CN201529939U - 化学机械研磨设备的清洗装置 - Google Patents
化学机械研磨设备的清洗装置 Download PDFInfo
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- CN201529939U CN201529939U CN2009202137249U CN200920213724U CN201529939U CN 201529939 U CN201529939 U CN 201529939U CN 2009202137249 U CN2009202137249 U CN 2009202137249U CN 200920213724 U CN200920213724 U CN 200920213724U CN 201529939 U CN201529939 U CN 201529939U
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CN2009202137249U CN201529939U (zh) | 2009-11-17 | 2009-11-17 | 化学机械研磨设备的清洗装置 |
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CN2009202137249U CN201529939U (zh) | 2009-11-17 | 2009-11-17 | 化学机械研磨设备的清洗装置 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102485425A (zh) * | 2010-12-03 | 2012-06-06 | 中芯国际集成电路制造(上海)有限公司 | 化学机械抛光的方法、用于化学机械抛光的清洗装置 |
CN103100964A (zh) * | 2011-11-11 | 2013-05-15 | 中芯国际集成电路制造(上海)有限公司 | 金属研磨保护装置及保护方法、化学机械研磨系统 |
CN109159020A (zh) * | 2018-10-26 | 2019-01-08 | 长江存储科技有限责任公司 | 研磨装置 |
CN110962022A (zh) * | 2019-12-31 | 2020-04-07 | 浙江芯晖装备技术有限公司 | 一种抛光设备 |
-
2009
- 2009-11-17 CN CN2009202137249U patent/CN201529939U/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102485425A (zh) * | 2010-12-03 | 2012-06-06 | 中芯国际集成电路制造(上海)有限公司 | 化学机械抛光的方法、用于化学机械抛光的清洗装置 |
CN102485425B (zh) * | 2010-12-03 | 2013-12-04 | 中芯国际集成电路制造(上海)有限公司 | 化学机械抛光的方法、用于化学机械抛光的清洗装置 |
CN103100964A (zh) * | 2011-11-11 | 2013-05-15 | 中芯国际集成电路制造(上海)有限公司 | 金属研磨保护装置及保护方法、化学机械研磨系统 |
CN103100964B (zh) * | 2011-11-11 | 2015-11-25 | 中芯国际集成电路制造(上海)有限公司 | 金属研磨保护装置及保护方法、化学机械研磨系统 |
CN109159020A (zh) * | 2018-10-26 | 2019-01-08 | 长江存储科技有限责任公司 | 研磨装置 |
CN110962022A (zh) * | 2019-12-31 | 2020-04-07 | 浙江芯晖装备技术有限公司 | 一种抛光设备 |
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130306 |
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Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
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Effective date of registration: 20130306 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100721 Termination date: 20181117 |