CN101482222A - 高纯二乙基锌的安全输送装置 - Google Patents
高纯二乙基锌的安全输送装置 Download PDFInfo
- Publication number
- CN101482222A CN101482222A CNA200910047074XA CN200910047074A CN101482222A CN 101482222 A CN101482222 A CN 101482222A CN A200910047074X A CNA200910047074X A CN A200910047074XA CN 200910047074 A CN200910047074 A CN 200910047074A CN 101482222 A CN101482222 A CN 101482222A
- Authority
- CN
- China
- Prior art keywords
- valve
- pneumatic valve
- diethyl zinc
- outlet
- pneumatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNA200910047074XA CN101482222A (zh) | 2009-03-05 | 2009-03-05 | 高纯二乙基锌的安全输送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNA200910047074XA CN101482222A (zh) | 2009-03-05 | 2009-03-05 | 高纯二乙基锌的安全输送装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN101482222A true CN101482222A (zh) | 2009-07-15 |
Family
ID=40879450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA200910047074XA Pending CN101482222A (zh) | 2009-03-05 | 2009-03-05 | 高纯二乙基锌的安全输送装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101482222A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106006525A (zh) * | 2016-05-18 | 2016-10-12 | 上海正帆科技股份有限公司 | 一种三甲基铝的安全输送装置 |
CN106545749A (zh) * | 2016-12-20 | 2017-03-29 | 上海至纯洁净系统科技股份有限公司 | 一种液态源供应装置 |
CN106969265A (zh) * | 2017-04-15 | 2017-07-21 | 广东蓝新氢能源科技有限公司 | 一种稳压防爆计量装置 |
-
2009
- 2009-03-05 CN CNA200910047074XA patent/CN101482222A/zh active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106006525A (zh) * | 2016-05-18 | 2016-10-12 | 上海正帆科技股份有限公司 | 一种三甲基铝的安全输送装置 |
CN106545749A (zh) * | 2016-12-20 | 2017-03-29 | 上海至纯洁净系统科技股份有限公司 | 一种液态源供应装置 |
CN106969265A (zh) * | 2017-04-15 | 2017-07-21 | 广东蓝新氢能源科技有限公司 | 一种稳压防爆计量装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106006525A (zh) | 一种三甲基铝的安全输送装置 | |
CN102657922A (zh) | 密闭式电缆隧道氮气自动消防系统 | |
CN101482222A (zh) | 高纯二乙基锌的安全输送装置 | |
CN201348138Y (zh) | 一种高纯二乙基锌的安全输送装置 | |
CN104111677A (zh) | 用于安全试验舱系统的温度湿度调节装置 | |
CN103926376A (zh) | 化学品火灾爆炸安全试验舱系统 | |
CN105439066B (zh) | 一种无水氢氟酸卸车系统 | |
CN207500803U (zh) | 一种特殊气体存储柜 | |
CN111850326A (zh) | 一种用于铝熔体净化的氮-氯气体混合系统和方法 | |
CN214663709U (zh) | 一种用于特殊气体输送的气瓶柜 | |
CN201615335U (zh) | 一种硅烷气体转移装置 | |
CN206530881U (zh) | 一种检测主厂房内供氢管道泄漏和降低爆炸危险的结构 | |
CN210979351U (zh) | 一种用于特殊气体输送的集装格供应系统 | |
US20170338130A1 (en) | Ion implanter comprising integrated ventilation system | |
CN106681290B (zh) | 油库罐区智能分析控制处理回收预控安全连锁系统 | |
CN201282131Y (zh) | 一种微电子气源柜吹扫系统 | |
CN110975567A (zh) | 一种工业表面处理用酸雾废气回收处理系统 | |
CN203395575U (zh) | 事故氯回收系统 | |
CN208090318U (zh) | 一种全自动特殊液体供应柜 | |
CN103411127B (zh) | 事故氯回收系统 | |
KR20130002307U (ko) | 불소 공급을 위한 퍼지 박스 | |
CN113332633A (zh) | 一种用于三甲基铝全自动供液柜的自动灭火系统 | |
CN211232413U (zh) | 一种用于大流量气体供应设备 | |
CN109439370B (zh) | 一种烧嘴冷却水保护装置及方法 | |
CN204608155U (zh) | 一种安全节能的非晶锗硅成膜设备 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI YIXIN ELECTRONICS TECHNOLOGY CO., LTD. SH Free format text: FORMER OWNER: SHANGHAI YIXIN ELECTRONICS TECHNOLOGY CO., LTD. |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20100406 Address after: 201108 No. 56 middle spring road, Xhenzhuang Industrial Zone, Shanghai Applicant after: Shanghai Zhengfan Superclean Technology Co., Ltd. Co-applicant after: Shanghai Yixin Electronic Technology Co., Ltd. Co-applicant after: Shanghai Zhengfan Technology Co., Ltd. Address before: 201108 No. 56 middle spring road, Xhenzhuang Industrial Zone, Shanghai Applicant before: Shanghai Zhengfan Superclean Technology Co., Ltd. Co-applicant before: Shanghai Yixin Electronic Technology Co., Ltd. |
|
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20090715 |