CN201466049U - Circulating production line for preparing thin-film photovoltaic batteries - Google Patents
Circulating production line for preparing thin-film photovoltaic batteries Download PDFInfo
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- CN201466049U CN201466049U CN2009201091534U CN200920109153U CN201466049U CN 201466049 U CN201466049 U CN 201466049U CN 2009201091534 U CN2009201091534 U CN 2009201091534U CN 200920109153 U CN200920109153 U CN 200920109153U CN 201466049 U CN201466049 U CN 201466049U
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- chamber
- balance
- scanning bracket
- film coating
- coating apparatus
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model belongs to a circulating production line for preparing thin-film photovoltaic batteries. In the circulating production line, conveying equipment is in a circulating connection with two ends of a film coating device; the conveying equipment arranged between the back end of the film coating device and a laser ruling machine has two paths: one path enables the film coating device to communicate with the front end of the laser ruling machine; and the other path enables the back end of the film coating device to communicate with the front end of the laser ruling machine through a chemical leaching and plating tank; the conveying equipment at the back end of the laser ruling machine has two paths: one path is communicated with the film coating device and the other path is communicated with finished product processing equipment; and the film coating device comprises a film coating cavity which is internally provided with an electron gun moving during a coating operation and a swinging device which drives the electron gun to move. In the utility model, the film coating operation on a substrate can be completed in circulation, each working procedure is mutually connected, and the production equipment can be used in circulation, thereby reducing investment capital; and the utility model has the advantages of uniform film coating, low investment cost, rapid processing speed, good quality, and huge yield, and can improve the substrate photovoltaic conversion rate and prolong the service life thereof substantially.
Description
Technical field
The utility model belongs to the circulating production line of making film photovoltaic cell.
Background technology
Film photovoltaic cell comprises the alternative single crystal silicon material of CIGS photovoltaic cell as solar power generation, and crystalline silicon material is as photovoltaic generation material price costliness, and manufacture difficulty is big, and the cost height is difficult to promote the use of.Up-to-date science shows that substituting crystalline silicon material with several layers of metal of electron gun evaporation coating method plating and nonmetal film on the substrate that can be used in glass or other materials is used as solar power generation, and this new material is cheap, is beneficial to and promotes the use of.On substrate, require film must thickness even with several layers of metallic film of electron gun evaporation coating method plating, but present equipment be difficult to the requirement that reaches such.Traditional electron gun evaporated device comprises a vacuum cavity, and the lower end fixedly installs several electron guns in the vacuum cavity, and substrate to be plated places the electron gun upper end, finishes electron gun evaporation system film.This traditional equipment can not guarantee the even of substrate upper film thickness, often causes the substrate upper film of close electron gun thick, otherwise, then thin.And the inhomogeneous substrate photoelectric conversion rate that makes of film thickness declines to a great extent, and quality conformance is poor, is difficult to promote the use of on market.Plate several layers of metallic film on substrate with the electron gun evaporation coating method at present, process in each plated film chamber respectively, each operation is separated, especially the preparatory process before substrate enters each plated film chamber is long, makes process velocity slow, yields poorly, the product processed quality is difficult to guarantee that product is short useful life.
Summary of the invention
The purpose of this utility model is a kind of circulating production line of making film photovoltaic cell of design, can circulate and finish plated film operation on substrate, each operation is connected to each other, production equipment recycles, reduce cost of investment, have plated film even, cost of investment is low, and process velocity is fast, quality is good, output is big, can increase substantially the substrate photoelectric conversion rate, the advantage that significantly prolongs its useful life.
For this reason, the utility model adopts the transfer equipment circulation on this production line to connect the two ends of coating apparatus, be divided into two-way on the transfer equipment between coating apparatus rear end and the laser beam marking machine, one the tunnel makes the coating apparatus rear end communicate with the laser beam marking machine front end, another road makes the coating apparatus rear end soak by chemistry and crosses the pond and communicate with the laser beam marking machine front end, be divided into two-way on the transfer equipment of laser beam marking machine rear end, one tunnel coating apparatus front end that communicates, another road finished product process equipment that communicates, comprise the plated film chamber in the coating apparatus, electron gun that moves when being provided with spraying operation in the plated film chamber and the pendulous device that electron gun is moved.The said structure design has reached the purpose of this utility model.
The utility model can circulate and finish plated film operation on substrate, each operation is connected to each other, can follow with a filming equipment and laser beam marking machine and can finish the plated film operation, reduce cost of investment, have plated film even, cost of investment is low, process velocity is fast, and quality is good, and output is big, can increase substantially the substrate photoelectric conversion rate, the advantage that significantly prolongs its useful life.
Description of drawings
Fig. 1 is a distributed architecture schematic diagram of the present utility model
Fig. 2 is the structural representation of the utility model coating apparatus
Fig. 3 is the structural representation of the utility model coating apparatus
Fig. 4 is the structural representation of plated film intracavity scanning support of the present utility model
Fig. 5 is the A-A section partial structurtes schematic diagram of Fig. 4
Specific embodiments
As shown in Figures 1 to 4, a kind of circulating production line of making film photovoltaic cell mainly is made up of plated film chamber 6, transfer equipment 2 and laser beam marking machine 12.Transfer equipment circulation on this production line connects the two ends of coating apparatus, be divided into two-way on the transfer equipment between coating apparatus rear end and the laser beam marking machine, one the tunnel makes the coating apparatus rear end communicate with the laser beam marking machine front end, and another road makes the coating apparatus rear end soak by chemistry and crosses pond 14 and communicate with the laser beam marking machine front end.Be divided into two-way on the transfer equipment of laser beam marking machine rear end, one tunnel coating apparatus front end that communicates, another road finished product process equipment 13 that communicates.Comprise plated film chamber 6 in the coating apparatus, electron gun 7 that moves when being provided with spraying operation in the plated film chamber and the pendulous device 8 that electron gun is moved.
Described coating apparatus is made up of load chamber 4, cushion chamber 5, plated film chamber 6, cushion chamber 10 and unloading chamber 9 successively, and load chamber and unloading two ends, chamber are provided with valve 3.Transfer equipment be for can transport the load wagon for the treatment of plated substrate 1, or for transporting the legacy equipments such as rolling driving wheel group of glass substrate to be plated, so be not repeated.
The utility model course of work is: transfer equipment is transported to load chamber 4 with substrate to be plated, load chamber valve 3 is opened, transfer equipment is delivered to substrate in the load chamber, valve-off, temperature-control pressure-control equipment is started working in the load chamber, form with the plated film chamber in after the identical temperature and pressure condition to be plated, open another valve between load chamber and cushion chamber 5, transfer equipment is delivered to substrate in the cushion chamber, further improve form with the plated film chamber in after the identical temperature and pressure condition to be plated, substrate enters in the plated film chamber and finishes a plating skim by several electron guns that move, then successively through cushion chamber 10 and after entering unloading chamber 9 decompression desuperheats after deriving line 12 quarters through laser beam marking machine, the substrate that (through behind the coating apparatus) has one deck plated film again through transfer equipment circulate successively send into the multicoating (with coating process is identical for the first time) and groove of finishing substrate in the coating apparatus repeatedly after, final substrate again through chemistry soak cross pond 14 and soak after, after forming protecting film, behind groove, deliver to finished product process equipment 13 through transfer equipment again and (be legacy equipment, as welding, equipment such as cutting machine) on, finish finished product processing, finished product 11 spreads out of production line through transfer equipment again.
Several electron guns of the present utility model are positioned on the pendulous device, and electron gun carries out spraying plating under mobile status.
As shown in Figure 4, described pendulous device is made of scanning bracket, balance and transmission device:
Transmission device comprises motor 820, decelerator 819, delivery wheel and the conveyer belt 814 of transmission scanning bracket and motor 85, delivery wheel 84 and the conveyer belt of transmission balance.The motor of transmission balance, delivery wheel and conveyer belt are positioned at scanning bracket.The motor of transmission balance drives balance wheel 815 by delivery wheel and conveyer belt, and the device of one group of transmission balance is respectively established in each balance lower end.The motor of transmission scanning bracket drives scanning bracket by decelerator, delivery wheel and conveyer belt and rotates.Also be provided with electron gun power pack 818 on the support of lower end, plated film chamber, the electron gun power supply in it is connected with electron gun on the balance by electron gun lead 817.Support 81 is used to support the plated film chamber.
The quantity of described electron gun is one or several, electron gun is positioned at the balance upper end. and described balance can be positive and negative 90 °～180 °, and positive and negative 90 °, or rotate in positive and negative 180 ° of model weeks. described scanning bracket can be positive and negative 90 °～180 °, positive and negative 90 °, or rotate in positive and negative 180 ° of model weeks.
During plated film, transmission device drives scanning bracket and laterally swings on line slideway, make balance be positive and negative 90 °～180 ° simultaneously, positive and negative 90 °, or rotate in positive and negative 180 ° of model weeks, several electron guns on it are also moved, and electron gun carries out spraying plating under mobile status, guaranteed the uniformity of sputtered films of bismuth.
Obviously, described pendulous device also: scanning bracket, be hollow T font, the upper end that is T font scanning bracket is positioned at the plated film chamber, is coupling by device for sealing magnetic fluid between scanning bracket and the plated film chamber, the scanning bracket lower end connects big belt wheel; Transmission device drives scanning bracket by the motor of motor, decelerator, delivery wheel and the conveyer belt transmission scanning bracket of transmission scanning bracket by decelerator, delivery wheel and conveyer belt and rotates.Promptly remove balance device and relevant transmission device, a plurality of electron guns directly are fixed on the scanning bracket two ends, and the scanning bracket of swing cooperates the substrate that moves also can reach the uniform purpose of sputtered films of bismuth.So be not repeated.
In a word, the utility model can circulate and finish plated film operation on substrate, and each operation is connected to each other, and production equipment recycles, reduce cost of investment, have plated film even, cost of investment is low, and process velocity is fast, quality is good, output is big, can increase substantially the substrate photoelectric conversion rate, the advantage that significantly prolongs its service life.
Claims (3)
1. circulating production line of making film photovoltaic cell, mainly by the plated film chamber, transfer equipment and laser beam marking machine are formed, it is characterized in that: the transfer equipment circulation on this production line connects the two ends of coating apparatus, be divided into two-way on the transfer equipment between coating apparatus rear end and the laser beam marking machine, one the tunnel makes the coating apparatus rear end communicate with the laser beam marking machine front end, another road makes the coating apparatus rear end soak by chemistry and crosses the pond and communicate with the laser beam marking machine front end, be divided into two-way on the transfer equipment of laser beam marking machine rear end, one tunnel coating apparatus front end that communicates, another road finished product process equipment that communicates, comprise the plated film chamber in the coating apparatus, electron gun that moves when being provided with spraying operation in the plated film chamber and the pendulous device that electron gun is moved.
2. by the circulating production line of the described manufacturing film photovoltaic cell of claim 1, it is characterized in that: described coating apparatus is made up of load chamber, cushion chamber, plated film chamber, cushion chamber and unloading chamber successively, and load chamber and unloading two ends, chamber are provided with valve.
3. by the circulating production line of the described manufacturing film photovoltaic cell of claim 1, it is characterized in that: described pendulous device is:
Scanning bracket is hollow T font, and the upper end that is T font scanning bracket is positioned at the plated film chamber, is coupling by device for sealing magnetic fluid between scanning bracket and the plated film chamber, and the scanning bracket lower end connects big belt wheel;
Balance is hollow T font, is positioned at the both sides, upper end that are T font scanning bracket, and balance and scanning bracket are coupling by device for sealing magnetic fluid, and the balance lower end is provided with the balance wheel, and the balance upper end is provided with electron gun;
Transmission device, comprise motor, decelerator, delivery wheel and the conveyer belt of transmission scanning bracket and motor, delivery wheel and the conveyer belt of transmission balance, the motor of transmission balance, delivery wheel and conveyer belt are positioned at scanning bracket, the motor of transmission balance drives the balance wheel by delivery wheel and conveyer belt, and the motor of transmission scanning bracket drives scanning bracket by decelerator, delivery wheel and conveyer belt and rotates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201091534U CN201466049U (en) | 2009-06-22 | 2009-06-22 | Circulating production line for preparing thin-film photovoltaic batteries |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201091534U CN201466049U (en) | 2009-06-22 | 2009-06-22 | Circulating production line for preparing thin-film photovoltaic batteries |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201466049U true CN201466049U (en) | 2010-05-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009201091534U Expired - Lifetime CN201466049U (en) | 2009-06-22 | 2009-06-22 | Circulating production line for preparing thin-film photovoltaic batteries |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201466049U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101950776A (en) * | 2010-09-01 | 2011-01-19 | 福建铂阳精工设备有限公司 | Method for improving productivity and yield of solar battery packs |
| CN102214736A (en) * | 2011-06-14 | 2011-10-12 | 泉州市金太阳电子科技有限公司 | Method for manufacturing photoelectric device |
| CN110548635A (en) * | 2019-09-04 | 2019-12-10 | 四川升腾元创机电技术研究有限公司 | Full-automatic spraying coating production line |
-
2009
- 2009-06-22 CN CN2009201091534U patent/CN201466049U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101950776A (en) * | 2010-09-01 | 2011-01-19 | 福建铂阳精工设备有限公司 | Method for improving productivity and yield of solar battery packs |
| CN101950776B (en) * | 2010-09-01 | 2012-10-10 | 福建铂阳精工设备有限公司 | Method for improving productivity and yield of solar battery packs |
| CN102214736A (en) * | 2011-06-14 | 2011-10-12 | 泉州市金太阳电子科技有限公司 | Method for manufacturing photoelectric device |
| CN110548635A (en) * | 2019-09-04 | 2019-12-10 | 四川升腾元创机电技术研究有限公司 | Full-automatic spraying coating production line |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100512 |