CN103586246A - Clamping mechanism of mask plate cleaning machine - Google Patents

Clamping mechanism of mask plate cleaning machine Download PDF

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Publication number
CN103586246A
CN103586246A CN201210292317.8A CN201210292317A CN103586246A CN 103586246 A CN103586246 A CN 103586246A CN 201210292317 A CN201210292317 A CN 201210292317A CN 103586246 A CN103586246 A CN 103586246A
Authority
CN
China
Prior art keywords
supporting seat
clamping
mask plate
cleaning machine
collet
Prior art date
Application number
CN201210292317.8A
Other languages
Chinese (zh)
Other versions
CN103586246B (en
Inventor
海树岩
Original Assignee
沈阳芯源微电子设备有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 沈阳芯源微电子设备有限公司 filed Critical 沈阳芯源微电子设备有限公司
Priority to CN201210292317.8A priority Critical patent/CN103586246B/en
Publication of CN103586246A publication Critical patent/CN103586246A/en
Application granted granted Critical
Publication of CN103586246B publication Critical patent/CN103586246B/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/04Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations

Abstract

The invention relates to mask plate cleaning machines, in particular to a clamping mechanism of a mask plate cleaning machine. The clamping mechanism comprises a base provided with a plurality of supporting seats different in height, the supporting seats enclose to form a clamping area, and each supporting seat is provided with bumping posts and an upright; a small-sized mask plate is supported through the uprights of the lower supporting seats and clamped through the bumping posts; a large-sized mask plate is supported through the uprights of the higher supporting seats and clamped through the bumping posts; the supporting seats different in height arranged at the edge of the base are divided into the lower supporting seats and the higher supporting seats which are arranged at intervals. The supporting seats different in height are arranged on the base at intervals, so that one base is omitted; the purpose that the two mask plates different in size can be mounted in the same clamping mechanism is achieved, and similar mask plate clamping mechanisms with large difference in size can be similarly designed, so that manufacturing cost is lowered.

Description

A kind of clamping device of mask plate cleaning machine
Technical field
The present invention relates to mask plate cleaning machine equipment, specifically a kind of clamping device of mask plate cleaning machine.
Background technology
At present, the equipment of mask plate cleaning machine is mainly comprised of mainshaft mechanism, rotating mechanism, clamping device, cavity, DIW water system, high pressure water system, megasonics systems, hairbrush purging system, organic solvent purging system, Separate System of Water-jet, waste discharge system etc.During cleaning, mask plate is contained on clamping device, rotation under main shaft drives, each purging system cleans it successively simultaneously; The mask plate size different (seeing size difference size) of cleaning due to the cleaning machine equipment of each semiconductor factory, clamping device also has difference.4 inches and 5 inches before this, two kinds of mask plates of 5 inches and 6 inches can be made respectively same clamping device, and two kinds of big or small mask plates are installed on same plane; But when the mask plate of 5 inches and 7 inches is installed at grade, the lower surface of 7 inches of plates can be encountered the installation bumping post of 5 inches of plates, can cannot be in place because interfere.This kind of other two classes mask plate of difference in size, when same cleaning machine cleans, need to be changed different clamping devices like this.
Summary of the invention
In order to solve different size mask plate, need to change the problem that different clamping devices clean, the object of the present invention is to provide a kind of clamping device that clamps the mask plate cleaning machine of two kinds of different size mask plates.
The object of the invention is to be achieved through the following technical solutions:
The present invention includes collet, this collet is provided with the different supporting seat of a plurality of height, and each supporting seat surrounds clamping zone, and bumping post and pillar are all installed on each supporting seat; The mask plate that size is little passes through the shore supports on highly shorter supporting seat, and clamps by bumping post; The mask plate that size is large passes through the shore supports on highly higher supporting seat, and clamps by bumping post.
Wherein: the different supporting seat of described a plurality of height is arranged on the edge of collet, is divided into short supporting seat and high supporting seat, described short supporting seat and high supporting seat interval arrange;
Described collet is quadrangle, and on tetragonal four summits, place is respectively equipped with high supporting seat, between adjacent two high supporting seats, is equipped with short supporting seat, on tetragonal four edges, is equipped with short supporting seat;
Described collet is square, and each short supporting seat is the centre in square limit, place all; Line between two relative high supporting seats is mutually vertical, and the line between two relative short supporting seats is mutually vertical, and the line between two relative short supporting seats is 45 ° with the line angle between relative two high supporting seats;
Pillar on each supporting seat is positioned at the inner side of bumping post; Bumping post on described each supporting seat is two, and pillar is one, and the height of bumping post is higher than the height of pillar; Each supporting seat respectively by link of boards in collet inside center and main shaft junction.
Advantage of the present invention and good effect are:
1. the present invention is spaced apart and arranged in the supporting seat of differing heights on collet, reduced by a collet, realized the object that the mask plate of two kinds of different sizes is installed on to a clamping device, and similarly two kinds of larger mask plate clamping mechanisms of size difference all can similarly design, and have reduced manufacturing cost.
2. when the present invention does the cleaning conversion of two kinds of different size mask plates aborning, needn't change clamping device, save time, improve efficiency.
3. during because of the collet under brace table and main shaft installation, there is the required precision of centering, as frequent dismounting easily causes the wearing and tearing of matching surface and then has influence on precision; Therefore, the present invention can avoid the collet that this reason causes to damage, and reduces maintenance cost.
Accompanying drawing explanation
Fig. 1 is perspective view of the present invention;
Fig. 2 is the schematic diagram of the present invention while clamping 5 inches of mask plates;
Fig. 3 is the schematic diagram of the present invention while clamping 7 inches of mask plates;
Wherein: 1 is collet, 2 is short supporting seat, and 3 is bumping post, and 4 is high supporting seat, and 5 is pillar, and 6 is 5 inches of mask plates, and 7 is 7 inches of mask plates, and 8 is gusset.
The specific embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Figure 1, the present invention includes collet 1, this collet 1 is provided with the different supporting seat of a plurality of height, be that supporting seat is divided into short supporting seat 2 and high supporting seat 4, short supporting seat 2 and high supporting seat 4 are disposed on the edge of collet 1, each supporting seat surrounds clamping zone, and bumping post 3 and pillar 5 are all installed on each supporting seat; The mask plate that size is little supports by the pillar 5 on short supporting seat 2, and clamps by bumping post 3; The mask plate that size is large supports by the pillar 5 on high supporting seat 4, and clamps by bumping post 3.
Collet 1 is quadrangle, and on tetragonal four summits, place is respectively equipped with high supporting seat 4, between adjacent two high supporting seats 4, is equipped with short supporting seat 2, on tetragonal four edges, is equipped with short supporting seat 2.The collet 1 of the present embodiment is square, and each short supporting seat 2 is the centre in square limit, place all; Line between two relative high supporting seats 4 is mutually vertical, and the line between two relative short supporting seats 2 is mutually vertical, and the line between two relative short supporting seats 2 is 45 ° with the line angle between relative two high supporting seats 4.Each supporting seat is connected to collet 1 inside center and main shaft junction by gusset 8 respectively, to increase support strength.
On the surface of each short supporting seat 2 and each high supporting seat 4, be equipped with two bumping posts 3 and a pillar 5, pillar 5 is positioned at the inner side of grade post 3, and the height of bumping post 3 is higher than the height of pillar 5.
The height of the short supporting seat 2 of the present embodiment is 10mm, and the height of high supporting seat 4 is 20mm, has just had like this drop of a 10mm between each formed brace table of short supporting seat 2 and the formed brace table of each high supporting seat 4.As shown in Figure 2, when cleaning 5 inches of mask plates 6,5 inches of mask plates 6 are placed on to the top of each short supporting seat 2 upper supporting columns 5, and by two bumping posts, 3 clampings on each short supporting seat 2.As shown in Figure 3, when cleaning 7 inches of mask plates 7,7 inches of mask plates 7 are placed on to the top of each high supporting seat 4 upper supporting columns 5, and by two bumping posts, 3 clampings on each high supporting seat 4.When high supporting seat 4 is loaded onto 7 inches of mask plates 7, the lower surface of plate will exceed the bumping post 2mm on short supporting seat 4, no longer causes interference.
The present invention considers from convenience and production efficiency are installed, the mask plate of two kinds of different sizes is installed on a clamping device.Installation when the present invention is not only suitable for 5 inches of cleaning machines and cleans with 7 inches of mask plates, also extends to the mask plate installing mechanism that two kinds of size difference cannot be installed more greatly at grade.

Claims (7)

1. a clamping device for mask plate cleaning machine, is characterized in that: comprise collet (1), this collet (1) is provided with the different supporting seat of a plurality of height, and each supporting seat surrounds clamping zone, and bumping post (3) and pillar (5) are all installed on each supporting seat; The mask plate that size is little supports by the pillar (5) on highly shorter supporting seat, and by bumping post (3) clamping; The mask plate that size is large supports by the pillar (5) on highly higher supporting seat, and by bumping post (3) clamping.
2. by the clamping device of mask plate cleaning machine described in claim 1, it is characterized in that: the different supporting seat of described a plurality of height is arranged on the edge of collet (1), be divided into short supporting seat (2) and high supporting seat (4), described short supporting seat (2) and high supporting seat (4) interval arrange.
3. by the clamping device of mask plate cleaning machine described in claim 2, it is characterized in that: described collet (1) is quadrangle, on tetragonal four summits, place is respectively equipped with high supporting seat (4), between adjacent two high supporting seats (4), be equipped with short supporting seat (2), on tetragonal four edges, be equipped with short supporting seat (2).
4. by the clamping device of mask plate cleaning machine described in claim 3, it is characterized in that: described collet (1) is square, and each short supporting seat (2) is the centre in square limit, place all; Line between two relative high supporting seats (4) is mutually vertical, line between two relative short supporting seats (2) is mutually vertical, and the line between two relative short supporting seats (2) is 45 ° with the line angle between relative two high supporting seats (4).
5. by the clamping device of mask plate cleaning machine described in claim 1 or 2, it is characterized in that: the pillar on each supporting seat (5) is positioned at the inner side of bumping post (3).
6. by the clamping device of mask plate cleaning machine described in claim 5, it is characterized in that: the bumping post (3) on described each supporting seat is two, and pillar (5) is one, and the height of bumping post (3) is higher than the height of pillar (5).
7. by the clamping device of mask plate cleaning machine described in claim 1 or 2, it is characterized in that: each supporting seat is connected to collet (1) inside center and main shaft junction by gusset (8) respectively.
CN201210292317.8A 2012-08-16 2012-08-16 A kind of clamping device of mask plate cleaning machine CN103586246B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210292317.8A CN103586246B (en) 2012-08-16 2012-08-16 A kind of clamping device of mask plate cleaning machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210292317.8A CN103586246B (en) 2012-08-16 2012-08-16 A kind of clamping device of mask plate cleaning machine

Publications (2)

Publication Number Publication Date
CN103586246A true CN103586246A (en) 2014-02-19
CN103586246B CN103586246B (en) 2016-03-23

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Application Number Title Priority Date Filing Date
CN201210292317.8A CN103586246B (en) 2012-08-16 2012-08-16 A kind of clamping device of mask plate cleaning machine

Country Status (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109698156A (en) * 2018-12-27 2019-04-30 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Square silicon wafer compatibility rotary-tray and silicon chip cleaning device
CN109742043A (en) * 2019-01-11 2019-05-10 田丽玖 A kind of Wafer Fabrication and its method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5566466A (en) * 1994-07-01 1996-10-22 Ontrak Systems, Inc. Spindle assembly with improved wafer holder
US6167893B1 (en) * 1999-02-09 2001-01-02 Novellus Systems, Inc. Dynamic chuck for semiconductor wafer or other substrate
CN2744763Y (en) * 2004-10-21 2005-12-07 何建辉 Steel bar support
WO2007148839A1 (en) * 2006-06-20 2007-12-27 Innovation For Creative Devices Co., Ltd. Plasma treatment apparatus for fixing multisize glass machinery board
CN201566966U (en) * 2009-12-30 2010-09-01 京东方科技集团股份有限公司 Packaging tray
CN201611653U (en) * 2009-11-10 2010-10-20 中芯国际集成电路制造(上海)有限公司 Semiconductor wafer clamping device
CN101871837A (en) * 2009-04-23 2010-10-27 友达光电股份有限公司 Multi-model fixing device
CN102125921A (en) * 2010-01-20 2011-07-20 常州瑞择微电子科技有限公司 Transmission method of optical mask in cleaning process
CN102270592A (en) * 2011-01-19 2011-12-07 沈阳芯源微电子设备有限公司 Automatic fixing device of square substrate of semiconductor in rotation process

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5566466A (en) * 1994-07-01 1996-10-22 Ontrak Systems, Inc. Spindle assembly with improved wafer holder
US6167893B1 (en) * 1999-02-09 2001-01-02 Novellus Systems, Inc. Dynamic chuck for semiconductor wafer or other substrate
CN2744763Y (en) * 2004-10-21 2005-12-07 何建辉 Steel bar support
WO2007148839A1 (en) * 2006-06-20 2007-12-27 Innovation For Creative Devices Co., Ltd. Plasma treatment apparatus for fixing multisize glass machinery board
CN101871837A (en) * 2009-04-23 2010-10-27 友达光电股份有限公司 Multi-model fixing device
CN201611653U (en) * 2009-11-10 2010-10-20 中芯国际集成电路制造(上海)有限公司 Semiconductor wafer clamping device
CN201566966U (en) * 2009-12-30 2010-09-01 京东方科技集团股份有限公司 Packaging tray
CN102125921A (en) * 2010-01-20 2011-07-20 常州瑞择微电子科技有限公司 Transmission method of optical mask in cleaning process
CN102270592A (en) * 2011-01-19 2011-12-07 沈阳芯源微电子设备有限公司 Automatic fixing device of square substrate of semiconductor in rotation process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109698156A (en) * 2018-12-27 2019-04-30 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Square silicon wafer compatibility rotary-tray and silicon chip cleaning device
CN109742043A (en) * 2019-01-11 2019-05-10 田丽玖 A kind of Wafer Fabrication and its method

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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province

Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd.

Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province

Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd.