CN201528409U - Micro-electro-mechanical microphone - Google Patents
Micro-electro-mechanical microphone Download PDFInfo
- Publication number
- CN201528409U CN201528409U CN2009202060514U CN200920206051U CN201528409U CN 201528409 U CN201528409 U CN 201528409U CN 2009202060514 U CN2009202060514 U CN 2009202060514U CN 200920206051 U CN200920206051 U CN 200920206051U CN 201528409 U CN201528409 U CN 201528409U
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- protection structure
- tone
- cavity
- sound
- wiring board
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The utility model discloses a micro-electro-mechanical microphone which comprises a first circuit board, a cavity connected with the first circuit board and a second circuit board connected with the cavity. The first circuit board, the cavity and the second circuit board form a protection structure; an MEMS chip provided with a back-cavity and a control circuit chip are arranged in the protection structure; a first sound entering aperture is formed on the protection structure; a shielding case with a second sound entering aperture for receiving sound is arranged outside the protection structure; the first sound entering aperture and the second sound entering aperture are in staggered arrangement; the back-cavity of the MEMS chip covers the first sound entering aperture; a viscous cushion block is arranged between the protection structure and the shielding case, so that a passage is formed between the protection structure and the shielding case; and the sound acts on the MEMS chip after passes through the second sound entering aperture, the passage and the first sound entering aperture. The micro-electro-mechanical microphone can improve signal-to-noise ratio.
Description
[technical field]
The utility model relates to a kind of microphone, relates in particular to a kind of micro-electro-mechanical microphone that is applied to miniature electrical equipment.
[background technology]
Mobile communication technology is rapidly developed in recent years.The consumer uses mobile communication equipment more and more, and for example portable phone, the portable phone that can surf the Net, personal digital assistant, laptop computer, laptop computer, figure input card maybe can be by other equipment public or that dedicated communications network communicates.The technological progress of the expansion at honeycomb networking and mobile communication aspect makes more consumers use mobile communication equipment.
The consumer not only is satisfied with and can converses the requirement of mobile communication equipment, and want high-quality communication effect can be provided, especially the development of mobile multimedia technology, the speech quality of mobile phone becomes more important, the microphone of mobile phone is as the voice device of mobile phone, and its design quality directly influences speech quality.
And the microphone of using more and better performances at present is MEMS (Micro-Electro-Mechanical-System Microphone) microphone structure.As shown in Figure 1, the microphone of correlation technique, comprise circuit board 11 ', sidewall 12 ' and be provided with the loam cake 13 ' of sound hole 21 ', place control circuit 2 ' and transducer 3 ' on the circuit board 11 ' respectively, control circuit 2 ' and transducer 3 ' are electrically connected by lead, the microphone of this structure, because acoustic pressure on transducer, makes that the operatic tunes at the back side is big inadequately from positive effect, signal to noise ratio is low.
[utility model content]
The purpose of this utility model is to provide a kind of capacitance microphone that improves signal to noise ratio.
For reaching above-mentioned technical purpose, the technical solution adopted in the utility model is:
A kind of micro-electro-mechanical microphone; comprise first wiring board; cavity that links to each other with first wiring board and second wiring board that links to each other with cavity; described first wiring board; the cavity and second wiring board constitute the protection structure; the MEMES chip and the control circuit chip that are provided with back of the body chamber are arranged in this protection structure; on the protection structure, be provided with first tone-entering hole; the protection structural outer is provided with radome; radome is provided with second tone-entering hole that is used to receive sound; first tone-entering hole and the interlaced setting of second tone-entering hole; the back of the body chamber of MEMS chip covers first tone-entering hole; between protection structure and radome, also be provided with the viscosity cushion block; making has passage between protection structure and the radome, and sound is by second tone-entering hole; passage; first tone-entering hole affacts on the MEMS chip.
Preferably, described MEMES chip and control circuit chip are separately positioned on second wiring board.
The beneficial effects of the utility model are, owing to the back side of sound from the MEMS chip affacts on the MEMS chip, can improve the signal to noise ratio of microphone; The passage of being propped up by the viscosity cushion block can not only be sent to voice signal on the MEMS chip, and MEMS chip and second sound hole setting of staggering, the dust that can prevent the external world is fallen on the MEMS chip, and cushioning effect is played in gas shock to external world, has improved reliability of products.
[description of drawings]
Fig. 1 is the microphone side profile of correlation technique;
Fig. 2 is the capacitance microphone sectional side view that the utility model provides.
[embodiment]
The utility model is described in further detail below in conjunction with drawings and embodiments.
The capacitance microphone that the utility model provides is mainly used on the mobile phone, accepts sound and sound is converted into the signal of telecommunication.
Micro-electro-mechanical microphone as shown in Figure 2, cavity 13 that comprise first wiring board 11, links to each other and second wiring board 12 that links to each other with cavity 13 with first wiring board 11.First wiring board 11, cavity 13 and second wiring board 12 constitute the protection structure.MEMES chip 16 and control circuit chip 17 are arranged in this protection structure, and MEMS chip 16 is provided with back of the body chamber 161.
Be provided with first tone-entering hole 121 on the protection structure, in the embodiment that the utility model provides, first tone-entering hole 121 is provided with on second wiring board 12.The protection structural outer is provided with radome 14; radome 14 is provided with second tone-entering hole 141 that is used to receive sound; first tone-entering hole 121 and the 141 interlaced settings of second tone-entering hole; the back of the body chamber 161 of MEMS chip 16 covers first tone-entering hole 121; between protection structure and radome 14, also be provided with viscosity cushion block 18; making has passage 15 between protection structure and the radome, and sound affacts on the MEMS chip 16 by second tone-entering hole 141, passage 15, first tone-entering hole 121.
Because sound affacts on the MEMS chip 16 from the back side of MEMS chip 16, can improve the signal to noise ratio of microphone; The passage of being propped up by viscosity cushion block 18 15 can not only be sent to voice signal on the MEMS chip 16, and MEMS chip 16 and second sound hole 141 setting of staggering, the dust that can prevent the external world is fallen on the MEMS chip 16, cushioning effect is played in gas shock to external world, has improved reliability of products.
Being connected by the metal conduction hole that is arranged in the cavity 13 of the electric signal of first wiring board 11 and second wiring board 12 realizes.
MEMES chip 16 and control circuit chip 17 are separately positioned on second wiring board 12.
Above-described only is better embodiment of the present utility model; should be pointed out that for the person of ordinary skill of the art at this, under the prerequisite that does not break away from the utility model creation design; can also make improvement, but these all belong to protection range of the present utility model.
Claims (2)
1. micro-electro-mechanical microphone; comprise first wiring board; cavity that links to each other with first wiring board and second wiring board that links to each other with cavity; described first wiring board; the cavity and second wiring board constitute the protection structure; the MEMES chip and the control circuit chip that are provided with back of the body chamber are arranged in this protection structure; it is characterized in that: on the protection structure, be provided with first tone-entering hole; the protection structural outer is provided with radome; radome is provided with second tone-entering hole that is used to receive sound; first tone-entering hole and the interlaced setting of second tone-entering hole; the back of the body chamber of MEMS chip covers first tone-entering hole; between protection structure and radome, also be provided with the viscosity cushion block; making has passage between protection structure and the radome, and sound is by second tone-entering hole; passage; first tone-entering hole affacts on the MEMS chip.
2. micro-electro-mechanical microphone according to claim 1 is characterized in that: described MEMES chip and control circuit chip are separately positioned on second wiring board.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009202060514U CN201528409U (en) | 2009-10-19 | 2009-10-19 | Micro-electro-mechanical microphone |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009202060514U CN201528409U (en) | 2009-10-19 | 2009-10-19 | Micro-electro-mechanical microphone |
Publications (1)
Publication Number | Publication Date |
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CN201528409U true CN201528409U (en) | 2010-07-14 |
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Application Number | Title | Priority Date | Filing Date |
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CN2009202060514U Expired - Lifetime CN201528409U (en) | 2009-10-19 | 2009-10-19 | Micro-electro-mechanical microphone |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102892064A (en) * | 2012-10-30 | 2013-01-23 | 无锡芯奥微传感技术有限公司 | Electroacoustic sensor packaging structure for microcomputer |
CN105101025A (en) * | 2014-05-07 | 2015-11-25 | 鑫创科技股份有限公司 | Micro-electro-mechanical system microphone |
CN110049419A (en) * | 2019-04-12 | 2019-07-23 | 苏州敏芯微电子技术股份有限公司 | Silicon microphone |
CN110113687A (en) * | 2019-04-12 | 2019-08-09 | 苏州敏芯微电子技术股份有限公司 | Silicon microphone |
CN111277938A (en) * | 2020-03-09 | 2020-06-12 | 无锡韦尔半导体有限公司 | Packaging structure of microphone |
TWI707586B (en) * | 2018-08-14 | 2020-10-11 | 美律實業股份有限公司 | Mems speaker |
-
2009
- 2009-10-19 CN CN2009202060514U patent/CN201528409U/en not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102892064A (en) * | 2012-10-30 | 2013-01-23 | 无锡芯奥微传感技术有限公司 | Electroacoustic sensor packaging structure for microcomputer |
CN105101025A (en) * | 2014-05-07 | 2015-11-25 | 鑫创科技股份有限公司 | Micro-electro-mechanical system microphone |
TWI707586B (en) * | 2018-08-14 | 2020-10-11 | 美律實業股份有限公司 | Mems speaker |
CN110049419A (en) * | 2019-04-12 | 2019-07-23 | 苏州敏芯微电子技术股份有限公司 | Silicon microphone |
CN110113687A (en) * | 2019-04-12 | 2019-08-09 | 苏州敏芯微电子技术股份有限公司 | Silicon microphone |
CN111277938A (en) * | 2020-03-09 | 2020-06-12 | 无锡韦尔半导体有限公司 | Packaging structure of microphone |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CX01 | Expiry of patent term |
Granted publication date: 20100714 |
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CX01 | Expiry of patent term |