CN201345358Y - Overturning type wafer automatic transmission device - Google Patents

Abstract

The utility model relates to an overturning type wafer automatic transmission device, which overcomes the defects in the prior art that complicated actions can not be done in a narrow space of process, and the like. The overturning type wafer automatic transmission device comprises a machine frame, a feeding platform, a wind box body and an arm mechanism. The overturning type wafer automatic transmission device has the technical key points that a lower arm of an arm mechanism is connected with a snatching mechanism through an overturning mechanism, a fixing plate of the snatching mechanism is hinged on an overturning base through an overturning shaft, a snatching motor of the snatching mechanism drives a snatching connecting rod through a worm gear and an endless screw to drive a clamping claw to move in a reciprocal mode along a snatching slide rail, and a positioning mechanism on the snatching mechanism is provided with an adjustable positioning block. The device has rational structure and design, stable transmission operation in process, and flexible and reliable actions, extends the application range, and can realize that a wafer box can be overturned in a range from 0 degree to 90 degrees, the inclined angle can be arbitrarily set for finishing automatic transmission of the wafer in horizontal or vertical states, the automatic transmission device also can be adapted for doing more complicated action in a narrow space of a process device simultaneously, can be stopped flexibly when the device encounters external interference for achieving the transmission effect of precise control.

Description

Automatic conveying device for turnover type wafer

Technical field

The utility model relates to a kind of wafer conveying equipment.Particularly a kind of to standard mechanical interface (Standard MechanicalInterface, abbreviation SMIF) wafer cassette is written into the reasonable in design of operation, between processing procedure, transmit and operate steadily, realize that the wafer casket in 0-90 degree scope rotary movement flexibility and reliability more, expanded the automatic conveying device for turnover type wafer of the scope of application.

Background technology

At present, in semi-conductive manufacture process, wafer is carried and is made most important to IC.Quality when between different processing procedures, transporting in order to ensure wafer; avoid wafer to be subjected to grit or other pollution; the container that transports of standard is adopted in the work of more and more transporting, and has promptly adopted standard mechanical interface (standard mechanical interface is called for short SMIF) technology.In United States Patent (USP) 4532970 and 4534389, disclose a kind of SMIF system.This system is the grit that flows through wafer by obvious minimizing, reduces the pollution of grit to wafer.This effect is by guaranteeing in mechanical aspects in wafer conveying, storage and the most processing procedure that the relative wafer of the gas of wafer periphery keeps static, and the grit in the external environment condition can not enter the wafer environment and realizes.The SMIF technology is the center with " isolation technology " notion.So-called isolation technology is intended to by wafer being enclosed in the super clean environment, relaxes simultaneously the cleanliness factor beyond this enclosed environment is required to prevent that product is contaminated.This make to save and hugely to become possibility with operation cost in advance, also makes the wafer factory can be more effective, more cost-effective simultaneously.

In addition, United States Patent (USP) 5934991 discloses a kind of wafer cassette charging appliance interface improved pure air system (Podloader interface improved clean air system), be a kind of integrated air filtering system, clean microenvironment can be provided.Fan in this system, filter, plenum box and loading platform are done as a whole moving, plenum chamber communicates by an angled porose screen and the wafer cassette on the loading platform, and pure air stream is blown over crystal column surface uniformly on all height of angled porose screen.Mechanical device lifts the wafer cassette shell under microenvironment, be written into then and carry out the wafer casket, make the wafer casket be written into and the process of carrying out in contaminated probability drop to minimum.The method is extensively adopted by the insider.

United States Patent (USP) 6086323 discloses a kind of method (Method for supplyingwafers to an IC manufacturing process) of sending wafer for the IC processing procedure, this method comprises supporting box, lift, material loading platform and a multi-joint mechanical arm, and material loading platform can dock with the SMIF wafer cassette.Elevator is used for the wafer lid is taken off from the SMIF wafer cassette.Rise at lift by the clamping bar of cylinder control and to open before the wafer cassette, the SMIF wafer cassette is fixed on the elevator.After its material loading platform with wafer cassette pedestal and wafer cassette loading interface docks, open the locking mechanism between wafer lid and the pedestal.When making wafer be in the microenvironment of cleaning, the wafer lid to be mentioned from pedestal, the actuator of mobile multi-joint mechanical arm is to the position of exposed wafer casket, with the wafer casket promptly, mobile mechanical arm produces microenvironment with wafer then, is delivered to the IC processing procedure.Multi-joint mechanical arm comprises rotation shoulder joint, elbow joint and wrist joint, can realize moving of horizontal direction.Screw rod vertical drive mechanism makes the mechanical arm can vertical moving wafer casket.But the function of mechanical arm is limited, has limited the application scenario of equipment.Needing the wafer casket to do on the processing procedure of compound action more, just can't realize automatic transmission.Grasping mechanism by cylinder as power.Adopt cylinder to be difficult to motion process is controlled accurately, also will increase by a cover pneumatic system simultaneously as dynamical element.The detent mechanism that is installed in the actuator lower surface adopts one group of four locating piece installing around the center.Form a funnelform structure, can guide wafer casket handle to reach position placed in the middle.But the installation of actuator locating piece can only be applicable to fixing a kind of wafer casket, and along with the development of process apparatus, the form of wafer casket is also more and more various, and this just makes the automatic transmission of wafer be restricted.

Disclose a kind of wafer transfer device (Transfer apparatus for wafers) in the United States Patent (USP) 5975825, it contains the linear microscope carrier that a liftable moves, and linear microscope carrier carries a mechanical arm.This mechanical arm comprises two and stretches one's arm (placing wafer casket both sides) and a mask device (being used to prop up the wafer edge).Mask device contains two mouth limits of being made by elastomeric material, and it can be against on the crystal round fringes.But there are some shortcomings in this kind wafer transfer device, shows in the following areas:

1, the complex structure of mechanical arm, the field of employment of two equipment that limited that stretch one's arm.

2, the mechanical arm required revolution space that rotates is bigger, and in the mechanical arm rotation, linear microscope carrier must cooperate lifting, and guarantees the level run stability of wafer cassette in cooperation, so that each parts collocation action accuracy is accurate.Therefore, this device not only takes up room bigger, and the equipment cost of input is also higher, and is subjected to the restriction of its structure, can't be applicable to the processing procedure of doing complicated action at small space.

3, the function singleness of mechanical arm limits its application scenario.Needing the wafer casket to do on the particular process sequence equipment of compound action more, just can't realize automatic transmission.

4, the setting of actuator locating piece can only be applicable to fixing a kind of wafer casket, can't adapt to the automatic transmission of the wafer casket of the pairing different shape of diversified process apparatus.

Patent announcement number be CN2327664Y's " with the wafer conveyer at standard mechanical interface ", adopted to make the jaw lifting, be used to utilize times jaw swing mechanism that the stroke design is transported to the wafer cassette on the jaw jaw horizontal mobile mechanism of fixed point and is used for wafer is playbacked in box to the jaw vertical lifting mechanism of fixed point with the grasping silicon wafer box.Wherein the jaw vertical lifting mechanism rises in the side of wafer cassette and drives jaw horizontal mobile mechanism and jaw swing mechanism associated movement, taken inner very big space, cause equipment volume big, the design feature of this wafer conveyer simultaneously limits the occasion of its application.

Korean Patent Publication No. be 100594371B1's " a kind of loading attachment (A loader havingfunction for carrying out cassette) that can transport the wafer casket ", adopt a kind of vertical axis link unit to rise and drive the mechanism that jaw moves horizontally two bases of grasping silicon wafer box side in the side of wafer cassette.But owing to still adopt inner grasping mechanism, cause equipment volume bigger than normal, and the function of mechanical arm is limited, can't realizes handling the wafer casket and do more complicated action.

Because the diversity and the particularity of process apparatus, existing wafer load equipment is difficult to comprehensively meet the demands.From the document of announcing, find that also the same equipment of employing can be when unloading the SMIF wafer cassette automatically, meeting automatically is transported to the required ad-hoc location of next processing procedure with wafer wherein, realize that promptly the wafer casket overturns in 0-90 degree scope, and arbitrarily set the angle of inclination, to finish the automatic transmission of wafer level or plumbness; And after machining, regain the automatic conveying device of wafer casket again.As seen existing wafer transfer device can't reach at it and be written into, carries in the process that, can satisfy process apparatus for the requirement of wafer on multiple locus, can reach process apparatus again and make the more purpose of compound action at small space, therefore, existing wafer transfer device is further improved.

The utility model content

The purpose of this utility model provides a kind of automatic conveying device for turnover type wafer, its isolation technology in inheriting SMIF of the prior art provides the advantage of clean microenvironment, can also overcome it effectively and be subjected to structural limitations, can't be applicable at the small space of processing procedure and make shortcomings such as complicated action, this apparatus structure is reasonable in design, between processing procedure, transmit and operate steadily, move more flexibility and reliability, expanded the scope of application, make it to realize that the wafer casket overturns in 0-90 degree scope, and arbitrarily set the angle of inclination, to finish the automatic transmission of wafer level or plumbness, can adapt at the process apparatus small space again simultaneously and make more compound action, and pliability stops when running into extraneous the interference, reaches the laser propagation effect of accurate control.

The technical scheme that the utility model adopted is: this automatic conveying device for turnover type wafer comprises frame, be fixed on the material loading platform on the frame, be assembled in the wind box that has button pawl mechanism of making lifting moving on the frame and do lifting, stretch the arm mechanism that has grasping mechanism that moves, its technical essential is: the lower arms of described arm mechanism connects described grasping mechanism by switching mechanism, the upset pedestal that is the lower arms of described arm mechanism and described switching mechanism is hinged, the fixed head of described grasping mechanism is hinged on the described upset pedestal by trip shaft, and utilize the gear connecting rod transmission mechanism that is assembled on the upset pedestal to drive described trip shaft and rotate, drive described grasping mechanism fixed head around rotational, the extracting motor that is arranged on described grasping mechanism moves back and forth by the extracting slide rail of turbine and worm driving extracting connecting rod drive jaw along described grasping mechanism fixed head, and the detent mechanism on the described grasping mechanism is provided with adjustable locating piece.

Be hinged on trip shaft on the described upset pedestal and be fixed on the both sides of described grasping mechanism fixed head, described trip shaft stretches out upset pedestal axis hole end fixedlys connected with the upset connecting-rod head in the described gear connecting rod transmission mechanism.

A pair of pinion in mesh in the described gear connecting rod transmission mechanism and gear wheel are assembled on the described upset pedestal, described pinion is assembled on the motor shaft of described upset pedestal, described gear wheel side is by an end of the hinged kinematic link of bearing pin, and the other end of kinematic link is hinged with the other end of the upset connecting rod that is fixedly connected on described upset axle head.

Driving described arm mechanism makes lifting, the arm lifting motor that stretch to move and stretching hand with arm motor and is separately fixed on the described frame and is fixed on the arm elevation base plate of sliding along the single slide rail of the arm lifting of frame, described arm lifting motor drives the arm lifting nut that is fixed on the arm elevation base plate by No. three driving-belts and arm lifting screw and moves back and forth along screw axial, make arm mechanism along with frame vertically do elevating movement.

Described stretching hand with arm motor via reducer structure, No. two driving-belts drive the arm power transmission shaft that is fixed on the last arm and rotate, the arm power transmission shaft drives the thorny arm fixed axis swing of last arm, swing around last arm under the drive of the inner driving-belt of last arm by the lower arms that arm rotating shaft and last arm are hinged, by the hinged switching mechanism of arm rotating shaft and lower arms under the drive of the inner driving-belt of lower arms around the lower arms swing, make arm mechanism along making stretching routine with the frame vertical direction.

Described wind box is assembled on the wind box holder that has the wind box lifting nut, be fixed on wind box lifting motor on the frame and drive the wind box lifting nut by driving-belt and wind box lifting screw and move back and forth, drive of the wind box lifting single slide rail upper and lower slip of wind box holder along frame along screw axial.

The button pawl motor of the button pawl mechanism of described wind box is hinged with button pawl pull bar one end by the pull bar bearing pin of assembling on it, the button pawl pull bar other end is hinged with the crank of button pawl axle head, the button pawl axle other end is fixed with the button pawl, crank on the motor-driven button pawl axle drives button pawl opening and closing around rotational.

Advantage and the good effect that the utlity model has are: because the utility model is to improve design on having the architecture basics of sending the transmission equipment in the wafer method now, so its isolation technology in inheriting SMIF of the prior art provides the advantage of clean microenvironment, can also overcome it effectively and be subjected to structural limitations, can't be applicable at the small space of processing procedure and make shortcomings such as complicated action.The lower arms of the arm mechanism of this device connects grasping mechanism by switching mechanism, and make grasping mechanism adopt grasp motor to drive the version that grasps connecting rod by turbine and worm and substitute pneumatic system in the existing grasping mechanism and drive jaw and move, guarantee that the wafer casket after jaw clamps can not come off, so its structural design is more reasonable, the transmission operation is not only steady between processing procedure, and can realize that the wafer casket is at the random angle of inclination of setting of 0-90 degree scope upset, move more flexibility and reliability, expanded the scope of application to different process apparatus, making it can either be in the self-propagating while of finishing wafer level or plumbness, satisfy process apparatus for the requirement of wafer on multiple locus, can adapt at the process apparatus small space again and make more compound action, and pliability stops when running into extraneous the interference, reaches the laser propagation effect of accurate control.

Description of drawings

Below in conjunction with accompanying drawing the utility model is further described.

Fig. 1 is a kind of concrete structure schematic diagram of the utility model.

Fig. 2 is the right view of Fig. 1.

Fig. 3 is a kind of structural representation of the arm mechanism among Fig. 1.

Fig. 4 is a kind of structural representation of the arm mechanism extended configuration among Fig. 1.

Fig. 5 is the vertical view of Fig. 4.

Fig. 6 is the right view of Fig. 4.

Fig. 7 is a kind of structural representation of the grasping mechanism among Fig. 3.

Fig. 8 is a kind of structural representation of the detent mechanism among Fig. 3.

Fig. 9 is a kind of structural representation of the button pawl mechanism among Fig. 2.

Sequence number explanation among the figure: 1 frame, 2 wind box lifting motors, No. 3 driving-belts, 4 wind box holders, 5 wind box lifting nuts, 6 wind box lifting screws, the single slide rail of 7 wind box liftings, the single slide rail of 8 arm liftings, 9 No. two driving-belts, 10 reducing gears, 11 stretching hand with arm motors, 12 arm elevation base plate, 13 arm lifting screws, 14 No. three driving-belts, 15 arm lifting motors, 16 arm lifting nuts, 17 arm holders, 18 arm power transmission shafts, 19 arm mechanisms, 20 button pawl mechanisms, 21 material loading platforms, 22 wind box, 23 detent mechanisms, 24 grasping mechanisms, 25 trip shafts, 26 switching mechanisms, 27 lower arms, 28 arm rotating shafts, 29 last arms, 30 arm fixed axis, 31 pinions, 32 bearing pins, 33 gear wheels, 34 kinematic links, 35 upset pedestals, 36 upset connecting rods, 37 jaws, 38 grasp motor, 39 grasp slide rail, 40 grasp connecting rod, 41 shaft couplings, 42 pitman pins, 43 worm screws, 44 turbines, 45 grasping mechanism fixed heads, 46 adjustable locating pieces, 47 grasp fixed head, 48 stationary positioned pieces, 49 button pawl motors, 50 pull bar bearing pins, 51 button pawl pull bars, 52 holders, 53 button pawl axles, 54 button pawls.

Embodiment

Describe concrete structure of the present utility model in detail according to Fig. 1～9.This automatic conveying device for turnover type wafer and redesigns according to the defective that exists in the prior art on the basis of inheriting United States Patent (USP) 6086323 patented technology advantages such as " a kind of methods of sending wafer for the IC processing procedure ".It comprises frame 1, is fixed on the material loading platform 21 on the frame 1, is assembled in the wind box 22 that has button pawl mechanism 20 of making lifting moving on the frame 1 and makes lifting, the mobile parts such as the arm mechanism that has grasping mechanism 24 19 of stretching, extension.Wherein wind box 22 is integrated air filtering systems, and clean microenvironment can be provided.Method in its operation principle and the above-mentioned United States Patent (USP) technology is basic identical, does not repeat them here.

As shown in Figure 1, 2, wind box 22 is assembled on the wind box holder 4 that has wind box lifting nut 5, be fixed on wind box lifting motor 2 on the frame 1 and drive wind box lifting nut 5 by driving-belt 3 and wind box lifting screw 6 and move back and forth, drive wind box holder 4 along the single slide rail 7 upper and lower slips of the wind box lifting of frame 1 along screw axial.Adopt the single slide rail 7 of wind box lifting to compare, can simplify drive mechanism, not only install easily, and be convenient to adjust when safeguarding with wind box lifting double sided slider bar of the prior art.

As shown in Figure 9, the button pawl mechanism 20 of wind box 22 is made up of button pawl motor 49, pull bar bearing pin 50, button pawl pull bar 51, holder 52, button pawl axle 53, button pawl 54 etc.Button pawl mechanism 20 adopts 49 transmissions of button pawl motor, no longer adopts the cylinder transmission of pneumatic system, and this had both solved its problem that can't accurately control motion process, also saves a cover pneumatic system simultaneously.Detain pawl mechanism 20 and adopt button pawl motors 49 and hinged with an end of button pawl pull bar 51 by the pull bar bearing pin of assembling on it 50, button pawl pull bar 51 other ends are hinged with the crank of button pawl axle 53 1 ends, and button pawl axle 53 other ends that utilize holder 52 to be assembled on the wind box 22 are fixed with button pawl 54.Button pawl motor 49 drives crank on the button pawl axle 53 around rotational by pull bar bearing pin 50 and button pawl pull bar 51, drives button pawl 54 opening and closing.Power is done by button pawl motor 49 by button pawl mechanism 20, has strengthened mechanism stability and controllability.

Shown in Fig. 3,4,5,6, arm mechanism 19 is made up of detent mechanism 23, grasping mechanism 24, trip shaft 25, switching mechanism 26, lower arms 27, arm rotating shaft 28, last arm 29, arm power transmission shaft 18, arm fixed axis 30 etc.Switching mechanism 26 is made up of pinion 31, bearing pin 32, gear wheel 33, kinematic link 34, upset pedestal 35, upset connecting rod 36 etc.

As shown in Figure 7, grasping mechanism 24 is made up of jaw 37, extracting motor 38, extracting slide rail 39, extracting connecting rod 40, shaft coupling 41, pitman pin 42, worm screw 43, turbine 44, grasping mechanism fixed head 45 etc.

As shown in Figure 8, detent mechanism 23 is made up of adjustable locating piece 46, extracting fixed head 47, stationary positioned piece 48 etc.

Wherein the lower arms 27 of arm mechanism 19 connects grasping mechanism 24 by switching mechanism 26, the lower arms 27 that is arm mechanism 19 is hinged with the upset pedestal 35 of switching mechanism 26, compared with prior art, can be in the self-propagating while of finishing wafer level or plumbness, can also realize according to actual needs that the wafer casket overturns in 0-90 degree scope, arbitrarily set the angle of inclination, to adapt to the requirement of different process apparatus design features.Grasping mechanism fixed head 45 is hinged on the upset pedestal 35 by trip shaft 25, and utilizes the gear connecting rod transmission mechanism that is assembled on the upset pedestal 35 to drive trip shaft 25 and rotate, and drives grasping mechanism fixed head 45 around rotational.The extracting motor 38 that is arranged on grasping mechanism 24 drives jaws 37 by turbine 44 and worm screw 43 driving extracting connecting rods 40 and moves back and forth along the extracting slide rail 39 that is fixed in grasping mechanism fixed head 45.Detent mechanism 23 on the grasping mechanism 24 is provided with adjustable locating piece 46.Be hinged on the trip shaft 25 of upset on the pedestal 35 and be fixed on the both sides of grasping mechanism fixed head 45.The end that trip shaft 25 stretches out the upset connecting rod 36 in upset pedestal 35 axis hole ends and the gear connecting rod transmission mechanism is fixedlyed connected.The gear connecting rod transmission mechanism is made up of motor-driven pinion 31, bearing pin 32, gear wheel 33, kinematic link 34, upset connecting rod 36.A pair of pinion in mesh 31 in the gear connecting rod transmission mechanism and gear wheel 33 are assembled on the upset pedestal 35.Pinion 31 is assembled on the motor shaft (not shown) of upset pedestal 35.Gear wheel 33 is by an end of bearing pin 32 hinged kinematic links 34, and the other end of kinematic link 34 is hinged with the other end of the upset connecting rod 36 that is fixedly connected on trip shaft 25 ends.

Driving arm mechanism 19 does lifting, stretches the arm lifting motor 15 that moves and stretching hand with arm motor 11 and be separately fixed on the frame 1 and be fixed on the arm elevation base plate 12 of sliding along the single slide rail 8 of the arm lifting of frame 1.Adopt the single slide rail 8 of arm lifting to compare, can simplify drive mechanism, not only install easily, and be convenient to adjust when safeguarding with arm lifting double sided slider bar of the prior art.Arm lifting motor 15 drives the arm lifting nut that is fixed on the arm elevation base plate 12 16 by No. three driving-belts 14 and arm lifting screw 13 and moves back and forth along screw axial, make arm mechanism 19 with the upper and lower slip of arm elevation base plate 12 along with frame 1 vertically do elevating movement.Stretching hand with arm motor 11 is by reducing gear 10, No. two driving-belts 9 drive the arm power transmission shaft 18 that is fixed on the last arm 29 and rotate, arm power transmission shaft 18 drives last arm 29 thorny arm fixed axis 30 swings, swing around last arm 29 under the drive of last arm 29 inner driving-belts by the lower arms 27 that arm rotating shaft 28 is connected with last arm 29, by the hinged switching mechanism 26 of arm rotating shaft 28 and lower arms 27 under the drive of lower arms 27 inner driving-belts around lower arms 27 swings, (seeing the partial sectional view among Fig. 3) makes arm mechanism 19 along making stretching routine with frame 1 vertical direction.

The course of action of this automatic conveying device for turnover type wafer is:

It is made up of the action of the parts such as upset of the folding of the folding of the stretching, extension of the lifting of the lifting of wind box 22, arm mechanism 19, arm mechanism 19, button pawl mechanism 20, grasping mechanism 24, grasping mechanism 24.Adopt the special-purpose controller of this device as CPU with utilize exclusive software controlling technique, make routing motion between each parts finish the automatic transmission of wafer.

Wind box lifting motor 2 drives wind box lifting screw 6 by a driving-belt 3 and rotates, and wind box lifting nut 5 drives wind box 22 along single slide rail 7 upper and lower the moving of wind box lifting along wind box lifting screw 6 upper and lower moving.

Arm lifting motor 15 drives arm lifting screw 13 by No. three driving-belts 14 and rotates, arm lifting nut 16 is along arm lifting screw 13 upper and lower moving, drive arm elevation base plate 12 along single slide rail 8 upper and lower the moving of arm lifting, realized the upper and lower mobile of arm mechanism 19.Arm lifting motor 15 is made position feedback by encoder, can realize that the position of rising, descending accurately controls.

Arm mechanism 19 has realized along the direction moving linearly vertical with frame 1, the i.e. stretching routine of arm mechanism 19 its switching mechanism that is hinged with grasping mechanism 24 26 under the common swing effect of last arm 29 and lower arms 27.Stretching hand with arm motor 15 is made position feedback by encoder, can realize the accurate control of extended position.The position of this rising, decline and the design of extended position can guarantee that positioning accuracy reaches in the 0.1mm, and when running into extraneous interference situation, do pliability at any time and stop, the object of can not wounding, and mechanism own is not easy damage.

Switching mechanism 26 can be realized the upset of wafer casket in the extension stroke of arm mechanism 19.The motor-driven pinion 31 of switching mechanism 26 drives gear wheel 33, and gear wheel 33 rotates by bearing pin 32 and promotes kinematic link 34 swings.Under the promotion of kinematic link 34, upset connecting rod 36 has driven the flip-flop movement of grasping mechanism 24 by the rotation of trip shaft 25.

The extracting motor 38 of grasping mechanism 24 drives worm screw 43 by shaft joint 41 and turbine 44 rotates, and turbine 44 promotes to grasp connecting rod 40 by pitman pin 42 and drives jaw 37, and under the restriction of grasping slide rail 39, jaw 37 is done straight reciprocating motion along grasping slide rail 39.Just changeing, reversing of control extracting motor 38 can realize the opening and closing of jaw 37.Adopt and grasp the controlling Design that motor 38 adds encoder, can guarantee that the wafer casket after jaw clamps can not come off.

The detent mechanism 23 that is installed in grasping mechanism 24 lower ends is used for realizing wafer casket location.Adjustable locating piece 46 and stationary positioned piece 48 all have the inner surface of an inclination, can guide the wafer casket to reach position placed in the middle.Adjustable locating piece 46 has the function that the position is adjusted, and can make the wafer casket be in suitable position under the discrepant situation of wafer casket external shape by the position of adjusting adjustable locating piece 46.

Button pawl mechanism 20 is used for before promoting wafer cassette wafer cassette being fixed on the wind box 22.When the button pawl motor 49 of button pawl mechanism 20 moved, motor shaft stretched out, and by 51 swings of pull bar bearing pin 50 pulling button pawl pull bars, the swing drive button pawl axle 53 of button pawl pull bar 51 rotates around holder 52.Button pawl 54 rotates along with the rotation of button pawl axle 53, finishes the action that button pawl 54 fastens.Otherwise, the motor shaft withdrawal of button pawl motor 49, button pawl axle 53 rotates in the opposite direction under the pulling of button pawl pull bar 51, promptly drives button pawl 54 and opens, and has so just finished fastening, the opening action of button pawl mechanism 20.

The course of work of this automatic conveying device for turnover type wafer is as follows:

Operating personnel are placed on wafer cassette on the material loading platform 21.Equipment is started working, and wafer cassette is opened by general locking mechanism, 20 actions of button pawl mechanism, and button pawl 54 is fixed on the lid of wafer cassette on the wind box 22.Wind box 22 rises to the top, drives the wafer lid and mentions from the wafer casket.This moment, the wafer casket was in the microenvironment of wind box 22.

Arm mechanism 19 drops to wafer casket top, and detent mechanism 23 navigates to middle position with the wafer casket, grasping mechanism 24 actions, and jaw 37 is clamped the wafer casket; Arm mechanism 19 rises, and the wafer casket is mentioned from material loading platform 21.

Arm mechanism 19 stretches, and the wafer casket is sent above the Working position of process apparatus; Arm mechanism 19 descends, and the wafer casket is placed on Working position.Meanwhile, if process apparatus needs wafer vertically to place, arm mechanism 19 makes switching mechanism 26 actions in the process of transporting the wafer casket, the wafer casket is done 90 upsets of spending, and is placed on Working position then.

After the process operation of wafer was finished, equipment was carried out opposite flow process, the wafer casket is reinstalled in the wafer cassette of equipment, so that the operator takes away.

Claims (7)

1, a kind of automatic conveying device for turnover type wafer, comprise frame, be fixed on the material loading platform on the frame, be assembled in the wind box that has button pawl mechanism of making lifting moving on the frame and do lifting, stretch the arm mechanism that has grasping mechanism that moves, it is characterized in that: the lower arms of described arm mechanism connects described grasping mechanism by switching mechanism, the upset pedestal that is the lower arms of described arm mechanism and described switching mechanism is hinged, the fixed head of described grasping mechanism is hinged on the described upset pedestal by trip shaft, and utilize the gear connecting rod transmission mechanism that is assembled on the upset pedestal to drive described trip shaft and rotate, drive described grasping mechanism fixed head around rotational, the extracting motor that is arranged on described grasping mechanism moves back and forth by the extracting slide rail of turbine and worm driving extracting connecting rod drive jaw along described grasping mechanism fixed head, and the detent mechanism on the described grasping mechanism is provided with adjustable locating piece.

2, automatic conveying device for turnover type wafer according to claim 1, it is characterized in that: be hinged on the both sides that trip shaft on the described upset pedestal is fixed on described grasping mechanism fixed head, described trip shaft stretches out upset pedestal axis hole end fixedlys connected with the upset connecting-rod head in the described gear connecting rod transmission mechanism.

3, automatic conveying device for turnover type wafer according to claim 1 and 2, it is characterized in that: a pair of pinion in mesh in the described gear connecting rod transmission mechanism and gear wheel are assembled on the described upset pedestal, described pinion is assembled on the motor shaft of described upset pedestal, described gear wheel side is by an end of the hinged kinematic link of bearing pin, and the other end of kinematic link is hinged with the other end of the upset connecting rod that is fixedly connected on described upset axle head.

4, automatic conveying device for turnover type wafer according to claim 1, it is characterized in that: drive described arm mechanism and make lifting, the arm lifting motor that stretch to move and stretching hand with arm motor and be separately fixed on the described frame and be fixed on the arm elevation base plate of sliding along the single slide rail of the arm lifting of frame, described arm lifting motor drives the arm lifting nut that is fixed on the arm elevation base plate by No. three driving-belts and arm lifting screw and moves back and forth along screw axial, make arm mechanism along with frame vertically do elevating movement.

5, according to claim 1 or 4 described automatic conveying device for turnover type wafer, it is characterized in that: described stretching hand with arm motor via reducer structure, No. two driving-belts drive the arm power transmission shaft that is fixed on the last arm and rotate, the arm power transmission shaft drives the thorny arm fixed axis swing of last arm, swing around last arm under the drive of the inner driving-belt of last arm by the lower arms that arm rotating shaft and last arm are hinged, by the hinged switching mechanism of arm rotating shaft and lower arms under the drive of the inner driving-belt of lower arms around the lower arms swing, make arm mechanism along making stretching routine with the frame vertical direction.

6, automatic conveying device for turnover type wafer according to claim 1, it is characterized in that: described wind box is assembled on the wind box holder that has the wind box lifting nut, the wind box lifting motor and the wind box lifting screw that are fixed on the frame move back and forth along screw axial by a driving-belt driving wind box lifting nut, drive the wind box lifting single slide rail upper and lower slip of wind box holder along frame.

7, automatic conveying device for turnover type wafer according to claim 1, it is characterized in that: the button pawl motor of the button pawl mechanism of described wind box is hinged with button pawl pull bar one end by the pull bar bearing pin of assembling on it, the button pawl pull bar other end is hinged with the crank of button pawl axle head, the button pawl axle other end is fixed with the button pawl, crank on the motor-driven button pawl axle drives button pawl opening and closing around rotational.

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