CN201576665U - 硅片背面化学处理装置 - Google Patents
硅片背面化学处理装置 Download PDFInfo
- Publication number
- CN201576665U CN201576665U CN2009202148544U CN200920214854U CN201576665U CN 201576665 U CN201576665 U CN 201576665U CN 2009202148544 U CN2009202148544 U CN 2009202148544U CN 200920214854 U CN200920214854 U CN 200920214854U CN 201576665 U CN201576665 U CN 201576665U
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- control valve
- pneumatic control
- soup
- processing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009202148544U CN201576665U (zh) | 2009-12-24 | 2009-12-24 | 硅片背面化学处理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009202148544U CN201576665U (zh) | 2009-12-24 | 2009-12-24 | 硅片背面化学处理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201576665U true CN201576665U (zh) | 2010-09-08 |
Family
ID=42696539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009202148544U Expired - Fee Related CN201576665U (zh) | 2009-12-24 | 2009-12-24 | 硅片背面化学处理装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN201576665U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107803292A (zh) * | 2017-11-22 | 2018-03-16 | 无锡博硕精睿科技有限公司 | 一种喷涂防滴液机构 |
CN111326437A (zh) * | 2018-12-14 | 2020-06-23 | 北京北方华创微电子装备有限公司 | 喷淋装置、半导体加工设备以及清洗方法 |
-
2009
- 2009-12-24 CN CN2009202148544U patent/CN201576665U/zh not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107803292A (zh) * | 2017-11-22 | 2018-03-16 | 无锡博硕精睿科技有限公司 | 一种喷涂防滴液机构 |
CN111326437A (zh) * | 2018-12-14 | 2020-06-23 | 北京北方华创微电子装备有限公司 | 喷淋装置、半导体加工设备以及清洗方法 |
CN111326437B (zh) * | 2018-12-14 | 2024-05-17 | 北京北方华创微电子装备有限公司 | 喷淋装置、半导体加工设备以及清洗方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100547725C (zh) | 处理基材的设备和方法 | |
CN103531503B (zh) | 用于处理基板的方法和装置 | |
TW201941289A (zh) | 基板處理方法及基板處理裝置 | |
CN103028570A (zh) | 智能机器人清洗中心 | |
CN202474010U (zh) | 一种湿硅片自动分片装置 | |
CN201576665U (zh) | 硅片背面化学处理装置 | |
CN201017172Y (zh) | 一种光阻供应管路装置 | |
JP2011222595A (ja) | 基板処理装置、基板処理方法及び記憶媒体 | |
TW202141615A (zh) | 基板處理裝置及基板處理方法 | |
CN201419170Y (zh) | 吸嘴清洗装置 | |
KR20000035285A (ko) | 시료의 처리시스템 | |
US10903091B2 (en) | Substrate processing apparatus and substrate processing method | |
CN202185420U (zh) | 一种硅片盒清洁装置 | |
CN203528055U (zh) | 硅片印刷机正面电极印刷工位的定位工装 | |
CN109887851B (zh) | 一种采用铝金属制作再分布层的制程 | |
CN204816984U (zh) | 一种单晶硅装片台供蜡装置 | |
US8012307B2 (en) | Separating device and method thereof | |
CN203620331U (zh) | 稀土沉淀物压力洗涤和过滤装置 | |
CN203746801U (zh) | 处理平坦基板的装置 | |
CN219785930U (zh) | 一种晶圆清洗装置 | |
CN204696087U (zh) | 用于承载Foup的装载端口及设备前端装置 | |
CN214043614U (zh) | 导轨式去胶机 | |
WO2004051735A1 (ja) | ウェハ単離装置 | |
CN218896609U (zh) | 等离子真空腔体自动开关门机构 | |
CN114400192A (zh) | 一种晶片刻蚀装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140113 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
|
TR01 | Transfer of patent right |
Effective date of registration: 20140113 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100908 Termination date: 20151224 |
|
EXPY | Termination of patent right or utility model |