CN201562673U

CN201562673U - Improved anti-block vacuum sucking disc

Info

Publication number: CN201562673U
Application number: CN2009202588741U
Authority: CN
Inventors: 储湘华; 郭东明; 顾荣军; 朱祥龙
Original assignee: Wuxi Machine Tools Co Ltd
Current assignee: Wuxi Machine Tools Co Ltd
Priority date: 2009-11-20
Filing date: 2009-11-20
Publication date: 2010-08-25
Anticipated expiration: 2019-11-20

Abstract

The utility model relates to an improved anti-block vacuum sucking disc, which guarantees that the impurities are discharged successfully and do not block up micropores in the using process thereof and comprises a disc body and an inner disc. A supporting surface of the inner disc is supported at a clamping end of the disc body. The middle part of the disc body is provided with a gas circuit channel. The utility model is characterized in that the particle sizes of micropore material particles from a sucking surface to the supporting surface of the inner disc are increased gradually; the pore gaps of the micropores formed among the micropore material particles from the sucking surface to the supporting surface of the sucking disc are increased gradually; the clamping end of the disc body is provided with a circular groove; the circular groove is communicated with the gas circuit channel; an excircle surface of the supporting surface of the inner disc is supported at the clamping end of the disc body; and the circular groove separates an inner circle surface of the supporting surface from the clamping end of the disc body.

Description

A kind of modified model anti-blockage vacuum suction cup

(1) technical field

The utility model relates to semiconductor wafer manufacturing equipment field, is specially a kind of modified model anti-blockage vacuum suction cup.

(2) background technology

Existing vacuum cup generally includes disk body and inner disc is formed, and the sticking face of inner disc contacts with the workpiece that will adsorb (as wafer), and inner disc is the micropore material, as the micropore material.During work, vacuum plant is taken the air the confined chamber that forms between inner disc sticking face and the workpiece away from gas channels, forms vacuum chamber, and workpiece is adsorbed.Its shortcoming is: because the micropore size on the inner disc is measure-alike, in use, from the impurity particle of sticking face absorption, be difficult for discharging, be easy to blocking microporous.In case stop up, must clean again or repair, even scrap.

(3) summary of the invention

At the problems referred to above, the utility model provides a kind of modified model anti-blockage vacuum suction cup, and it guarantees the smooth discharge of impurity in use, and is not blocking microporous.

Its technical scheme is such: it comprises disk body, inner disc, the bearing-surface of described inner disc is supported on the bare terminal end of described disk body, the core of described disk body is a gas channels, it is characterized in that: the sticking face of described inner disc to the micropore material particle grain size of bearing-surface increases successively, the sticking face of described sucker to the hole of formed micropore between the micropore material particle of bearing-surface increases successively, the bare terminal end of described disk body have a circular channel, described circular channel is communicated with described gas channels, the periphery of the bearing-surface of described inner disc is supported in the bare terminal end of described disk body, and described circular channel is separated the inner headed face of described bearing-surface and the bare terminal end of described disk body.

It is further characterized in that: sticking face to the bearing-surface of described inner disc comprises a plurality of micropore material stratum granulosums, in the adjacent two layers near the particle grain size of the micropore material stratum granulosum of described sticking face less than its its near the particle grain size of the micropore material stratum granulosum of bearing-surface.

In the said structure of the present utility model, because the sticking face of described inner disc to the micropore material particle grain size of bearing-surface increases successively, the sticking face of described sucker to the hole of formed micropore between the micropore material particle of bearing-surface increases successively, in the use, enter in the micropore from the impurity particle of sticking face absorption, when gas channels is air-breathing, because the sticking face of described sucker to the hole of formed micropore between the micropore material particle of bearing-surface increases successively, its impurity particle easily is sucked into described circular channel, discharge from gas channels then, it guarantees the smooth discharge of impurity in use, and is not blocking microporous.

(4) description of drawings

Fig. 1 is the structural representation of front view of the present utility model;

Fig. 2 is that the A of Fig. 1 is to enlarged drawing.

(5) embodiment

See Fig. 1, Fig. 2, it comprises disk body 1, inner disc 2, the bearing-surface 3 of inner disc 2 is supported on the bare terminal end 4 of disk body 1, the core of disk body 1 is a gas channels 5, the sticking face 6 of inner disc 2 to the particle diameter of the micropore material particle 7 of bearing-surface 3 increases successively, the sticking face 6 of inner disc 2 to the hole of formed micropore 8 between the micropore material particle of bearing-surface 3 increases successively, the bare terminal end 4 of disk body 1 have a circular channel 9, circular channel 9 is communicated with gas channels 5, the periphery of the bearing-surface 3 of inner disc 2 is supported in the bare terminal end 4 of disk body 1, and circular channel 9 is separated the inner headed face of bearing-surface 3 and the bare terminal end 4 of disk body 1.The sticking face 6 of inner disc 2 to bearing-surface 3 is included as a plurality of micropore material stratum granulosums, and the micropore material particle grain size of the micropore material stratum granulosum of close sticking face 6 is less than its micropore material particle grain size near the micropore material stratum granulosum of bearing-surface 3 in the adjacent two layers.Among Fig. 2,10 is impurity particle.

During its work, under the suction of gas channels 5, impurity particle 10 is adsorbed to circular channel 9 along the micropore 8 that increases successively, discharges from gas channels 5 then.

Claims

1. modified model anti-blockage vacuum suction cup, it comprises disk body, inner disc, the bearing-surface of described inner disc is supported on the bare terminal end of described disk body, the core of described disk body is a gas channels, it is characterized in that: the sticking face of described inner disc to the micropore material particle grain size of bearing-surface increases successively, the sticking face of described sucker to the hole of formed micropore between the micropore material particle of bearing-surface increases successively, the bare terminal end of described disk body have a circular channel, described circular channel is communicated with described gas channels, the periphery of the bearing-surface of described inner disc is supported in the bare terminal end of described disk body, and described circular channel is separated the inner headed face of described bearing-surface and the bare terminal end of described disk body.

2. according to the described a kind of modified model anti-blockage vacuum suction cup of claim 1, it is characterized in that: sticking face to the bearing-surface of described inner disc comprises a plurality of micropore material stratum granulosums, in the adjacent two layers near the particle grain size of the micropore material stratum granulosum of described sticking face less than its its near the particle grain size of the micropore material stratum granulosum of bearing-surface.