CN201509291U

CN201509291U - Mems microphone

Info

Publication number: CN201509291U
Application number: CN2009202047793U
Authority: CN
Inventors: 王凯
Original assignee: CHANGZHOU MEIOU ELECTRONICS Co Ltd; Shenzhen Meiou Electronics Co Ltd
Current assignee: CHANGZHOU MEIOU ELECTRONICS Co Ltd; Shenzhen Meiou Electronics Co Ltd
Priority date: 2009-09-14
Filing date: 2009-09-14
Publication date: 2010-06-16
Anticipated expiration: 2019-09-14

Abstract

The utility model provides an MEMS microphone, which includes a protection structure formed by a bottom board and an upper cover covering the bottom board, and an energy converter arranged in the protection structure and provided with a back cavity; and the protection structure forms an accommodating cavity, a leakage passage and a sound inlet for receiving external sound source are formed on the protection structure, the sound inlet and the leakage passage are communicated, a leakage hole is formed on the leakage passage, and the accommodating cavity is communicated with the leakage passage through the leakage hole. The encapsulation structure increases the low frequency decrement of the microphone, and can efficiently reduce the lower frequency noise jamming, and improve the response characteristic of the microphone.

Description

The MEMS microphone

[technical field]

The utility model relates to a kind of microphone, relates in particular to a kind of MEMS microphone.

[background technology]

Development along with wireless telecommunications, Global Mobile Phone Users is more and more, the user not only is satisfied with conversation to the requirement of mobile phone, and want high-quality communication effect can be provided, especially at present the development of mobile multimedia technology, requirement is strengthened the directive property and the noise reduction capability of picking up sound, and the microphone of mobile phone is as the voice pick device of mobile phone, and its design quality directly influences speech quality.

And the microphone of using more and better performances at present is MEMS (Micro-Electro-Mechanical-System Microphone) microphone.The microphone of correlation technique comprises as shown in Figure 1: base plate 21 ', cover the loam cake 22 ' of base plate 21 ', place transducer 2 ' and control circuit 3 ' on the base plate 21 ' respectively, wherein, base plate 21 ' is provided with hole 11 '.The structure of this microphone can't be controlled the low cut amount of microphone from encapsulation, thereby can not make microphone reach higher frequency response performance.

[utility model content]

The technical problem that the utility model need solve is to provide a kind of novel MEMS microphone strong to the low-frequency noise antijamming capability.

The utility model solves the problems of the technologies described above by such technical scheme:

A kind of MEMS microphone; comprise loam cake protection structure that constitutes and the transducer of carrying on the back the chamber that has that places in this protection structure by base plate and covering base plate; this protection structure forms host cavity; on this protection structure, be provided with the sound hole of leakage path and the extraneous sound source of reception; sound hole and leakage path connect; leakage path is provided with leak, and host cavity connects by this leak and leakage path.

Preferably, described leak area size is 3.14 * 10 ^-8m ²In.

Preferably, described transducer places on the base plate, and described leakage path, sound hole and leak are located on the base plate, and the back of the body chamber of transducer is above sound hole, and this back of the body chamber covers sound hole.

Preferably, described transducer places on the base plate, and sound hole and leakage path, leak are located at loam cake respectively.

Preferably, described transducer places on the base plate, and described sound hole is located on the base plate, and leak is located at loam cake.

The beneficial effects of the utility model are, owing to be provided with leakage path and leak, host cavity can carry out Gas Exchange by the leakage path and the external world, has strengthened microphone low cut amount, reduce the interference of low-frequency noise like this, improve the Frequency Response of microphone microphone generating.

[description of drawings]

Fig. 1 is the cross-sectional schematic of correlation technique MEMS microphone;

MEMS microphone cross-sectional schematic among the embodiment 1 that Fig. 2 provides for the utility model;

MEMS microphone cross-sectional schematic among the embodiment 2 that Fig. 3 provides for the utility model;

MEMS microphone cross-sectional schematic among the embodiment 3 that Fig. 4 provides for the utility model.

[embodiment]

The utility model is described in further detail below in conjunction with drawings and embodiments.

The MEMS microphone that the utility model provides is mainly used on the mobile phone, accepts sound and sound is converted into the signal of telecommunication.

Show as Fig. 2; the embodiment 1 that provides for the utility model; this MEMS microphone mainly comprises the loam cake 32 of base plate 31, covering base plate 31 and places the control circuit 5 on the base plate 31 respectively and have the transducer 6 of carrying on the back chamber 22; base plate 31 and loam cake 32 are formed protection structure (not marking among the figure); this protection structure forms host cavity 23, and the plate at transducer 6 places is described base plate.

Wherein, control circuit 5 and transducer 6 are electrically connected.In the present embodiment, transducer 6 is realized being electrically connected by gold thread with control circuit 5, can certainly take other mode to realize being electrically connected, such as connect by the circuit that is embedded in the circuit board.

In the present embodiment, control circuit 5 and transducer 6 are branch body structures, the two can certainly be integrated in one.

Described base plate 31 is provided with sound hole 11 and leakage path 21, and sound hole 11 and leakage path 21 connect, and leakage path 21 is provided with leak 12, and host cavity 23 connects by this leak 12 and leakage path 21.This structure guarantees that host cavity 23 can carry out Gas Exchange with the external world by leakage path 21.

The back of the body chamber 22 of described transducer 6 is above sound hole 11, and covering sound hole 11.

Described leak 12 areas are arranged on 3.14 * 10 ^-8m ²In.The setting of this leak area can be controlled host cavity 23 and extraneous Gas Exchange amount, thus control microphone low cut amount.

Show as Fig. 3, the embodiment 2 that provides for the utility model, other structures of this MEMS microphone are identical with structure among the embodiment 1, its difference is: leakage path 21 and leak 12 and sound hole 11 all are located on the loam cake 32 respectively, sound hole 11 and leakage path 21 connect, leakage path 21 is provided with leak 12, and host cavity 23 connects by this leak 12 and leakage path 21, sound hole 11 direct and host cavity 23 perforations.

Show as Fig. 4; the embodiment 3 that provides for the utility model; other structures of this MEMS microphone are identical with structure among the embodiment 1; its difference is: described sound hole 11 is located on the base plate 31; described leak 12 is located at loam cake 32, and sound hole 11 and leakage path 21 connect, and leakage path 21 is located on base plate 31 and the loam cake 32 common protection structures that constitute; connect sound hole 11 and leak 12, host cavity 23 carries out Gas Exchange by this leakage path 21 with the external world.

This shows, adopted the MEMS microphone that the utility model provides after, host cavity 23 can carry out Gas Exchange with the external world by leakage path 21, the area by the control leak comes the control gaseous exchange capacity, thereby control low cut amount.The leak area is set 3.14 * 10 ^-8m ²In, can reduce the interference of various low-frequency noises effectively, the sensitivity that improves this MEMS microphone improves its Frequency Response.

Above-described only is better embodiment of the present utility model; should be pointed out that for the person of ordinary skill of the art at this, under the prerequisite that does not break away from the invention design; can also make improvement, but these all belong to protection range of the present utility model.

Claims

1. MEMS microphone; it comprises: by loam cake the protection structure that constitutes and the transducer of carrying on the back the chamber that has that places in this protection structure of base plate and covering base plate; this protection structure forms host cavity; it is characterized in that: the sound hole that on this protection structure, is provided with leakage path and the extraneous sound source of reception; sound hole and leakage path connect; leakage path is provided with leak, and host cavity connects by this leak and leakage path.

2. MEMS microphone according to claim 1 is characterized in that: described leak area size is 3.14 * 10 ^-8m ²In.

3. MEMS microphone according to claim 1 and 2 is characterized in that: described transducer places on the base plate, and described leakage path, sound hole and leak are located on the base plate, and the back of the body chamber of transducer is above sound hole, and this back of the body chamber covers sound hole.

4. MEMS microphone according to claim 1 and 2 is characterized in that: described transducer places on the base plate, and sound hole and leakage path, leak are located at loam cake respectively.

5. MEMS microphone according to claim 1 and 2 is characterized in that: described transducer places on the base plate, and sound hole is located on the base plate, and leak is located at loam cake.