CN201252679Y - 用于物体相对基底或与基底一起的定位或定向的装置 - Google Patents

用于物体相对基底或与基底一起的定位或定向的装置 Download PDF

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Publication number
CN201252679Y
CN201252679Y CNU2007203053434U CN200720305343U CN201252679Y CN 201252679 Y CN201252679 Y CN 201252679Y CN U2007203053434 U CNU2007203053434 U CN U2007203053434U CN 200720305343 U CN200720305343 U CN 200720305343U CN 201252679 Y CN201252679 Y CN 201252679Y
Authority
CN
China
Prior art keywords
light
receiving system
substrate
mark
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNU2007203053434U
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English (en)
Chinese (zh)
Inventor
克里斯托弗·莫泽
卢祖博米尔·马雷尔杰科
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&S China Co Ltd
Original Assignee
AT&S China Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&S China Co Ltd filed Critical AT&S China Co Ltd
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Publication of CN201252679Y publication Critical patent/CN201252679Y/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0008—Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0266—Marks, test patterns or identification means
    • H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/16—Inspection; Monitoring; Aligning
    • H05K2203/161—Using chemical substances, e.g. colored or fluorescent, for facilitating optical or visual inspection

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Laser Beam Processing (AREA)
CNU2007203053434U 2007-10-12 2007-11-30 用于物体相对基底或与基底一起的定位或定向的装置 Expired - Lifetime CN201252679Y (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ATGM619/2007 2007-10-12
AT0061907U AT10237U1 (de) 2007-10-12 2007-10-12 Verfahren und vorrichtung zum positionieren und ausrichten eines gegenstand relativ zu bzw. mit einem untergrund sowie verwendung hiefür

Publications (1)

Publication Number Publication Date
CN201252679Y true CN201252679Y (zh) 2009-06-03

Family

ID=39735900

Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2007203053434U Expired - Lifetime CN201252679Y (zh) 2007-10-12 2007-11-30 用于物体相对基底或与基底一起的定位或定向的装置

Country Status (5)

Country Link
JP (1) JP5325225B2 (fr)
KR (1) KR20100085026A (fr)
CN (1) CN201252679Y (fr)
AT (1) AT10237U1 (fr)
WO (1) WO2009046468A2 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102297657A (zh) * 2010-06-23 2011-12-28 富士施乐株式会社 位置测量装置
CN106610570A (zh) * 2015-10-21 2017-05-03 上海微电子装备有限公司 一种实现运动台定位的装置及方法
CN108738378A (zh) * 2017-02-15 2018-11-02 日本梅克特隆株式会社 柔性印刷电路板的制造方法及柔性印刷电路板的制造系统
CN109773833A (zh) * 2019-03-14 2019-05-21 烟台南山学院 一种码垛机器人板件识别方法
CN115082871A (zh) * 2022-07-22 2022-09-20 合肥讯图信息科技有限公司 交通信号灯定位纠偏方法及系统

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT10543U1 (de) * 2007-12-03 2009-05-15 Austria Tech & System Tech Verfahren und vorrichtung zum ermitteln von rückständen eines materials sowie verwendung hiefür
JP2017504796A (ja) * 2013-12-18 2017-02-09 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ 対象物の光学的検出に使用するターゲットデバイス
CN110506252B (zh) * 2017-11-27 2021-01-29 华为技术有限公司 基于图样中标志图形点坐标的转换关系定位终端屏幕
DE102020201884B4 (de) 2019-02-15 2021-12-23 Virtek Vision International Ulc Verfahren von detektieren richtiger orientierung von materialapplikation
KR102549897B1 (ko) * 2020-12-08 2023-06-30 한국전자기술연구원 형광필름과 파장 필터를 이용한 호겔 얼라인 장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3617744A (en) * 1969-07-01 1971-11-02 Bell Telephone Labor Inc Method and apparatus for circuit module testing by comparison of a fluorescent image with a standard pattern
JPH0481473A (ja) * 1990-07-25 1992-03-16 Mitsubishi Rayon Co Ltd 画像形成用樹脂組成物および蛍光検出方式自動外観検査方法
JPH06333029A (ja) * 1993-05-25 1994-12-02 Hitachi Electron Eng Co Ltd 小型配線基板の位置合わせ光学系
JPH08167777A (ja) * 1994-12-12 1996-06-25 Hitachi Chem Co Ltd 多層プリント配線板
JPH10141951A (ja) * 1996-11-06 1998-05-29 Asahi Optical Co Ltd 写真測量用ターゲット
JP2002170757A (ja) * 2000-11-30 2002-06-14 Nikon Corp 位置計測方法及びその装置、露光方法及びその装置、デバイスの製造方法
JP2002207004A (ja) * 2001-01-09 2002-07-26 Mitsutoyo Corp 画像測定機

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102297657A (zh) * 2010-06-23 2011-12-28 富士施乐株式会社 位置测量装置
CN102297657B (zh) * 2010-06-23 2015-08-19 富士施乐株式会社 位置测量装置
CN106610570A (zh) * 2015-10-21 2017-05-03 上海微电子装备有限公司 一种实现运动台定位的装置及方法
CN106610570B (zh) * 2015-10-21 2020-11-13 上海微电子装备（集团）股份有限公司 一种实现运动台定位的装置及方法
CN108738378A (zh) * 2017-02-15 2018-11-02 日本梅克特隆株式会社 柔性印刷电路板的制造方法及柔性印刷电路板的制造系统
CN109773833A (zh) * 2019-03-14 2019-05-21 烟台南山学院 一种码垛机器人板件识别方法
CN115082871A (zh) * 2022-07-22 2022-09-20 合肥讯图信息科技有限公司 交通信号灯定位纠偏方法及系统

Also Published As

Publication number Publication date
JP5325225B2 (ja) 2013-10-23
JP2011501109A (ja) 2011-01-06
WO2009046468A3 (fr) 2009-08-20
AT10237U1 (de) 2008-11-15
WO2009046468A2 (fr) 2009-04-16
WO2009046468A8 (fr) 2009-06-25
KR20100085026A (ko) 2010-07-28

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Granted publication date: 20090603