CN201369318Y - 晶圆清洗装置 - Google Patents
晶圆清洗装置 Download PDFInfo
- Publication number
- CN201369318Y CN201369318Y CNU2009200682359U CN200920068235U CN201369318Y CN 201369318 Y CN201369318 Y CN 201369318Y CN U2009200682359 U CNU2009200682359 U CN U2009200682359U CN 200920068235 U CN200920068235 U CN 200920068235U CN 201369318 Y CN201369318 Y CN 201369318Y
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- wafer
- substrate
- cleaned
- cleaning
- liquid
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNU2009200682359U CN201369318Y (zh) | 2009-02-27 | 2009-02-27 | 晶圆清洗装置 |
Applications Claiming Priority (1)
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CNU2009200682359U CN201369318Y (zh) | 2009-02-27 | 2009-02-27 | 晶圆清洗装置 |
Publications (1)
Publication Number | Publication Date |
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CN201369318Y true CN201369318Y (zh) | 2009-12-23 |
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CNU2009200682359U Expired - Lifetime CN201369318Y (zh) | 2009-02-27 | 2009-02-27 | 晶圆清洗装置 |
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CN (1) | CN201369318Y (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103977973A (zh) * | 2014-05-09 | 2014-08-13 | 欧蒙医学诊断(中国)有限公司 | 一种载片清洗装置和方法 |
CN112845305A (zh) * | 2021-01-04 | 2021-05-28 | 长江存储科技有限责任公司 | 晶圆清洗装置 |
-
2009
- 2009-02-27 CN CNU2009200682359U patent/CN201369318Y/zh not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103977973A (zh) * | 2014-05-09 | 2014-08-13 | 欧蒙医学诊断(中国)有限公司 | 一种载片清洗装置和方法 |
CN112845305A (zh) * | 2021-01-04 | 2021-05-28 | 长江存储科技有限责任公司 | 晶圆清洗装置 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130121 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
TR01 | Transfer of patent right |
Effective date of registration: 20130121 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20091223 |