CN201442975U - Gas transportation deposition device - Google Patents
Gas transportation deposition device Download PDFInfo
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- CN201442975U CN201442975U CN2009200237365U CN200920023736U CN201442975U CN 201442975 U CN201442975 U CN 201442975U CN 2009200237365 U CN2009200237365 U CN 2009200237365U CN 200920023736 U CN200920023736 U CN 200920023736U CN 201442975 U CN201442975 U CN 201442975U
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- gas
- deposition apparatus
- tubular heater
- gas transportation
- graphite tubular
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Abstract
The utility model discloses a gas transportation deposition device. The gas transportation deposition device has the advantages that the structure is simple, the use is convenient, the service life is long, the heating is even, deposition source gas can be effectively prevented from pollution, and the like. The gas transportation deposition device has the structure that a sealed graphite pipe type heater is arranged, and two ends of the graphite pipe type heater are respectively communicated with a gas transportation left channel and a gas transportation right channel.
Description
Technical field
The utility model relates to a kind of gas transportation and deposition apparatus, particularly a kind of gas transportation and deposition apparatus at the cadmium telluride film solar cells absorption layer.
Background technology
The absorption layer of cadmium telluride film solar cells has kinds of experiments chamber making method, vacuum evaporation deposition, sputtering sedimentation, molecular beam epitaxy deposition, silk screen printing, plating, vapour phase epitaxy, near space distillation, gas transport deposition etc. are typically arranged, near space distillation wherein, gas transport deposition technique develop into industrialization from the laboratory, some and production efficiency, the closely-related gordian technique of product performance are being carried out extensive and deep research.
Gas transport deposition cadmium telluride film solar cells, because deposition source structure more complicated, this technological experiment chamber research data is quite deficient, successfully adopts the producer of this technology also to have only the U.S. one tame factory at present.According to patent " APPARATUS AND METHOD FOR DEPOSITING A MATERIAL ON A SUBSTRATE " (patent No. US5945163) of its announcement in 1999 and the patent of announcing in 2000 " APPARATUS AND METHOD FOR DEPOSITING ASEMICONDUCTOR MATERIAL " (patent No. US6037241), its structure formation has following several respects shortcoming:
1. heating efficiency is very low.Because what its adopted is the resistance wire type of heating, need carry out insulation protection, and can not directly contacts and be deposited material;
The heated filament of opening portion be deposited thing of short duration the contact arranged, may Marine sediments;
3. the air-flow distribution is not controlled substantially, is difficult to guarantee the homogeneity of deposit film.
According to Theoretical Calculation, the photoelectric transformation efficiency of cadmium telluride film solar cells can reach 26%, breadboard high conversion efficiency also reaches 16.5%, and has only 10% with the thin film solar battery module efficient of present structure deposition source growth, has the test of a great deal of and theoretical investigation work to do.
The utility model content
The utility model is exactly at above-mentioned design shortcoming, provide a kind of have simple in structure, easy to use, long service life, homogeneous heating can effectively prevent the gas transportation and deposition apparatus of advantages such as deposition source gas is polluted.
For achieving the above object, the utility model adopts following technical scheme:
A kind of gas transportation and deposition apparatus, it comprises the graphite tubular heater of a sealing, graphite tubular heater two ends respectively with gas transport left side passage and the right channel connection of gas transport.
A kind of gas transportation and deposition apparatus, it comprises the graphite tubular heater of a sealing, and one and gas transport channel connection are only arranged in the graphite tubular heater two ends, the other end sealing.
Be provided with air flow guiding device in the described graphite tubular heater.
Described air flow guiding device is the one group of gas guide board that is arranged on the staggered arrangement of graphite tubular heater inwall.
Described air flow guiding device is the arcuation semi-closure ring type gas guide board of one group of concentric reducing.
Described gas transport passage stretches into graphite tubular heater inside, is provided with stock chest at this portion gas transport passage simultaneously.
Described gas transport passage is a silica tube.
Described graphite tubular heater is the long and narrow linear well heater of body for diameter is little.
The graphite tubular heater that the utility model gas transportation and deposition apparatus has, its heating efficiency height, because the institute of graphite inherent characteristic own, make the heatproof characteristic of well heater greatly improve, thereby greatly improved the work-ing life of well heater itself, guaranteed the long term operation validity and the stability of this gas transportation and deposition apparatus.In addition, the graphite tubular heater of the utility model gas transportation and deposition apparatus also is the core cavity of deposition source simultaneously, makes that the structure of gas transportation and deposition apparatus is more succinct.
In addition, the utility model gas transportation and deposition apparatus only adopts graphite and quartzy two kinds of materials, even the big area contact can not cause the pollution that deposition source is deposited material yet.
In addition, the utility model gas transportation and deposition apparatus has three stage structure design since this because of, guaranteed that the utility model gas transportation and deposition apparatus is more convenient when equipment is installed.
In addition, the utility model gas transportation and deposition apparatus heating caliber is little and long and narrow, is similar to " line heating ", makes the temperature field more even.
In addition, the utility model gas transportation and deposition apparatus is taked the design of various ways structure flow deflector air-channel system, guarantees the uniform and stable property of gas transport composition.
The graphite tubular heater is an emphasis core content of the present utility model.
The beneficial effects of the utility model are: select the graphite body type of heating for use, increase the work-ing life of gas transportation and deposition apparatus.Select the graphite body pipe type heating mode for use, make the temperature field more even.Select for use the graphite tubular heater to do the core cavity of deposition source simultaneously, avoid the pollution of technological process deposition source gas.Scientific and reasonable gas circuit structure is taked in complicated gas circuit structure design, and the carrier gas air-flow is control effectively.
Description of drawings:
Fig. 1 is the synoptic diagram of the utility model gas transportation and deposition apparatus;
Fig. 2 is the utility model gas transportation and deposition apparatus the 1st example structure sectional schematic diagram;
Fig. 3 is the sectional schematic diagram of the utility model gas transportation and deposition apparatus the 2nd embodiment;
Fig. 4 is the schematic cross-sectional view of the utility model gas transportation and deposition apparatus the 3rd embodiment;
Fig. 5 is the longitudinal section synoptic diagram of the utility model gas transportation and deposition apparatus the 3rd embodiment.
Wherein, 1. gas transport left side passage, 2. graphite tubular heater, 3. right passage, 4. stock chest, 5. gas guide board, 6. semi-closure ring type gas guide board, 7. gas transport passage of gas transport.
Embodiment:
The utility model is described in further detail below in conjunction with accompanying drawing and embodiment.
It has the graphite tubular heater 2 of a sealing among Fig. 1, and its left end is communicated with gas transport left side passage 1, and right-hand member is communicated with the right passage 3 of gas transport.The right passage 3 of gas transport left side passage 1 and gas transport is silica tube.Graphite tubular heater 2 is what seal with gas transport left side passage 1 and the right passage of gas transport 3 junctions.
Fig. 2 is the 1st embodiment of the present utility model, and in this embodiment, it is provided with one group of gas guide board that is interspersed 5 on the inwall of graphite tubular heater 2, guarantees the uniform and stable property of gas transport composition.
Fig. 3 is the 2nd embodiment of the present utility model, and in this embodiment, graphite tubular heater 2 only is communicated with a gas transport passage 7, and the part in gas transport passage 7 stretches into graphite tubular heater 2 is provided with stock chest 4.Graphite tubular heater 2 is what seal with gas transport passage 7 junctions.
Fig. 4, Fig. 5 are the utility model the 3rd embodiment, and in this embodiment, graphite tubular heater 2 two ends are communicated with gas transport left side passage 1 and the right passage 3 of gas transport respectively, and the junction between them is what seal; Then be provided with the arcuation semi-closure ring type gas guide board 6 of a plurality of concentric reducings simultaneously in graphite tubular heater 2 inside.
Claims (8)
1. a gas transportation and deposition apparatus is characterized in that, it comprises the graphite tubular heater of a sealing, graphite tubular heater two ends respectively with gas transport left side passage and the right channel connection of gas transport.
2. gas transportation and deposition apparatus as claimed in claim 1 is characterized in that, is provided with air flow guiding device in the described graphite tubular heater.
3. gas transportation and deposition apparatus as claimed in claim 2 is characterized in that, described air flow guiding device is the one group of gas guide board that is arranged on the staggered arrangement of graphite tubular heater inwall.
4. gas transportation and deposition apparatus as claimed in claim 2 is characterized in that, described air flow guiding device is the arcuation semi-closure ring type gas guide board of one group of concentric reducing.
5. a gas transportation and deposition apparatus is characterized in that, it comprises the graphite tubular heater of a sealing, and one and gas transport channel connection are only arranged in the graphite tubular heater two ends, the other end sealing.
6. gas transportation and deposition apparatus as claimed in claim 5 is characterized in that, described gas transport passage stretches into graphite tubular heater inside, is provided with stock chest at this portion gas transport passage simultaneously.
7. as claim 1 or 5 or 6 described gas transportation and deposition apparatus, it is characterized in that described gas transport passage is a silica tube.
8. as claim 1 or 2 or 3 or 5 or 6 described gas transportation and deposition apparatus, it is characterized in that described graphite tubular heater is the long and narrow linear well heater of body for diameter is little.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200237365U CN201442975U (en) | 2009-03-16 | 2009-03-16 | Gas transportation deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200237365U CN201442975U (en) | 2009-03-16 | 2009-03-16 | Gas transportation deposition device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201442975U true CN201442975U (en) | 2010-04-28 |
Family
ID=42547652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200237365U Expired - Fee Related CN201442975U (en) | 2009-03-16 | 2009-03-16 | Gas transportation deposition device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201442975U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113566044A (en) * | 2021-07-30 | 2021-10-29 | 重庆大学 | Heating method for obtaining continuous high-temperature chlorine |
-
2009
- 2009-03-16 CN CN2009200237365U patent/CN201442975U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113566044A (en) * | 2021-07-30 | 2021-10-29 | 重庆大学 | Heating method for obtaining continuous high-temperature chlorine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: REAL FORCE POWER ENTERPRISE CO., LTD. Free format text: FORMER OWNER: SHANDONG REALFORCE GROUP CO., LTD. Effective date: 20100803 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20100803 Address after: Realforce Industrial Park in Shandong province 277600 Weishan County Economic Development Zone Patentee after: Real Force Power Enterprise Co., Ltd. Address before: Realforce Industrial Park in Shandong province 277600 Weishan County Economic Development Zone Patentee before: Shandong RealForce Group Co., Ltd. |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100428 Termination date: 20140316 |