CN201615335U - 一种硅烷气体转移装置 - Google Patents
一种硅烷气体转移装置 Download PDFInfo
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- CN201615335U CN201615335U CN2010201292521U CN201020129252U CN201615335U CN 201615335 U CN201615335 U CN 201615335U CN 2010201292521 U CN2010201292521 U CN 2010201292521U CN 201020129252 U CN201020129252 U CN 201020129252U CN 201615335 U CN201615335 U CN 201615335U
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CN2010201292521U CN201615335U (zh) | 2010-03-11 | 2010-03-11 | 一种硅烷气体转移装置 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102588730A (zh) * | 2012-02-24 | 2012-07-18 | 南京亚格泰新能源材料有限公司 | 外盘管冷却硅烷中间储罐 |
CN102628546A (zh) * | 2012-04-17 | 2012-08-08 | 南京特种气体厂有限公司 | 硅烷纯化与灌装用冷阱系统 |
CN102635784A (zh) * | 2012-04-17 | 2012-08-15 | 南京特种气体厂有限公司 | 硅烷灌装系统的气瓶快速置换处理装置 |
CN104075106A (zh) * | 2014-06-24 | 2014-10-01 | 江苏天舒电器有限公司 | 一种充氮保压抽真空设备的控制方法及其控制装置 |
CN112409122A (zh) * | 2020-11-29 | 2021-02-26 | 山东高端化工研究院有限公司 | 一种醚后碳四原料预处理装置 |
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2010
- 2010-03-11 CN CN2010201292521U patent/CN201615335U/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102588730A (zh) * | 2012-02-24 | 2012-07-18 | 南京亚格泰新能源材料有限公司 | 外盘管冷却硅烷中间储罐 |
CN102628546A (zh) * | 2012-04-17 | 2012-08-08 | 南京特种气体厂有限公司 | 硅烷纯化与灌装用冷阱系统 |
CN102635784A (zh) * | 2012-04-17 | 2012-08-15 | 南京特种气体厂有限公司 | 硅烷灌装系统的气瓶快速置换处理装置 |
CN104075106A (zh) * | 2014-06-24 | 2014-10-01 | 江苏天舒电器有限公司 | 一种充氮保压抽真空设备的控制方法及其控制装置 |
CN104075106B (zh) * | 2014-06-24 | 2016-02-10 | 江苏天舒电器有限公司 | 一种充氮保压抽真空设备的控制方法及其控制装置 |
CN112409122A (zh) * | 2020-11-29 | 2021-02-26 | 山东高端化工研究院有限公司 | 一种醚后碳四原料预处理装置 |
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Owner name: SHANGHAI YIXIN ELECTRONICS TECHNOLOGY CO., LTD. SH Free format text: FORMER OWNER: SHANGHAI YIXIN ELECTRONICS TECHNOLOGY CO., LTD. SHANGHAI XINTONG SEMICONDUCTOR EQUIPMENT CO., LTD. |
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C41 | Transfer of patent application or patent right or utility model | ||
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Effective date of registration: 20110608 Address after: 201108 No. 56 middle spring road, Xhenzhuang Industrial Zone, Shanghai Co-patentee after: Shanghai Yixin Electronic Technology Co., Ltd. Patentee after: Shanghai Zhengfan Technology Co., Ltd. Co-patentee after: Shanghai Zhengfan Semiconductor Equipment Co., Ltd. Address before: 201108 No. 56 middle spring road, Xhenzhuang Industrial Zone, Shanghai Co-patentee before: Shanghai Yixin Electronic Technology Co., Ltd. Patentee before: Shanghai Zhengfan Technology Co., Ltd. Co-patentee before: Shanghai Xintong Semiconductor Equipment Co., Ltd. |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20121015 Address after: 201108 No. 56 middle spring road, Xhenzhuang Industrial Zone, Shanghai Patentee after: Shanghai Zhengfan Technology Co., Ltd. Patentee after: Shanghai Zhengfan Semiconductor Equipment Co., Ltd. Address before: 201108 No. 56 middle spring road, Xhenzhuang Industrial Zone, Shanghai Patentee before: Shanghai Zhengfan Technology Co., Ltd. Patentee before: Shanghai Yixin Electronic Technology Co., Ltd. Patentee before: Shanghai Zhengfan Semiconductor Equipment Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101027 Termination date: 20190311 |