CN201455812U - 简易式研磨液供应系统 - Google Patents
简易式研磨液供应系统 Download PDFInfo
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- CN201455812U CN201455812U CN2009200725532U CN200920072553U CN201455812U CN 201455812 U CN201455812 U CN 201455812U CN 2009200725532 U CN2009200725532 U CN 2009200725532U CN 200920072553 U CN200920072553 U CN 200920072553U CN 201455812 U CN201455812 U CN 201455812U
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- lapping liquid
- supply system
- filter
- liquid supply
- pump
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2009200725532U CN201455812U (zh) | 2009-05-19 | 2009-05-19 | 简易式研磨液供应系统 |
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CN2009200725532U CN201455812U (zh) | 2009-05-19 | 2009-05-19 | 简易式研磨液供应系统 |
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CN201455812U true CN201455812U (zh) | 2010-05-12 |
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CN2009200725532U Expired - Fee Related CN201455812U (zh) | 2009-05-19 | 2009-05-19 | 简易式研磨液供应系统 |
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CN (1) | CN201455812U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102806526A (zh) * | 2011-05-31 | 2012-12-05 | 无锡华润上华半导体有限公司 | 研磨液供应系统 |
CN104552008A (zh) * | 2013-10-23 | 2015-04-29 | 株式会社荏原制作所 | 研磨方法及研磨装置 |
CN112536722A (zh) * | 2019-09-20 | 2021-03-23 | 夏泰鑫半导体(青岛)有限公司 | 研磨浆供应系统及无尘室 |
-
2009
- 2009-05-19 CN CN2009200725532U patent/CN201455812U/zh not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102806526A (zh) * | 2011-05-31 | 2012-12-05 | 无锡华润上华半导体有限公司 | 研磨液供应系统 |
CN104552008A (zh) * | 2013-10-23 | 2015-04-29 | 株式会社荏原制作所 | 研磨方法及研磨装置 |
CN104552008B (zh) * | 2013-10-23 | 2018-04-06 | 株式会社荏原制作所 | 研磨方法及研磨装置 |
US11192216B2 (en) | 2013-10-23 | 2021-12-07 | Ebara Corporation | Polishing method and polishing apparatus |
CN112536722A (zh) * | 2019-09-20 | 2021-03-23 | 夏泰鑫半导体(青岛)有限公司 | 研磨浆供应系统及无尘室 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130219 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
TR01 | Transfer of patent right |
Effective date of registration: 20130219 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100512 Termination date: 20180519 |