CN201522986U - Discharge device - Google Patents

Discharge device Download PDF

Info

Publication number
CN201522986U
CN201522986U CN2009202200793U CN200920220079U CN201522986U CN 201522986 U CN201522986 U CN 201522986U CN 2009202200793 U CN2009202200793 U CN 2009202200793U CN 200920220079 U CN200920220079 U CN 200920220079U CN 201522986 U CN201522986 U CN 201522986U
Authority
CN
China
Prior art keywords
array
electrod
discharge equipment
roller bearing
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2009202200793U
Other languages
Chinese (zh)
Inventor
杨景华
张超前
赵玲利
王守国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Microelectronics of CAS
Original Assignee
Institute of Microelectronics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Microelectronics of CAS filed Critical Institute of Microelectronics of CAS
Priority to CN2009202200793U priority Critical patent/CN201522986U/en
Application granted granted Critical
Publication of CN201522986U publication Critical patent/CN201522986U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Plasma Technology (AREA)

Abstract

The utility model provides a discharge apparatus belongs to plasma technical field. The discharge apparatus includes: the electrode array is arranged in a circular arc shape and is connected to a high-frequency pulse power supply; and the round rolling shaft is made of metal, is arranged to be concentric with the arc-shaped electrode array, and is used for discharging between the round rolling shaft and the electrode array when a high-frequency pulse power supply is switched on. The utility model provides a discharge apparatus can produce the even accurate glow plasma of low temperature passageway that discharges under the atmospheric pressure, can carry out surface modification or grafting to the various thin film materials that pass plasma discharge region.

Description

Discharge equipment
Technical field
The utility model relates to a kind of discharge equipment, particularly, relates to a kind of discharge equipment that utilizes into the pinpoint array of circular-arc arrangement to the discharge of circle roller bearing, belongs to technical field of plasma.
Background technology
The atmospheric plasma body technique has obtained developing rapidly in recent years, and is widely used.The atmospheric pressure plasma techniques that generally adopts mainly is the high-frequency and high-voltage discharge of dielectric impedance at present, this technology is to place a medium between two electrodes at least, and discharge is the air that directly punctures, local little arc current that discharge is produced is bigger, generally is to be used for the surface modification and the generation ozone of macromolecular material are used for sterilization.
But because dielectric barrier discharge is when being used to handle macromolecular material, produce local the ablation at material surface easily, bigger to the local failure of material surface, also inhomogeneous to the processing of material surface, thus influenced the character of material.Therefore, need a kind of solution that under atmospheric pressure produces the air plasma discharge of even aura, can solve the problem in the above-mentioned correlation technique.
The utility model content
The purpose of this utility model is to provide a kind of atmosphere pressure glow discharge plasma generating equipment, can make air ionization produce glow discharge at the tip of each needlepoint electrode in a series of needlepoint electrodes, by the zone of integrated these most advanced and sophisticated glow discharges, form large-area discharge channel.This equipment can be handled the various thin-film materials by this discharge channel, is fit to that especially modification is carried out on the surface of various sensitive materials and handles.
According to the utility model, a kind of discharge equipment is provided, this discharge equipment comprises: electrod-array, be arranged to circular-arcly, and be connected to high frequency pulse power supply; The circle roller bearing is made of metal, and is arranged to and circular-arc electrod-array concentric, is used for when connecting high frequency pulse power supply, discharges between itself and electrod-array.
Preferably, this discharge equipment also comprises the axis of guide, is arranged on the both sides of round roller bearing bottom, is used to make pending film to be compacted to round roller bearing, and passes through between electrod-array and circle roller bearing.
Preferably, electrod-array is arranged on the circular arc metallic plate.
Preferably, each distance between electrodes in the electrod-array equates.
Preferably, each electrode in the electrod-array all insulate with the circular arc metallic plate.
Preferably, each electrode in the electrod-array all equates with the distance of justifying between the roller bearing.
Preferably, the distance between each electrode in the electrod-array and the circle roller bearing is 15-50mm.
Preferably, this discharge equipment also comprises radome, is made of metal, and is arranged on circular arc metallic plate outside, and is connected to ground.
The beneficial effects of the utility model are: the discharge equipment that the utility model provides can under atmospheric pressure produce the even accurate glow plasma discharge channel of low temperature, handles thereby can carry out surface modification or grafting to the various thin-film materials that pass plasma discharge.
Description of drawings
Fig. 1 and Fig. 2 are that the utilization of the utility model embodiment is arranged in pinpoint array on the arc surface to the structural representation of the discharge equipment that discharges of circle roller bearing.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, the utility model execution mode is described in further detail below in conjunction with accompanying drawing.
See figures.1.and.2, the utility model embodiment provides a kind of discharge equipment, and this discharge equipment comprises circular arc metallic plate 105, needlepoint electrode 106, round metal roller bearing 104, support 109 and base 101.
A series of needlepoint electrodes 106 are installed on the circular arc metallic plate 105, these needlepoint electrodes 106 constitute pinpoint array, preferably, in this pinpoint array, the distance that equates at interval between each needlepoint electrode 106, thereby make the needlepoint electrode in the pinpoint array evenly distributed, preferably, each electrode all insulate with described circular arc metallic plate.This circular arc metallic plate 105 that pinpoint array is housed is installed on the support 109 by insulating material 108, and support 109 is fixed on the base 101.Each needlepoint electrode 106 all is connected with the high-voltage pulse end of high frequency pulse power supply 112.The pulse rise time of this high frequency pulse power supply 112, the voltage that rises to was higher than 30,000 volts less than 30ns.A radome that is connected with the earth 107 is installed in the outside of this circular arc metallic plate 105, and this radome 107 also is installed on the support 109 by connector 110.Have the spacing that equates between the surface of the tip of each needlepoint electrode 106 and round metal roller bearing 104, preferably, this spacing is 15-50mm.
Round metal roller bearing 104 also is installed on the support 109 by bearing 102, round metal roller bearing 104 and circular arc metallic plate 105 concentrics.Support 109 is installed on the base 101, and support 109 is connected with the earth.
Be separately installed with the axis of guide 103 in round metal roller bearing 104 both sides, pending film 113 passes the region of discharge 111 of plasma by the axis of guide 103.
When between needlepoint electrode 106 and round metal roller bearing 104, adding high frequency pulse power supply, will between the tip of needlepoint electrode 106 and round metal roller bearing 104 surfaces, produce plasma discharge.
Circular arc metallic plate 105, needlepoint electrode 106, radome 107, round metal roller bearing 104, support 109 and base 101 all are to make with metal material, for example are processed into by stainless steel, aluminium, copper or iron etc.; Insulating material 108 can be made with materials such as polytetrafluoroethylene or plastic plates.
The discharge equipment that the utility model embodiment provides can under atmospheric pressure produce the even accurate glow plasma discharge channel of low temperature, handles thereby can carry out surface modification or grafting to the various thin-film materials that pass plasma discharge.
The above is a preferred embodiment of the present utility model only, is not limited to the utility model, and for a person skilled in the art, the utility model can have various changes and variation.All within spirit of the present utility model and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within the protection range of the present utility model.

Claims (8)

1. a discharge equipment is characterized in that, comprising:
Electrod-array is arranged to circular-arcly, and is connected to high frequency pulse power supply;
The circle roller bearing is made of metal, and is arranged to and circular-arc electrod-array concentric, is used for when connecting described high frequency pulse power supply, discharges between itself and described electrod-array.
2. discharge equipment according to claim 1, it is characterized in that described discharge equipment also comprises the axis of guide, be arranged on the both sides of described round roller bearing bottom, be used to make pending film to be compacted to described round roller bearing, and between described electrod-array and described round roller bearing, pass through.
3. discharge equipment according to claim 2 is characterized in that described electrod-array is arranged on the circular arc metallic plate.
4. discharge equipment according to claim 3 is characterized in that, each distance between electrodes in the described electrod-array equates.
5. discharge equipment according to claim 4 is characterized in that, each electrode in the described electrod-array all insulate with described circular arc metallic plate.
6. discharge equipment according to claim 5 is characterized in that, each electrode in the described electrod-array all equates with distance between the described round roller bearing.
7. discharge equipment according to claim 6 is characterized in that, the distance between each electrode in the described electrod-array and the described round roller bearing is 15-50mm.
8. discharge equipment according to claim 7 is characterized in that described discharge equipment also comprises radome, is made of metal, and is arranged on described circular arc metallic plate outside, and is connected to ground.
CN2009202200793U 2009-10-23 2009-10-23 Discharge device Expired - Lifetime CN201522986U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009202200793U CN201522986U (en) 2009-10-23 2009-10-23 Discharge device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009202200793U CN201522986U (en) 2009-10-23 2009-10-23 Discharge device

Publications (1)

Publication Number Publication Date
CN201522986U true CN201522986U (en) 2010-07-07

Family

ID=42509162

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009202200793U Expired - Lifetime CN201522986U (en) 2009-10-23 2009-10-23 Discharge device

Country Status (1)

Country Link
CN (1) CN201522986U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102427653A (en) * 2011-09-19 2012-04-25 大连海事大学 Atmospheric non-equilibrium plasma source for introducing mini-glow discharge mode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102427653A (en) * 2011-09-19 2012-04-25 大连海事大学 Atmospheric non-equilibrium plasma source for introducing mini-glow discharge mode
CN102427653B (en) * 2011-09-19 2012-11-28 大连海事大学 Atmospheric non-equilibrium plasma source for introducing mini-glow discharge mode

Similar Documents

Publication Publication Date Title
CN102946685B (en) Atmospheric pressure induced air dielectric barrier discharge low-temperature plasma generating device
CN203167413U (en) Atmospheric-pressure dispersion-type cold plasma generator
TW200802598A (en) Plasma processing apparatus and plasma processing method
CN202524634U (en) Dielectric barrier discharge enhanced low-temperature plasma electric brush generating device
EP1073091A3 (en) Electrode for plasma generation, plasma treatment apparatus using the electrode, and plasma treatment with the apparatus
CN108408843B (en) Plasma activated water generating device
CN101668378A (en) Discharge device
CN203015262U (en) Atmospheric pressure induced air dielectric barrier discharge low-temperature plasma generating device
CN102595757A (en) Three-electrode discharge device for generating large-volume atmosphere pressure plasma
CN104918402A (en) Device for common voltage high voltage radio cooperation radio frequency glow jet discharge and discharge method
CN109121278A (en) A kind of plasma-activated oil treatment provisions
CN103327722B (en) Dielectric impedance enhancement mode multi-electrode glow discharge low-temp plasma brush array generating means
CN102448239A (en) Dielectric barrier discharge enhanced low-temperature plasma electric brush generating device
CN106028616A (en) Gliding arc discharge plasma jet generation device and method thereof
CN110013915A (en) A kind of replaceable discharge electrode
Deepak et al. Electrical characterization of argon and nitrogen based cold plasma jet
CN102036460B (en) Tabulate plasma generating device
CN103052250A (en) Atmospheric pressure dispersion type cold plasma generation device
CN107979907B (en) Atmospheric pressure dielectric barrier discharge enhanced DC alternating electrode low-temperature plasma jet array
CN201522986U (en) Discharge device
CN203407057U (en) Dielectric-barrier-enhancement-type multi-electrode glow discharge low-temperature plasma brush array generator
CN204518205U (en) Plasma jet generating device for atmospheric pressure hollow substrate electrode
CN113175721A (en) Plasma humidifier
CN103194001B (en) Plasma treatment device and plasma treatment method for polymer material surface modification
Yang et al. Effects of electrode parameters on sewage disinfection by underwater pulsed arc discharge

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20100707