CN201375944Y - Follow-up spraying device - Google Patents
Follow-up spraying device Download PDFInfo
- Publication number
- CN201375944Y CN201375944Y CN200920135240U CN200920135240U CN201375944Y CN 201375944 Y CN201375944 Y CN 201375944Y CN 200920135240 U CN200920135240 U CN 200920135240U CN 200920135240 U CN200920135240 U CN 200920135240U CN 201375944 Y CN201375944 Y CN 201375944Y
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- CN
- China
- Prior art keywords
- crossbeam
- sprayer unit
- spraying device
- silicon chip
- hooks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a follow-up spraying device used for silicon chip treatment process, which comprises a movable crossbeam and a pair of hanging hooks, the movable crossbeam is arranged on a vertical post, the hanging hooks are fixed on the crossbeam, a spraying device consisting of a group of spray nozzles is arranged between the hanging hooks, and lower ends of the hanging hooks are provided with hooks for lifting/dropping a hanging basket. Besides, a controller for controlling actions of the hooks and open/close of the spraying device is arranged on the crossbeam. The follow-up spraying device can guarantee keeping silicon chips in a misty environment and keep surfaces of the silicon chips moist, thereby facilitating the subsequent cleaning operation.
Description
Technical field
The utility model relates to the soda acid treatment facility of silicon materials, and relating in particular to a kind of silicon materials soda acid treatment facility that is used for can be with the mobile servo-actuated sprayer unit of silicon chip hanging basket.
Background technology
In silicon chip was handled, because after silicon chip handled in the NaOH of about 85 ℃ of high temperature or KOH liquid, reaction product (silicate) can adhere to silicon chip surface along with the proposition of silicon chip, silicate need clean up in follow-up operation.When silicon chip had just proposed, surface temperature was very high, and silicon chip very thin (about 0.2mm), was easy to dry.After the silicate that silicon chip adheres to is dry, is difficult in the follow-up matting and cleans up, thereby influence the surface quality and the performance of silicon chip.Therefore, how when silicon chip is mentioned, to prevent the silicate of its surface attachment dry be a technical barrier that needs to be resolved hurrily in the industry.
The utility model content
The utility model provides a kind of servo-actuated sprayer unit in order to overcome the technical problem that the silicate that adheres on the silicon chip in the prior art is difficult to clean after dry, and this device guarantees the moistening of silicon chip surface when silicon sheet material is mentioned from treatment fluid.
For solving the problems of the technologies described above, the technical solution adopted in the utility model is a kind of servo-actuated sprayer unit of design, comprising: be installed on the column movably crossbeam; Be fixed on a pair of suspension hook on the crossbeam; Be arranged on the sprayer unit that this suspension hook middle part is made up of one group of shower nozzle; And be arranged on the hook that described suspension hook lower end is used to mention/put down hanging basket.
Described crossbeam is provided with the controller of action of control hook and sprayer unit On/Off
Described sprayer unit comprises the vapour-liquid mixing arrangement.
Compared with prior art, the utility model carries out in the process of acid or alkali treatment at silicon materials, particularly in handling process, can guarantee that silicon chip is in the atmosphere of steam fog, makes silicon chip surface keep moistening, is convenient to follow-up cleaning.
Description of drawings
Below in conjunction with drawings and Examples the utility model is described further:
Fig. 1 is a structural representation of the present utility model.
The specific embodiment
As shown in Figure 1, the servo-actuated sprayer unit of the utility model design comprises: be installed on the column 7, and can be up and down or the crossbeam 1 that moves forward and backward; Be fixed on a pair of suspension hook 2 on the crossbeam; Be arranged on the sprayer unit 3 that this suspension hook middle part is made up of one group of shower nozzle 4; And be arranged on the hook 5 that described suspension hook lower end is used to mention/put down hanging basket.Crossbeam 1 is provided with 5 actions of control hook, mention/put down the controller of hanging basket, when hook 5 was mentioned the hanging basket 6 that silicon chip is housed from treatment trough, this controller started sprayer unit immediately and begins to spray facing to silicon chip in the hanging basket, guaranteed that the silicon chip in the hanging basket keeps moistening in moving process.When hook 5 put down hanging basket, controller cut out sprayer unit.
Described sprayer unit also comprises the vapour-liquid mixing arrangement, for example, pure water and Compressed Gas is mixed, and makes the device of shower nozzle ejection liquid-vapor mixture.
During work, sprayer unit is fixed on the manipulator transverse arm of crossbeam, moves together with manipulator.When manipulator took out silicon chip from chemical treating tank after, sprayer unit facing to the silicon chip spraying, was in the atmosphere of steam fog silicon chip in handling process, keeps moistening, prevented that the silicate that silicon chip adheres to is dry, made things convenient for follow-up cleaning.
Above-mentioned is the utility model preferred embodiment, allly improves on this principle, all falls into protection domain of the present utility model.
Claims (3)
1, a kind of servo-actuated sprayer unit is characterized in that comprising: be installed on the column movably crossbeam; Be fixed on a pair of suspension hook on the crossbeam; Be arranged on the sprayer unit that this suspension hook middle part is made up of one group of shower nozzle; Be arranged on the hook that described suspension hook lower end is used to mention/put down hanging basket.
2, servo-actuated sprayer unit according to claim 1 is characterized in that: described crossbeam is provided with the controller of action of control hook and sprayer unit On/Off
3, servo-actuated sprayer unit according to claim 2, it is characterized in that: described sprayer unit comprises the vapour-liquid mixing arrangement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920135240U CN201375944Y (en) | 2009-02-27 | 2009-02-27 | Follow-up spraying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920135240U CN201375944Y (en) | 2009-02-27 | 2009-02-27 | Follow-up spraying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201375944Y true CN201375944Y (en) | 2010-01-06 |
Family
ID=41516038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920135240U Expired - Lifetime CN201375944Y (en) | 2009-02-27 | 2009-02-27 | Follow-up spraying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201375944Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104813438A (en) * | 2012-11-28 | 2015-07-29 | 盛美半导体设备（上海）有限公司 | Method and apparatus for cleaning semiconductor wafer |
-
2009
- 2009-02-27 CN CN200920135240U patent/CN201375944Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104813438A (en) * | 2012-11-28 | 2015-07-29 | 盛美半导体设备（上海）有限公司 | Method and apparatus for cleaning semiconductor wafer |
| US10297472B2 (en) | 2012-11-28 | 2019-05-21 | Acm Research (Shanghai) Inc. | Method and apparatus for cleaning semiconductor wafer |
| US11462423B2 (en) | 2012-11-28 | 2022-10-04 | Acm Research (Shanghai) Inc. | Method and apparatus for cleaning semiconductor wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SHENZHEN JIEJIA WEICHUANG MICROELECTRONICS EQUIPME Free format text: FORMER OWNER: SHENZHEN SC EXACT EQUIPMENT CO., LTD. Effective date: 20110329 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 518103 BUILDING A13, LINPOKENG INDUSTRIAL ZONE, HAOSI, SHAJING TOWN, BAO'AN DISTRICT, SHENZHEN CITY, GUANGDONG PROVINCE TO: 518000 1/F, BUILDING A4, LINPOKENG INDUSTRIAL ZONE, HAOSI, SHAJING SUBDISTRICT, BAO'AN DISTRICT, SHENZHEN CITY |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20110329 Address after: 518000, Shenzhen Baoan District manhole Street oyster four Lin slope pit Industrial Zone, A4 building, first floor Patentee after: Shenzhen Jiejiachuang Microelectronic Equipment Co., Ltd. Address before: 518103 A13 building, oyster four woods slope pit Industrial Zone, Baoan District, Guangdong, Shenzhen Patentee before: Shenzhen SC Exact Equipment Co., Ltd. |
|
| C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN S.C NEW ENERGY TECHNOLOGY CORPORATION Free format text: FORMER NAME: SHENZHEN JIEJIA WEICHUANG MICROELECTRONICS EQUIPMENT CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 518000, Guangdong, Shenzhen province Baoan District manhole Street oyster four Lin slope pit Industrial Zone A4 and No. A6 workshop Patentee after: Shenzhen S. C New Energy Equipment Co., Ltd. Address before: 518000, Shenzhen Baoan District manhole Street oyster four Lin slope pit Industrial Zone, A4 building, first floor Patentee before: Shenzhen Jiejiachuang Microelectronic Equipment Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100106 |