CN201444405U - Two-dimensional non-coupling nano-motion platform mechanism - Google Patents

Two-dimensional non-coupling nano-motion platform mechanism Download PDF

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Publication number
CN201444405U
CN201444405U CN2009200159614U CN200920015961U CN201444405U CN 201444405 U CN201444405 U CN 201444405U CN 2009200159614 U CN2009200159614 U CN 2009200159614U CN 200920015961 U CN200920015961 U CN 200920015961U CN 201444405 U CN201444405 U CN 201444405U
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CN
China
Prior art keywords
frame
platform
motion
flexible guiding
piezoelectric ceramic
Prior art date
Application number
CN2009200159614U
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Chinese (zh)
Inventor
董再励
刘柱
丁晓辉
周磊
Original Assignee
中国科学院沈阳自动化研究所
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Application filed by 中国科学院沈阳自动化研究所 filed Critical 中国科学院沈阳自动化研究所
Priority to CN2009200159614U priority Critical patent/CN201444405U/en
Application granted granted Critical
Publication of CN201444405U publication Critical patent/CN201444405U/en

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Abstract

The utility model relates to a two-dimensional non-coupling nano-motion platform mechanism, belonging to the technical field of nano-grade displacement output and positioning. The two-dimensional non-coupling nano-motion platform mechanism comprises a movable platform, an inner frame and an outer frame which are connected by flexible guiding connection rib plates in an interlaced mode to form an integral structure, i.e. the flexible guiding connection rib plate is connected between a symmetrical frame of the inner frame and the movable platform, and the flexible guiding connection rib plate is connected between the other symmetrical frame of the inner frame and the outer frame; the other pair of frames between the movable platform and the inner frame and between the movable platform and the outer frame are respectively and symmetrically provided with a piezoelectric porcelain driver and a pretightening driving spring; and the piezoelectric porcelain driver is connected with an outer controller. The utility model adopts the connecting structure of the separated frames and the flexible rib plates, thereby ensuring that the XY axial motion is independent, realizing the stable and accurate guidance of platform motion and having simple and compact integral structure. The driving mode of combining the piezoelectric porcelain driver and the pretightening driving spring can reach nano/subnano driving displacement resolution ratio, reduce the driving control design difficulty of the platform, and improve the integral assembling ability and the controllability of the platform.

Description

The non-coupling nanometer motion of a kind of two dimension platform mechanism
Technical field
The utility model belongs to nano-grade displacement output and field of locating technology, specifically a kind of two-dimentional non-coupling nanometer motion platform mechanism that utilizes Piezoelectric Ceramic.This platform mechanism can be realized two-dimentional uncoupled nanoscale motion under the driving of two one dimension piezoelectric ceramic actuators.
Background technology
Rise and fast development along with nanometer technology, high precision, high resolving power, the nanoscale motion platform system of high reliability will play an increasingly important role in numerous high-tech areas such as MEMS (micro electro mechanical system), nano-fabrication technique, microelectronics and nanoelectronic technology, nano biological engineerings.
The mechanism form that tradition is used for the nanoscale motion platform mainly contains: mechanical transmission-type (as rail plate and rolling guide etc.), friction driving type, elastic deformation formula, piezoelectric element formula etc.But ubiquity problems such as low, the gapped or multi-dimensional movement coupling of displacement resolution.Thereby on the accurate nano-manipulation of research, processing, mounting technology, be subjected to very big restriction.
The utility model content
At the technical matters of above-mentioned existence, in order to realize two-dimentional non-coupling, no gap nanoscale displacement output and location, the utility model provides a kind of two-dimentional non-coupling nanometer motion platform mechanism based on Piezoelectric Ceramic.
The technical solution adopted in the utility model is as follows:
The non-coupling nanometer motion of a kind of two dimension platform mechanism, comprise moving platform and internal and external frame, between connect gusset by flexible guiding and be cross-linked the formation integral structure, that is: be connected with flexible guiding between one of inner frame symmetrical frame and moving platform and be connected gusset, be connected with flexible guiding between another symmetrical frame and outer rim and be connected gusset; Moving platform and rim and between outer rim another be arranged with piezoelectric ceramic actuator and pretension driving spring respectively on to frame, piezoelectric ceramic actuator is connected with outer controller.
It is to be made of side by side several plates that described flexible guiding connects gusset.Described piezoelectric ceramic actuator is the one dimension piezoelectric ceramic actuator.
Under impressed voltage control, piezoelectric ceramic actuator and preloading spring can produce telescopic drive power, overcome flexible guiding dowel plate resistance power, promote the motion of moving platform or inner frame.Because the piezoelectric ceramic actuator displacement has nanometer/sub-nm resolution, the guide effect that flexible guiding connects gusset makes the XY motion of moving platform not have coupling, thereby, realize the non-coupled motions of nanoscale two dimension in the moving platform XY face by the driving voltage of two piezoelectric ceramic actuators of control.
The beneficial effects of the utility model:
1. adopt flexible gusset connected mode, do not have mechanical gearing, can realize not having the gap motion.
2. employing Piezoelectric Ceramic can reach nanometer/Ya Nami drive displacement resolution.
3. adopt split-frame and flexible gusset syndeton, can realize that the XY motion is independent.
4. adopt the type of drive of piezoelectric ceramics and pretension driving spring combination, reduced the drive controlling design difficulty of platform, improved the assembling capacity and the controllability of platform and integrally.
5. adopt the how flexible gusset of symmetry as the connection guide piece, but the steady accurately guiding of implementation platform motion, and one-piece construction is compactness simply.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is a platform mechanism agent structure synoptic diagram among Fig. 1.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples.
Embodiment: as shown in Figure 1 and Figure 2, the utility model comprises moving platform 3 and inner frame 4, outside framework 6, between connect gusset 1 by flexible guiding and be cross-linked the formation integral structure, that is: one of inner frame 4 symmetrical frame is connected with flexible guiding with 3 of moving platforms and is connected gusset 1, and another symmetrical frame is connected with flexible guiding with 6 of outer rim and is connected gusset; Be arranged with piezoelectric ceramic actuator 5 and pretension driving spring 2 at another of 6 of moving platform 3 and rim 4 and rim 4 and outer rim respectively on to frame, piezoelectric ceramic actuator 5 is connected with outer controller.
It is to be made of side by side a plurality of slicer boards that this routine described flexible guiding connects gusset 1, at work microdeformation can be arranged.Piezoelectric ceramic actuator 5 is the one dimension piezoelectric ceramic actuator, does not have coupling during its motion.The outer controller model is the PVC-300C2 controller.
As shown in Figure 2, it is into a single integrated structure that platform mechanism agent structure of the present utility model adopts Wire-cut Electrical Discharge Machining.On the frame that piezoelectric ceramic actuator 5 and pretension driving spring 2 are installed on moving platform 3 and inner frame 4, the outside framework 6, have groove, be reserved with mounting boss 7 in groove one end, its size matches with the institute mounted component, one dimension piezoelectric ceramic actuator 5 and pretension driving spring 2 are installed in respectively between moving platform 3 and inner frame 4, inner frame 4 and the outside framework 6, are fixed in reservation mounting boss 7 positions in institute's recessing.
Principle of work of the present utility model: as shown in Figure 1, the driving voltage of PVC-300C2 controller puts on piezoelectric ceramic actuator 5, produce the moving displacement of pre-motion orientation, when driving voltage increases, piezoelectric ceramic actuator 5 elongations, overcome the resistance that flexible guiding connects gusset 1 and pretension driving spring 2, make moving platform 3 produce the displacement output (motion principle of X, Y direction is identical) of forward; When driving voltage reduced, piezoelectric ceramic actuator 5 shrank, and moving platform 3 connects under the effect of gusset 1 and pretension driving spring 2 at flexible guiding, follows piezoelectric ceramic actuator 5 counter motions, made moving platform 3 produce reverse displacement.By control XY to the elongation of piezoelectric ceramic actuator 5 shorten motion, can realize the non-coupled motions of nanoscale two dimension in the moving platform 3XY face.

Claims (3)

1. the non-coupling nanometer motion of two dimension platform mechanism, it is characterized in that: comprise moving platform and internal and external frame, between connect gusset by flexible guiding and be cross-linked the formation integral structure, that is: be connected with flexible guiding between one of inner frame symmetrical frame and moving platform and be connected gusset, be connected with flexible guiding between another symmetrical frame and outer rim and be connected gusset; Moving platform and rim and between outer rim another be arranged with piezoelectric ceramic actuator and pretension driving spring respectively on to frame, piezoelectric ceramic actuator is connected with outer controller.
2. the non-coupling nanometer motion of two dimension according to claim 1 platform mechanism is characterized in that: it is to be made of side by side several plates that described flexible guiding connects gusset.
3. the non-coupling nanometer motion of two dimension according to claim 1 platform mechanism, it is characterized in that: described piezoelectric ceramic actuator is the one dimension piezoelectric ceramic actuator.
CN2009200159614U 2009-07-28 2009-07-28 Two-dimensional non-coupling nano-motion platform mechanism CN201444405U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009200159614U CN201444405U (en) 2009-07-28 2009-07-28 Two-dimensional non-coupling nano-motion platform mechanism

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Application Number Priority Date Filing Date Title
CN2009200159614U CN201444405U (en) 2009-07-28 2009-07-28 Two-dimensional non-coupling nano-motion platform mechanism

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CN201444405U true CN201444405U (en) 2010-04-28

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102637462A (en) * 2012-05-17 2012-08-15 合肥工业大学 12-rod two-dimensional no-coupling micrometric displacement workbench
CN102664047A (en) * 2012-05-17 2012-09-12 合肥工业大学 20-bar two-dimensional non-coupling micro-displacement stage
CN102664045A (en) * 2012-05-17 2012-09-12 合肥工业大学 16-bartwo-dimensional no-coupling micro displacement worktable
CN102664046A (en) * 2012-05-17 2012-09-12 合肥工业大学 24-bar two-dimensional no-coupling micro-displacement workbench
CN104315310A (en) * 2014-10-31 2015-01-28 华南理工大学 Long-stroke high-precision positioning platform with symmetrically-distributed corrugated sheets
CN104464839A (en) * 2014-10-21 2015-03-25 清华大学 Two-dimensional nano flexible motion platform
CN106297900A (en) * 2016-08-04 2017-01-04 苏州大学 A kind of micro-rotation platform of Z axis

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102637462A (en) * 2012-05-17 2012-08-15 合肥工业大学 12-rod two-dimensional no-coupling micrometric displacement workbench
CN102664047A (en) * 2012-05-17 2012-09-12 合肥工业大学 20-bar two-dimensional non-coupling micro-displacement stage
CN102664045A (en) * 2012-05-17 2012-09-12 合肥工业大学 16-bartwo-dimensional no-coupling micro displacement worktable
CN102664046A (en) * 2012-05-17 2012-09-12 合肥工业大学 24-bar two-dimensional no-coupling micro-displacement workbench
CN104464839A (en) * 2014-10-21 2015-03-25 清华大学 Two-dimensional nano flexible motion platform
CN104315310A (en) * 2014-10-31 2015-01-28 华南理工大学 Long-stroke high-precision positioning platform with symmetrically-distributed corrugated sheets
CN106297900A (en) * 2016-08-04 2017-01-04 苏州大学 A kind of micro-rotation platform of Z axis
CN106297900B (en) * 2016-08-04 2019-01-04 苏州大学 A kind of micro- rotating platform of Z axis

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Granted publication date: 20100428

Termination date: 20140728