CN201611653U

CN201611653U - Semiconductor wafer clamping device

Info

Publication number: CN201611653U
Application number: CN2009202121715U
Authority: CN
Inventors: 汲生泉; 钱洪涛; 康盛; 丁祥君
Original assignee: Semiconductor Manufacturing International Shanghai Corp
Current assignee: Semiconductor Manufacturing International Beijing Corp
Priority date: 2009-11-10
Filing date: 2009-11-10
Publication date: 2010-10-20
Anticipated expiration: 2019-11-10

Abstract

The utility model provides a semiconductor wafer clamping device used for clamping at least two different wafers in terms of size. The clamping device comprises a disc, the base of the disc and supporting rods, wherein, the disc comprises a first circular ring and a second circular ring which form a cascaded groove structure, the supporting rods are fixed on the base of the disc, and the base of the disc and the supporting rods are positioned at the bottom of the disc. The clamping device is simple in structure, and can be used on one production machine for clamping various wafers with different sizes, thereby eliminating the need for production machines dedicated to wafers with different sizes respectively, reducing cost and boosting productivity.

Description

A kind of anchor clamps of semiconductor crystal wafer

Technical field

The utility model relates to integrated circuit and makes the field, relates in particular to a kind of anchor clamps of semiconductor crystal wafer.

Background technology

Make the field at integrated circuit, be used at present the wafer that the anchor clamps of clamping wafer can only a kind of size of clamping in the industry, if the danger that the another kind of size wafer of clamping is prone to fragmentation or drops, with reference to the accompanying drawings shown in 1, what it adopted is the mechanical clamp arm configuration of traditional type, the opening size of gripper is fixed, so can't the grasp opening size with the wafer of outside dimension, therefore, the wafer of various different sizes can't and be produced on the board and use in a kind of measurement of fixed dimension, cause the idle waste of resource, therefore, provide a kind of can clamping the anchor clamps of the multiple size wafer wafer of realizing various different sizes in a kind of measurement of fixed dimension and produce use on the board, make full use of the resources of production thereby reach, reducing production costs, is very necessary.

The utility model content

The utility model provides a kind of anchor clamps of semiconductor crystal wafer, to solve the problem of the wafer that the existing anchor clamps that are used for the clamping wafer can only a kind of size of clamping.

For solving the problems of the technologies described above, the utility model provides a kind of anchor clamps of semiconductor crystal wafer, comprising:

Disk, this disk comprise first annulus and second annulus, and described first annulus and described second annulus constitute the staged groove structure;

The base of disk and support bar, described support bar are fixed on the base of described disk, and the base of described disk and described support bar are positioned at the bottom of described disk.

Optionally, the quantity of described support bar is at least three, distance between the adjacent described support bar equates, each described support bar equates with distance between the described disc base center of circle and less than the hollow radius of a circle of described first annulus, be beneficial to the stressed even of support bar, and can pass described open circles smoothly.

Optionally, the material of described anchor clamps is a monomer moulding casting nylon.

The utility model provides a kind of anchor clamps of semiconductor crystal wafer, and described clamp structure is simple, but and the wafer of the multiple size of clamping, improved the utilance of different size wafer production board, saved cost, improved production capacity.

Description of drawings

Fig. 1 is the vertical view of anchor clamps of the semiconductor crystal wafer of prior art;

The vertical view of the disk of the semiconductor crystal wafer anchor clamps that Fig. 2 is provided for the utility model one embodiment;

Fig. 3 is the cutaway view of the disk of semiconductor crystal wafer anchor clamps shown in Figure 2 along A direction among Fig. 2;

The base of the disk of the semiconductor crystal wafer anchor clamps that Fig. 4 is provided for the utility model one embodiment and the vertical view of support bar;

Fig. 5 is the base of disk of semiconductor crystal wafer anchor clamps shown in Figure 4 and the support bar cutaway view along B direction among Fig. 4;

Disk and the base of disk and the location diagram of support bar of the semiconductor crystal wafer anchor clamps that Fig. 6 is provided for the utility model one embodiment.

Embodiment

Be described in further detail below in conjunction with the anchor clamps of the drawings and specific embodiments the semiconductor crystal wafer that the utility model proposes.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.

Core concept of the present utility model is, a kind of anchor clamps of semiconductor crystal wafer are provided, and makes its ability with wafer of the multiple size of clamping, to reach the saving cost, improves the purpose of production capacity.

In the anchor clamps of the semiconductor crystal wafer that the utility model one embodiment is provided, as shown in Figures 2 and 3, the vertical view of the disk of the semiconductor crystal wafer anchor clamps that Fig. 2 is provided for the utility model one embodiment, Fig. 3 is the cutaway view of the disk of semiconductor crystal wafer anchor clamps shown in Figure 2 along A direction among Fig. 2, first annulus, 10 diameters of disk 100 are D2=201mm, so that place 8 cun wafers, second annulus, 20 diameters are D1=300mm, so that place 12 cun wafers, first annulus 10 and second annulus 20 constitute the staged groove structure.As Fig. 4 and shown in Figure 5, the base of the disk of the semiconductor crystal wafer anchor clamps that Fig. 4 is provided for the utility model one embodiment and the vertical view of support bar, Fig. 5 is the base of disk of semiconductor crystal wafer anchor clamps shown in Figure 4 and the support bar cutaway view along B direction among Fig. 4, distance in three support bars 200 between the adjacent supports bar equates, distance between base 300 centers of circle of each support bar and disk equates, and less than first annulus, 10 hollow radius of a circle D3, be beneficial to the stressed even of support bar, and can pass described open circles smoothly.

During use, as shown in Figure 6, can utilize the base 300 of disk to rise, support bar 200 passes the first annulus open circles of disk 100, with 8 cun wafers and 12 cun wafer jack-up, with vacuum WAND wafer is taken out then.Therefore, in the present embodiment, these anchor clamps can 8 cun wafers of clamping again can 12 cun wafers of clamping.

In the utility model one embodiment, disk 100, the material of the base 300 of support bar 200 and disk is a monomer moulding casting nylon, its material has also reached 140 ℃ than light and strong its fusing point simultaneously of rigidity, is fit to do anchor clamps.Preferable, the maximum operation (service) temperature of these anchor clamps is 100 ℃, avoids high temperature to make its fusion.

Will be appreciated that described support bar 200 quantity can be more than three or three.

Please refer to Fig. 2 to Fig. 6.The anchor clamps of the semiconductor crystal wafer that is provided at the utility model one embodiment comprise: disk 100, this disk 100 comprise first annulus 10 and second annulus, 20, the first annulus 10 and second annulus 20 and constitute the staged groove structures; The base 300 of disk and support bar 200, support bar 200 are fixed on the base 300 of disk, and the base 300 of disk and support bar 200 are positioned at the bottom of described disk 100.The quantity of described support bar is at least three, and the distance between the adjacent supports bar equates, the distance between the base center of circle of each support bar and disk equates and less than the hollow radius of a circle D3 of first annulus.Disk 100, the base 300 of support bar 200 and disk adopts monomer moulding casting nylon to make.

In sum, the utility model provides a kind of anchor clamps of semiconductor crystal wafer, and described clamp structure is simple, but and the wafer of the multiple size of clamping, improved the utilance of different size wafer production board, saved cost, improved production capacity.

Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.

Claims

1. the anchor clamps of a semiconductor crystal wafer, the wafer in order at least two kinds of sizes of clamping is characterized in that, comprising:

2. the anchor clamps of semiconductor crystal wafer as claimed in claim 1, it is characterized in that, the quantity of described support bar is at least three, distance between the adjacent described support bar equates, each described support bar equates with distance between the described disc base center of circle and less than the hollow radius of a circle of described first annulus.

3. the anchor clamps of semiconductor crystal wafer as claimed in claim 1 is characterized in that, adopt monomer moulding casting nylon to make.