CN201561986U - Full-decoupling dual-axis capacitive micromechanical accelerometer - Google Patents
Full-decoupling dual-axis capacitive micromechanical accelerometer Download PDFInfo
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- CN201561986U CN201561986U CN200920277757XU CN200920277757U CN201561986U CN 201561986 U CN201561986 U CN 201561986U CN 200920277757X U CN200920277757X U CN 200920277757XU CN 200920277757 U CN200920277757 U CN 200920277757U CN 201561986 U CN201561986 U CN 201561986U
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Abstract
The utility model relates to a full-decoupling dual-axis capacitive micromechanical accelerometer which belongs to the technical field of inertial sensors in a micro electro mechanical system. In the full-decoupling dual-axis capacitive micromechanical accelerometer, an upright post is fixed on a substrate of the accelerometer; a horizontal folded beam and a vertical folded beam are fixed on the substrate of the accelerometer through the upright post; a horizontal movable electrode and a vertical movable electrode are respectively fixed on the horizontal folded beam and the vertical folded beam relatively; a horizontal fixed electrode and a vertical fixed electrode are fixed on the substrate of the accelerometer and are opposite to the horizontal movable electrode and the vertical movable electrode respectively; a horizontal isolation beam is fixed on the vertical movable electrode relatively; a vertical isolation beam is fixed on the horizontal movable electrode relatively; a sensitive mass is positioned in a pane formed by the horizontal isolation beam and the vertical isolation beam in a surrounded manner; and four corners of the sensitive mass are respectively fixed with the horizontal isolation beam and the vertical isolation beam relatively. The full-decoupling dual-axis capacitive micromechanical accelerometer completely solves the mechanical cross coupling problem of the dual-axis capacitive micromechanical accelerometer, reduces the error in measurement, and achieves the high-precision measurement of acceleration.
Description
Technical field
The utility model relates to a kind of full-decoupling dual-axis capacitive micromechanical accelerometer, belongs to the inertial sensor technical field in the MEMS (micro electro mechanical system) (hereinafter to be referred as MEMS).
Background technology
MEMS is a size from micron to the millimetre-sized system that electronic component and mechanical organ are integrated together, and can carry out sensitivity, control, driving to microsize, finishes specific function individually or ordinatedly.Have that volume and quality are little, cost and a series of characteristics such as energy consumption is low, integrated level and intelligent degree height.As wherein typicalness, representative achievement, with integrated circuit technology and micromachined technology serves as the micro-mechanical accelerometer made of basis so that its volume is little, in light weight, power consumption is little, cost is low, easy of integration, characteristics such as overload capacity strong and can produce in batches, not only become the core parts of MIMU (Micro Inertial Measurement Unit), also expand other civil areas rapidly to.
U.S. AD (Analog Devices) company began the research of little silicon comb-tooth-type capacitance accelerometer in 1989, the formation series of products of going into operation in 1993.AD companies in 1998 have successfully released its twin-axis accelerometer product line.Range is from ± 2g to ± 1000g, integrated twin shaft acceleration sensor, signal condition and pulse-width signal output circuit on an IC chip.Existing micro-mechanical accelerometer product is single shaft mostly on the market, and usually needs twin shaft or three axis accelerometer to measure acceleration in actual applications.Twin-axis accelerometer (the Chinese invention patent: CN1844934A), pass through the acceleration of responsive two orthogonal directionss of a mass with centrosymmetric structure that China is present mainly with form realization differential static driving, the capacitance detecting of broach electric capacity.Figure 1 shows that the planar structure synoptic diagram of the dual-axis capacitance type micromechanical accelerometer of comb structure, the resiliency supported, movable electrode 6, fixed electorde 5, the anchor point 8 that comprise substrate 1, mass 2, form by clamped beam 3 and tilting beam 4.Total is a centrosymmetric image, acceleration by responsive two orthogonal directionss of a mass, mass 2 occupy the center of structure, the periphery is resiliency supported and movable electrode, resiliency supported is made of four two-end fixed beams 3 and four tilting beams 4, and four two-end fixed beams constitute square, and foursquare four angles are anchor points 8, one end and the mass 2 of each tilting beam are connected, and the two-end fixed beam that the other end is corresponding with it is middle to be connected; Movable electrode 6 is connected with mass 2, and fixed electorde 5 is connected with tooth pivot 7, realizes differential static driving and capacitance detecting with the broach bias structure.
In order to realize cross-compound arrangement, resiliency supported is made up of four clamped beams and four semi-girders.This tilting girder construction does not solve cross-couplings fully, brings bigger measuring error easily.In addition, the elastic stiffness of tilting girder construction is very big, makes system's undamped self-vibration angular frequency higher, and mass motion amplitude and reaction sensitivity when sense accelerations changes are restricted, reduce the sensitivity of micro-mechanical accelerometer, be difficult for realizing high-precision acceleration analysis.
Summary of the invention
The purpose of this utility model is to propose a kind of full-decoupling dual-axis capacitive micromechanical accelerometer, change the structure of existing micro-mechanical accelerometer, with cross-couplings and the excessive weak point of resiliency supported rigidity that overcomes prior art, reach full decoupled, purposes such as resiliency supported rigidity is less, sensitivity height, realize high-precision two dimensional acceleration measurement.
The full-decoupling dual-axis capacitive micromechanical accelerometer that the utility model proposes comprises responsive mass, lateral isolation beam, laterally folded beam, transversely movable electrodes, crosswise fixed electrode, vertical isolation beams, vertical movable electrode, vertical fixed electorde, longitudinal folding beam and column; Described column is fixed on the substrate of accelerometer; Described laterally folded beam and longitudinal folding beam are fixed on the substrate of accelerometer by column; Described transversely movable electrodes and vertically movable electrode respectively with laterally folded beam and longitudinal folding beam relative fixed; Described crosswise fixed electrode and vertical fixed electorde are fixed on the substrate of accelerometer, and relative with the position of transversely movable electrodes and vertical movable electrode respectively; Described lateral isolation beam and vertical movable electrode relative fixed, described vertical isolation beams and transversely movable electrodes relative fixed; Described responsive mass is arranged in by lateral isolation beam and the vertical square frame that surrounds of isolation beams, four jiaos of responsive mass respectively with lateral isolation beam and vertical isolation beams relative fixed.
The full-decoupling dual-axis capacitive micromechanical accelerometer that the utility model proposes has the following advantages:
1, in the micro-mechanical accelerometer of the present utility model, isolation beams and folded beam structure have independently been adopted, make the motion of transversely movable electrodes and vertical movable electrode separate separately, the transverse movement of responsive mass can only cause the motion of transversely movable electrodes, the lengthwise movement of responsive mass only causes the motion of vertical movable electrode, therefore solve the mechanical cross-couplings problem of dual-axis capacitance type micromechanical accelerometer fully, reduced measuring error.
2, in the micro-mechanical accelerometer of the present utility model, the isolation beams and the folded beam structural elasticity rigidity that adopt are less, therefore the sensitivity that has improved micro-mechanical accelerometer, realized high-acruracy survey, can be used as motion state measurement and control that little inertia device is widely used in automotive electronics, Aero-Space, weaponry acceleration.
3, the micro-mechanical accelerometer that the utility model proposes, identical with the job operation of traditional dual-axis capacitance type micromechanical accelerometer, do not increase producting process difficulty and processing cost, be easy to produce in batches.
Description of drawings
Fig. 1 is the planar structure synoptic diagram of existing dual-axis capacitance type micromechanical accelerometer.
Fig. 2 is the planar structure synoptic diagram of the full-decoupling dual-axis capacitive micromechanical accelerometer that the utility model proposes.
Among Fig. 1, the 1st, substrate, the 2nd, mass, the 3rd, clamped beam, the 4th, tilting beam, the 5th, fixed electorde, the 6th, movable electrode, the 7th, tooth pivot, the 8th, anchor point.Among Fig. 2, the 11st, laterally folded beam, the 12nd, crosswise fixed electrode, the 13rd, transversely movable electrodes, the 14th, responsive mass, the 15th, vertical fixed electorde, the 16th, vertical movable electrode, the 17th, longitudinal folding beam, the 18th, vertical isolation beams, the 19th, column, the 20th, lateral isolation beam.
Embodiment
The full-decoupling dual-axis capacitive micromechanical accelerometer that the utility model proposes, its planar structure comprises responsive mass 14, lateral isolation beam 20, laterally folded beam 11, transversely movable electrodes 13, crosswise fixed electrode 12, vertical isolation beams 18, vertical movable electrode 16, vertical fixed electorde 15, longitudinal folding beam 17 and column 19 as shown in Figure 2.Column 19 is fixed on the substrate (not shown) of accelerometer.Laterally folded beam 11 and longitudinal folding beam 17 are fixed on the substrate of accelerometer by column 19.Transversely movable electrodes 13 and vertically movable electrode 16 respectively with laterally folded beam and longitudinal folding beam relative fixed.Crosswise fixed electrode 12 and vertical fixed electorde 15 are fixed on the substrate of accelerometer, and relative with the position of transversely movable electrodes 13 and vertical movable electrode 16 respectively.Lateral isolation beam 20 and vertical movable electrode 16 relative fixed, vertically isolation beams 18 and transversely movable electrodes 13 relative fixed.Responsive mass 14 is arranged in by lateral isolation beam 20 and the vertical square frame that surrounds of isolation beams 18, four jiaos of responsive mass 14 respectively with lateral isolation beam 20 and vertical isolation beams 18 relative fixed.
In the accelerometer of the present utility model, responsive mass 14, horizontal and vertical folded beam, horizontal and vertical isolation beams, horizontal and vertical movable electrode etc. all adopt conventional body silicon process technology, by technologies such as mask, photoetching and etchings, remove unwanted part on the silicon chip, obtain complete microstructure at last.Substrate in the accelerometer can adopt glass substrate material.
In the accelerometer of the present utility model, responsive mass 14 links to each other with vertical fixed electorde 15 with transversely movable electrodes 13 respectively with lateral isolation beam 20 by vertical isolation beams 18, transversely movable electrodes 13 links to each other with column 19 by laterally folded beam 11, vertically movable electrode 16 links to each other with column 9 by longitudinal folding beam 17, and column 9 is fixed on the substrate of glass substrate.Crosswise fixed electrode 12 and vertical fixed electorde 15 are fixed on the substrate of glass substrate, and transversely movable electrodes 13 laterally detects electric capacity with crosswise fixed electrode 12 compositions, and vertical movable electrode 16 is formed vertically detection electric capacity with vertical fixed electorde 15.
The principle of work of the utility model accelerometer is:
The horizontal equivalent stiffness of laterally folded beam 11 is very low, and transversely movable electrodes 13 can only carry out transverse movement under the constraint of laterally folded beam 11.When dual-axis capacitance type micromechanical accelerometer is experienced horizontal and vertical acceleration change, be converted into inertial force by responsive mass 14 degree of will speed up, inertial force is subjected to displacement responsive mass 14.Because the horizontal equivalent stiffness of lateral isolation beam 20 is very low, vertically the horizontal equivalent stiffness of isolation beams 18 is very big, the transverse movement of responsive mass 14 can't be delivered to vertical movable electrode 16, therefore, the transverse movement of responsive mass 14 can only be carried out identical transverse movement by vertical isolation beams 18 drive transversely movable electrodes 13.By detecting the differential capacitor quantitative changeization of transversely movable electrodes 13 and crosswise fixed electrode 12, can realize the detection of transverse acceleration.In like manner, the lengthwise movement of responsive mass 14 can only drive vertical movable electrode 16 by lateral isolation beam 20 and carry out identical lengthwise movement, by detecting the differential capacitor quantitative changeization of vertical movable electrode 16 and vertical fixed electorde 15, can realize the detection of longitudinal acceleration.
In sum, the utility model is innovated dual-axis capacitance type micromechanical accelerometer in design, the transverse movement that can guarantee the sensitive-mass piece only is delivered to transversely movable electrodes, the lengthwise movement of sensitive-mass piece only is delivered to vertical movable electrode, and the motion of transversely movable electrodes is mutually uncorrelated with the motion of vertical movable electrode, on structural design, eliminate the measurements interference that mechanical couplings is brought fully, improved the certainty of measurement of dual-axis capacitance type micromechanical accelerometer. On the other hand, the sensitive-mass piece in the utility model accelerometer is very low in the elastic stiffness that the detection side makes progress, and the sensitivity that has therefore improved micro-mechanical accelerometer can realize high-precision acceleration analysis. The processing method of the utility model and traditional dual-axis capacitance type micromechanical accelerometer is identical, does not increase technology difficulty and processing cost, is easy to batch production.
Claims (1)
1. a full-decoupling dual-axis capacitive micromechanical accelerometer is characterized in that this accelerometer comprises responsive mass, lateral isolation beam, laterally folded beam, transversely movable electrodes, crosswise fixed electrode, vertical isolation beams, vertical movable electrode, vertical fixed electorde, longitudinal folding beam and column; Described column is fixed on the substrate of accelerometer; Described laterally folded beam and longitudinal folding beam are fixed on the substrate of accelerometer by column; Described transversely movable electrodes and vertically movable electrode respectively with laterally folded beam and longitudinal folding beam relative fixed; Described crosswise fixed electrode and vertical fixed electorde are fixed on the substrate of accelerometer, and relative with the position of transversely movable electrodes and vertical movable electrode respectively; Described lateral isolation beam and vertical movable electrode relative fixed, described vertical isolation beams and transversely movable electrodes relative fixed; Described responsive mass is arranged in by lateral isolation beam and the vertical square frame that surrounds of isolation beams, four jiaos of responsive mass respectively with lateral isolation beam and vertical isolation beams relative fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920277757XU CN201561986U (en) | 2009-12-11 | 2009-12-11 | Full-decoupling dual-axis capacitive micromechanical accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920277757XU CN201561986U (en) | 2009-12-11 | 2009-12-11 | Full-decoupling dual-axis capacitive micromechanical accelerometer |
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| Publication Number | Publication Date |
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| CN201561986U true CN201561986U (en) | 2010-08-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200920277757XU Expired - Lifetime CN201561986U (en) | 2009-12-11 | 2009-12-11 | Full-decoupling dual-axis capacitive micromechanical accelerometer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112739642A (en) * | 2018-09-21 | 2021-04-30 | 美国亚德诺半导体公司 | 3-axis accelerometer |
-
2009
- 2009-12-11 CN CN200920277757XU patent/CN201561986U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112739642A (en) * | 2018-09-21 | 2021-04-30 | 美国亚德诺半导体公司 | 3-axis accelerometer |
| CN112739642B (en) * | 2018-09-21 | 2024-02-23 | 美国亚德诺半导体公司 | 3-axis accelerometer |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20100825 Effective date of abandoning: 20091211 |