CN201588006U - Automatic pressure stabilization system in vertical gradient freeze technique single crystal growing system - Google Patents
Automatic pressure stabilization system in vertical gradient freeze technique single crystal growing system Download PDFInfo
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- CN201588006U CN201588006U CN2009203501872U CN200920350187U CN201588006U CN 201588006 U CN201588006 U CN 201588006U CN 2009203501872 U CN2009203501872 U CN 2009203501872U CN 200920350187 U CN200920350187 U CN 200920350187U CN 201588006 U CN201588006 U CN 201588006U
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- automatic pressure
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Abstract
The utility model relates to an automatic pressure stabilization system in a vertical gradient freeze technique single crystal growing system, comprising a set of PLC control system, a mass flow controller and an inflatable air bottle, wherein the mass flow controller is connected at an air inlet on a boiler body so as to control the flow rate of gas entering a boiler; a controllable electric valve is installed at an air outlet so as to control the opening or closing of the air outlet, and simultaneously, the mass flow controller and the controllable electric valve are respectively connected with two PID meters on the PLC control system; and the tail end of the air inlet is connected with the inflatable air bottle, and the tail end of the air outlet is connected with a waste gas recycling device. Compared with the background technology, the automatic pressure stabilization system has the advantage by adopting PLC control, and the entire system can realize complete automation, thereby providing great convenience for production and management and increasing the production efficiency. Besides, by adopting the system, the accuracy on controlling the inner pressure of the boiler can be increased, thereby increasing the yield and the quality of crystallization.
Description
Technical field
The utility model relates to technical field of semiconductors, refers in particular to when adopting the VGF technology growth to have the crystal of volatile element body of heater internal pressure Controlling System.
Background technology
Vertical Gradient Freeze (VGF) (VGF) technology has become one of mainstream technology of growth major diameter, low dislocation monocrystalline, its biggest advantage be exactly can be under less thermograde condition the higher monocrystalline of growth quality.When using the VGF technology growth to have the monocrystalline of volatile element (as GaAs etc.), need the intravital pressure of control stove, guarantee that crystal grows under the stoichiometric ratio condition, improving the monocrystalline crystal forming rate, and obtain high-quality monocrystalline.Common domestic employing manually charges and discharge the means of gas the body of heater internal pressure is controlled.This method is simple, easy handling.But but be unfavorable for the accurate control of body of heater internal pressure, error is bigger, the quality of monocrystalline is had certain influence, and can not satisfy the requirement of automatic production.
Goal of the invention
The purpose of this utility model provides automatic pressure stable system in a kind of Vertical Gradient Freeze (VGF) technology growth monocrystalline system, this system accurately controls the pressure in the stove, thereby improve the monocrystalline crystal forming rate, reduce the defective in the crystal, be convenient to the automatic management of system.
To achieve the above object of the invention, the utility model is by the following technical solutions:
Automatic pressure stable system in the VGF technology growth monocrystalline system, it comprises: a cover PLC Controlling System, a mass flow controller, an inflation gas cylinder, inlet mouth place quality of connection flow director on the body of heater is used to control the gas flow that enters in the stove; Controlled motorized valve is installed at the venting port place, be used to control the closure of venting port, simultaneously mass flow controller and controlled motorized valve are connected with two PID epiphases on the PLC Controlling System respectively, inlet mouth terminal with inflate gas cylinder and be connected, the venting port end links to each other with waste gas recovering device.
Described mass flow controller comprises: mass flowmeter, air intake filter, flow control valve.
Install on the controlled motorized valve loop and also be connected with the venting strainer at the venting port place.
When furnace pressure was lower than set(ting)value, the PLC supervisory control desk fed back to PID table 1, opened the inlet mouth air valve by mass flow controller, and gaseous tension begins to inflating in the stove greater than in the stove in the gas cylinder.Can be on PID table 1 setting program, the furnace inner gas pressure value is during near set(ting)value, the regulation and control mass flow controller slows down gas and enters flow, reaches the purpose of accurate control.When the stove internal gas pressure reached set(ting)value, mass flow controller cut out the inlet mouth air valve under the regulation and control of PID table 1.When furnace inner gas pressure during greater than set(ting)value, this moment, the PLC housing fed back to PID table 2, opened the controlled motorized valve of venting port, and this moment, body of heater began venting.Along with the furnace pressure value constantly reduces, the controlled motorized valve of PID table 2 control is closed gradually, reaches preset value until furnace pressure.
The utility model has the advantages that: compare with background technology, the automatic voltage regulation system adopts PLC control, and whole system can be realized fully automated, for production management brings great convenience, can enhance productivity.Adopt this system in addition, can improve the accuracy of furnace pressure control, the crystal forming rate that improves monocrystalline with become the crystalloid amount.
Description of drawings
Fig. 1: the automatic voltage regulation system principle synoptic diagram in the VGF technology growth monocrystalline system
Fig. 2: signal transmission control chart
Among Fig. 1, Fig. 2,1 is body of heater, and 2 is mass flow controller, and 3 is gas cylinder, and 4 is the PLC supervisory control desk, and 4-1 is the PID Table I, and 4-2 is the PID Table II, and 5 is waste gas recovering device, and 6 is controlled motorized valve.2-1 is a mass flowmeter, and 2-2 is an air intake filter, and 2-3 is a flow control valve, and 5-1 is the venting strainer.
Among Fig. 1, Fig. 2, the model of mass flowmenter can adopt the D07 of Beijing Sevenstar Huachuang Electronic, and the PLC switch board adopts the FP2-C1 of Panasonic, Table I (island electricity FP93), Table II (island electricity FP93), the controllable electric valve can adopt ATIDA F05/14, and pressure sensor can adopt the moving MD-G of inscription.
Embodiment
As shown in Figure 2.PLC adopts the FP2-C1 type of Panasonic, PID epi-position day island proper electricity FP93, and mass flow controller is the D07 series of Beijing Sevenstar Huachuang Electronic, controlled motorized valve model is the AT1DA F05/14 of Shanghai Vacuum Valve Manufacturing Co., Ltd., is full of argon gas in the gas cylinder.Before mass flow controller and controlled motorized valve strainer is installed, can be played the anti-blocking effect of protection, exhaust processor is to discharging the gas aseptic.Setting stove internal gas pressure stationary value is 5 normal atmosphere, (1) when furnace pressure during less than 5 normal atmosphere, the tensimeter feedback pressure signal is given PLC, PLC receives pressure signal, transfer control signal is to PID table 1, mass flow controller is regulated, opened intake valve, argon gas is charged in the stove by intake ducting, this moment, furnace pressure constantly rose, and constantly feed back signal to PLC by tensimeter, PLC transmits control signal to PID table 1, the quality of regulation flow director, constantly reduce flow of aerating air, when the stove internal gas pressure reached set(ting)value, airshed was zero, and air valve is closed; (2) when furnace pressure greater than preset value, PID table 2 is regulated controlled motorized valve, opens purging valve, furnace gas has atmospheric pipe to discharge via exhaust processor, along with the continuous minimizing of air pressure, air valve is closed gradually, until reaching set(ting)value.
Claims (3)
1. automatic pressure stable system in the Vertical Gradient Freeze (VGF) technology growth monocrystalline system, it is characterized in that: it comprises: a cover PLC Controlling System, a mass flow controller, an inflation gas cylinder, inlet mouth place quality of connection flow director on the body of heater is used to control the gas flow that enters in the stove; Controlled motorized valve is installed at the venting port place, be used to control the closure of venting port, simultaneously mass flow controller and controlled motorized valve are connected with two PID epiphases on the PLC Controlling System respectively, inlet mouth terminal with inflate gas cylinder and be connected, the venting port end links to each other with waste gas recovering device.
2. automatic pressure stable system in a kind of Vertical Gradient Freeze (VGF) technology growth monocrystalline according to claim 1 system, it is characterized in that: described mass flow controller comprises: mass flowmeter, air intake filter, flow control valve.
3. automatic pressure stable system in a kind of Vertical Gradient Freeze (VGF) technology growth monocrystalline according to claim 1 system, it is characterized in that: install on the controlled motorized valve loop and also be connected with the venting strainer at the venting port place.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203501872U CN201588006U (en) | 2009-12-28 | 2009-12-28 | Automatic pressure stabilization system in vertical gradient freeze technique single crystal growing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203501872U CN201588006U (en) | 2009-12-28 | 2009-12-28 | Automatic pressure stabilization system in vertical gradient freeze technique single crystal growing system |
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| Publication Number | Publication Date |
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| CN201588006U true CN201588006U (en) | 2010-09-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009203501872U Expired - Fee Related CN201588006U (en) | 2009-12-28 | 2009-12-28 | Automatic pressure stabilization system in vertical gradient freeze technique single crystal growing system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102337583A (en) * | 2011-11-04 | 2012-02-01 | 湖南顶立科技有限公司 | System and method for controlling pressure in crystalline silicon ingot furnace |
| CN102956743A (en) * | 2011-08-26 | 2013-03-06 | 洛阳尚德太阳能电力有限公司 | Gas filling method for vacuum equipment door opening process and control device for gas filling process |
| CN113464844A (en) * | 2021-06-23 | 2021-10-01 | 长江存储科技有限责任公司 | Gas supply system and gas supply method |
-
2009
- 2009-12-28 CN CN2009203501872U patent/CN201588006U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102956743A (en) * | 2011-08-26 | 2013-03-06 | 洛阳尚德太阳能电力有限公司 | Gas filling method for vacuum equipment door opening process and control device for gas filling process |
| CN102956743B (en) * | 2011-08-26 | 2016-02-03 | 洛阳尚德太阳能电力有限公司 | For the inflation method of vacuum equipment door opening process and the control device of gas replenishment process |
| CN102337583A (en) * | 2011-11-04 | 2012-02-01 | 湖南顶立科技有限公司 | System and method for controlling pressure in crystalline silicon ingot furnace |
| CN102337583B (en) * | 2011-11-04 | 2015-01-28 | 湖南顶立科技有限公司 | System and method for controlling pressure in crystalline silicon ingot furnace |
| CN113464844A (en) * | 2021-06-23 | 2021-10-01 | 长江存储科技有限责任公司 | Gas supply system and gas supply method |
| CN113464844B (en) * | 2021-06-23 | 2022-06-14 | 长江存储科技有限责任公司 | Gas supply system and gas supply method |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: BEIJING GUOJING INFRARED OPTICAL TECHNOLOGY CO., LTD. Effective date: 20130809 Owner name: BEIJING GUOJING INFRARED OPTICAL TECHNOLOGY CO., L Free format text: FORMER OWNER: BEIJING CENTRAL INST.OF THE NONFERROUS METAL Effective date: 20130809 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20130809 Address after: 100088, 2, Xinjie street, Beijing Patentee after: Beijing Guojing Infrared Optical Technology Co., Ltd. Address before: 100088, 2, Xinjie street, Beijing Patentee before: General Research Institute for Nonferrous Metals Patentee before: Beijing Guojing Infrared Optical Technology Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100922 Termination date: 20151228 |
|
| EXPY | Termination of patent right or utility model |