CN201334537Y - Silicon liquid overflow protection structure of polysilicon ingot furnace - Google Patents
Silicon liquid overflow protection structure of polysilicon ingot furnace Download PDFInfo
- Publication number
- CN201334537Y CN201334537Y CNU2008201691204U CN200820169120U CN201334537Y CN 201334537 Y CN201334537 Y CN 201334537Y CN U2008201691204 U CNU2008201691204 U CN U2008201691204U CN 200820169120 U CN200820169120 U CN 200820169120U CN 201334537 Y CN201334537 Y CN 201334537Y
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- furnace body
- wall
- furnace
- silicon liquid
- lug boss
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a silicon liquid overflow protection structure of a polysilicon ingot furnace, which belongs to the manufacturing technical field of a polysilicon crystal directional growing furnace. The furnace mainly consists of a furnace body inner wall (1), a furnace body outer wall (2), a lug boss (3) welded at the central position of the bottom of the furnace body inner wall (1), high-pressure cooling circulating water (5) positioned in the inlayer of the furnace body inner wall (1) and the furnace body outer wall (2), a space ring (4) welded between the furnace body inner wall (1) and the furnace body outer wall (2) at both sides of the lug boss (3), etc. The furnace is reasonable in design and simple in structure, and separates the weak area of the welding line from the high-pressure cooling circulating water by improving the structure of the lug boss of furnace body and adding one space ring surrounding the lug boss, thereby effectively preventing serious safety accidents caused by silicon liquid overflow.
Description
Technical field
The utility model relates to a kind of polycrystalline silicon ingot or purifying furnace silicon hydrorrhea stream protection structure, belongs to the manufacturing technology field of polysilicon epitaxis stove.
Background technology
Polycrystalline silicon ingot or purifying furnace is a kind of vacuum pressure container, is mainly used in starting material polysilicon high temperature melting under negative pressure of vacuum, solidifies ingot casting then again.Generally all be provided with supporting bable tops in body of heater inside, and on this table top, put the quartz crucible that takes up the silicon raw material, because the characteristic of quartz crucible, quartz crucible disruptive situation inevitably can appear, melt when being in a liquid state state if just in time be in silicon this moment, silicon liquid will be from the disruptive quartz crucible toward dirty.Although general polycrystalline silicon ingot casting furnace bottom is provided with heavy safety control for preventing that silicon hydrorrhea stream from damaging, but all there is careless omission, general polycrystalline silicon ingot or purifying furnace is needs of finishing casting ingot process, all design the various forms of boss that communicate with body of heater inside in the bottom of body of heater, and the inboard wall of furnace body interlayer all is connected with the recirculated cooling water of certain pressure, boss and body of heater itself are to lump together by soldering group, and weld a weak area on the furnace binding often, if the silicon liquid burn through of overflow the weld weld seam of boss and body of heater, so very likely the high pressure water in the furnace sandwich can penetrate into body of heater inside, and body of heater inside is the environment of a high temperature negative pressure, a large amount of water enters body of heater quickly, and sharply vaporization causes the body of heater internal pressure sharply to increase, even explosion caused, serious security incident takes place.
Summary of the invention
It is a kind of reasonable in design, simple in structure that the purpose of this utility model provides, and can effectively take precautions against the polycrystalline silicon ingot or purifying furnace silicon hydrorrhea stream protection structure that silicon hydrorrhea stream causes serious security incident.
The utility model is a kind of polycrystalline silicon ingot or purifying furnace silicon hydrorrhea stream protection structure; comprise inboard wall of furnace body; furnace body outer wall; be welded in the boss of inboard wall of furnace body bottom centre position; place the high pressure cooling circulating water of the interlayer of inboard wall of furnace body and furnace body outer wall, it is characterized in that being welded with spacer ring between the inboard wall of furnace body of boss both sides and the furnace body outer wall.
The utility model is reasonable in design, simple in structure, by body of heater boss place structure division is rationally improved, make weld seam weak area and high pressure cooling circulating water keep apart at spacer ring of the peripheral increase of boss, can effectively take precautions against silicon hydrorrhea stream and cause serious security incident.
Description of drawings
Fig. 1 is an one-piece construction sectional view of the present utility model;
Silicon liquid was piled up flow schematic diagram when Fig. 2 overflow silicon for generation.
Embodiment
The utility model mainly is made of inboard wall of furnace body 1, furnace body outer wall 2, the boss 3 that is welded in inboard wall of furnace body 1 bottom centre position, the high pressure cooling circulating water 5 that places the interlayer of inboard wall of furnace body 1 and furnace body outer wall 2, the inboard wall of furnace body 1 that is welded in boss 3 both sides and the spacer ring 4 between the furnace body outer wall 2 etc.
During use,, cause weld seam 6 burn throughs in case 7 overflows of silicon liquid are piled up at boss 3 places, high pressure cooling circulating water 5 is under the isolation of spacer ring 4, can not enter the body of heater inside of high temperature negative pressure, just can not form security incident yet because of there being a large amount of steam to cause furnace pressure sharply to increase; If the silicon liquid burn through weld seam 6 that overflows only can cause the part outside air to enter body of heater inside, the pressure in the stove can sharply not rise quickly, therefore just is difficult for forming the security incident of blast and so on yet; If the silicon liquid of overflow is a lot, burn through weld seam 6, the silicon liquid that overflows can be under action of gravity, flow out the body of heater outside, can not accumulate in body of heater inside in a large number, because the silicon liquid that overflows does not relate to the furnace sandwich part, even if therefore the silicon hydrorrhea flows, after solidifying, the maintenance of body of heater itself is also relatively convenient.
Claims (1)
- A kind of polycrystalline silicon ingot or purifying furnace silicon hydrorrhea stream protection structure; comprise inboard wall of furnace body (1); furnace body outer wall (2); be welded in the boss (3) of inboard wall of furnace body (1) bottom centre position; place the high pressure cooling circulating water (5) of the interlayer of inboard wall of furnace body (1) and furnace body outer wall (2), it is characterized in that being welded with spacer ring (4) between the inboard wall of furnace body (1) of boss (3) both sides and the furnace body outer wall (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201691204U CN201334537Y (en) | 2008-11-28 | 2008-11-28 | Silicon liquid overflow protection structure of polysilicon ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201691204U CN201334537Y (en) | 2008-11-28 | 2008-11-28 | Silicon liquid overflow protection structure of polysilicon ingot furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201334537Y true CN201334537Y (en) | 2009-10-28 |
Family
ID=41286187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201691204U Expired - Fee Related CN201334537Y (en) | 2008-11-28 | 2008-11-28 | Silicon liquid overflow protection structure of polysilicon ingot furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201334537Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102286779A (en) * | 2011-08-15 | 2011-12-21 | 宁夏日晶新能源装备股份有限公司 | Lower chamber heat-insulation structure and polycrystalline furnace using same |
| CN102383183A (en) * | 2011-11-04 | 2012-03-21 | 湖南顶立科技有限公司 | Crystalline silicon ingot casting furnace |
| CN102747415A (en) * | 2012-07-02 | 2012-10-24 | 浙江宏业新能源有限公司 | Dry type furnace shell for polycrystalline ingot furnace |
| CN103668451A (en) * | 2013-12-18 | 2014-03-26 | 中南大学 | Polysilicon ingot furnace |
| CN106917138A (en) * | 2017-04-23 | 2017-07-04 | 连云港清友新能源科技有限公司 | For the polycrystalline cast ingot furnace body of oversize silicon ingot |
| CN111334834A (en) * | 2020-03-11 | 2020-06-26 | 梁世花 | Method for making oleophylic non-stick cooking utensils |
-
2008
- 2008-11-28 CN CNU2008201691204U patent/CN201334537Y/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102286779A (en) * | 2011-08-15 | 2011-12-21 | 宁夏日晶新能源装备股份有限公司 | Lower chamber heat-insulation structure and polycrystalline furnace using same |
| CN102286779B (en) * | 2011-08-15 | 2014-04-16 | 宁夏日晶新能源装备股份有限公司 | Polycrystalline furnace using lower chamber heat-insulation structure |
| CN102383183A (en) * | 2011-11-04 | 2012-03-21 | 湖南顶立科技有限公司 | Crystalline silicon ingot casting furnace |
| CN102747415A (en) * | 2012-07-02 | 2012-10-24 | 浙江宏业新能源有限公司 | Dry type furnace shell for polycrystalline ingot furnace |
| CN102747415B (en) * | 2012-07-02 | 2014-09-17 | 浙江宏业新能源有限公司 | Dry type furnace shell for polycrystalline ingot furnace |
| CN103668451A (en) * | 2013-12-18 | 2014-03-26 | 中南大学 | Polysilicon ingot furnace |
| CN103668451B (en) * | 2013-12-18 | 2016-03-30 | 中南大学 | A kind of polycrystalline silicon ingot or purifying furnace |
| CN106917138A (en) * | 2017-04-23 | 2017-07-04 | 连云港清友新能源科技有限公司 | For the polycrystalline cast ingot furnace body of oversize silicon ingot |
| CN111334834A (en) * | 2020-03-11 | 2020-06-26 | 梁世花 | Method for making oleophylic non-stick cooking utensils |
| CN111334834B (en) * | 2020-03-11 | 2021-03-19 | 梁世花 | Method for making oleophylic non-stick cooking utensils |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SHAOXING JINGGONG ELECTRICAL AND MECHANICAL INSTIT Free format text: FORMER NAME: SHAOXING FINE ELECTROMECHANICAL INSTITUTE CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: Jianhu road 312030 Zhejiang County of Shaoxing province Keqiao Industrial Park No. 1809 Cauchy Street Patentee after: Shaoxing Jinggong Electronic Research Institute Co., Ltd. Address before: Jianhu road 312030 Zhejiang County of Shaoxing province Keqiao Industrial Park No. 1809 Cauchy Street Patentee before: Shaoxing Fine Electromechanical Institute Co., Ltd. |
|
| C56 | Change in the name or address of the patentee |
Owner name: HANGZHOU JINGGONG ELECTRICAL RESEARCH INSTITUTE CO Free format text: FORMER NAME: SHAOXING JINGGONG MECHANICAL AND ELECTRICAL INSTITUTE CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 310018, No. 2, No. 17, No. 9, Hangzhou economic and Technological Development Zone, Zhejiang, Hangzhou Province, fourth floors Patentee after: Hangzhou Jinggong Mechanical & Electrical Research Institute Co., Ltd. Address before: Jianhu road 312030 Zhejiang County of Shaoxing province Keqiao Industrial Park No. 1809 Cauchy Street Patentee before: Shaoxing Jinggong Electronic Research Institute Co., Ltd. |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091028 Termination date: 20131128 |