench is fixedly installed on the CNC milling machine workbench, base is provided with four vertically disposed guide pillars, upper end pivot bush unit one guide pin bushing of every guide pillar, the top of guide pin bushing and the bottom surface of rig floor are fixed together, middle part at base is set with cylinder, the output shaft of cylinder and the bottom surface of rig floor are fixed together, limit, left side on the upper surface of rig floor is set with the side locating piece, back side edge on the upper surface of rig floor is set with the back locating piece, is provided with drilled workpiece between side locating piece and back locating piece
The invention has the beneficial effects as follows that ultrasonic punching machine adopts the ultrasonic head rotation technique to process, produce the automatic frequency tracking function by electric feedback circuit, the frequency that makes ultrasonic-frequency power supply is along with the resonant frequency of transducer is done corresponding the variation, to guarantee that transducer always works in resonant condition, make resonance effect reach best; Be equipped with vision system and accurately locate, the equipment that guaranteed has very high positioning accuracy; Adopt the air floating table control technology, can reduce fragment rate effectively, and improve surface smoothness.
Description of drawings:
Fig. 1 is a structural representation of the present invention
Fig. 2 is the structural representation of main axis rotation assembly of the present invention
Fig. 3 is the structural representation of collecting ring assembly of the present invention
Fig. 4 is the structural representation of gas suspension workbench of the present invention
The specific embodiment
Ultrasonic punching machine, comprise CNC milling machine 1, CNC milling machine controller 2, CNC milling machine main axis rotation assembly 3, vision system assembly 4, Industrial Control Computer 5, CNC milling machine workbench 6, voltage-stabilized power supply 8 and ultrasonic power 9, be provided with spindle through-hole 14 along axis in the main shaft in the described CNC milling machine main axis rotation assembly 3, be set with collecting ring assembly 15 on the top of spindle through-hole 14, in the bottom of spindle through-hole 14 cone-shaped interface 13, be set with the fixed cover 12 of piezoelectric ceramic transducer, in the fixed cover 12 of piezoelectric ceramic transducer, be provided with piezoelectric ceramic transducer 10, the lower end of piezoelectric ceramic transducer 10 and drill bit 11 are fixed together, the upper end of piezoelectric ceramic transducer 10 is connected with the power line 16 of two piezoelectric ceramic transducers, the power line of these two piezoelectric ceramic transducers pass spindle through-hole 14 respectively with collecting ring assembly 15 on last collecting ring 17 be connected with lower header ring 18, last collecting ring 17 and lower header ring 18 is electrically connected with ultrasonic power 9.
Described CNC milling machine workbench 6 is provided with gas suspension workbench 7, the base 19 of gas suspension workbench 7 is fixedly installed on the CNC milling machine workbench 6, base 19 is provided with four vertically disposed guide pillars 20, upper end pivot bush unit one guide pin bushing 21 of every guide pillar 20, the bottom surface of the top of guide pin bushing 21 and rig floor 22 is fixed together, be set with cylinder 23 at the middle part of base 19, the output shaft 24 of cylinder 23 is fixed together with the bottom surface of rig floor 22, limit, left side on the upper surface of rig floor 22 is set with side locating piece 25, back side edge on the upper surface of rig floor 22 is set with back locating piece 26, is provided with drilled workpiece 27 between side locating piece 25 and back locating piece 26.
Hard brittle workpiece is installed on air-flotation workbench, and CNC milling machine controller 2 is arranged on the automatic running program.After pressing the working procedure button, take pictures in 4 pairs of hard brittle workpiece of vision system assembly, the 27 left and right angles of going up, industrial computer 5 operation programs are analyzed photo and are drawn the accurate coordinates of workpiece under CNC milling machine controller 2 coordinate systems, and give CNC milling machine controller 2 with coordinates transmission.CNC milling machine controller 2 is an initial point on workpiece left comer summit, locatees processing automatically under the coordinate system that left and right angular vertex line is an X-axis.Main axis rotation assembly 3 matches with ultrasonic power 9, CNC milling machine controller 2, gas suspension workbench 7 and realizes rotary ultrasonic processing.
Ultrasonic punching machine is to belong to a kind of in the rotary ultrasonic process equipment, and its ultrasonic head can be along with main axis rotation when work.Rotary ultrasonic processing is to grow up on the basis of conventional ultrasound processing, and the difference that it and conventional ultrasound are processed is: instrument has added when doing ultrasonic vibration and rotatablely moved; Instrument by metal dust and diamond or cubic boron nitride abrasive materials by a certain percentage sintering form; Cooling water rather than abrasive suspension are input between instrument and the surface of the work.Rotary ultrasonic machining principle essence is that the ablation with the rotation of the hammering campaign of ultrasonic vibration instrument and instrument combines is the compound of conventional ultrasound processing and diamond grinding Material Removal Mechanism.It comprises hammering (impression under ultrasonic vibration and cracked), abrasion (rotatablely moving of cutting element can be regarded as grinding process) and throw to lose (ultrasonic vibration and instrument rotatablely move produced simultaneously) etc. effect.Under this processing mode effect, the surface of the work layer produces tired under the high frequency ultrasound vibration, thereby is ground removal easily, and tonnage is less, has improved operating efficiency greatly.
Ultrasonic punching machine has solved key technologies such as ultrasonic vibration system resonance design and manufacturing technology, vision system placement technology, air floating platform control, equipment can not only be realized the function of punching, can also carry out the processing of milling figure and blind hole, widened the range of work greatly, machining accuracy and process velocity have been improved, the range of work comprises materials such as silicon chip, ceramic substrate, optical glass, quartz, can be widely used in approaching, industry such as manufacturing of thick film substrate, semiconductor manufacturing, Aero-Space, optical glass manufacturing.

Claims (2)

1. ultrasonic punching machine, comprise CNC milling machine (1), CNC milling machine controller (2), CNC milling machine main axis rotation assembly (3), vision system assembly (4), Industrial Control Computer (5), CNC milling machine workbench (6), voltage-stabilized power supply (8) and ultrasonic power (9), it is characterized in that, be provided with spindle through-hole (14) along axis in the main shaft in the described CNC milling machine main axis rotation assembly (3), be set with collecting ring assembly (15) on the top of spindle through-hole (14), in the bottom cone-shaped interface (13) of spindle through-hole (14), be set with the fixed cover (12) of piezoelectric ceramic transducer, in the fixed cover (12) of piezoelectric ceramic transducer, be provided with piezoelectric ceramic transducer (10), the lower end of piezoelectric ceramic transducer (10) and drill bit (11) are fixed together, the upper end of piezoelectric ceramic transducer (10) is connected with the power line (16) of two piezoelectric ceramic transducers, the power line of these two piezoelectric ceramic transducers pass spindle through-hole (14) respectively with collecting ring assembly (15) on last collecting ring (17) be connected with lower header ring (18), last collecting ring (17) and lower header ring (18) and ultrasonic power (9) are electrically connected.
2. a kind of ultrasonic punching machine according to claim 1, it is characterized in that, described CNC milling machine workbench (6) is provided with gas suspension workbench (7), the base (19) of gas suspension workbench (7) is fixedly installed on the CNC milling machine workbench (6), base (19) is provided with four vertically disposed guide pillars (20), upper end pivot bush unit one guide pin bushing (21) of every guide pillar (20), the bottom surface of the top of guide pin bushing (21) and rig floor (22) is fixed together, be set with cylinder (23) at the middle part of base (19), the output shaft (24) of cylinder (23) is fixed together with the bottom surface of rig floor (22), limit, left side on the upper surface of rig floor (22) is set with side locating piece (25), back side edge on the upper surface of rig floor (22) is set with back locating piece (26), is provided with drilled workpiece (27) between side locating piece (25) and back locating piece (26).
CN 201020139124 2010-03-24 2010-03-24 Ultrasonic punching machine Expired - Fee Related CN201625865U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201020139124 CN201625865U (en) 2010-03-24 2010-03-24 Ultrasonic punching machine

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Application Number Priority Date Filing Date Title
CN 201020139124 CN201625865U (en) 2010-03-24 2010-03-24 Ultrasonic punching machine

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101745658A (en) * 2010-03-24 2010-06-23 中国电子科技集团公司第二研究所 Ultrasonic punching machine
CN104761135A (en) * 2014-01-07 2015-07-08 丸荣机械股份有限公司 Drilling processing method of hard and brittle material
CN115302644A (en) * 2022-10-11 2022-11-08 南京宏泰晶智能装备科技有限公司 Vertical punching device for monocrystalline silicon wafer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101745658A (en) * 2010-03-24 2010-06-23 中国电子科技集团公司第二研究所 Ultrasonic punching machine
CN104761135A (en) * 2014-01-07 2015-07-08 丸荣机械股份有限公司 Drilling processing method of hard and brittle material
CN115302644A (en) * 2022-10-11 2022-11-08 南京宏泰晶智能装备科技有限公司 Vertical punching device for monocrystalline silicon wafer
CN115302644B (en) * 2022-10-11 2023-01-31 南京宏泰晶智能装备科技有限公司 Vertical punching device for monocrystalline silicon wafer

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20101110

Termination date: 20110324