CN201447516U - 单晶炉副炉结构 - Google Patents
单晶炉副炉结构 Download PDFInfo
- Publication number
- CN201447516U CN201447516U CN2009200396944U CN200920039694U CN201447516U CN 201447516 U CN201447516 U CN 201447516U CN 2009200396944 U CN2009200396944 U CN 2009200396944U CN 200920039694 U CN200920039694 U CN 200920039694U CN 201447516 U CN201447516 U CN 201447516U
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- CN
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- Prior art keywords
- heater
- furnace
- interlayer
- single crystal
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000013078 crystal Substances 0.000 title claims abstract description 15
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000011229 interlayer Substances 0.000 claims abstract description 18
- 238000005086 pumping Methods 0.000 claims abstract description 6
- 229910052749 magnesium Inorganic materials 0.000 claims description 9
- 239000011777 magnesium Substances 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 abstract 1
- 238000003723 Smelting Methods 0.000 abstract 1
- 239000000498 cooling water Substances 0.000 abstract 1
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 241000370738 Chlorion Species 0.000 description 2
- 230000036760 body temperature Effects 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003245 working effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2009200396944U CN201447516U (zh) | 2009-04-20 | 2009-04-20 | 单晶炉副炉结构 |
Applications Claiming Priority (1)
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CN2009200396944U CN201447516U (zh) | 2009-04-20 | 2009-04-20 | 单晶炉副炉结构 |
Publications (1)
Publication Number | Publication Date |
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CN201447516U true CN201447516U (zh) | 2010-05-05 |
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CN2009200396944U Expired - Fee Related CN201447516U (zh) | 2009-04-20 | 2009-04-20 | 单晶炉副炉结构 |
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CN (1) | CN201447516U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102167449A (zh) * | 2010-12-13 | 2011-08-31 | 浙江开化同力电子科技有限公司 | 一种单晶炉用冷却水的处理方法 |
CN102312283A (zh) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | 具备双副炉室结构的单晶炉及单晶硅生产方法 |
-
2009
- 2009-04-20 CN CN2009200396944U patent/CN201447516U/zh not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102167449A (zh) * | 2010-12-13 | 2011-08-31 | 浙江开化同力电子科技有限公司 | 一种单晶炉用冷却水的处理方法 |
CN102312283A (zh) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | 具备双副炉室结构的单晶炉及单晶硅生产方法 |
CN102312283B (zh) * | 2011-07-04 | 2013-11-13 | 浙江晶盛机电股份有限公司 | 具备双副炉室结构的单晶炉及单晶硅生产方法 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: CHANGZHOU TIANLONG OPTOELECTRONICS EQUIPMENT CO., Free format text: FORMER OWNER: PAN YANPING Effective date: 20101203 Free format text: FORMER OWNER: PAN GUOQIANG |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 213129 NO.157, QILIANG ROAD, WANSUI, MENGHE TOWN, XINBEI DISTRICT, CHANGZHOU CITY, JIANGSU PROVINCE TO: 213138 NO.16, GANGXI AVENUE, MENGHE TOWN, CHANGZHOU CITY, JIANGSU PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20101203 Address after: 213138, No. 16, West Avenue, Meng Meng Town, Jiangsu, Changzhou Patentee after: Changzhou Tianlong Optical Equipment Co., Ltd. Address before: 213129, Changzhou, Jiangsu province new North Meng Town, Wan Sui Qi Liang Road, No. 157 Co-patentee before: Pan Guoqiang Patentee before: Pan Yanping |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100505 Termination date: 20150420 |
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EXPY | Termination of patent right or utility model |