CN201153119Y - Light emitting auxiliary alignment positioning apparatus - Google Patents
Light emitting auxiliary alignment positioning apparatus Download PDFInfo
- Publication number
- CN201153119Y CN201153119Y CNU2008200001470U CN200820000147U CN201153119Y CN 201153119 Y CN201153119 Y CN 201153119Y CN U2008200001470 U CNU2008200001470 U CN U2008200001470U CN 200820000147 U CN200820000147 U CN 200820000147U CN 201153119 Y CN201153119 Y CN 201153119Y
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- location structure
- pore
- workpiece
- communicated
- luminous
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Abstract
The utility model relates to a locating device which can illuminate for assistant calibration. The locating device comprises a platform, a working bearing seat arranged on the platform, and a locating structure arranged on the working bearing seat. The locating structure is provided with a first surface, a second surface and a luminous part; a vacuum suction part is arranged on the locating structure and comprises a suction conduit which is distributed on the second surface of the locating structure concavely inwards. A first air hole is arranged on the second surface of the locating structure and is communicated with the suction conduit; a second air hole is arranged on the first surface of the locating structure; an air duct is arranged inside the locating structure and is communicated with the first and the second surfaces. A working gas supplying part is arranged inside the locating structure and is composed of a plurality of third air holes which are arranged on the second surface of the locating structure. A forth air hole is arranged on the first surface of the locating structure and is communicated with the third air hole. The locating device of the utility model has the labeling design of the assistant back light, and the positioning is accurate; the structure of the combination of the locating structure and the working gas supplying part is simple, and the vacuum suction part enables a workpiece to be easily located.
Description
Technical field
The utility model relates to a kind of positioner of silicon wafer process, relates in particular to a kind of positioner that can luminous assisted calibration.
Background technology
Tradition is applied to the positioner (for example TaiWan, China application case number No. 5210816 patent) of silicon wafer process, is as shown in Figures 1 and 2, and it is provided with a reaction chamber wall 72 on a board 71, establishes a work bearing 73 in this reaction chamber wall 72 again; Then establish a location structure 74 on this work bearing 73; This location structure 74 has a wafer telltale mark 751 in order to fix a wafer 75 on this wafer 75.
There is following shortcoming in the tradition positioner:
1, nothing assists label Design Orientation backlight more inaccurate.As shown in Figure 2, but the tradition positioner may move the precalculated position of this wafer 75 to this location structure 74 with sequence controlled machine arm 76, place a light shield 77 on it again, and judge by an image processor (not shown) whether the light shield telltale mark 771 on this light shield 77 aligns with wafer telltale mark 751 on this wafer 75, in case during complete matching, just the location finishes at last, otherwise need carry out the fine setting of position.Because these wafer 75 belows there is no light source and come floor light, therefore, when image processor carried out capture in position fixing process, the image of obtaining was darker, and the error probability during processing is higher, so, locate more inaccurate.
2, working gas supply department is quite complicated.The tradition positioner needs to be provided with reaction chamber wall on board, the work bearing then is located in this reaction chamber wall, when needs carry out operation when avoiding oxidation in predetermined gas (for example nitrogen), work bearing/location structure body also can't be emitted predetermined gas, must emit predetermined gas by the working gas supply department on the board, and working gas is riddled in the reaction chamber wall, just can carry out operation, such design, between work bearing and reaction chamber wall preset distance must be arranged, desire to make predetermined gas to intersperse among by the work bearing, (gas can dissipate then to need a large amount of predetermined gas, and establish reaction chamber wall on the board in addition and working gas supply department then makes device complicated quite waste).
Therefore, be necessary to research and develop new technology to solve above-mentioned shortcoming.
The utility model content
Technical problem underlying to be solved in the utility model is, overcome the above-mentioned defective that prior art exists, and provide a kind of positioner that can luminous assisted calibration, it is more accurate that it has label Design Orientation auxiliary backlight, make the unification of location structure and working gas supply department simple in structure, its vacuum attraction portion can locate workpiece easily.
The technical scheme that its technical problem that solves the utility model adopts is:
A kind of positioner that can luminous assisted calibration is characterized in that comprising: a board; One work bearing is located on this board; One location structure is located on this work bearing; This location structure has one first and one second; At least one illuminating part is located on this location structure, and it can be luminous towards this direction of second; One vacuum attraction portion is located on this location structure, and it comprises: one attracts conduit, indent to be distributed on second of this location structure; One first pore is opened on second of this location structure, and is communicated with this attraction conduit; One second pore is opened on first of this location structure; One airway is located at this location structure inside, and is communicated with this first pore and this second pore, whereby, makes this vacuum attraction portion produce predetermined attraction; One working gas supply department is located at this location structure inside, and it comprises: a plurality of the 3rd pores are opened on second of this location structure, and attract the conduit periphery around this substantially; One the 4th pore is opened on first of this location structure, and is communicated with this a plurality of the 3rd pores, whereby, makes this working gas supply department can send predetermined gas to center on this attraction conduit.
Aforesaid positioner that can luminous assisted calibration, wherein vacuum attraction portion comprises a device for vacuum generation again, this device for vacuum generation is communicated with this second pore; Described working gas supply department comprises a pneumatic supply again, and this pneumatic supply is communicated with the 4th pore.
Aforesaid positioner that can luminous assisted calibration, wherein second of location structure this first workpiece has one at least can assist first label backlight in order to one first workpiece to be set, this first label is aimed at the light that this illuminating part sends and is auxiliary shape backlight; Described device for vacuum generation produces a suction, and through this airway, this first pore, and attracts this first workpiece by this attraction conduit, makes this first workpiece be attached to second of this location structure; Whereby, one second workpiece can be moved on this first workpiece, on this second workpiece to should first label and have at least one and can assist second label backlight, borrow the light of this illuminating part, make second, first label that is auxiliary shape backlight be easy to aim at, make first, second workpiece reach the calibration location; Described pneumatic supply is through the 4th pore and towards the 3rd pore output predetermined gas; Make first, second workpiece that is adsorbed on this attraction conduit in this predetermined gas, carry out operation; Described predetermined gas is a nitrogen.
Aforesaid positioner that can luminous assisted calibration, wherein location structure is made up of one first structure and one second structure; Described illuminating part, described vacuum attraction portion and described working gas supply department are arranged at respectively on this first, second structure; Described working gas supply department comprises: a plurality of air flues of going up, to should a plurality of the 3rd pores and be located at this location structure inside; Air flue in a plurality of is located at this location structure inside to going up air flue; A plurality of downtakes, to should in air flue and be located at this location structure inside; Again, the 4th pore is communicated with these a plurality of downtakes.
Aforesaid positioner that can luminous assisted calibration, wherein illuminating part is established a plurality of.
The beneficial effects of the utility model are, it is more accurate that it has label Design Orientation auxiliary backlight, and it is simple in structure that location structure and working gas supply department are unified, and its vacuum attraction portion can locate workpiece easily.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is the schematic diagram of existing apparatus
Fig. 2 is the part-structure enlarged diagram of existing apparatus
Fig. 3 is a schematic appearance of the present utility model
Fig. 4 is the schematic appearance of part-structure one of the present utility model
Fig. 5 is the schematic appearance of part-structure two of the present utility model
Fig. 6 is that vacuum attraction portion of the present utility model and working gas supply department are in the distribution schematic diagram of this location structure inside
Fig. 7 is the action schematic diagram of illuminating part of the present utility model and vacuum attraction portion
Fig. 8 is the schematic diagram that working gas of the present utility model supply department sends predetermined gas
Fig. 9 is the floor map of embodiment of the present utility model
The number in the figure explanation:
10,71 boards, 20,73 work bearings
30,74 location structure 30A, first structure
31 first on 30B second structure
32 second 40 illuminating parts
50 vacuum attraction portions 51 attract conduit
52 first pores, 53 second pores
54 airways, 55 device for vacuum generation
60 working gas supply departments 61 the 3rd pore
Air flue in the air flue 63 on 62
64 downtakes 65 the 4th pore
66 pneumatic supplies, 67 predetermined gas
72 reaction chamber wall, 75 wafers
751 wafer telltale marks, 76 mechanical arms
77 light shields, 771 light shield telltale marks
91 first workpiece, 911 first labels
92 second workpiece, 921 second labels
Embodiment
The utility model is for a kind of positioner that can luminous assisted calibration, consults Fig. 3 to Fig. 6, and it comprises:
One board 10;
One work bearing 20 is located on this board 10;
One location structure 30 is located on this work bearing 20; This location structure 30 has one first 31 and 1 second 32;
At least one illuminating part 40 is located on this location structure 30, and it can be luminous towards this direction of second 32;
One vacuum attraction portion 50 is located on this location structure 30, and it comprises:
One attracts conduit 51, is that indent is distributed on second 32 of this location structure 30;
One first pore 52 is opened on second 32 of this location structure 30, and is communicated with this attraction conduit 51;
One second pore 53 is opened on first 31 of this location structure 30;
One airway 54 is located at this location structure 30 inside, and is communicated with this first pore 52 and this second pore 53;
One working gas supply department 60 is located at these location structure 30 inside (not communicating with this airway 54), and it comprises:
A plurality of the 3rd pores 61 are opened on second 32 of this location structure 30, and attract conduit 51 outsides around this substantially;
A plurality of air flues 62 of going up are to should a plurality of the 3rd pores 61 and be located at this location structure 30 inside;
A plurality of downtakes 64, to should in air flue 63 and be located at this location structure 30 inside;
One the 4th pore 65 is opened on first 31 of this location structure 30, and is communicated with these a plurality of downtakes 64.
This is a positioner that can luminous assisted calibration of the present utility model.
In fact, this location structure 30 is formed (as shown in Figures 7 and 8) by one first structure 30A and one second structure 30B, wherein, this illuminating part 40, this vacuum attraction portion 50 are arranged at respectively on this first, second structure 30A and the 30B with this working gas supply department 60.
This illuminating part 40 is established a plurality of.
This vacuum attraction portion 50 comprises a device for vacuum generation 55 (as shown in Figure 7) again, and this device for vacuum generation 55 is communicated with this second pore 53.
This working gas supply department 60 comprises a pneumatic supply 66 (as shown in Figure 8) again, and this pneumatic supply 66 is communicated with the 4th pore 65.
Consult Fig. 7 to Fig. 9, be applied to the schematic diagram of the calibration positioner of wafer for the utility model, second 32 of this location structure 30, be in order to one first workpiece 91 (for example being wafer) to be set, this first workpiece 91 has one at least can assist first label 911 backlight, and this first label 911 is corresponding to this illuminating part 40; Start this illuminating part 40, this illuminating part 40 emits beam and makes this first label 911 be auxiliary shape backlight.
Start this device for vacuum generation 55, this device for vacuum generation 55 produces one suction, and from this second pore 53 through this airway 54, this first pore 52, and attract conduit 51 to attract these first workpiece 91 by this, make these first workpiece, 91 attached works on second 32 of this location structure 30.
One second workpiece 92 is moved on this first workpiece 91, be adsorbed on because of this first workpiece 91 on second 32 of this location structure 30; Can not move so make its first label 911 be positioned to be on this illuminating part 40 auxiliary shape backlight; On this second workpiece 92 to should first label 911 and have at least one and can assist second label 921 backlight, the light of borrowing this illuminating part 40 to send, make second label 921 and these first label, 911 easier alignings that are auxiliary shape backlight, so, make first, second workpiece 91 and 92 reach accurate calibration location by assisting first label 911 backlight and second label 921.
Start this pneumatic supply 66, this pneumatic supply 66 is towards the 4th pore 65 input one predetermined gas 67 (for example being nitrogen); This predetermined gas 67 is through this downtake 64, air flue 63 in this, air flue 62 on this, and by these a plurality of the 3rd pore 61 outputs, because these a plurality of the 3rd pores 61 are substantially around these attraction conduit 51 outsides, so first, second workpiece 91 and 92 that is adsorbed on this attraction conduit 51 can be surrounded by this predetermined gas 67, and in predetermined gas centers on, carries out operation.
Advantage of the present utility model and effect can reduce:
1, label Design Orientation auxiliary backlight is more accurate.The utility model is provided with illuminating part in location structure, as long as the label of workpiece is aimed at this illuminating part, can be made label be " auxiliary shape backlight " by light from light source, the label that makes two workpiece is because of being " assisting shape backlight " easier aligning, and reaches the effect of accurate location.
2, the unification of location structure and working gas supply department is simple in structure.The utility model is directly established a working gas supply department on this location structure, this working gas supply department establishes three pore of a plurality of cardinal principles around this location structure periphery, emit predetermined gas (for example nitrogen) by a plurality of the 3rd pores, make the workpiece (for example wafer) on the location structure, can operation under the environment that predetermined gas centers on, need not workpiece is moved to operation in the confined space with predetermined gas from location structure again, can make workpiece on location structure, directly allowing predetermined gas center on (such design, it is the same following in having the confined space of predetermined gas) and carries out operation.
3, vacuum attraction portion can locate workpiece easily.The utility model is positioned on this location structure in first workpiece, and first label on it is aimed at this illuminating part and after being auxiliary shape backlight, can be by the vacuum attraction of this vacuum attraction portion, make the attached work of first workpiece on second of this location structure, second label and first label calibration location even second workpiece needs to move on first workpiece, still can not cause first workpiece to move (first label can not leave illuminating part), can calibrate the location rapidly.
The above, it only is preferred embodiment of the present utility model, be not that the utility model is done any pro forma restriction, every foundation technical spirit of the present utility model all still belongs in the scope of technical solutions of the utility model any simple modification, equivalent variations and modification that above embodiment did.
Claims (5)
- One kind can luminous assisted calibration positioner, it is characterized in that comprising:One board;One work bearing is located on this board;One location structure is located on this work bearing; This location structure has one first and one second;At least one illuminating part is located on this location structure, and it can be luminous towards this direction of second;One vacuum attraction portion is located on this location structure, and it comprises:One attracts conduit, indent to be distributed on second of this location structure;One first pore is opened on second of this location structure, and is communicated with this attraction conduit;One second pore is opened on first of this location structure;One airway is located at this location structure inside, and is communicated with this first pore and this second pore, whereby, makes this vacuum attraction portion produce predetermined attraction;One working gas supply department is located at this location structure inside, and it comprises:A plurality of the 3rd pores are opened on second of this location structure, and attract the conduit periphery around this;One the 4th pore is opened on first of this location structure, and is communicated with these a plurality of the 3rd pores.
- 2. positioner that can luminous assisted calibration according to claim 1 is characterized in that:Described vacuum attraction portion comprises a device for vacuum generation again, and this device for vacuum generation is communicated with this second pore;Described working gas supply department comprises a pneumatic supply again, and this pneumatic supply is communicated with the 4th pore.
- 3. positioner that can luminous assisted calibration according to claim 2 is characterized in that:Second of described location structure this first workpiece has one at least can assist first label backlight in order to one first workpiece to be set, and this first label is aimed at the light that this illuminating part sends and is auxiliary shape backlight;Described device for vacuum generation produces a suction, and through this airway, this first pore, and attracts this first workpiece by this attraction conduit, makes this first workpiece be attached to second of this location structure; Whereby, one second workpiece can be moved on this first workpiece, on this second workpiece to should first label and have at least one and can assist second label backlight;Described pneumatic supply is through the 4th pore and towards the 3rd pore output predetermined gas;Described predetermined gas is a nitrogen.
- 4. positioner that can luminous assisted calibration according to claim 1 is characterized in that:Described location structure is made up of one first structure and one second structure;Described illuminating part, described vacuum attraction portion and described working gas supply department are arranged at respectively on this first, second structure;Described working gas supply department comprises:A plurality of air flues of going up are to should a plurality of the 3rd pores and be located at this location structure inside;Air flue in a plurality of is located at this location structure inside to going up air flue;A plurality of downtakes, to should in air flue and be located at this location structure inside;Again, the 4th pore is communicated with these a plurality of downtakes.
- 5. positioner that can luminous assisted calibration according to claim 4, it is characterized in that: described illuminating part is established a plurality of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200001470U CN201153119Y (en) | 2008-01-04 | 2008-01-04 | Light emitting auxiliary alignment positioning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200001470U CN201153119Y (en) | 2008-01-04 | 2008-01-04 | Light emitting auxiliary alignment positioning apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201153119Y true CN201153119Y (en) | 2008-11-19 |
Family
ID=40128794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200001470U Expired - Fee Related CN201153119Y (en) | 2008-01-04 | 2008-01-04 | Light emitting auxiliary alignment positioning apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201153119Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104748943A (en) * | 2013-12-31 | 2015-07-01 | 玉晶光电(厦门)有限公司 | Optical assistant measuring device and measuring method applying same |
| CN105182700A (en) * | 2015-09-30 | 2015-12-23 | 合肥芯碁微电子装备有限公司 | Maskless direct-writing photolithography machine suction cup structure with back surface alignment function |
| CN108180830A (en) * | 2017-12-28 | 2018-06-19 | 武汉华星光电技术有限公司 | For the gas-tpe fitting and measurement system of substrate detection |
| CN110600415A (en) * | 2019-09-27 | 2019-12-20 | 浙江大学 | Three-dimensional stacking alignment method |
-
2008
- 2008-01-04 CN CNU2008200001470U patent/CN201153119Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104748943A (en) * | 2013-12-31 | 2015-07-01 | 玉晶光电(厦门)有限公司 | Optical assistant measuring device and measuring method applying same |
| CN104748943B (en) * | 2013-12-31 | 2018-09-21 | 玉晶光电(厦门)有限公司 | Optics assists the method for measurement of measuring equipment and the application device |
| CN105182700A (en) * | 2015-09-30 | 2015-12-23 | 合肥芯碁微电子装备有限公司 | Maskless direct-writing photolithography machine suction cup structure with back surface alignment function |
| CN108180830A (en) * | 2017-12-28 | 2018-06-19 | 武汉华星光电技术有限公司 | For the gas-tpe fitting and measurement system of substrate detection |
| US10690598B2 (en) | 2017-12-28 | 2020-06-23 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Air pipe joint and measurement system for substrate inspection |
| CN110600415A (en) * | 2019-09-27 | 2019-12-20 | 浙江大学 | Three-dimensional stacking alignment method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081119 Termination date: 20130104 |
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| CF01 | Termination of patent right due to non-payment of annual fee |